A probe device for testing contact resistance with adjustable probe spacing

By designing a test probe device with adjustable probe spacing, the problem that existing probes cannot adapt to different grid line spacings is solved, enabling fast and accurate contact resistance testing, and reducing costs and R&D cycle.

CN224594737UActive Publication Date: 2026-08-04JIANGSU LINYANG SOLARFUN CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
JIANGSU LINYANG SOLARFUN CO LTD
Filing Date
2025-06-26
Publication Date
2026-08-04

AI Technical Summary

Technical Problem

Existing test probes have a fixed probe spacing, which cannot adapt to solar cells with different grid line spacings. This results in the need to customize multiple probes, which is inconvenient to use, costly, and has a long development cycle.

Method used

An adjustable probe device was designed, which uses an insulated sliding base, an insulated fixed base and a spacing adjustment nut, combined with an elastic washer and a scale to achieve flexible adjustment of the probe spacing. The four-wire method is used for testing.

Benefits of technology

No need to customize test probes with various spacings, easy to use, saving time and costs, quickly adapting to battery testing with different grid line spacings, and providing accurate test results.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a kind of probe device of probe spacing adjustable test contact resistance, it includes insulating sliding base, insulating fixed base and spacing adjusting nut, spacing adjusting nut passes through the middle part of insulating sliding base and is connected in the middle part of insulating fixed base, spacing adjusting nut can be through rotating and adjust the spacing between insulating sliding base and insulating fixed base;Several probe fixed rows are equipped between insulating sliding base and insulating fixed base, and elastic washer is equipped in the inside or between probe fixed row, for adjusting the spacing between probe fixed row;Test probe is inserted on probe fixed row, and each test probe is connected by connecting wire and is connected with the connecting slot on insulating fixed base.This device is low in cost, convenient to use, simple structure and test probe with probe spacing adjustable at will, facing different spacing battery can be quickly adjusted and tested.
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Description

Technical Field

[0001] This utility model belongs to the field of solar cell production equipment, specifically relating to a probe device for testing contact resistance with adjustable probe spacing. Background Technology

[0002] In crystalline silicon solar cells, the main factors affecting cell conversion efficiency are optical loss, recombination loss, and resistive loss; among which resistive loss includes series resistance loss and parallel resistance loss. Parallel resistance loss is usually caused by pn junction leakage and edge leakage under the grid line, which can be avoided by optimizing the sintering and etching processes; the situation of series resistance is more complex.

[0003] Series resistance includes the silicon wafer substrate resistance, diffusion sheet resistance, grid line resistance, and the contact resistance between the grid lines and the silicon wafer. The contact resistance between the grid lines and the silicon wafer is related not only to the screen printing pattern but also to the diffusion and sintering processes. Its value reflects the quality of the metal ohmic contact on the surface of the crystalline silicon solar cell, as well as the quality of the screen printing pattern, diffusion process, and printing-sintering process. Therefore, accurate, convenient, and rapid measurement of the contact resistance of crystalline silicon solar cells allows for quick monitoring of the screen printing pattern, diffusion process, and printing-sintering process, enabling targeted improvements.

[0004] Currently, the mainstream method in the industry is to use a contact resistance tester connected to a test probe to test contact resistance. The current test probe mainly consists of two rows of probes and a mounting base. The two rows of probes are parallel and perpendicularly interspersed on the mounting base, with equidistant distribution within each row. The upper end of the probe connects to the tester, and the lower end contacts the metal grid lines on the surface of the crystalline silicon solar cell. However, current test probes in the industry have a fixed spacing, and the spacing between the probes cannot be adjusted. This means that only solar cells with fixed spacing can be tested. Because different companies in the industry use different screen printing patterns for their solar cells, there are solar cells with various grid line spacings. Traditional test probes cannot accurately test the contact resistance of solar cells with such diverse grid line spacings. The disadvantages are: 1) Multiple probes with different spacings need to be customized to match different cell spacings, requiring probe replacement each time, leading to inconvenience; 2) For companies that frequently develop solar cells with different grid line spacings, customizing probes takes time, preventing timely testing of the contact resistance of new cells, significantly increasing time costs and extending the cell development cycle; 3) Each time a different cell spacing is developed, a custom probe needs to be customized to match, significantly increasing costs. Summary of the Invention

[0005] The purpose of this invention is to provide a test probe that is low in cost, easy to use, simple in structure, and allows for easy adjustment of the probe spacing. It can quickly test batteries with different spacings without the need for frequent test probe replacements.

[0006] The technical solution of this utility model is:

[0007] A probe device for testing contact resistance with adjustable probe spacing is characterized in that it includes an insulating sliding base, an insulating fixed base, and a spacing adjusting nut. The spacing adjusting nut passes through the middle of the insulating sliding base and is connected to the middle of the insulating fixed base. The spacing adjusting nut can be rotated to adjust the spacing between the insulating sliding base and the insulating fixed base. A plurality of probe fixing rows are provided between the insulating sliding base and the insulating fixed base. Elastic washers are provided inside or between the probe fixing rows to adjust the spacing between the probe fixing rows. Test probes are inserted into the probe fixing rows and are connected to the connecting slots provided on the insulating fixed base through connecting wires.

[0008] In one embodiment, at least one elastic washer may be provided inside the probe fixing row or between two probe fixing rows, and the elastic washers are all wrapped around the pitch adjusting nut or around the pitch adjusting nut.

[0009] In one embodiment, a scale is provided on the side of an insulated sliding base or an insulated fixed base for measuring the spacing between the probe fixing rows adjusted by the spacing adjusting nut.

[0010] In this device, the main body of the test probe is inserted into the probe fixing row, one end of the test probe is connected to the connection slot through the connecting wire, and the other end of the test probe is used to connect to the grid line of the crystalline silicon cell to test the contact resistance of the crystalline silicon cell.

[0011] The connection slot in this device connects to the test equipment, and the side locking bolts on the insulating mounting base are used to fix the probe device to the test equipment or other fasteners.

[0012] In this device, there are multiple rows of test probes interspersed on the probe fixing row, with two test probes forming a row, and adjacent rows of test probes are staggered.

[0013] In one scheme, there are 8 rows of test probes interspersed on the probe fixed row, and the number of test probes is 16. Every two test probes form a row, and the test probes in adjacent rows are staggered.

[0014] In one scheme, multiple rows of test probes are arranged from the insulating sliding base to the insulating fixed base. The sequence number of the probes is divided into odd-numbered rows and even-numbered rows. The two test probes in each odd-numbered row are arranged in two straight lines along the longitudinal direction, and the two test probes in each even-numbered row are arranged in two straight lines along the longitudinal direction.

[0015] In one embodiment, the insulating fixed base and the spacing adjusting nut are slidably or rotatably connected.

[0016] In one embodiment, the probe fixing row and the spacing adjusting nut are slidably or rotatably connected.

[0017] This invention relates to an adjustable probe spacing contact resistance test probe designed and developed based on the transmission line testing method (TLM). It adopts a four-wire method, namely, two voltage lines and two current lines. A constant current source is applied between the wires through the current probe, and then the voltage value between the wires is measured by the voltage probe. The resistance value between the wires can be calculated according to Ohm's law.

[0018] When the probe of this invention with adjustable probe spacing for testing contact resistance is used to test the contact resistivity of a sample, the testing method includes:

[0019] a) Test the total resistance value corresponding to different gate line spacings; for example, the spacing between two adjacent sub-gate lines (the first and the second) is... L The corresponding total resistance value for testing is R T1 The spacing between the first and third sub-gate lines is 2. L The corresponding total resistance value for testing is R T2 The spacing between the 1st and (n+1)th sub-gate lines is n. L The corresponding total resistance value for testing is R Tn .

[0020] b) Plot different gate line spacings on the x-axis and the corresponding different total resistance values ​​on the y-axis, i.e.: the x-axis is... L 2 L ...n L The vertical axis is R T1 , R T2 ... R Tn ; Plot a scatter plot and perform linear fitting, the fitted function is: The contact resistivity was calculated using a line transmission model.

[0021] In the above scheme, the Line Transmission Model (TLM) formula is:

[0022]

[0023] In the formula, R T The total resistance value tested. L The spacing between the grid lines, R s The sheet resistance of the crystalline silicon substrate is... W The width of the elongated sample. LT The x-axis represents the transmission length. L 2 L ...n L The vertical axis is R T1 , R T2 ... R Tn Linear fitting yielded slopes and intercepts of 1 / 2 and 1 / 2 respectively. k and b ,but ,intercept Contact resistivity ρ c The formula is:

[0024]

[0025] Therefore, the contact resistivity of the passivated contact structure can be obtained.

[0026] The probe developed in this invention, capable of rapidly testing the contact resistance of crystalline silicon solar cell grid lines, has the following advantages:

[0027] 1) No need to customize test probes with multiple spacings, and no need to replace probes, making it easy to use;

[0028] 2) For solar cells with different grid line spacings, the probe spacing can be adjusted to match the cell at will, without waiting for the customization of probes, saving time and costs, and greatly reducing the R&D cycle of new cells;

[0029] 3) No need to customize multiple test probes, greatly saving costs;

[0030] 4) The device is easy to operate, has a simple structure, low cost, and is convenient to use. The probe is easy to replace, and the four-wire connection method makes the test results more accurate. Attached Figure Description

[0031] Figure 1 This is a front view structural diagram of an adjustable probe spacing test contact resistance probe provided by this utility model;

[0032] Figure 2 This is a left-side view of the structure of an adjustable probe spacing test contact resistance probe provided by this utility model;

[0033] Figure 3 This is a top view of a probe with adjustable probe spacing for testing contact resistance provided by this utility model.

[0034] In the diagram, 1-Insulated sliding base; 11-Insulated fixed base; 12-Connecting slot; 2-Side locking bolt; 3-Gap adjusting nut; 31-Scale; 4-Test probe; 41-Probe fixing row; 42-Elastic washer; 43-Connecting wire. Detailed Implementation

[0035] The present invention will be further described below with reference to the accompanying drawings and embodiments, but the scope of protection of the present invention is not limited to the following examples.

[0036] like Figure 1-3 As shown, the probe device for testing contact resistance with adjustable probe spacing of this utility model includes an insulating sliding base 1, an insulating fixed base 11, a connecting slot 12, a spacing adjusting nut 3, a probe fixing row 41, an elastic washer 42, and a connecting wire 43. The spacing adjusting nut 3 passes through the middle of the insulating sliding base 1 and connects to the middle of the insulating fixed base 11. The spacing adjusting nut 3 can be rotated to adjust the spacing between the insulating sliding base 1 and the insulating fixed base 11. The insulating fixed base 11 and the spacing adjusting nut 3 are slidably connected by threads.

[0037] Furthermore, a side locking bolt 2 can be provided on the insulating mounting base 11. This side locking bolt 2 can be configured to securely connect the probe by connecting it to a fixing component or other device. The side locking bolt 2 can also be tightened to fix the probe assembly to the testing equipment. The insulating sliding base 1 and the spacing adjusting nut 3 can be slidably connected by threads or fixedly connected.

[0038] Several probe fixing rows 41 are provided between the insulating sliding base 1 and the insulating fixed base 11. The probe fixing row 41 can be a single row structure, with only one row and only one row of test probes 4 can be inserted. The probe fixing row 41 can also be a multi-row structure, with different rows of a single probe fixing row 41 connected by a spiral structure or by an elastic spacing mechanism. Multiple rows of test probes 4 can be inserted on such a probe fixing row 41.

[0039] The probe fixing row 41 and the spacing adjusting nut 3 can be connected by a threaded sliding connection or by a fixing member. Elastic washers 42 are provided inside the probe fixing row 41 or between the probe fixing rows 41 to adjust the spacing between the probe fixing rows, thereby indirectly adjusting the spacing between the rows of test probes 4 inserted on the probe fixing row 41. There is at least one elastic washer 42, specifically one or more, preferably multiple. The elastic washers 42 can be disposed around the spacing adjusting nut 3. Specifically, the elastic washers 42 can be evenly wrapped around the spacing adjusting nut (3) or evenly wrapped around the spacing adjusting nut 3.

[0040] Test probes 4 are inserted into the probe mounting array 41. The main body of the test probe 4 is inserted into the probe mounting array 41. One end of the test probe 4 is connected to the connection slot 12 provided on the insulating mounting base 11 via the connecting wire 43. The other end of the test probe 4 is used to connect to the grid line of the crystalline silicon cell to test the contact resistance of the crystalline silicon cell. The connection slot 12 is used to connect to the testing equipment.

[0041] There are multiple test probes 4. In one scheme, there are multiple rows of test probes 4 interspersed on the probe fixing row 41, with two test probes 4 forming a row, and adjacent rows of test probes 4 are staggered.

[0042] In one specific embodiment, there are 8 rows of test probes 4 interspersed on the probe fixing row 41, with a total of 16 test probes 4. Each row consists of two test probes 4, and adjacent rows of test probes 4 are staggered. Counting from the insulating sliding base 1 to the insulating fixing base 11, the multiple rows of test probes 4 are sequentially numbered into odd-numbered rows and even-numbered rows. The two test probes 4 in each odd-numbered row are arranged in two straight lines along the longitudinal direction, and the two test probes 4 in each even-numbered row are arranged in two straight lines along the longitudinal direction.

[0043] Each test probe 4 is connected to a connection slot 12 on an insulating base 11 via a connecting wire 43. In one specific embodiment, the body of each test probe 4 is inserted into the probe fixing row 41, with the probe head protruding outwards and the probe tail connected by the connecting wire 43.

[0044] A scale is provided on the side of the insulating sliding base 1 or the insulating fixed base 11. It is used to measure the spacing between the probe fixing rows 41 adjusted by the spacing adjusting nut 3. Specifically, it can adjust the spacing between the probe fixing rows according to the scale by adjusting the spacing adjusting nut 3 clockwise to compress the elastic washer 42 or by adjusting it counterclockwise to loosen the elastic washer 42, thereby further adjusting the spacing between the test probes 4 inserted on the probe fixing row 41.

[0045] In one specific scheme, with Figure 1-3 Taking the probe in the example, this device has 8 rows of parallel probe rows, with 2 probes in each row, for a total of 16 test probes 4. Adjacent rows are staggered, with the two test probes 4 in each odd-numbered row arranged in two straight lines along the longitudinal direction, and the two test probes 4 in each even-numbered row arranged in two straight lines along the longitudinal direction. Because of this staggered arrangement of adjacent rows of probes, in... Figure 1 From an upward-looking angle, four rows of probes can be seen. Figure 2 It can be seen that there are 8 rows of probes, from Figure 3It can be seen that the adjacent rows of probes are staggered. The device uses a four-wire method for testing, with each probe connected to a voltage line and a current line; elastic washers are provided between the probe fixing rows, and the spacing between the probe rows inserted on the probe fixing rows can be adjusted by adjusting the nuts to compress and loosen the elastic washers; the presence of scale lines 31 or scale rulers facilitates the confirmation of probe row spacing; each probe is easy to disassemble and replace; the side locking bolts 2 facilitate fixing and fixed connection with other testing equipment.

[0046] When using the probe with adjustable probe spacing for testing contact resistance, first place the metallized patterned crystalline silicon solar cell on the test platform, connect the probe's connection slot 12 to the test equipment, and tighten the side locking bolt 2 to fix the probe device to the test equipment. Move the probe above the crystalline silicon solar cell, and adjust the spacing adjustment nut 3 by rotating the nut clockwise to compress the elastic washer 42, or by rotating the nut counterclockwise to loosen the elastic washer 42. Adjust the probe row spacing according to the scale so that the heads of each probe 4 are aligned and pressed against the grid lines of the crystalline silicon solar cell. Set the test parameters and start the test equipment to begin the test.

[0047] Test example:

[0048] Place a sample with an H-shaped metallized pattern (excluding the main grid line), 7 mm wide, with a grid line width of 20 μm and a 1 mm interval between adjacent secondary grid lines on the test platform. Connect the probe's connection slot 12 to the test equipment and tighten the side locking bolt 2 to fix the probe device to the test equipment. Move the probe above the test sample and adjust the spacing adjusting nut 3 by rotating the nut clockwise to compress the elastic washer 42 or counterclockwise to loosen the elastic washer 42. Adjust the probe row spacing to 1 mm according to the scale line 31 so that the probe 4 head is aligned and pressed against the grid line of the test sample. Set the test parameters and start the test equipment to begin the test.

[0049] Test methods for samples:

[0050] a) Test the total resistance value corresponding to different gate line spacings; for example, the spacing between two adjacent sub-gate lines (the first and the second) is... L The corresponding total resistance value for testing is R T1 The spacing between the first and third sub-gate lines is 2. L The corresponding total resistance value for testing is R T2 The spacing between the 1st and (n+1)th sub-gate lines is n. L The corresponding total resistance value for testing is R Tn .

[0051] Using different gate line spacings as the x-axis and the corresponding different total resistance values ​​as the y-axis, i.e., the x-axis is... L 2 L ...n L The vertical axis is R T1 , R T2 ... R Tn ; Plot a scatter plot and perform linear fitting, the fitted function is: The contact resistivity was calculated using a line transmission model.

[0052] In the above scheme, the Line Transmission Model (TLM) formula is:

[0053]

[0054] In the formula, R T The total resistance value tested. L The spacing of the gate lines is the spacing in this embodiment. L It is 1 mm. R s The sheet resistance of the crystalline silicon substrate is... W The width of the elongated sample is specified in this embodiment. W It is 7 mm. L T The x-axis represents the transmission length. L 2 L ...n L The vertical axis is R T1 , R T2 ... R Tn Linear fitting yielded slopes and intercepts of 1 / 2 and 1 / 2 respectively. k and b ,but ,intercept Contact resistivity ρ c The formula is:

[0055]

[0056] Therefore, the contact resistivity of the passivated contact structure can be obtained.

[0057] In this embodiment, the linear fitting equation for the collected data is obtained through linear fitting and line transmission model calculation formulas. The calculated contact resistivity is 1.19 mΩ•cm. 2 .

[0058] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A probe device for testing contact resistance with adjustable probe spacing, characterized in that It includes an insulating sliding base (1), an insulating fixed base (11), and a spacing adjustment nut (3). The spacing adjustment nut (3) passes through the middle of the insulating sliding base (1) and is connected to the middle of the insulating fixed base (11). The spacing adjustment nut (3) can be rotated to adjust the spacing between the insulating sliding base (1) and the insulating fixed base (11). A plurality of probe fixing rows (41) are provided between the insulating sliding base (1) and the insulating fixed base (11). Elastic washers (42) are provided inside or between the probe fixing rows (41) to adjust the spacing between the probe fixing rows (41). Test probes (4) are inserted on the probe fixing rows (41). The test probes (4) are connected to the connecting slots (12) provided on the insulating fixed base (11) through connecting wires (43).

2. The probe device for testing contact resistance with adjustable probe spacing according to claim 1, characterized in that At least one elastic washer (42) is provided inside the probe fixing row (41) or between two probe fixing rows (41), and the elastic washer (42) is wrapped around the spacing adjusting nut (3) or around the spacing adjusting nut (3).

3. The probe device for testing contact resistance with adjustable probe spacing according to claim 2, characterized in that A scale is provided on the side of the insulating sliding base (1) or the insulating fixed base (11) for measuring the spacing between the probe fixing rows (41) adjusted by the spacing adjusting nut (3).

4. The probe device for testing contact resistance with adjustable probe spacing according to claim 1, characterized in that The main body of the test probe (4) is inserted into the probe fixing row (41). One end of the test probe (4) is connected to the connection slot (12) through the connecting wire (43). The other end of the test probe (4) is used to connect to the grid line of the crystalline silicon cell to test the contact resistance of the crystalline silicon cell.

5. The probe device for testing contact resistance with adjustable probe spacing according to claim 1, characterized in that The connection slot (12) is connected to the test equipment, and a side locking bolt (2) is provided on the insulating fixing base (11) for fixing the probe device to the test equipment or other fixing parts.

6. The probe device for testing contact resistance with adjustable probe spacing according to claim 1, characterized in that The test probes (4) inserted on the probe fixing row (41) are in multiple rows, with each row consisting of two test probes (4) and the test probes (4) in adjacent rows being staggered.

7. The probe device for testing contact resistance with adjustable probe spacing according to claim 6, characterized in that There are 8 rows of test probes (4) inserted on the probe fixing row (41), and the number of test probes (4) is 16. Every two test probes (4) form a row, and the test probes (4) in adjacent rows are staggered.

8. The probe device for testing contact resistance with adjustable probe spacing according to claim 6, characterized in that The test probes (4) in multiple rows are arranged in two columns along the longitudinal direction, from the insulating sliding base (1) to the insulating fixed base (11). The numbering of the test probes (4) is divided into odd-numbered rows and even-numbered rows. The two test probes (4) in each odd-numbered row are arranged in two columns along the longitudinal direction. The two test probes (4) in each even-numbered row are arranged in two columns along the longitudinal direction.

9. The probe device for testing contact resistance with adjustable probe spacing according to claim 1, characterized in that The insulating fixed base (11) and the spacing adjusting nut (3) are slidably or rotatably connected.

10. The probe device for testing contact resistance with adjustable probe spacing according to claim 1, characterized in that The probe fixing row (41) and the spacing adjusting nut (3) are slidably or rotatably connected.