A gas purifying device for a CVD reactor
By introducing a purification mechanism into the CVD reactor, and using a motor-driven rotation system and multi-layer filters and activated carbon filter plates to perform graded filtration of the gas, the safety hazards and pollution problems in the exhaust process of the existing equipment are solved, and efficient gas purification and equipment stability are achieved.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- LIGHT-SEMI CO LTD
- Filing Date
- 2025-09-09
- Publication Date
- 2026-08-04
AI Technical Summary
Existing CVD reactor devices lack filtration during the exhaust process, which may cause safety accidents such as fires and explosions, and pollute the air.
Design a gas purification device that includes a purification mechanism. The device uses a motor-driven rotating system and multiple layers of filters and activated carbon filters to perform graded filtration of the gas. The purified gas is discharged through a discharge pipe. The purification mechanism and the discharge pipe are designed separately to facilitate the control of the discharge of gaseous and liquid products.
It enables rapid discharge of reaction gases, maintains a stable reaction environment, reduces the possibility of side reactions, effectively removes particulate impurities and harmful gases, reduces environmental pollution, improves equipment reliability and stability, and simplifies the maintenance process of filter screens and activated carbon filter plates.
Smart Images
Figure CN224585561U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of CVD reactor technology, specifically to a gas purification device for CVD reactors. Background Technology
[0002] Chemical vapor deposition (CVD) is a chemical engineering technique that uses one or more gaseous compounds or elements containing thin film elements to chemically react on a substrate surface to generate a thin film. CVD is a new technology for preparing inorganic materials that has been developed in recent decades. CVD has been widely used for purifying substances, developing new crystals, and depositing various single-crystal, polycrystalline, or glassy inorganic thin film materials.
[0003] Publication No. CN218232569U discloses a CVD reactor with nozzles. This device delivers feed gas to the CVD reactor through external equipment, and then drives a transmission assembly to rotate the CVD reactor for thorough mixing of the feed gas. Simultaneously, the use of both rotating and orbiting nozzle assemblies ensures more uniform injection of the feed gas into the furnace, greatly increasing the practicality and efficiency of the equipment, which is beneficial for practical application and operation. However, this patent still has the following problems in actual use: This device drives the CVD reactor to rotate via a drive transmission assembly to thoroughly mix the feed gas. Simultaneously, it utilizes both a revolution nozzle assembly and a rotation nozzle assembly to ensure the feed gas is injected more evenly into the furnace, greatly increasing the equipment's practicality. Since CVD reactions typically use various gases as reactants or carrier gases, such as inert gases like hydrogen, nitrogen, and argon, as well as some reactive gases containing specific elements like silane and methane, these gases may undergo chemical reactions during the reaction to generate the target thin film material, while also producing some byproducts. However, the device's exhaust pipe lacks a filtration function. Direct emission without treatment could potentially cause fires, explosions, and other safety accidents, as well as air pollution, causing inconvenience for operators.
[0004] A gas purification device for CVD reactors is proposed to address the problems mentioned above. Utility Model Content
[0005] The purpose of this invention is to provide a gas purification device for a CVD reactor, which solves the problem mentioned in the background art. Currently, the CVD reactor is rotated by a drive transmission assembly to fully mix the raw material gas. Simultaneously, a revolution nozzle assembly and a rotation nozzle assembly are used to ensure more uniform injection of the raw material gas into the furnace, greatly increasing the practicality of the equipment. In the CVD reaction process, various gases are typically used as reactants or carrier gases, such as inert gases like hydrogen, nitrogen, and argon, as well as some reactive gases containing specific elements, such as silane and methane. During the reaction, these gases may undergo chemical reactions to generate the target thin film material, while also producing some byproducts. However, the exhaust pipe of this device lacks a filtration function. If discharged directly without treatment, it may cause safety accidents such as fires and explosions, and pollute the air.
[0006] To achieve the above objectives, the present invention provides the following technical solution: a gas purification device for a CVD reactor, comprising a furnace body, an end cover fixedly installed on the top of the furnace body, a reactor body disposed inside the end cover, and a discharge pipe embedded in the lower interior of the furnace body; a purification mechanism disposed on one side of the bottom of the furnace body, and a fixing component disposed inside the purification mechanism. The purification mechanism includes a box fixedly installed on one side of the bottom of the furnace body. A conical frame is embedded inside one side of the box, and a connecting pipe is fixedly connected between the conical frame and the furnace body. A strip box is fixedly connected to the inner top of the box, and a drive rod is rotatably connected between the strip box and the box. A motor is fixedly connected to the top of the drive rod. A rotating rod is rotatably connected between the strip box and the conical frame, and a fan blade is fixedly installed on the outside of the rotating rod. A first conical tooth is fixedly connected to the bottom of the drive rod, and a second conical tooth is fixedly connected to the end of the rotating rod away from the fan blade. A fixed frame is inserted into one side of the bottom of the box, and a filter screen is fixedly connected to the upper interior of the fixed frame. A connecting frame is fixedly connected to the lower interior of the fixed frame, and an activated carbon filter plate is fixedly installed inside the connecting frame.
[0007] Preferably, a fixing pipe is fixedly installed inside the connecting pipe, and a slot is opened on one side of the fixing pipe. A block is attached to the inner side of the slot. A support plate is fixedly connected inside one end of the fixing pipe, and an electric telescopic rod is fixedly connected to one side of the support plate. Limiting pipes are symmetrically fixedly connected to the side of the support plate near the electric telescopic rod. A squeezing rod is slidably connected inside one end of the limiting pipe. A first contraction spring is provided inside the limiting pipe. A push plate is fixedly connected to one end of the squeezing rod and the electric telescopic rod. The side of the push plate away from the limiting pipe is fixedly connected to the block.
[0008] Preferably, the fixing component includes a positioning box, which is symmetrically embedded in one side of the bottom of the box. A fixing rod is fixedly connected to one side of the positioning box, and a movable frame is slidably connected to the outside of the fixing rod. One end of the movable frame passes through the positioning box and is slidably connected to the positioning box. A second retraction spring is sleeved on the outside of the fixing rod. An insert plate is slidably connected to one side of the positioning box, and a movable rod is rotatably connected between the movable frame and the insert plate. Slots are symmetrically opened on the upper and lower sides of the fixing frame, and the insert plate is inserted into the slot.
[0009] Preferably, a pull block is fixedly installed at the end of the movable frame away from the positioning box.
[0010] Preferably, a discharge pipe is fixedly installed inside the lower part of the box, and a sealing plug is inserted into the bottom inner side of the discharge pipe.
[0011] Preferably, a handle is fixedly installed on the side of the fixing frame away from the box body.
[0012] Preferably, the first conical tooth and the second conical tooth are engaged in a meshing connection.
[0013] Compared with the prior art, the beneficial effects of this utility model are as follows: A gas purification device for a CVD reactor is described, specifically: A motor drives the rotation of a drive rod; the rotation of the first conical tooth drives the rotation of the second conical tooth; the rotation of the rotating rod drives the rotation of the fan blades; and the connecting pipe draws in the gas from inside the furnace. Multiple sets of filters with different mesh sizes filter solid impurities from the gas, and activated carbon filters absorb harmful components. Finally, the purified gas is discharged through the discharge pipe, thus achieving rapid auxiliary discharge of gas from the furnace. Rapid discharge of the reacted gas helps maintain a stable reaction environment inside the furnace, improves reaction efficiency, reduces the residence time of the gas in the furnace, and reduces the possibility of side reactions. The device utilizes multiple... The filter screens and activated carbon filter plates enable staged gas filtration, effectively removing particulate impurities and harmful gases, reducing environmental pollution, and achieving preliminary gas purification. Workers pull two sets of movable frames that slide inside the positioning box. One end of the movable frame slides outside the fixed rod, causing the second compression spring to contract. The movement of the movable frame drives the movement of the movable rod, which in turn rotates and pulls the insert plate inside the positioning box. The tension generated by the second compression spring allows the insert plate to engage with the slot, enabling quick installation and removal of the fixed frame. This facilitates cleaning and regeneration of the filter screens and activated carbon filter plates, significantly improving the efficiency of daily maintenance and ensuring the continuous effectiveness of the gas purification function.
[0014] 1. The motor drives the drive rod to rotate, which in turn drives the first conical tooth to rotate, which in turn drives the second conical tooth to rotate, which in turn drives the rotating rod to rotate, which in turn drives the fan blades to rotate. This fan blade rotation creates a negative pressure inside the conical frame, which in turn draws in gas from inside the furnace through the connecting pipe. The gas enters the chamber and is filtered by multiple sets of filters with different mesh sizes to remove solid impurities. Then, an activated carbon filter absorbs harmful components from the gas. Finally, the purified gas is discharged through the discharge pipe, thus achieving rapid auxiliary discharge of gas from the furnace. Rapid discharge of the reacted gas helps maintain a stable reaction environment inside the furnace, improves reaction efficiency, reduces the residence time of gas in the furnace, and reduces the possibility of side reactions. The use of multiple sets of filters and activated carbon filter plates enables gas separation... The multi-stage filtration effectively removes particulate impurities and harmful gases from the gas, reducing environmental pollution. The separate design of the purification mechanism and discharge pipe prevents the gas and liquid products inside the furnace from being discharged together, facilitating separate control of gas and liquid product emissions, improving equipment reliability and stability, and achieving preliminary gas purification. Operators activate an electric telescopic rod to move the push plate horizontally inside the fixed pipe. At this time, the block and slot close or open. As the push plate moves, it drives two sets of extrusion rods to slide inside the limiting tube. The first compression spring is compressed, buffering the push plate and enabling rapid sealing and opening of the connecting pipe. This allows operators to seal the gas when it is not needed, preventing leakage and protecting workers and the environment from harmful gases. Furthermore, gas emissions can be flexibly adjusted according to actual production needs. 2. The worker inserts the fixed frame into the housing, then pulls two sets of movable frames to slide inside the positioning box. At this time, one end of the movable frame slides outside the fixed rod. The second contraction spring is compressed and contracts. The movement of the movable frame drives the movement of the movable rod. The movement of the movable rod rotates and pulls the insert plate to slide inside the positioning box. The worker then releases the movable frame, and the tension generated by the second contraction spring causes the movable rod to rotate and push the insert plate to move, thus allowing the insert plate to be inserted into the slot. This enables the quick installation and removal of the fixed frame, facilitating the cleaning and regeneration of the filter screen and activated carbon filter plate. This greatly improves the daily maintenance efficiency of the device, ensures the continuous effectiveness of the gas purification function, and brings convenience to the workers during use. Attached Figure Description
[0015] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a schematic diagram of the overall structure of the purification mechanism in this utility model; Figure 3This is a side sectional view of the overall structure of the fixed tube in this utility model; Figure 4 This is a cross-sectional view of the overall structure of the fixed tube in this utility model; Figure 5 This utility model Figure 2 Enlarged structural diagram of section A.
[0016] In the diagram: 1. Furnace body; 101. End cap; 102. Reactor body; 103. Discharge pipe; 2. Purification mechanism; 201. Box; 202. Conical frame; 203. Connecting pipe; 204. Strip box; 205. Drive rod; 206. Motor; 207. Rotating rod; 208. Fan blade; 209. First conical tooth; 210. Second conical tooth; 211. Fixing frame; 212. Filter screen; 213. Connecting frame; 214. Activated carbon filter plate; 215. Fixing pipe 216. Groove; 217. Block; 218. Support plate; 219. Electric telescopic rod; 220. Limiting tube; 221. Extrusion rod; 222. First contraction spring; 223. Push plate; 224. Discharge pipe; 225. Sealing plug; 226. Handle; 3. Fixing assembly; 301. Positioning box; 302. Fixing rod; 303. Moving frame; 304. Second contraction spring; 305. Insert plate; 306. Movable rod; 307. Slot; 308. Pull block. Detailed Implementation
[0017] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0018] Please see Figure 1-5 The present invention provides a technical solution: a gas purification device for a CVD reactor, comprising a furnace body 1, an end cap 101 fixedly installed on the top of the furnace body 1, a reactor body 102 disposed inside the end cap 101, and a discharge pipe 103 embedded in the lower interior of the furnace body 1; a purification mechanism 2 disposed on one side of the bottom of the furnace body 1, and a fixing component 3 disposed inside the purification mechanism 2. The purification mechanism 2 includes a housing 201 fixedly installed on one side of the bottom of the furnace body 1. A conical frame 202 is embedded inside one side of the housing 201, and a connecting pipe 203 is fixedly connected between the conical frame 202 and the furnace body 1. A strip box 204 is fixedly connected to the inner top of the housing 201, and a drive rod 205 is rotatably connected between the strip box 204 and the housing 201. A motor 206 is fixedly connected to the top of the drive rod 205. A rotating rod 207 is rotatably connected between the strip box 204 and the conical frame 202. A fan blade 208 is fixedly installed on the outside of the rotating rod 207. A first conical tooth 209 is fixedly connected to the bottom of the drive rod 205, and a second conical tooth 210 is fixedly connected to the end of the rotating rod 207 away from the fan blade 208. The first conical tooth 209 and the second conical tooth 210 are meshed together. A strip box 201 is inserted into the bottom side of the housing 201. The furnace has a fixed frame 211, and filter screens 212 are fixedly connected to the upper interior of the fixed frame 211. A connecting frame 213 is fixedly connected to the lower interior of the fixed frame 211, and an activated carbon filter plate 214 is fixedly installed inside the connecting frame 213. This enables the rapid auxiliary discharge of gas inside the furnace 1. Rapid discharge of the gas after reaction helps maintain a stable reaction environment inside the furnace, improves reaction efficiency, reduces the residence time of gas inside the furnace, and reduces the possibility of side reactions. The use of multiple sets of filter screens 212 and activated carbon filter plates 214 can achieve the effect of gas grading filtration, effectively removing particulate impurities and harmful gases from the gas, reducing environmental pollution. Furthermore, the separate design of the purification mechanism 2 and the discharge pipe 103 can prevent the gas and liquid products inside the furnace 1 from being discharged together, making it easier to control the discharge of gas and liquid products separately, and improving the reliability and stability of the equipment. A fixing pipe 215 is fixedly installed inside the connecting pipe 203. A slot 216 is opened on one side of the fixing pipe 215, and a block 217 is fitted to the inner side of the slot 216. A support plate 218 is fixedly connected to one end of the fixing pipe 215, and an electric telescopic rod 219 is fixedly connected to one side of the support plate 218. Limiting pipes 220 are symmetrically fixedly connected to the side of the support plate 218 near the electric telescopic rod 219. A pressing rod 221 is slidably connected to one end of the limiting pipe 220, and a first contraction spring 222 is installed inside the limiting pipe 220. A push plate 223 is fixedly connected to one end of the pressing rod 221 and the electric telescopic rod 219. The side of the push plate 223 away from the limiting pipe 220 is fixedly connected to the block 217. It can quickly seal and open the inside of the connecting pipe 203, making it convenient for staff to seal the gas when it does not need to be discharged, preventing leakage and protecting the staff and environment from harmful gases. At the same time, it can flexibly adjust the gas discharge according to actual production needs, bringing convenience to the staff during use. The discharge pipe 224 is fixedly installed inside the lower part of the box 201, and a sealing plug 225 is inserted into the bottom inner side of the discharge pipe 224. Through the design of the discharge pipe 224 and the sealing plug 225, it is convenient for the staff to discharge the purified gas inside the box 201. A handle 226 is fixedly installed on the side of the fixed frame 211 away from the box 201. Through the design of the handle 226, it is convenient for the staff to operate the fixed frame 211.
[0019] The fixing component 3 includes a positioning box 301, which is symmetrically embedded in one side of the bottom of the housing 201. A fixing rod 302 is fixedly connected to one side of the interior of the positioning box 301, and a movable frame 303 is slidably connected to the outside of the fixing rod 302. One end of the movable frame 303 passes through the positioning box 301 and is slidably connected to it. A second retraction spring 304 is sleeved on the outside of the fixing rod 302. An insert plate 305 is slidably connected to the inside of one side of the positioning box 301, and a movable rod 306 is rotatably connected between the movable frame 303 and the insert plate 305. Furthermore, the fixed frame 211 has symmetrical slots 307 on its upper and lower sides, and the insert plate 305 is inserted into the slot 307. The movable frame 303 is fixedly installed with a pull block 308 at the end away from the positioning box 301, which enables the quick installation and disassembly of the fixed frame 211. This facilitates the cleaning and regeneration of the filter screen 212 and activated carbon filter plate 214 by the staff, thereby greatly improving the daily maintenance efficiency of the device, ensuring the continuous effectiveness of the gas purification function, and bringing convenience to the staff during use. The design of the pull block 308 makes it easy for the staff to operate the movable frame 303.
[0020] Working principle: Before using this type of gas purification device for CVD reactors, it is necessary to check the overall condition of the device to ensure it can operate normally. Figure 1 - Figure 5 As shown, when the operator needs to discharge the gas generated during the operation of the CVD reactor, the operator starts the motor 206 to drive the drive rod 205 to rotate. The rotation of the drive rod 205 drives the first conical tooth 209 to rotate, which in turn drives the second conical tooth 210 to rotate. The rotation of the second conical tooth 210 drives the rotating rod 207 to rotate, which in turn drives the fan blade 208 to rotate. At this time, the rotation of the fan blade 208 creates a negative pressure inside the conical frame 202, which then draws the gas from inside the furnace body 1 through the connecting pipe 203. The gas then enters the interior of the housing 201 and is processed by multiple sets of... Different mesh sizes of filter screens 212 filter solid impurities in the gas, and then activated carbon filter plate 214 absorbs harmful components in the gas. Finally, the purified gas is discharged through discharge pipe 224, thus achieving the effect of rapid auxiliary discharge of gas from the furnace body 1. Rapid discharge of the reacted gas helps maintain a stable reaction environment inside the furnace, improves reaction efficiency, reduces the residence time of gas in the furnace, and reduces the possibility of side reactions. By using multiple sets of filter screens 212 and activated carbon filter plate 214, the effect of staged gas filtration can be achieved, effectively removing particulate impurities and harmful gases from the gas, reducing environmental pollution, and purifying the gas. The separate design of the purification mechanism 2 and the discharge pipe 103 avoids the simultaneous discharge of gas and liquid products inside the furnace body 1, facilitating separate control of gas and liquid product emissions, improving equipment reliability and stability, and achieving preliminary gas purification. The discharge pipe 224 is then connected to a pipeline to transport the gas to other gas filtration equipment for final purification. The operator activates the electric telescopic rod 219, causing the push plate 223 to move horizontally within the fixed pipe 215. At this time, the block 217 closes or opens between the plug and the slot 216. When the push plate 223 moves, it drives two sets of extrusion rods 221 to slide within the limiting pipe 220. At this point, the first collection... The compression spring 222 is compressed and shrinks, which buffers the push plate 223, thereby achieving the effect of quickly sealing and opening the inside of the connecting pipe 203. This allows the staff to seal the gas when it is not needed to prevent leakage and prevent harmful gases from harming the staff and the environment. At the same time, the gas emission can be flexibly adjusted according to actual production needs, which brings convenience to the staff. The design of the discharge pipe 224 and the sealing plug 225 makes it easy for the staff to discharge the purified gas inside the box 201. The design of the handle 226 makes it easy for the staff to operate the fixed frame 211. The worker inserts the fixed frame 211 into the housing 201, and then pulls the two sets of movable frames 303 to slide inside the positioning box 301. At this time, one end of the movable frame 303 slides outside the fixed rod 302. The second contraction spring 304 is compressed and contracted. The movement of the movable frame 303 drives the movement of the movable rod 306. The movement of the movable rod 306 rotates and pulls the insert plate 305 to slide inside the positioning box 301. The worker then releases the movable frame 303. Using the tension generated by the second contraction spring 304, the movable rod 306 rotates and pushes the insert plate 305 to move, so that the insert plate 305 can be inserted into the slot 307. This achieves the effect of quick installation and disassembly of the fixed frame 211, which facilitates the worker to clean and regenerate the filter screen 212 and activated carbon filter plate 214. This greatly improves the daily maintenance efficiency of the device, ensures the continuous effectiveness of the gas purification function, and brings convenience to the worker during use. The design of the pull block 308 makes it easy for the worker to operate the movable frame 303.
[0021] In the prior art, CN218232569U discloses a CVD reactor with a nozzle, and the apparatus used therein will not be described in detail here.
[0022] All standard parts used in this utility model can be purchased from the market, and irregular parts can be customized according to the description and drawings. The specific connection methods of each part adopt conventional methods such as bolts, rivets, and welding that are mature in the prior art. The machinery, parts and equipment adopt conventional models in the prior art. In addition, the circuit connection adopts conventional connection methods in the prior art, which will not be described in detail here. The contents not described in detail in this specification belong to the prior art known to those skilled in the art.
[0023] Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.
Claims
1. A gas purification device for a CVD reactor, comprising a furnace body (1), wherein an end cap (101) is fixedly installed on the top of the furnace body (1), and a reactor body (102) is provided inside the end cap (101), and a discharge pipe (103) is embedded in the lower interior of the furnace body (1). Its features are, Also includes: A purification mechanism (2) is provided on one side of the bottom of the furnace body (1), and a fixing component (3) is provided inside the purification mechanism (2). The purification mechanism (2) includes a box (201) fixedly installed on one side of the bottom of the furnace body (1), and a conical frame (202) is embedded inside one side of the box (201). A connecting pipe (203) is fixedly connected between the conical frame (202) and the furnace body (1). A strip box (204) is fixedly connected to the inner top of the box (201), and a drive rod (205) is rotatably connected between the strip box (204) and the box (201). A motor (206) is fixedly connected to the top of the drive rod (205), and a motor (206) is rotatably connected between the strip box (204) and the conical frame (202). A rotating rod (207) is fixedly mounted with a fan blade (208) on its outside. A first conical tooth (209) is fixedly connected to the bottom of a drive rod (205). A second conical tooth (210) is fixedly connected to the end of the rotating rod (207) away from the fan blade (208). A fixed frame (211) is inserted into one side of the bottom of the housing (201). A filter screen (212) is fixedly connected to the upper interior of the fixed frame (211). A connecting frame (213) is fixedly connected to the lower interior of the fixed frame (211). An activated carbon filter plate (214) is fixedly mounted inside the connecting frame (213).
2. The gas purification device for a CVD reactor according to claim 1, characterized in that: The connecting pipe (203) is fixedly installed with a fixing pipe (215), and a slot (216) is opened on one side of the fixing pipe (215). A block (217) is attached to the inside of the slot (216). A support plate (218) is fixedly connected to one end of the fixing pipe (215). An electric telescopic rod (219) is fixedly connected to one side of the support plate (218). A limit tube (220) is symmetrically fixedly connected to the side of the support plate (218) near the electric telescopic rod (219). A squeezing rod (221) is slidably connected to one end of the limit tube (220). A first contraction spring (222) is provided inside the limit tube (220). A push plate (223) is fixedly connected to one end of the squeezing rod (221) and the electric telescopic rod (219). The side of the push plate (223) away from the limit tube (220) is fixedly connected to the block (217).
3. The gas purification device for a CVD reactor according to claim 1, characterized in that: The fixing component (3) includes a positioning box (301), which is symmetrically embedded in the bottom side of the box body (201). A fixing rod (302) is fixedly connected to the inside side of the positioning box (301), and a movable frame (303) is slidably connected to the outside of the fixing rod (302). One end of the movable frame (303) passes through the positioning box (301) and is slidably connected to the positioning box (301). A second retraction spring (304) is sleeved on the outside of the fixing rod (302). A plug plate (305) is slidably connected to the inside of one side of the positioning box (301). A movable rod (306) is rotatably connected between the movable frame (303) and the plug plate (305). Slots (307) are symmetrically opened on the upper and lower sides of the fixing frame (211), and the plug plate (305) is inserted into the slot (307).
4. A gas purification device for a CVD reactor according to claim 3, characterized in that: A pull block (308) is fixedly installed at the end of the movable frame (303) away from the positioning box (301).
5. A gas purification device for a CVD reactor according to claim 1, characterized in that: The lower interior of the box (201) is fixedly equipped with a discharge pipe (224), and a sealing plug (225) is inserted into the bottom inner side of the discharge pipe (224).
6. A gas purification device for a CVD reactor according to claim 1, characterized in that: A handle (226) is fixedly installed on the side of the fixed frame (211) away from the box (201).
7. A gas purification device for a CVD reactor according to claim 1, characterized in that: The first conical tooth (209) and the second conical tooth (210) are engaged.