Optical fiber adapter for wafer polishing apparatus and wafer polishing apparatus

Abstract

This utility model discloses an optical fiber connector for a wafer polishing apparatus and the wafer polishing apparatus itself. The optical fiber connector includes a limiting bushing, a stator structure, a rotor structure, and a lens structure. The axial ends of the limiting bushing are a first end and a second end, respectively. The stator structure includes stator pins and stator optical fibers, and the rotor structure includes rotor pins and rotor optical fibers. The rotor structure and the stator structure are positioned opposite each other along the axial direction of the limiting bushing and spaced apart. Multiple second fiber cores are arranged in a one-to-one correspondence with multiple first fiber cores. The lens structure is spaced between the stator optical fibers and the rotor optical fibers. The lens structure is used to convert the light emitted from the stator optical fibers into a parallel beam and converge it toward the rotor optical fibers, and also to convert the light emitted from the rotor optical fibers into a parallel beam and converge it toward the stator optical fibers. Thus, the rotor and stator optical fibers, after passing through the lens structure, can increase the emitted light spot area, thereby reducing the sensitivity of the optical fiber connector to foreign objects and improving the reliability of the optical fiber connector.

Description

Technical Field

[0001] This utility model relates to the field of wafer polishing equipment technology, and in particular to an optical fiber connector for a wafer polishing device and a wafer polishing device. Background Technology

[0002] During the wafer polishing process, the polishing slurry continuously washes the wafer surface to achieve effective polishing. Simultaneously, the measurement components must monitor the wafer's thickness and flatness in real time to ensure product quality. However, in related technologies, if foreign objects come into contact with the fiber optic connector, it may affect signal transmission between the measurement and processing components, making it impossible to accurately monitor the wafer's thickness and flatness, potentially leading to wafer scrap. Therefore, the reliability of fiber optic connectors needs improvement. Utility Model Content

[0003] This invention aims to solve at least one of the technical problems existing in the prior art. To this end, this invention proposes a fiber optic connector for a wafer polishing apparatus and a wafer polishing apparatus. By incorporating a lens structure, the coaxiality requirement between the rotor fiber and the stator fiber can be reduced. Furthermore, the lens structure increases the emitted light spot area, thereby reducing the sensitivity of the fiber optic connector to foreign objects and improving its reliability.

[0004] According to a first aspect embodiment of the present invention, an optical fiber connector for a wafer polishing apparatus includes: a limiting bushing, a stator structure, a rotor structure, and a lens structure. The axial ends of the limiting bushing are a first end and a second end, respectively. The stator structure includes a stator pin and a stator optical fiber. The stator optical fiber passes through and is fixedly connected to the stator pin. The stator pin passes through and is fixedly connected to the first end. The stator optical fiber includes multiple first fiber cores. The rotor structure includes a rotor pin and a rotor optical fiber. The rotor optical fiber passes through and is fixedly connected to the rotor pin. The rotor pin passes through and is rotatably connected to the second end. The rotor structure and the stator structure are opposite to each other along the axial direction of the limiting bushing and are spaced apart. The rotor optical fiber includes multiple second fiber cores, which are arranged one-to-one with the multiple first fiber cores. The lens structure is embedded in the limiting bushing and spaced between the stator optical fiber and the rotor optical fiber. The lens structure is used to convert the light emitted by the stator optical fiber into a parallel beam and converge it toward the rotor optical fiber, and also to convert the light emitted by the rotor optical fiber into a parallel beam and converge it toward the stator optical fiber.

[0005] According to the present invention, the fiber optic connector for a wafer polishing apparatus has a lens structure that can convert the divergent light emitted by the stator fiber into a parallel beam and converge it toward the rotor fiber. The lens structure can also convert the divergent light emitted by the rotor fiber into a parallel beam and converge it toward the stator fiber, thus maintaining a low divergence angle and reducing energy loss due to diffusion. Simultaneously, the lens structure reduces the coaxiality requirement between the rotor and stator fibers, thereby lowering the manufacturing difficulty of the fiber optic connector. Furthermore, the lens structure increases the emitted light spot area, ensuring that even if foreign objects (such as particles or moisture) exist between the rotor and stator fibers during use, they will not completely block the emitted or received light from the rotor or stator fibers. This reduces the sensitivity of the fiber optic connector to foreign objects and improves its reliability.

[0006] In some embodiments, the lens structure includes a first lens and a second lens spaced apart along the axial direction of the limiting bushing. The first lens is located between the stator fiber and the second lens, the mating end of the stator fiber is located at the focal point of the first lens, and the mating end of the rotor fiber is located at the focal point of the second lens.

[0007] In some embodiments, both the first lens and the second lens are convex lenses.

[0008] In some embodiments, the diameter of the light spot emitted by the stator fiber after exiting through the first lens is greater than or equal to 400 μm, and the diameter of the light spot emitted by the rotor fiber after exiting through the second lens is greater than or equal to 400 μm.

[0009] In some embodiments, the inner diameter of the limiting bushing is greater than or equal to 15 mm.

[0010] In some embodiments, the lens structure is a single piece.

[0011] In some embodiments, there are three or more first and second fiber cores, and the cross-sectional area of ​​both the first and second fiber cores is greater than or equal to 0.2 mm². 2 .

[0012] In some embodiments, the limiting bushing is made of stainless steel.

[0013] In some embodiments, the limiting bushing is made of SUS316.

[0014] A wafer polishing apparatus according to a second aspect of the present invention includes: a polishing component, a driving component, a measuring component, a processing component, and a fiber optic connector for a wafer polishing device according to a first aspect of the present invention. The polishing component includes a rotating disk and a polishing pad. The polishing pad has a polishing surface suitable for polishing a workpiece. The driving component drives the rotating disk to rotate the polishing pad. The measuring component, the fiber optic connector, and the processing component are all disposed on the rotating disk. The measuring component is used to measure the thickness and / or flatness of the workpiece. The fiber optic connector is connected between the measuring component and the processing component. A limiting bushing is vertically arranged, and a rotor structure is located at the lower end of the limiting bushing.

[0015] According to the wafer polishing apparatus of the present invention, the above-mentioned fiber optic connector has good reliability, and therefore the use of the fiber optic connector can improve the reliability of the wafer polishing apparatus.

[0016] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0017] The above and / or additional aspects and advantages of this utility model will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which: Figure 1 This is a schematic diagram of an optical fiber connector according to some embodiments of the present invention; Figure 2 yes Figure 1 A cross-sectional view of the fiber optic connector shown in the image; Figure 3 yes Figure 2 The diagram shows the combination of the stator fiber, rotor fiber, and lens structure. The dashed lines in the diagram represent the optical path. Figure 4 This is a cross-sectional view of an optical fiber connector according to some embodiments of the present invention; Figure 5 yes Figure 4 The diagram shows the combination of the stator fiber, rotor fiber, and lens structure. The dashed lines in the diagram represent the optical path. Figure 6 yes Figure 5 A schematic diagram of the stator fiber shown; Figure 7 yes Figure 1 A schematic diagram of the limiting bushing shown; Figure 8 This is a schematic diagram of an optical fiber connector according to some embodiments of the present invention.

[0018] Figure label: Fiber optic connector 100 Limiting bushing 1, first end 11, second end 12, first cylinder part 13, first mounting part 131, first slot 1311, second cylinder part 14, second mounting part 141, second slot 1411 Stator structure 2, stator ferrule 21, stator optical fiber 22, first fiber core 221 Rotor structure 3, rotor pin 31, rotor optical fiber 32 Lens structure 4, first lens 41, second lens 42, Signal transmission line 51, anti-interference line 52. Detailed Implementation

[0019] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0020] The following disclosure provides numerous different embodiments or examples for implementing various structures of the present invention. To simplify the disclosure, specific examples of components and arrangements are described below. These are merely examples and are not intended to limit the scope of the invention. Furthermore, reference numerals and / or letters may be repeated in different examples. Such repetition is for simplification and clarity and does not in itself indicate a relationship between the various embodiments and / or arrangements discussed. In addition, examples of various specific processes and materials are provided in this invention; however, those skilled in the art will recognize the applicability of other processes and / or the use of other materials.

[0021] Hereinafter, with reference to the accompanying drawings, a fiber optic connector 100 for a wafer polishing apparatus according to a first aspect embodiment of the present invention will be described. Exemplarily, the wafer polishing apparatus includes a measuring component and a processing component, with the fiber optic connector 100 connected between the measuring component and the processing component. The measuring component is used to measure the thickness and / or flatness of a workpiece, and the fiber optic connector 100 is capable of transmitting the measurement data from the measuring component to the processing component, facilitating timely adjustment of the polishing parameters for the workpiece by the operator.

[0022] Please refer to Figures 1-5The fiber optic connector 100 includes: a limiting bushing 1, a stator structure 2, a rotor structure 3, and a lens structure 4. The limiting bushing 1 has a first end 11 and a second end 12 at its two axial ends. The stator structure 2 includes a stator pin 21 and a stator fiber 22. The stator fiber 22 passes through and is fixedly connected to the stator pin 21, which in turn passes through and is fixedly connected to the first end 11. The stator fiber 22 includes multiple first fiber cores 221. The rotor structure 3 includes a rotor pin 31 and a rotor fiber 32. The rotor fiber 32 passes through and is fixedly connected to the rotor pin 31, which in turn passes through and is rotatably connected to the second end 12. The rotor structure 3 and the stator structure 2 are connected along the axial direction of the limiting bushing 1 (e.g., along the axial direction of the limiting bushing 1). Figure 2 The rotor fiber 32 includes multiple second fiber cores, which are arranged in a one-to-one correspondence with multiple first fiber cores 221. The lens structure 4 is embedded in the limiting bushing 1 and is spaced between the stator fiber 22 and the rotor fiber 32. The lens structure 4 is used to convert the light emitted by the stator fiber 22 into a parallel beam and converge it toward the rotor fiber 32.

[0023] As can be seen, the stator fiber 22 is fixed to the stator pin 21, and the stator pin 21 is fixed to the limiting bushing 1, so that the stator structure 2 and the bushing structure are not prone to relative movement, so that the stator fiber 22 can transmit optical signals more stably; the rotor fiber 32 is fixed to the rotor pin 31, and the rotor pin 31 is rotatably connected to the limiting bushing 1, so that the rotor structure 3 and the limiting bushing 1 can rotate relative to each other, so that the rotor fiber 32 can measure different positions of the workpiece.

[0024] It is understandable that when the fiber optic connector 100 is used in a wafer polishing device, the fiber optic connector 100 is in an environment with large vibration. The rotor ferrule 31 and the rotor fiber 32 can rotate relative to the limiting bushing 1, which facilitates the compensation of the influence of external mechanical factors on the fiber optic connection. This helps to prevent fiber damage or connection failure caused by rigid connection and can play a certain role in buffering external stress.

[0025] Furthermore, the lens structure 4 is embedded in the limiting bushing 1, and the lens structure 4 is spaced between the stator fiber 22 and the rotor fiber 32, so that the lens structure 4 can transmit the light emitted by the stator fiber 22 to the rotor fiber 32, and at the same time facilitate the lens structure 4 to transmit the light emitted by the rotor fiber 32 to the stator fiber 22, so that the optical signal can be transmitted between the rotor fiber 32 and the stator fiber 22, and then transmitted to other components (such as the measurement component and / or processing component described later), which facilitates the non-contact transmission of optical signals between the rotor fiber 32 and the stator fiber 22.

[0026] For example, the stator fiber 22 includes multiple first fiber cores 221, and the rotor fiber 32 includes multiple second fiber cores. A portion of the first fiber cores 221 can transmit light to a portion of the second fiber cores to realize the transmission of light emitted by the stator fiber 22 to the rotor fiber 32. Another portion of the first fiber cores 221 can receive light emitted by another portion of the second fiber cores to realize the transmission of emitted light by the rotor fiber 32 to the stator fiber 22.

[0027] The lens structure 4 is used to convert the light emitted by the stator fiber 22 into a parallel beam and converge it toward the rotor fiber 32. In other words, the lens structure 4 can convert the divergent light emitted by the stator fiber 22 into a parallel beam and converge it toward the rotor fiber 32.

[0028] In some examples, the lens structure 4 includes two lenses (e.g., the first lens 41 and the second lens 42 described later) disposed between the rotor fiber 32 and the stator fiber 22. That is, the light emitted from one of the rotor fiber 32 and the stator fiber 22 can be converted into parallel light after passing through one of the adjacent lenses. The parallel light is then converged to the other of the rotor fiber 32 and the stator fiber 22 by the other lens, so that the lens structure 4 is used to convert the light emitted from the stator fiber 22 into a parallel beam and converge it toward the rotor fiber 32.

[0029] In some other examples, the lens structure 4 includes a lens, such as a biconvex lens. When light emitted from one of the rotor fiber 32 and the stator fiber 22 comes into contact with the surface of the corresponding biconvex lens, the light can be parallel inside the biconvex lens. The parallel light then converges to the other of the rotor fiber 32 and the stator fiber 22 through the other surface of the biconvex lens, so that the lens structure 4 is used to convert the light emitted from the stator fiber 22 into a parallel beam and converge toward the rotor fiber 32, and the lens structure 4 is used to convert the light emitted from the rotor fiber 32 into a parallel beam and converge toward the stator fiber 22.

[0030] It is evident that direct transmission of divergent light leads to beam diffusion and energy dispersion, making it difficult for the receiving end to effectively collect the light. This application addresses this by incorporating a lens structure 4 between the stator fiber 22 and the rotor fiber 32, enabling the beam to maintain a low divergence angle, reducing energy loss due to diffusion, and minimizing optical loss. This improves the transmission efficiency of the fiber optic connector 100. Furthermore, direct coupling of divergent light places extremely high demands on the alignment accuracy of the fiber end faces, specifically requiring high coaxiality between the rotor fiber 32 and the stator fiber 22. Even a small offset can significantly reduce coupling efficiency. This application converts the divergent light into parallel light using the lens structure 4, which is then focused onto either the stator fiber 22 or the rotor fiber 32. This allows for greater axial and radial alignment tolerances between the rotor fiber 32 and the stator fiber 22, reducing the manufacturing difficulty of the fiber optic connector 100 and simplifying installation and debugging. Even when the fiber optic connector 100 is subjected to external forces or vibrations during use, the rotor fiber 32 and the stator fiber 22 maintain stable signal transmission. Therefore, by setting the lens structure 4, the coaxiality requirement between the rotor fiber 32 and the stator fiber 22 can be reduced, so that the limiting bushing 1 does not need to excessively limit the rotor fiber 32 radially. This allows the rotor fiber 32 to have a certain gap with the inner peripheral wall of the limiting bushing 1, so that when the rotor fiber 32 rotates relative to the limiting bushing 1, the rotor fiber 32 is less likely to experience significant wear with the limiting bushing 1, which helps to improve the service life of the rotor fiber 32 and thus improve the service life of the fiber optic connector 100.

[0031] Furthermore, this application provides a lens structure 4 between the rotor fiber 32 and the stator fiber 22 to increase the light spot area emitted by the rotor fiber 32 and the stator fiber 22 after passing through the lens structure 4. This allows the rotor fiber 32 and the stator fiber 22 to transmit more data per unit time. Even if there are foreign objects (such as particles, water vapor, etc.) between the rotor fiber optic connector 32 and the stator fiber 22 during use, the foreign objects will not completely block the output or reception of the rotor fiber 32 or the stator light. That is, the foreign objects will not excessively affect the signal transmission between the rotor light and the stator light, thereby reducing the sensitivity of the fiber optic connector 100 to foreign objects, improving the reliability of the fiber optic connector 100, and helping to reduce the scrap rate of wafers and improve the wafer processing yield.

[0032] For example, the wafer polishing apparatus includes a measurement component and a processing component. The fiber optic connector 100 is connected between the measurement component and the processing component. When the wafer polishing apparatus polishes the workpiece, it needs to continuously spray polishing fluid to wash the wafer surface to achieve effective polishing. At this time, some water vapor may come into contact with the fiber optic connector 100. This application provides a lens structure 4 between the rotor fiber 32 and the stator fiber 22 to increase the light spot area emitted by the rotor fiber 32 and the stator fiber 22 after passing through the lens structure 4. Even if there is some water vapor between the rotor fiber 32 and the stator fiber 22, the water vapor will not completely block the rotor fiber 32 or the stator light from being emitted or received, so that the fiber optic connector 100 can stably transmit optical signals between the measurement component and the processing component, which facilitates the improvement of the reliability of the wafer polishing apparatus.

[0033] According to the embodiment of the present invention, the fiber optic connector 100 for a wafer polishing apparatus has a lens structure 4 that can convert the divergent light emitted by the stator fiber 22 into a parallel beam and converge it toward the rotor fiber 32. The lens structure 4 can also convert the divergent light emitted by the rotor fiber 32 into a parallel beam and converge it toward the stator fiber 22, so that the beam can maintain a low divergence angle transmission, reducing energy loss due to diffusion. Simultaneously, the lens structure 4 can reduce the coaxiality requirement between the rotor fiber 32 and the stator fiber 22, thereby reducing the manufacturing difficulty of the fiber optic connector 100. Furthermore, the lens structure 4 increases the emitted light spot area of ​​the rotor fiber 32 and the stator fiber 22. Even if foreign objects (such as particles, water vapor, etc.) exist between the rotor fiber 32 and the stator fiber 22 during use, the foreign objects will not completely block the emitted or received light from the rotor fiber 32 or the stator fiber, thus reducing the sensitivity of the fiber optic connector 100 to foreign objects and improving the reliability of the fiber optic connector 100.

[0034] It is understandable that in wafer polishing equipment, fiber optic connectors are considered spare parts. Due to their high sensitivity to foreign objects, fiber optic connectors are frequently replaced, resulting in time-consuming installation, poor signal feedback / inaccuracy, and potential machine downtime. The fiber optic connector 100 in this embodiment helps extend its service life. In some technologies, fiber optic connectors without lens structures have a service life of 1440 hours, while the fiber optic connector 100 in this application has a service life of up to 12960 hours, and at a lower cost.

[0035] Please refer to Figure 2 and Figure 3In some embodiments, the lens structure 4 includes a first lens 41 and a second lens 42 spaced apart along the axial direction of the limiting bushing 1. The first lens 41 is located between the stator fiber 22 and the second lens 42. The mating end of the stator fiber 22 is located at the focal point of the first lens 41, and the mating end of the rotor fiber 32 is located at the focal point of the second lens 42. It is understood that the mating end refers to the end of the rotor fiber 32 and the stator fiber 22 that emits or receives optical signals.

[0036] As can be seen, the mating end of the stator fiber 22 is located at the focal point of the first lens 41, and the mating end of the rotor fiber 32 is located at the focal point of the second lens 42. This allows the diverging light emitted from the stator fiber 22 to be converted into parallel light by the first lens 41. After contacting the second lens 42, the parallel light converges to the focal point of the second lens 42, i.e., converges to the rotor fiber 32. This achieves the purpose of lens structure 4 in converting the light emitted from the stator fiber 22 into a parallel beam and converging it toward the rotor fiber 32. At the same time, the diverging light emitted from the rotor fiber 32 can be converted into parallel light by the second lens 42. After contacting the first lens 41, the parallel light converges to the focal point of the first lens 41, i.e., converges to the stator fiber 22. This achieves the purpose of lens structure 4 in converting the light emitted from the rotor fiber 32 into a parallel beam and converging it toward the stator fiber 22.

[0037] Therefore, by placing the mating end of the stator fiber 22 at the focal point of the first lens 41 and the mating end of the rotor fiber 32 at the focal point of the second lens 42, the signal transmission between the rotor fiber 32 and the stator fiber 22 can be made more stable and less susceptible to interference from external foreign objects, thereby improving the reliability of the fiber optic connector 100.

[0038] It is understandable that even if there is a certain radial spacing between the rotor fiber 32 and the stator fiber 22, that is, a certain coaxiality deviation between the rotor fiber 32 and the stator fiber 22, as long as the docking end of the stator fiber 22 is located at the focal point of the first lens 41 and the docking end of the rotor fiber 32 is located at the focal point of the second lens 42, it will not affect the convergence of light to the rotor fiber 32 and the stator fiber 22. In other words, it is not easy to affect the optical signal transmission between the rotor fiber 32 and the stator fiber 22, which facilitates the improvement of the reliability of the fiber optic connector 100.

[0039] Please refer to Figure 2 and Figure 3In some embodiments, both the first lens 41 and the second lens 42 are convex lenses, which can convert diverging light from a point light source into parallel light. Exemplarily, both the first lens 41 and the second lens 42 are plano-convex lenses, with the convex surface of the first lens 41 facing the stator fiber 22 and the convex surface of the second lens 42 facing the rotor fiber 32. The planes of the first lens 41 and the second lens 42 are arranged opposite each other, so that the lens structure 4 can convert the light emitted from the stator fiber 22 into a parallel beam and converge it towards the rotor fiber 32, and the lens structure 4 can also convert the light emitted from the rotor fiber 32 into a parallel beam and converge it towards the stator fiber 22. It is evident that the convex lens structure 4 is relatively simple, easy to manufacture, and has a low manufacturing cost, thus reducing the manufacturing cost of the fiber optic connector 100.

[0040] Please refer to Figure 2 and Figure 3 In some embodiments, the diameter of the light spot output after the light emitted by the stator fiber 22 exits through the first lens 41 (e.g., Figure 3 The diameter of the light spot emitted by the rotor fiber 32 after passing through the second lens 42 is greater than or equal to 400μm.

[0041] In related technologies, the stator fiber and rotor fiber are directly coupled, that is, the stator fiber and rotor fiber are directly aligned and spaced together. The light spots emitted from the stator fiber and rotor fiber are the emitted light, so that the light spot area received by the stator fiber and rotor fiber is small, for example, the diameter of the light spot is 10μm. The amount of data transmitted by the stator fiber and rotor fiber per unit time is small. Moreover, if there are foreign objects between the stator fiber and rotor fiber, the foreign objects will block the light spot significantly, thus excessively affecting the signal transmission between the stator fiber and rotor fiber.

[0042] This application, by setting up lens structure 4, ensures that the diameter of the light spot output after the light emitted by the stator fiber 22 exits through the first lens 41 is greater than or equal to 400 μm, and the diameter of the light spot output after the light emitted by the rotor fiber 32 exits through the second lens 42 is also greater than or equal to 400 μm. This allows the stator fiber 22 and rotor fiber 32 to transmit more data per unit time. Even if there are foreign objects between the rotor fiber 32 and stator fiber 22 during use of the fiber optic connector 100, the foreign objects will not completely block the aforementioned light spots. That is, the foreign objects will not excessively affect the signal transmission between the rotor light and the stator light, thereby reducing the sensitivity of the fiber optic connector 100 to foreign objects and improving the reliability of the fiber optic connector 100. At the same time, even if there is a certain coaxiality deviation between the rotor fiber 32 and stator fiber 22, the signal transmission between the rotor fiber 32 and stator fiber 22 is not easily damaged by the aforementioned light spot setting, which helps to reduce the manufacturing difficulty of the fiber optic connector 100.

[0043] For example, as is known in the art, both the first lens 41 and the second lens 42 can convert divergent light into parallel light. The diameter of the light spot output after passing through the first lens 41 is related to parameters such as the divergence angle, wavelength, waist radius, and focal length of the light emitted by the stator fiber 22. Similarly, the diameter of the light spot output after passing through the second lens 42 is related to parameters such as the divergence angle, wavelength, waist radius, and focal length of the light emitted by the rotor fiber 32. The specific relationships are also well known to those skilled in the art. Those skilled in the art can also adjust the diameter of the light spot passing through the first lens 41 and the second lens 42 by adjusting any of the above-mentioned corresponding parameters.

[0044] Please refer to Figure 2 In some embodiments, the inner diameter of the limiting bushing 1 (e.g.) Figure 2 The L3 in the design is greater than or equal to 15mm to ensure sufficient space within the limiting bushing 1 to accommodate the lens structure 4, rotor fiber 32, and stator fiber 22, thereby reducing the manufacturing difficulty of the fiber optic connector 100. Furthermore, the first lens 41 and the second lens 42 reduce the coaxiality requirement between the rotor fiber 32 and the stator fiber 22, eliminating the need for excessive radial limiting of the rotor fiber 32 and stator fiber 22 by the limiting bushing 1. This allows for a larger design of the limiting bushing 1, enabling a certain gap between the rotor fiber 32 and the stator fiber 22 and the inner circumferential wall of the limiting bushing 1. This reduces wear on the rotor fiber 32 during relative rotation with the limiting bushing 1, improving its lifespan and consequently extending the lifespan of the fiber optic connector 100.

[0045] Please refer to Figure 4 and Figure 5 In some embodiments, the lens structure 4 is a single piece. For example, the lens structure 4 is a biconvex lens, comprising two convex surfaces. Taking the axis of the limiting bushing 1 as the left-right direction, the stator fiber 22 is located on the left side of the biconvex lens, and the rotor fiber 32 is located on the right side. When the light emitted from the stator fiber 22 contacts the corresponding left convex surface of the biconvex lens, the light becomes parallel within the biconvex lens. The parallel light then converges to the rotor fiber 32 through the right surface of the biconvex lens. Similarly, when the light emitted from the rotor fiber 32 contacts the corresponding right convex surface of the biconvex lens, the light becomes parallel within the biconvex lens. The parallel light then converges to the stator fiber 22 through the left surface of the biconvex lens. Thus, the lens structure 4 is used to convert the light emitted from the stator fiber 22 into a parallel beam that converges towards the rotor fiber 32, and the lens structure 4 is used to convert the light emitted from the rotor fiber 32 into a parallel beam that converges towards the stator fiber 22. It is evident that by making the lens structure 4 a single piece, the manufacturing and assembly difficulty of the lens structure 4 can be reduced, and the manufacturing efficiency of the fiber optic connector 100 can be improved.

[0046] Please refer to Figure 6 In some embodiments, there are three or more first fiber cores 221 and second fiber cores, and the cross-sectional area of ​​both the first fiber core 221 and the second fiber core is greater than or equal to 0.2 mm². 2 For example, a portion of the first fiber core 221 can be used to emit light, and another portion of the first fiber core 221 can be used to receive light. For example, a portion of the second fiber core can be used to emit light, and another portion of the second fiber core can be used to receive light.

[0047] In related technologies, the cross-sectional area of ​​the first and second fiber cores is 0.1 mm. 2 The first and second fiber cores are relatively thin and have low structural strength. When the first and second fiber cores rotate with the fiber optic connector, they are easily damaged. In harsh working environments (such as water mist, corrosive liquids, etc.), the thinness of the first and second fiber cores can easily cause deviations in the transmitted signal and result in a weaker light spot intensity.

[0048] The cross-sectional area of ​​both the first fiber core 221 and the second fiber core in this application is greater than or equal to 0.2 mm². 2 This design ensures that the first fiber core 221 and the second fiber core have good structural strength. When the first fiber core 221 and the second fiber core rotate with the fiber optic connector 100, the first fiber core 221 and the second fiber core are not easily damaged, which helps to improve the service life of the fiber optic connector 100. Moreover, when the working environment is relatively harsh (such as water mist, corrosive liquid, etc.), the above-mentioned arrangement of the first fiber core 221 and the second fiber core makes it less likely for the first fiber core 221 and the second fiber core to cause deviations in the transmitted signal, and the intensity of the light spot formed can also be more appropriate, which helps to improve the reliability of the fiber optic connector 100.

[0049] For example, the stator fiber 22 includes three first fiber cores 221, each with a cross-sectional area of ​​0.5 mm. 2 For example, the rotor fiber 32 includes three second cores, each with a cross-sectional area of ​​0.5 mm². 2 .

[0050] In some embodiments, the limiting bushing 1 is made of stainless steel. Stainless steel has good structural strength, so that the fiber optic connector 100 is less likely to be damaged when it rubs against other components, thus improving the reliability of the fiber optic connector 100. At the same time, stainless steel has good corrosion resistance, so that the fiber optic connector 100 can be used in different operating environments, thus improving the applicability of the fiber optic connector 100. For example, when the fiber optic connector 100 is used in a wafer polishing apparatus, the polishing fluid has a certain degree of corrosiveness. By making the limiting bushing 1 a stainless steel component, the limiting bushing 1 is less susceptible to corrosion. The limiting bushing 1 can provide stable protection for the rotor fiber 32 and the stator fiber 22, thus improving the reliability of the fiber optic connector 100.

[0051] In some embodiments, the limiting bushing 1 is made of SUS316. In related technologies, the limiting bushing 1 is made of SUS306. Compared with SUS306, SUS316 has better corrosion resistance, which can further improve the ability of the fiber optic connector 100 to work in harsh environments. At the same time, SUS316 has better structural strength, so that when the limiting bushing 1 and the rotor fiber 32 rub against each other, the limiting bushing 1 is less likely to shed a lot of particles, which will not affect the signal transmission between the rotor fiber 32 and the stator fiber 22.

[0052] A wafer polishing apparatus according to a second aspect of the present invention includes: a polishing component, a driving component, a measuring component, a processing component, and a fiber optic connector 100 for wafer polishing equipment according to a first aspect of the present invention. The polishing component includes a rotating disk and a polishing pad. The polishing pad has a polishing surface suitable for polishing a workpiece. The driving component is used to drive the rotating disk to rotate the polishing pad. The measuring component, the fiber optic connector 100, and the processing component are all disposed on the rotating disk. The measuring component is used to measure the thickness of the workpiece and / or measure the flatness of the workpiece. The fiber optic connector 100 is connected between the measuring component and the processing component.

[0053] As can be seen, the drive assembly is used to drive the rotary disk to rotate and drive the polishing pad to rotate, so as to achieve the polishing function of the workpiece; the measuring assembly, the fiber optic connector 100 and the processing assembly are all located on the rotary disk, so that the measuring assembly, the fiber optic connector 100 and the processing assembly can rotate together with the rotary disk, so that the measuring assembly can measure different positions of the workpiece, so that the measuring assembly can measure the workpiece more comprehensively.

[0054] In addition, the fiber optic connector 100 is connected between the measuring component and the processing component. The measuring component is used to measure the thickness and / or flatness of the workpiece. The fiber optic connector 100 can transmit the measurement data of the measuring component to the processing component, so that the operator can obtain the thickness and / or flatness of the workpiece in a timely manner through the processing component, which facilitates the operator to adjust the polishing parameters of the workpiece in a timely manner.

[0055] The limiting bushing 1 is vertically arranged, and the rotor structure 3 is located at the lower end of the limiting bushing 1, that is, the stator structure 2 is located at the upper end of the limiting bushing 1, so that the measuring components and the fiber optic connector 100 can be arranged in the vertical direction, so that the internal layout of the wafer polishing device is more reasonable.

[0056] It is understandable that a wafer polishing apparatus can be a single-sided polishing apparatus, in which case the workpiece can be placed on one side of the polishing pad for single-sided polishing; or, a wafer polishing apparatus can be a double-sided polishing apparatus, which includes two rotating disks and two polishing pads, with the rotating disks and polishing pads corresponding one to one, and the two polishing pads being set opposite each other. In this case, the workpiece can be placed on one of the polishing pads so that both sides of the workpiece contact the two polishing pads respectively for double-sided polishing.

[0057] For example, the measurement component includes a laser thickness gauge. The laser thickness gauge emits a laser beam, which is transmitted to a probe via one of the fiber cores of the fiber optic connector 100. The probe projects the laser beam onto the wafer surface. After reflection from the wafer, the reflected light is received by the probe and then transmitted back to the laser thickness gauge via another fiber core of the fiber optic connector 100. The laser thickness gauge processes the optical signal and converts it into an electrical signal, which is transmitted to a digital board via a cable. The digital board performs preliminary signal processing and then transmits the signal to a processing component via a cable. The processing component may include a control unit and a computer. After receiving the signal, the processing component transmits the thickness measurement data to the computer for analysis. On the other hand, the computer can send control commands to the control unit via a network cable, forming a two-way interaction. At the same time, the control unit can also be connected to a video input via a trigger line for auxiliary functions such as synchronous video monitoring.

[0058] According to the wafer polishing apparatus of the present invention, the above-mentioned fiber optic connector 100 has good reliability, and therefore the use of the fiber optic connector 100 can improve the reliability of the wafer polishing apparatus.

[0059] Please refer to Figure 7 In some embodiments, the limiting bushing 1 includes a first cylindrical portion 13 and a second cylindrical portion 14 arranged sequentially along the axial direction. The diameter of the first cylindrical portion 13 is larger than the diameter of the second cylindrical portion 14. A stator pin 21 passes through and is fixedly connected to the end of the first cylindrical portion 13 away from the second cylindrical portion 14. A portion of the stator optical fiber 22 is located inside the first cylindrical portion 13. A rotor pin 31 passes through and is rotatably connected to the end of the second cylindrical portion 14 away from the first cylindrical portion 13. A portion of the rotor optical fiber 32 is located inside the first cylindrical portion 13. A lens structure 4 is embedded inside the first cylindrical portion 13. As an example, the stator pin 21 is fixed to the first cylindrical portion 13 by fasteners (e.g., screws) or adhesive.

[0060] Furthermore, a first mounting portion 131 is also provided at the connection between the first cylindrical portion 13 and the second cylindrical portion 14. The first mounting portion 131 is a closed ring and has a plurality of first slots 1311 arranged circumferentially. The rotating disk also has a plurality of first buckles. The first buckles and the first slots 1311 are matched one by one to reduce the assembly difficulty of the fiber optic connector 100 and the rotating disk.

[0061] Furthermore, a second mounting portion 141 is also provided at the end of the second cylindrical portion 14 away from the first cylindrical portion 13. The second mounting portion 141 is a closed ring and has a plurality of second slots 1411 arranged circumferentially. The rotating disk also has a plurality of second buckles. The second buckles and the second slots 1411 are matched one-to-one. Combined with the one-to-one matching of the first buckles and the first slots 1311, the optical fiber connector 100 and the rotating disk can be matched more stably, which is conducive to improving the reliability of the wafer polishing device.

[0062] Please refer to Figure 8 In some embodiments, the plurality of first fiber cores 221 include a signal transmission line 51 and an anti-interference line 52. The signal transmission line 51 is used to transmit the measurement signal fed back from the rotor fiber 22 to the processing component. The anti-interference line 52 can reduce the possibility of interference to the signal transmission line 51 during transmission, thereby improving the reliability of the wafer polishing apparatus. The connection method of the anti-interference line 52 is well known to those skilled in the art and will not be described in detail.

[0063] Furthermore, it should be noted that the various specific technical features described in the above specific embodiments can be combined in any suitable manner without contradiction. To avoid unnecessary repetition, this application will not describe the various possible combinations separately. In addition, various different embodiments of this application can also be arbitrarily combined, as long as they do not violate the spirit of this application, they should also be regarded as the content disclosed in this application.

[0064] In the description of this utility model, it should be understood that the terms "center," "lateral," "length," "thickness," "top," "bottom," "inner," "outer," "axial," "radial," and "circumferential," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, features defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more. In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installed," "connected," and "linked" should be interpreted broadly. For example, it can refer to a fixed connection, a detachable connection, or an integral connection; it can refer to a mechanical connection or an electrical connection; it can refer to a direct connection or an indirect connection through an intermediate medium; it can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0065] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0066] Although embodiments of the present invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the claims and their equivalents.

Claims

1. An optical fiber adapter for a wafer polishing apparatus, comprising: include: A limiting bushing, wherein the two axial ends of the limiting bushing are a first end and a second end, respectively; A stator structure, the stator structure including a stator ferrule and a stator optical fiber, the stator optical fiber passing through and fixedly connected to the stator ferrule, the stator ferrule passing through and fixedly connected to the first end, the stator optical fiber including multiple first fiber cores; The rotor structure includes a rotor pin and a rotor optical fiber. The rotor optical fiber is inserted through and fixedly connected to the rotor pin. The rotor pin is inserted through and rotatably connected to the second end. The rotor structure and the stator structure are arranged opposite to each other and spaced apart along the axial direction of the limiting bushing. The rotor optical fiber includes multiple second fiber cores, and the multiple second fiber cores are arranged in a one-to-one correspondence with multiple first fiber cores. A lens structure is embedded in the limiting bushing and spaced between the stator fiber and the rotor fiber. The lens structure is used to convert the light emitted by the stator fiber into a parallel beam and converge it toward the rotor fiber, and to convert the light emitted by the rotor fiber into a parallel beam and converge it toward the stator fiber.

2. The fiber optic terminator for a wafer polishing apparatus of claim 1, wherein, The lens structure includes a first lens and a second lens spaced apart along the axial direction of the limiting bushing. The first lens is located between the stator fiber and the second lens. The mating end of the stator fiber is located at the focal point of the first lens, and the mating end of the rotor fiber is located at the focal point of the second lens.

3. The fiber optic buttler for a wafer polishing apparatus according to claim 2, wherein Both the first lens and the second lens are convex lenses.

4. The fiber optic buttler for wafer polishing apparatus of claim 2, wherein, The diameter of the light spot emitted by the stator fiber after passing through the first lens is greater than or equal to 400 μm, and the diameter of the light spot emitted by the rotor fiber after passing through the second lens is greater than or equal to 400 μm.

5. The fiber optic buttler for wafer polishing apparatus of claim 4, wherein, The inner diameter of the limiting bushing is greater than or equal to 15 mm.

6. The fiber optic terminator for a wafer polishing apparatus of claim 1, wherein, The lens structure is a single piece.

7. The fiber optic terminator for wafer polishing apparatus of claim 1, wherein, Both the first and second fiber cores consist of three or more fibers, and the cross-sectional area of ​​both the first and second fiber cores is greater than or equal to 0.2 mm². 2 .

8. The fiber optic buttler for wafer polishing apparatus of any one of claims 1-7, wherein, The limiting bushing is made of stainless steel.

9. The fiber optic terminator for a wafer polishing apparatus of claim 8, wherein, The limiting bushing is made of SUS316.

10. A wafer polishing apparatus characterized by comprising: The device includes a polishing assembly, a driving assembly, a measuring assembly, a processing assembly, and a fiber optic connector for a wafer polishing apparatus according to any one of claims 1-9. The polishing assembly includes a rotating disk and a polishing pad, the polishing pad having a polishing surface suitable for polishing a workpiece. The driving assembly drives the rotating disk to rotate the polishing pad. The measuring assembly, the fiber optic connector, and the processing assembly are all disposed on the rotating disk. The measuring assembly measures the thickness and / or flatness of the workpiece. The fiber optic connector is connected between the measuring assembly and the processing assembly. The limiting bushing is vertically arranged, and the rotor structure is located at the lower end of the limiting bushing.

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