A target material transfer device for semiconductor chip manufacturing

Abstract

The utility model discloses a target material transfer device for semiconductor chip manufacturing, including transfer flat -bed truck, and the receiving subassembly of transfer flat -bed truck upper end face is provided with, and the sheltering subassembly of receiving subassembly outside is provided with, through setting up the receiving cavity on the receiving box upper end face, the target material body is placed in the receiving box and is transferred for the convenience of user, and because a plurality of receiving boxes are placed respectively on the front and back two sides of first support plate and second support plate upper end face, the space around is also relatively open, also is convenient for user to carry out the convenient taking of receiving box and target material body and put, through the sheltering of surrounding board placing on transfer flat -bed truck, can make the sheltering of surrounding board to the target material body in receiving box and shield protection, avoid the target material body in being transferred process direct exposure and receive knock, through setting up first weight reduction through cavity and second weight reduction through cavity, can further reduce the dead weight of sheltering surrounding board to make the sheltering surrounding board in being taken more portable.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor chip target transfer technology, specifically a target transfer device for semiconductor chip manufacturing. Background Technology

[0002] The semiconductor chip manufacturing process can be divided into three main stages: silicon wafer manufacturing, wafer fabrication, and chip packaging. Metal sputtering targets are needed in both wafer fabrication and chip packaging, and corresponding transfer devices are required to transfer the target to the desired location during the target transfer process.

[0003] In the prior art, a target material transfer device for semiconductor chip manufacturing, with the publication number "CN220701798U", achieves the effect of convenient target material placement through the design of an upper shell, a lower shell and a placement groove, and achieves the effect of convenient fixation of the upper shell and the lower shell through the design of a connecting rod, a connecting hole, a buckle, a slot, a first magnetic strip and a second magnetic strip.

[0004] However, the above technical solutions and existing technologies have the following drawbacks: Although the target transfer device can transfer and protect the target, the process of handling the target requires first removing the placement box from the main body, then removing the upper and lower shells from the placement box, and finally opening the upper shell to handle the target. This process is rather cumbersome, and the limited space between the placement box and the upper and lower shells makes it difficult for users to handle them conveniently, resulting in poor usability. Utility Model Content

[0005] The purpose of this invention is to provide a target transfer device for semiconductor chip manufacturing, so as to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, this utility model provides the following technical solution: A target material transfer device for semiconductor chip manufacturing includes a transfer flatbed cart, casters with foot brakes, and a push handle. Casters with foot brakes are symmetrically installed on the left and right sides of the lower end face of the transfer flatbed cart. A push handle is fixedly connected to the right end face of the transfer flatbed cart. Multiple target material bodies to be transferred are placed on the top of the transfer flatbed cart. A storage component is provided on the upper end face of the transfer flatbed cart, and the storage component is used to store and limit the multiple target material bodies. A shielding component is provided on the outside of the storage component, and the shielding component is used to shield and protect the storage component. The storage assembly includes a storage box, a first support plate, a support rod, a second support plate, a top guard plate, a placement slot, and a storage cavity. The first support plate is fixedly connected to the upper surface of the transfer flatbed. Support rods are symmetrically fixedly connected to the left and right sides of the upper surface of the first support plate. A top guard plate is fixedly connected to the top of the support rods. A second support plate is fixedly connected between the top guard plate and the first support plate. Placement slots are symmetrically opened on the front and rear sides of the upper surfaces of the second and first support plates. A storage box is placed on the upper surface of the placement slot. A storage cavity is opened on the upper surface of the storage box, and the storage cavity matches the target body. A connecting post is inserted through the middle position inside the top guard plate and the second support plate. A second extension plate is connected to the bottom of the connecting post. A first extension plate is connected to the outer surface of the connecting post. Positioning strips are connected to the front and rear ends of the first and second extension plates.

[0007] Preferably, the protective assembly includes a protective panel, a first weight-reducing cavity, a second weight-reducing cavity, and a detachable handle. The protective panel is placed on the upper surface of the transfer flatbed. Multiple first weight-reducing cavities are symmetrically opened on the front and rear sides inside the protective panel. Second weight-reducing cavities are symmetrically opened on the left and right sides inside the protective panel. Detachable handles are symmetrically fixedly connected to the left and right sides of the upper surface of the protective panel.

[0008] Preferably, a first positioning hole is provided on the upper side inside the connecting column, a second positioning through hole is provided directly below the first positioning hole, and a handle is provided on the top of the connecting column.

[0009] Preferably, a support plate is fixedly connected to the upper surface of the top guard plate, and a positioning pin is inserted inside the support plate, and the positioning pin is matched with the first positioning hole and the second positioning hole respectively.

[0010] Preferably, the placement slot matches the bottom of the storage box, and the storage box has a moving latch slot on its side.

[0011] Compared with the prior art, the beneficial effects of this utility model are: 1. By opening a storage cavity on the upper surface of the storage box, it is convenient for users to place the target body in the storage box for transfer. Since multiple storage boxes are placed on the front and back sides of the upper surface of the first support plate and the second support plate respectively, the surrounding space is relatively open, which also makes it convenient for users to take and put away the storage box and the target body. 2. By lowering the connecting column, the connecting column can drive multiple positioning strips to descend together through the first extension plate and the second extension plate and fit with the upper end of the target body in multiple storage boxes. Then, the positioning pin is inserted into the first positioning hole to lock the connecting column, which can prevent the target body in the storage cavity from rolling and shifting during the later transfer process, thereby ensuring the transfer stability of the target body. 3. By placing the shielding panel on the transfer flatbed, the shielding panel can protect the target body in the storage box, preventing the target body from being directly exposed and bumped during the transfer process. By opening the first weight-reducing cavity and the second weight-reducing cavity, the weight of the shielding panel can be further reduced, making the shielding panel lighter when it is picked up and put down. Attached Figure Description

[0012] Figure 1 This is a schematic diagram of the main structure of this utility model; Figure 2 This is a structural diagram of the target body in the storage and positioning state of the storage component in this utility model; Figure 3 This is a structural diagram of the present invention showing the target body being stored and positioned by the storage component. Figure 4 This is a partial structural diagram of the storage component in this utility model; Figure 5 This is a structural diagram of the shielding component in this utility model; Figure 6 This is a structural diagram of the storage box in this utility model.

[0013] In the diagram: 1. Transfer flatbed trolley; 2. Universal wheel with foot brake; 3. Push handle; 4. Protective assembly; 41. Protective enclosure; 42. First weight-reducing cavity; 43. Second weight-reducing cavity; 44. Detachable handle; 5. Storage assembly; 51. Storage box; 52. First support plate; 53. Support rod; 54. Second support plate; 55. Top guard plate; 56. Positioning pin; 57. Support piece; 58. Connecting column; 581. First positioning hole; 582. Second positioning hole; 583. Handle; 59. Positioning strip; 511. Placement slot; 512. First extension plate; 513. Second extension plate; 514. Storage cavity; 6. Target body. Detailed Implementation

[0014] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0015] Please see Figures 1-6 This utility model provides a technical solution: Example 1: A target material transfer device for semiconductor chip manufacturing includes a transfer flatbed trolley 1, casters 2 with foot brakes, and a push lever 3. Casters 2 with foot brakes are symmetrically installed on the left and right sides of the lower end face of the transfer flatbed trolley 1. The casters 2 with foot brakes not only make the transfer flatbed trolley 1 more convenient and labor-saving during transfer, but also have locking capabilities. A push lever 3 is fixedly connected to the right end face of the transfer flatbed trolley 1. The push lever 3 is connected to the transfer flatbed trolley 1 by welding. The push lever 3 allows the user to push and pull the transfer flatbed trolley 1 by hand. Multiple target material bodies 6 to be transferred are placed on top of the transfer flatbed trolley 1. The target material bodies 6 are used for semiconductor chip manufacturing.

[0016] The upper surface of the transfer flatbed trolley 1 is provided with a storage component 5, which is used to store and limit multiple target bodies 6 to prevent the target bodies 6 from becoming loose or slipping during the transfer process. The outer side of the storage component 5 is provided with a shielding component 4, which is used to shield and protect the storage component 5 to prevent the target bodies 6 from being bumped or knocked during the transfer process.

[0017] Storage component 5 includes a storage box 51, a first support plate 52, a support rod 53, a second support plate 54, a top guard plate 55, a placement slot 511, and a storage cavity 514. The first support plate 52 is fixedly connected to the upper end face of the transfer flatbed 1. The first support plate 52 is connected to the transfer flatbed 1 by welding. The first support plate 52 can support the support rod 53 and the storage box 51 respectively. The support rods 53 are symmetrically fixedly connected to the left and right sides of the upper end face of the first support plate 52. The support rods 53 are connected to the first support plate 52, the second support plate 54, and the top guard plate 55 by means of... The support rod 53 is connected by welding and can support and fix the second support plate 54 and the top protective plate 55. The top protective plate 55 is fixedly connected to the top of the support rod 53. The top protective plate 55 can not only support the support piece 57, but also protect the target body 6 stored in the upper storage box 51. The second support plate 54 is fixedly connected between the top protective plate 55 and the first support plate 52. The second support plate 54 can separate the storage space between the top protective plate 55 and the first support plate 52 so that the device can store more target bodies 6.

[0018] The second support plate 54 and the first support plate 52 are symmetrically provided with placement slots 511 on both the front and rear sides of their upper ends. The placement slots 511 match the bottom of the storage box 51 and can limit the storage box 51 to prevent it from shifting or slipping during use. The storage box 51 is placed on the upper end of the placement slots 511. The upper end of the storage box 51 is provided with a storage cavity 514, which matches the target body 6. The storage box 51 with the storage cavity 514 on its upper end can limit the storage of the target body 6 and prevent it from rolling during transfer. The storage box 51 is provided with a moving buckle groove on its side, which makes it easy for users to move and place the storage box 51 by hand.

[0019] Connecting posts 58 are inserted into the middle of the top guard plate 55 and the second support plate 54. The connecting posts 58 are connected to the first extension plate 512 and the second extension plate 513 by welding. The connecting posts 58 can support the first extension plate 512 and the second extension plate 513 respectively. The bottom of the connecting posts 58 is connected to the second extension plate 513, which can support the positioning strip 59 below. The outer surface of the connecting posts 58 is connected to the first extension plate 512, which can support the positioning strip 59 above. The front and rear ends of the first extension plate 512 and the second extension plate 513 are connected to positioning strips 59. There are multiple positioning strips 59, and the multiple positioning strips 59 are of the same specification. The multiple positioning strips 59 are connected to the first extension plate 512 and the second extension plate 513 by welding. The multiple positioning strips 59 can simultaneously press and position the target body 6 in multiple storage boxes 51 to prevent the target body 6 from shaking or shifting during the transfer process.

[0020] A first positioning hole 581 is provided on the upper side of the inside of the connecting post 58, and a second positioning through hole is provided directly below the first positioning hole 581. A handle 583 is provided on the top of the connecting post 58, and the handle 583 is connected to the connecting post 58 by welding. The handle 583 allows the user to move the connecting post 58 up and down by hand. The annular side of the handle 583 is provided with anti-slip texture, which improves the anti-slip performance of the annular side of the handle 583. A support plate 57 is fixedly connected to the upper end of the top guard plate 55, and the support plate 57 is connected to the top guard plate 55 by welding. The support plate 57 can support the positioning pin 56, and a [missing information] is inserted inside the support plate 57. Positioning pin 56 is provided, and positioning pin 56 is matched with first positioning hole 581 and second positioning hole 582 respectively. When positioning pin 56 is inserted into first positioning hole 581 through support plate 57, the lower end face of multiple positioning pressure strips 59 will be in contact with the upper end face of target body 6 in multiple storage boxes 51, so that positioning pressure strips 59 can stably block and position target body 6 in multiple storage boxes 51. When positioning pin 56 is inserted into second positioning through hole through support plate 57, it can be locked by the rising connecting post 58 to prevent positioning pressure strips 59 from obstructing the user from taking and putting away target body 6 in storage box 51.

[0021] Example 2: Based on Embodiment 1, in this embodiment, by placing the shielding panel on the transfer flatbed trolley 1, the shielding panel can shield and protect the target body 6 in the storage box 51, preventing the target body 6 from being directly exposed and bumped during the transfer process. By opening the first weight-reducing cavity 42 and the second weight-reducing cavity 43, the weight of the shielding panel 41 can be further reduced, making the shielding panel 41 lighter during handling.

[0022] The protective assembly 4 includes a protective panel 41, a first weight-reducing cavity 42, a second weight-reducing cavity 43, and a detachable handle 44. The protective panel 41 is placed on the upper surface of the transfer flatbed 1. The protective panel 41 is made of engineering plastic. The protective panel 41, made of engineering plastic, is not only strong and can accommodate the assembly 5 for shielding and protection, but also has a relatively low density, which is generally between 1.0 and 2.0, much lower than that of metal materials. Therefore, it is lightweight and avoids the need for users to exert effort when handling it.

[0023] Multiple first weight-reducing cavities 42 are symmetrically opened on the front and rear sides of the interior of the protective panel 41, and second weight-reducing cavities 43 are symmetrically opened on the left and right sides of the interior of the protective panel 41. The first weight-reducing cavities 42 and the second weight-reducing cavities 43 can further reduce the weight of the protective panel 41, making the protective panel 41 lighter and easier to handle. The upper surface of the protective panel 41 is symmetrically fixedly connected to the left and right sides with detachable handles 44. The detachable handles 44 are made of the same material as the protective panel 41 and are integrated with the protective panel 41. The detachable handles 44 make it convenient for users to handle the protective panel 41 by hand.

[0024] Working principle: In the semiconductor chip manufacturing process, this device is used to transfer the target body 6 to the required position. The user first holds the disassembly handle 44 to lift and disassemble the protective cover 41. Then, the multiple target bodies 6 to be transferred can be placed in the storage cavities 514 on the upper surface of multiple storage boxes 51. After placement, hold the handle 583 with one hand and pull out the positioning pin 56 with the other hand to separate it from the second positioning hole 582. At this time, the connecting post 58 can be lowered through the handle 583. The connecting post 58 will drive multiple positioning pressure strips 59 to descend together through the first extension plate 512 and the second extension plate 513, so that the multiple positioning pressure strips 59 descend and fit against the upper end of the multiple target bodies 6. Then, the positioning pin 56 is passed through the support plate 57 and inserted into the first positioning hole 581 to lock the connecting post 58 (see reference). Figure 2 This allows multiple positioning strips 59 to simultaneously block and position multiple target bodies 6, preventing the target bodies 6 in the receiving cavity 514 from rolling or shifting during subsequent transfer, thus ensuring the stability of the target bodies 6 during transfer; then, the user places the protective enclosure 41 vertically on the transfer flatbed trolley 1 (see reference). Figure 1 This design allows the protective panel 41 to shield and protect the target bodies 6 on the multiple storage boxes 51, preventing them from being bumped or knocked during transport. The first weight-reducing cavity 42 and the second weight-reducing cavity 43 further reduce the weight of the protective panel 41, making it easier to handle. Users can then use the transfer cart 1 to move the multiple target bodies 6. When a target body 6 is moved to the desired location and needs to be removed, the user first... The enclosure panel 41 is lifted and placed on the ground. Then, the positioning pin 56 is removed, and the connecting post 58 is lifted. The connecting post 58 will move multiple positioning strips 59 upwards through the first extension plate 512 and the second extension plate 513, thereby releasing the multiple positioning strips 59 from obstructing the multiple target bodies 6. After the connecting post 58 is lifted to the required distance, the positioning pin 56 is passed through the support plate 57 and inserted into the second positioning hole 582, which can lock the lifted connecting post 58 (see reference). Figure 3 At this point, the user can move the multiple storage boxes 51 at the front and back or take out the target body 6 individually.

[0025] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A target transfer device for semiconductor chip manufacturing, comprising a transfer flatbed cart (1), casters with foot brakes (2), and a push handle (3), characterized in that: The transfer flatbed (1) is symmetrically equipped with casters (2) with foot brakes on the left and right sides of the lower end face. The right end face of the transfer flatbed (1) is fixedly connected with a push handle (3). Multiple target bodies (6) to be transferred are placed on the top of the transfer flatbed (1). The upper end face of the transfer flatbed (1) is provided with a storage component (5), which is used to store and limit the multiple target bodies (6). The outside of the storage component (5) is provided with a shielding component (4), which is used to shield and protect the storage component (5). The storage assembly (5) includes a storage box (51), a first support plate (52), a support rod (53), a second support plate (54), a top guard plate (55), a placement slot (511), and a storage cavity (514). The first support plate (52) is fixedly connected to the upper end face of the transfer flatbed (1). Support rods (53) are symmetrically fixedly connected to the left and right sides of the upper end face of the first support plate (52). The top guard plate (55) is fixedly connected to the top of the support rods (53). The second support plate (54) is fixedly connected between the top guard plate (55) and the first support plate (52). The second support plate (54) and the first support plate (52) are connected to each other. The front and rear sides of the end face are symmetrically provided with placement slots (511). A storage box (51) is placed on the upper surface of the placement slot (511). A storage cavity (514) is provided on the upper surface of the storage box (51), and the storage cavity (514) matches the target body (6). A connecting post (58) is inserted in the middle of the top guard plate (55) and the second support plate (54). A second extension plate (513) is connected to the bottom of the connecting post (58). A first extension plate (512) is connected to the outer surface of the connecting post (58). Positioning strips (59) are connected to the front and rear ends of the first extension plate (512) and the second extension plate (513).

2. The target transfer apparatus for semiconductor chip manufacturing according to claim 1, characterized in that: The shielding assembly (4) includes a shielding panel (41), a first weight-reducing cavity (42), a second weight-reducing cavity (43), and a detachable handle (44). The shielding panel (41) is placed on the upper surface of the transfer flatbed (1). Multiple first weight-reducing cavities (42) are symmetrically opened on the front and rear sides inside the shielding panel (41). Second weight-reducing cavities (43) are symmetrically opened on the left and right sides inside the shielding panel (41). Detachable handles (44) are symmetrically fixedly connected on the left and right sides of the upper surface of the shielding panel (41).

3. The target transfer apparatus for semiconductor chip manufacturing according to claim 1, characterized in that: The connecting post (58) has a first positioning hole (581) on its upper side, and a second positioning through hole is provided directly below the first positioning hole (581). A handle (583) is provided on the top of the connecting post (58).

4. The target transfer apparatus for semiconductor chip manufacturing according to claim 3, characterized in that: The top guard plate (55) is fixedly connected to a support plate (57), and a positioning pin (56) is inserted inside the support plate (57), and the positioning pin (56) is matched with the first positioning hole (581) and the second positioning hole (582) respectively.

5. The target transfer apparatus for semiconductor chip manufacturing according to claim 1, characterized in that: The placement slot (511) matches the bottom of the storage box (51), and the storage box (51) has a moving buckle slot on its side.

Images