Crucible switching guard

Abstract

The utility model discloses a kind of crucible switching protection devices, it includes: base, carousel, crucible, scraper and circular baffle, carousel is rotatably horizontally arranged above base, annular array is set on the top of carousel Staircase hole, crucible is arranged in staircase hole, first motor is vertically arranged on base and located carousel side, circular baffle is horizontally arranged on the rotating shaft of first motor, the edge of circular baffle extends to above carousel and covers single crucible, fixed seat is arranged below circular baffle on base, tool holder is vertically arranged on the top of fixed seat, scraper is vertically arranged on tool holder, the blade of scraper top is contacted with the bottom surface of circular baffle, switching of crucible is carried out by the rotation of carousel, and covered protection is carried out using circular baffle when crucible is heated, so that impurities condense on the bottom surface of circular baffle, using the rotation of circular baffle, impurities are scraped off when passing through the blade of scraper top, and maintenance is convenient.

Description

Technical Field

[0001] This utility model relates to the field of silicon wafer processing equipment, and in particular to a crucible switching protection device. Background Technology

[0002] During the silicon wafer processing, the electron beam of the evaporation stage can be used to heat the metal particles in the crucible, causing the metal particles to evaporate and impact the surface of the silicon wafer, where they condense and form a corresponding metal film.

[0003] Because some metal particles contain small amounts of impurities, these impurities evaporate and transfer to the silicon wafer surface after heating, reducing the quality of the metal film on the silicon wafer. To reduce the adverse effects of impurities on silicon wafer processing, a baffle can be used to cover the crucible opening when heating the metal particles in the crucible. This allows the impurities to evaporate to the bottom surface of the baffle, where they are pre-condensed, thus reducing the problem of impurities evaporating onto the silicon wafer.

[0004] After impurities accumulate on the bottom surface of the baffle, it needs to be cleaned or replaced manually. Otherwise, the bottom surface of the baffle will be uneven, and it will not be able to cover the crucible opening tightly in the future, which increases the cost of cleaning or replacing the baffle. Improvement is needed. Utility Model Content

[0005] The purpose of this invention is to provide a crucible switching and protection device for switching crucibles and providing covering protection, thereby improving the convenience of maintenance.

[0006] To achieve this objective, the present invention adopts the following technical solution: A crucible switching protection device includes: a base, a turntable, a crucible, a scraper, and a circular baffle. The turntable is rotatably and horizontally mounted above the base. The top of the turntable has a stepped hole arranged in a ring array. The crucible is placed in the stepped hole. A first motor is vertically mounted on the base and located on one side of the turntable. The circular baffle is horizontally mounted on the shaft of the first motor. The edge of the circular baffle extends above the turntable and covers a single crucible. A fixed seat is mounted on the base below the circular baffle. A scraper holder is vertically mounted above the fixed seat. The scraper has a blade at its top that contacts the bottom surface of the circular baffle.

[0007] The base is equipped with a second motor that drives the turntable to rotate.

[0008] The number of stepped holes is at least two.

[0009] The fixed base is provided with a stud that extends upward through the tool holder, and a spring located below the tool holder is sleeved on the stud.

[0010] The stud is provided with a nut located at the bottom of the spring.

[0011] The blade extends radially along the circular baffle.

[0012] The beneficial effects of this utility model are as follows: A crucible switching and protection device switches crucibles by rotating a turntable, and uses a circular baffle to cover and protect the crucibles when they are heated, so that impurities condense on the bottom surface of the circular baffle. The impurities are scraped off by the rotation of the circular baffle as it passes over the blade at the top of the scraper. The device has a high degree of automation and improves the convenience of maintenance. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the structure of this utility model. Detailed Implementation

[0014] The following is combined Figure 1 The technical solution of this utility model will be further illustrated through specific embodiments.

[0015] like Figure 1 The crucible switching protection device shown includes: a base 1, a turntable 3, a crucible 5, a scraper 7, and a circular baffle 6. The turntable 3 is rotatably and horizontally arranged above the base 1. In this embodiment, a second motor 2 for driving the turntable 3 to rotate is provided on the base 1. The second motor 2 can be rotated by a PLC to realize the automatic rotation switching of the turntable 3.

[0016] A stepped hole 4 is arranged in a ring array on the top of the turntable 3, and the crucible 5 is placed in the stepped hole 4. In this embodiment, the number of stepped holes 4 is at least 2, which facilitates the switching of crucible 5 and the cyclic operation.

[0017] A first motor 14 is vertically mounted on the base 1 and located on one side of the turntable 3. A circular baffle 6 is horizontally mounted on the rotating shaft of the first motor 14 and fixed by screws, so that the circular baffle 6 can rotate under the drive of the first motor 14. The first motor 14 can be rotated by a PLC to improve the level of automation.

[0018] like Figure 1 As shown, the edge of the circular baffle 6 extends above the turntable 3 and covers a single crucible. In this embodiment, the gap between the circular baffle 6 and the top surface of the turntable 3 is small, which can achieve tight coverage and protection of the corresponding crucible.

[0019] The metal particles in the crucible are heated by an electron beam, causing impurities in the metal particles to evaporate. The impurities eventually condense on the bottom surface of the circular baffle 6. Then, the turntable 3 is rotated, causing the crucible 5 to rotate below the silicon wafer and away from the circular baffle 6. The metal particles in the crucible 5 evaporate and collide with the surface of the silicon wafer, and condense on the surface of the silicon wafer to form a corresponding metal film, thus improving the quality of metal film production.

[0020] In this embodiment, a fixed seat 13 is provided on the base 1 below the circular baffle 6. A blade holder 10 is provided above the fixed seat 13 and can be raised and lowered. The scraper 7 is vertically arranged on the blade holder 10. The top of the scraper 7 is provided with a blade 12 that contacts the bottom surface of the circular baffle 6. During the rotation of the circular baffle 6, the impurity film layer is scraped off when passing through the blade 12 at the top of the scraper 6. The degree of automation is high and the convenience of maintenance is improved.

[0021] The scraper 7 can be fixed to the blade holder 10 by welding or screws, resulting in a stable structure. Figure 1 As shown, the fixed base 13 is provided with a stud 8 that extends upward through the cutter holder 10 to guide the lifting and lowering of the cutter holder 10. A spring 11 is sleeved on the stud 8 and located below the cutter holder 10 to provide elastic support for the cutter holder 10, so that the blade 12 makes elastic contact with the bottom surface of the circular baffle 6, ensuring the scraping effect on the impurity film layer.

[0022] like Figure 1 As shown, a nut 9 is provided on the stud 8 at the bottom of the spring 11 to facilitate the compression of the spring 11 and adjust the elastic support force on the blade holder 10. In this embodiment, the blade 12 extends radially along the circular baffle 6 to ensure that the blade 12 can scrape away impurities on the bottom surface of the circular baffle 6.

[0023] The above description is only a preferred embodiment of this utility model. For those skilled in the art, there will be changes in the specific implementation method and application scope based on the idea of ​​this utility model. The content of this specification should not be construed as a limitation of this utility model.

Claims

1. A crucible switching protection device, characterized in that, include: The system comprises a base, a turntable, a crucible, a scraper, and a circular baffle. The turntable is rotatably and horizontally positioned above the base. The top of the turntable has a stepped array of holes arranged in a ring. The crucible is placed in the stepped holes. A first motor is vertically mounted on the base and located on one side of the turntable. The circular baffle is horizontally mounted on the shaft of the first motor, with its edge extending above the turntable and covering a single crucible. A fixed seat is mounted on the base below the circular baffle. A scraper holder is vertically mounted above the fixed seat and is vertically mounted on the scraper holder. The top of the scraper has a cutting edge that contacts the bottom surface of the circular baffle.

2. The crucible switching protection device according to claim 1, characterized in that, The base is equipped with a second motor that drives the turntable to rotate.

3. The crucible switching protection device according to claim 1, characterized in that, The number of stepped holes is at least two.

4. The crucible switching protection device according to claim 1, characterized in that, The fixed base is provided with a stud that extends upward through the tool holder, and a spring located below the tool holder is sleeved on the stud.

5. The crucible switching protection device according to claim 4, characterized in that, A nut is provided on the stud at the bottom of the spring.

6. The crucible switching protection device according to claim 1, characterized in that, The length of the blade extends radially along the circular baffle.

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