Automated feed plasma etching machine

Abstract

This application provides an automated feeding plasma etching machine, including a worktable, a feeding assembly, a processing assembly, a gripping assembly, and an unloading assembly. A protective shell covers the top of the worktable, with a feeding port and an unloading port on each of the two sides of the protective shell. The feeding assembly has a first conveyor belt that passes through the feeding port. The processing assembly is located on the worktable, and the gripping assembly has a gripping part that can hold the product from the feeding assembly and move the product to the processing assembly. The unloading assembly receives the product processed by the processing assembly. Compared to manual feeding, the automated feeding plasma etching machine provided by this application avoids the physical labor required for employees to move products back and forth, greatly reducing labor intensity. Compared to robotic arm feeding, the conveyor belt has lower costs, reducing overall operating costs.

Description

Technical Field

[0001] This application belongs to the field of etching equipment technology, specifically relating to an automatic feeding plasma etching machine. Background Technology

[0002] Plasma etching machines are key equipment in semiconductor manufacturing, microelectronics processing, and other fields. They primarily utilize plasma to precisely etch material surfaces to form patterns or structures at the micrometer or even nanometer scale. Their working principle is as follows: In a vacuum chamber, gas is ionized to generate plasma via radio frequency power supply or other means. Active ions and free radicals in the plasma bombard the surface of the material to be etched under the influence of an electric field. Through the combined action of physical bombardment and chemical reaction, specific areas of the material are removed, thereby achieving functions such as circuit pattern transfer and device structure fabrication.

[0003] Existing plasma etching machines have two feeding methods: manual feeding and robotic feeding. Manual feeding refers to employees manually carrying the products to be processed onto the pallet of the processing equipment. This is suitable for small-scale operations, but the back-and-forth carrying by employees is physically demanding and increases labor intensity. Robotic feeding involves a robotic arm grabbing the product and placing it onto the pallet of the processing equipment. Although this saves manpower, the robotic arm has poor flexibility and requires an automated system, resulting in high maintenance costs. If a malfunction occurs, the machine needs to be shut down for repair, affecting normal working efficiency. Utility Model Content

[0004] This application provides an automated feeding plasma etching machine, which aims to solve the technical problems of existing technologies where manual feeding is only suitable for small-scale processing, has low efficiency, affects the labor intensity of employees, and the maintenance cost of using robotic arms for feeding is high, thus affecting costs.

[0005] To achieve the above objectives, the technical solution adopted in this application is as follows: An automatic feeding plasma etching machine is provided, including a worktable, and a feeding component, a processing component, a gripping component and a discharging component arranged sequentially on the worktable according to the product transport path; The workbench is set at two ends along the product transport path, forming an inlet end and an outlet end, respectively. The feeding assembly is provided with a first conveyor belt extending along the product transport path, and the first conveyor belt is located at the feeding end; The processing components are used for etching the product; The gripping assembly has a gripping part that moves along the product transport path, the gripping part being able to clamp the product from the first conveyor belt and move the product to the processing assembly; The discharge assembly is used to receive the products processed by the processing assembly and remove them from the discharge end.

[0006] In one possible implementation, the feeding assembly further includes: Multiple support plates are spaced apart along a direction perpendicular to the product transport path. Each support plate has a drive wheel and multiple driven wheels rotatably connected to its top side. The driven wheels are spaced apart along the product transport path. The drive wheel is rotatably mounted on the bottom side of the support plate. A first conveyor belt is fitted around the outer circumference of the drive wheel and the multiple driven wheels to achieve synchronous rotation of the drive wheel and the multiple driven wheels. Multiple driving components are provided, each corresponding to a support plate. The driving components are installed at the bottom of the corresponding support plate. Each driving component has an output end that meshes with the corresponding transmission wheel, and the output end drives the transmission wheel to rotate.

[0007] In one possible implementation, the feeding assembly further includes a plurality of first slides, each of which corresponds to a support plate. The plurality of first slides are spaced apart on the worktable along the product transport path, and each first slide extends in a direction perpendicular to the product transport path. The support plate is slidably disposed on the top of the corresponding first slide in a direction perpendicular to the product transport path.

[0008] In one possible implementation, the processing component includes: A lifting platform is installed on the workbench in a height-adjustable manner, and the top of the lifting platform is used to support the product; A support frame, mounted on the workbench and located on one side of the lifting platform; and The processing body is installed on the top of the support frame. The processing body has a downward-opening processing cavity. The lifting platform rises and seals the opening to form a sealed processing space.

[0009] In one possible implementation, the top of the workbench is covered with a protective shell, and the two sides of the protective shell are respectively provided with a feed port and a discharge port corresponding to the feed end and the discharge end. A cooling fan is provided at the top of the inner cavity of the protective shell, and the air outlet of the cooling fan faces the processing body.

[0010] In one possible implementation, the crawling component includes: A sliding seat is mounted on the worktable, and the top of the sliding seat has a sliding block that slides along the product transport path; A sliding table, one end of which is connected to the sliding block, slides above the discharge assembly and the lifting platform; A clamping member is slidably disposed on the bottom of the sliding table in a direction perpendicular to the product transport path. The clamping member has a clamping space on its side near the feed end. This clamping space can clamp the product from the first conveyor belt and place the product on the lifting platform as the sliding table moves. A pusher is provided on the side of the clamping member facing the discharge end. The pusher can move along the product transport path with the movement of the sliding table and push the processed product into the discharge assembly.

[0011] In one possible implementation, the clamping element includes: A base is installed at the bottom of the sliding table; A clamping base is slidably and vertically connected to one side of the base; The first clamping plate is slidably connected to the side of the clamping seat near the feed end in the vertical direction; The second clamping plate is located directly below the first clamping plate and is slidably connected to the first conveyor belt. The clamping space is located between the first clamping plate and the second clamping plate. The pushing member is located at the bottom of the second clamping plate near the discharge end.

[0012] In one possible implementation, the second clamping plate includes an integrally formed vertical plate and a horizontal plate, the horizontal plate being disposed on the bottom side of the vertical plate and used to adhere to the lower side of the product.

[0013] In one possible implementation, the automated feeding plasma etching machine further includes a scanning and recognition component, which includes: A fixed base is slidably disposed on the worktable in a direction perpendicular to the product transport path; A second conveyor belt is installed on top of the fixed base and located between the feeding assembly and the processing assembly, and the second conveyor belt extends along the product transport path; A fixing bracket, installed on one side of the fixing base; and The scanning unit is mounted on the top of the fixture and located directly above the second conveyor belt. The scanning unit is used to identify product information.

[0014] In one possible implementation, the upper surface of the lifting platform has two bearing surfaces in a direction perpendicular to the product transport path, and the second conveyor belt can move with the fixed seat in a direction perpendicular to the product transport path to transfer the product to one of the two bearing surfaces.

[0015] The automated feeding plasma etching machine provided in this application, compared with existing technologies, first places the product on the first conveyor belt of the feeding component. The first conveyor belt extends along the product transport direction and passes through the inlet. The gripping part of the gripping component moves along the product transport direction and clamps the product from the first conveyor belt. The gripping component and the processing component are spaced apart, and the gripping part can accurately move the product to the processing component for etching. After processing, the discharge component receives the product and removes it from the discharge port, completing the entire product processing flow. By setting up the feeding component, processing component, gripping component, and discharge component, and making them sequentially connected and working collaboratively along a specific path, a fully automated process of product feeding, scanning and recognition, etching, and discharge is achieved. Compared with manual feeding, it avoids the physical labor consumed by employees carrying products back and forth, greatly reducing labor intensity. Compared with robotic arm feeding, it not only eliminates the need for a complex and costly automated system, but also improves the flexibility and efficiency of the equipment through the rational layout of the components. The conveyor belt is low in cost and easy to replace, reducing the overall operating cost. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 A schematic diagram of the structure of the automated feeding plasma etching machine provided in the embodiments of this application. Figure 1 ; Figure 2 A schematic diagram of the structure of the automated feeding plasma etching machine provided in the embodiments of this application. Figure 2 ; Figure 3 This is a front view of the automatic feeding plasma etching machine used in the embodiments of this application, wherein the protective shell is in cross-section. Figure 4 This is a schematic diagram of the workbench structure used in the embodiments of this application. Figure 1 ; Figure 5 This is a schematic diagram of the workbench structure used in the embodiments of this application. Figure 2 ; Figure 6 This is a front view of the workbench used in the embodiments of this application; Figure 7 This is a schematic diagram of the feeding assembly used in the embodiments of this application. Figure 1 ; Figure 8 This is a schematic diagram of the feeding assembly used in the embodiments of this application. Figure 2 ; Figure 9 This is a schematic diagram of the structure of the scanning and recognition component used in the embodiments of this application. Figure 1 ; Figure 10 This is a schematic diagram of the structure of the scanning and recognition component used in the embodiments of this application. Figure 2 ; Figure 11 This is a schematic diagram of the structure of the grasping component used in the embodiments of this application. Figure 1 ; Figure 12 This is a schematic diagram of the structure of the grasping component used in the embodiments of this application. Figure 2 ; Figure 13 This is a schematic diagram of the gripping component used in the embodiments of this application; Figure 14 This is a front view of the processing components used in the embodiments of this application; Figure 15 This is a schematic diagram of the processing components used in the embodiments of this application.

[0018] Explanation of reference numerals in the attached figures: 1. Workbench; 11. Protective casing; 111. Feed inlet; 112. Discharge outlet; 2. Feeding assembly; 21. First conveyor belt; 22. Support plate; 221. Drive wheel; 222. Driven wheel; 223. Driving component; 23. First slide table; 3. Scanning and recognition component; 31. Mounting base; 32. Scanning unit; 33. Second transmission belt; 34. Mounting frame; 4. Processing components; 41. Lifting platform; 411. Bearing surface; 42. Support frame; 43. Processing body; 44. Cooling fan; 5. Gripping assembly; 51. Sliding seat; 52. Sliding table; 53. Clamping component; 531. Base; 532. Clamping seat; 533. First clamping plate; 534. Second clamping plate; 5341. Vertical plate; 5342. Horizontal plate; 54. Pushing component; 6. Discharge assembly. Detailed Implementation

[0019] To make the technical problems, technical solutions, and beneficial effects to be solved by this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and are not intended to limit the scope of this application.

[0020] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. The following description of at least one exemplary embodiment is actually illustrative only and is in no way intended to limit this application or its application or use. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of this application.

[0021] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0022] It should also be noted that, unless otherwise explicitly specified and limited, terms such as "installation," "connection," "linking," "fixing," and "setting" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0023] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. Additionally, "multiple" and "several" mean two or more, unless otherwise explicitly specified.

[0024] Please refer to the following: Figures 1 to 15The automatic feeding plasma etching machine provided in this application will now be described. The automatic feeding plasma etching machine includes a worktable 1, and a feeding assembly 2, a processing assembly 4, a gripping assembly 5, and an unloading assembly 6 arranged sequentially on the worktable 1 according to the product transport path; the two ends of the worktable 1 along the product transport path respectively form a feeding end and an unloading end; the feeding assembly 2 is provided with a first conveyor belt 21 extending along the product transport path, and the first conveyor belt 21 is located at the feeding end; the processing assembly 4 is used to perform etching processing on the product; the gripping assembly 5 has a gripping part that moves along the product transport path, and the gripping part can clamp the product from the first conveyor belt 21 and move the product to the processing assembly 4; the unloading assembly 6 is used to receive the product processed by the processing assembly 4 and remove it from the unloading end.

[0025] It should be noted that the feed end of the conveyor belt of the previous process is connected to the feed end of the first conveyor belt 21, and the product is directly transported from the conveyor belt of the previous process to the first conveyor belt 21 without manual intervention.

[0026] The automated feeding plasma etching machine provided in this embodiment, compared with the prior art, achieves a fully automated process of product feeding, scanning and recognition, etching, and unloading by setting up a feeding component 2, a scanning and recognition component 3, a processing component 4, a gripping component 5, and an unloading component 6, and having them sequentially connected and working collaboratively along a specific path. Compared with manual feeding, it avoids the physical labor consumed by employees carrying products back and forth, greatly reducing labor intensity; compared with robotic arm feeding, it not only eliminates the need for a complex and costly automated system, but also improves the flexibility and efficiency of the equipment through the rational layout of the components. The conveyor belt is low in cost and easy to replace, reducing the overall operating cost.

[0027] In some embodiments, see Figures 4 to 8 The feeding assembly 2 also includes multiple support plates 22 and multiple driving components 223. The multiple support plates 22 are spaced apart along a direction perpendicular to the product transport path. Each support plate 22 has a drive wheel 221 and multiple driven wheels 222 rotatably connected to its top side. The driven wheels 222 are spaced apart along the product transport path. The drive wheel 221 is rotatably mounted on the bottom side of the support plate 22. A first conveyor belt 21 is fitted around the outer periphery of the drive wheel 221 and the multiple driven wheels 222 to achieve synchronous rotation of the drive wheel 221 and the multiple driven wheels 222. Multiple driving components 223 correspond one-to-one with the support plates 22. The driving components 223 are installed at the bottom of the corresponding support plate 22 and have an output end that meshes with the corresponding drive wheel 221, driving the drive wheel 221 to rotate.

[0028] The feeding assembly 2 provided in this embodiment has a stable structure. The arrangement of multiple support plates 22, transmission wheels 221, driven wheels 222, and driving components 223 makes the transmission of the first conveyor belt 21 more stable and efficient. The driving components 223 correspond one-to-one with the support plates 22, and can individually control the rotation of the transmission wheels 221 on each support plate 22. This allows for flexible adjustment of the conveying speed of different parts of the first conveyor belt 21 according to actual needs, to adapt to the feeding speed requirements of different products, thus improving the applicability of the feeding assembly 2.

[0029] In practical implementation, when the first conveyor belt 21 needs to be driven, the drive component 223 is activated, and its output end meshes with the corresponding transmission wheel 221, driving the transmission wheel 221 to rotate. Since the first conveyor belt 21 is fitted around the outer circumference of the transmission wheel 221 and multiple driven wheels 222, the rotation of the transmission wheel 221 drives the first conveyor belt 21 to move through friction, thereby causing the multiple driven wheels 222 to rotate synchronously. Multiple support plates 22 are spaced apart along a direction perpendicular to the product transport path, serving to support and fix the transmission wheel 221, driven wheels 222, and first conveyor belt 21, ensuring the stability of the entire transmission structure.

[0030] In some embodiments, the feeding assembly 2 and the discharging assembly 6 have the same structure and transport the products in the same direction.

[0031] In some embodiments, see Figures 4 to 8 The feeding assembly 2 also includes multiple first slides 23, each corresponding to a support plate 22. The multiple first slides 23 are spaced apart on the worktable 1 along the product transport path, with each first slide 23 extending perpendicular to the product transport path. The support plate 22 slides perpendicular to the product transport path and is slidably mounted on the top of the corresponding first slide 23. The multiple first slides 23 allow the support plate 22 to slide perpendicular to the product transport path, further increasing the flexibility of the feeding assembly 2. The position of the support plate 22 on the first slide 23 can be flexibly adjusted according to the product size or different processing requirements, thereby adjusting the position of the first conveyor belt 21 for better docking with subsequent scanning and recognition components 3, improving the equipment's adaptability to different production conditions.

[0032] In practice, when it is necessary to adjust the position of the first conveyor belt 21, the operator can adjust the support plate 22. Since the support plate 22 is slidably mounted on the top of the corresponding first slide table 23 in a direction perpendicular to the product transport path, the support plate 22 can slide to a suitable position on the first slide table 23, thereby changing the position of the first conveyor belt 21 on the workbench 1 and completing the adjustment of the distance between the two support plates 22. This allows the two support plates 22 to support products of different sizes, increasing the applicability of the equipment.

[0033] In some embodiments, see Figure 4 , Figure 5 and Figure 15 The processing component 4 includes a lifting platform 41, a support frame 42, and a processing body 43. The lifting platform 41 is mounted on the workbench 1 in a height-adjustable manner, and the top of the lifting platform 41 is used to support the product. The support frame 42 is mounted on the workbench 1 and is located on one side of the lifting platform 41. The processing body 43 is mounted on the top of the support frame 42 and has a downward-opening processing cavity. The lifting platform 41 rises and seals the opening to form a sealed processing space.

[0034] In practice, the bottom of the lifting platform 41 is provided with a lifting drive component 223 to drive the lifting platform 41 to rise. The lifting drive component 223 can be a servo motor or a lifting cylinder, as long as it can control the lifting platform 41 to rise and fall.

[0035] In this embodiment, before etching, the lifting platform 41 descends, and the gripping component 5 places the product on top of the lifting platform 41. Then, the lifting platform 41 rises until it is tightly fitted with the opening of the processing body 43, forming a sealed processing cavity. The processing body 43 is activated, generating plasma to etch the product. After processing, the lifting platform 41 descends, facilitating the removal of the processed product by the unloading component 6. The height-adjustable design of the lifting platform 41 allows for flexible adjustment of the relative position of the product and the processing body 43 during processing, facilitating product placement and removal. When the lifting platform 41 rises to seal the opening of the processing body 43, forming a sealed processing space, it facilitates plasma etching in a relatively sealed environment, improving etching effect and processing accuracy, and reducing interference from external factors on the etching process.

[0036] In some embodiments, see Figures 4 to 6 The worktable 1 is topped with a protective shell 11. The protective shell 11 has an inlet 111 and an outlet 112 on its two sides, corresponding to the feed and discharge ends, respectively. A cooling fan 44 is installed at the top of the inner cavity of the protective shell 11, with its outlet facing the processing body 43. When the etching machine is working, the processing body 43 continuously generates heat. The cooling fan 44 starts simultaneously, drawing in cool air from the outside into the protective shell 11 and blowing it towards the processing body 43 through its outlet. The cool air exchanges heat with the surface of the processing body 43, carrying away heat and achieving heat dissipation. The cooling fan 44, located at the top of the inner cavity of the protective shell 11 with its outlet facing the processing body 43, can promptly dissipate the heat generated by the processing body 43 during operation, preventing overheating from affecting its performance and service life, and ensuring the etching machine can operate stably for extended periods.

[0037] In practice, the protective shell 11 provides a relatively enclosed environment for the entire processing, reducing interference from external factors. At the same time, the positions of the inlet 111 and outlet 112, in conjunction with the layout of each component, ensure the smooth flow of the product.

[0038] In some embodiments, see Figures 11 to 13 The gripping component 5 includes a sliding seat 51, a sliding table 52, a clamping member 53, and a pushing member 54. The sliding seat 51 is mounted on the workbench 1, and the top of the sliding seat 51 has a sliding block that slides along the product transport path; one end of the sliding table 52 is connected to the sliding block, and the sliding table 52 slides above the discharge component 6 and the lifting platform 41; the clamping member 53 is slidably disposed at the bottom of the sliding table 52 in a direction perpendicular to the product transport path, and the side of the clamping member 53 near the feeding end has a clamping space, which can clamp the product from the first conveyor belt 21 and place the product on the lifting platform 41 as the sliding table 52 moves; the pushing member 54 is disposed on the side of the clamping member 53 facing the discharge end, and the pushing member 54 can push the processed product along the product transport path and move it into the discharge component 6 as the sliding table 52 moves.

[0039] In this embodiment, the sliding seat 51 is mounted on the worktable 1, and the sliding block slides along the product transport path on the top of the sliding seat 51, driving the connected sliding table 52 to slide above the discharge assembly 6 and the lifting platform 41. When a product needs to be gripped, the clamping member 53 slides along a direction perpendicular to the product transport path onto the first conveyor belt 21, using the clamping space to hold the product. Then, the sliding table 52 moves, driving the clamping member 53 to place the product on the lifting platform 41. After the product is processed, the pushing member 54 moves with the sliding table 52, pushing the processed product along the product transport path into the receiving position of the discharge assembly 6.

[0040] The gripping component 5 used in this embodiment, with its sliding seat 51, sliding table 52, clamping component 53, and pushing component 54 working together, achieves precise gripping, transfer, and pushing of products. It can accurately grip products from the first conveyor belt 21 and place them onto the processing component 4. After processing, the product can be pushed to the discharge component 6, ensuring stable product transmission throughout the entire processing flow and improving the automation level and work efficiency of the equipment.

[0041] In some embodiments, see Figure 13The clamping member 53 includes a base 531, a clamping seat 532, a first clamping plate 533, and a second clamping plate 534. The base 531 is installed at the bottom of the sliding table 52; the clamping seat 532 is slidably connected to one side of the base 531; the first clamping plate 533 is slidably connected to the side of the clamping seat 532 near the feed end in the vertical direction; the second clamping plate 534 is located directly below the first clamping plate 533 and is slidably connected to the first conveyor belt 21, the clamping space is located between the first clamping plate 533 and the second clamping plate 534, and the pusher 54 is located at the bottom of the second clamping plate 534 near the discharge end.

[0042] In practice, a telescopic motor is installed on the side wall of the base 531. The bottom of the telescopic motor has a telescopic end that can extend and retract vertically. The telescopic end is fixed to the sliding seat 51, which drives the sliding seat 51 to slide on the side of the base 531 facing the feed inlet 111.

[0043] It should be noted that the pusher 54 rises with the clamping seat 532, which can avoid the product already placed on the lifting platform 41, and prevent the product from being pushed down before it is processed.

[0044] In practice, when a product needs to be clamped, the clamping base 532 adjusts its height according to the product's height, positioning the first clamping plate 533 and the second clamping plate 534 in suitable positions. Then, the first clamping plate 533 slides vertically towards the product, engaging with the second clamping plate 534 to clamp the product within the clamping space between them. During product transport, the second clamping plate 534 provides support, preventing the product from falling.

[0045] In this embodiment, the structural design of the base 531, clamping seat 532, first clamping plate 533, and second clamping plate 534 of the clamping member 53 makes the clamping of the product more stable and reliable. The clamping seat 532 is height-adjustable, which can easily adapt to the clamping needs of products of different heights. The clamping space formed between the first clamping plate 533 and the second clamping plate 534 can firmly clamp the product from both the top and bottom, preventing the product from falling during transportation and improving the safety of product transportation.

[0046] In some embodiments, see Figure 13The second clamping plate 534 includes an integrally formed vertical plate 5341 and a horizontal plate 5342. The horizontal plate 5342 is located on the bottom side of the vertical plate 5341 and is used to closely adhere to the lower side of the product. When clamping the product, the horizontal plate 5342 adheres closely to the lower side of the product, and the vertical plate 5341 cooperates with the first clamping plate 533 to restrict the movement of the product from the side. The two work together to ensure that the product is stably clamped in the clamping member 53 and maintains a stable state during subsequent product transfer and processing. The integrally formed structure of the vertical plate 5341 and the horizontal plate 5342 of the second clamping plate 534, with the horizontal plate 5342 closely adhering to the lower side of the product, further enhances the support effect on the product, making the product more stable during clamping and transfer, reducing product shaking and displacement, and helping to improve processing accuracy.

[0047] In practice, the structure of the first clamping plate 533 is the same as that of the second clamping plate 534. They are attached to both sides of the product to clamp the product.

[0048] In some embodiments, a sensor is provided on the top of the first clamping plate 533 to detect whether the bottom of the first clamping plate 533 is in contact with the upper surface of the product.

[0049] In some embodiments, see Figure 4 , Figure 9 and Figure 10 The automated feeding plasma etching machine also includes a scanning and recognition component 3, which comprises a fixed base 31, a second conveyor belt 33, a fixed frame 34, and a scanning unit 32. The fixed base 31 is slidably mounted on the worktable 1 in a direction perpendicular to the product transport path; the second conveyor belt 33 is mounted on top of the fixed base 31 and located between the feeding component 2 and the processing component 4, extending along the product transport path; the fixed frame 34 is mounted on one side of the fixed base 31; the scanning unit 32 is mounted on top of the fixed frame 34 and located directly above the second conveyor belt 33, and is used to identify product information.

[0050] It should be noted that the scanning unit 32 is a device for identifying information on a product, such as a QR code scanning device, an industrial camera combined with OCR technology, or an automatic optical inspection device. The equipment and applications used in the scanning unit 32 are common knowledge in the field; therefore, the specific structure and model of the scanning unit 32 will not be described in detail here.

[0051] In practice, the scanning unit 32 can also slide along the product transport direction to perform a full-view scan of the product.

[0052] In practice, when the position of the feeding component 2 changes or the position of the scanning and recognition component 3 needs to be adjusted according to the product processing flow, the fixed base 31 can slide to a suitable position on the worktable 1 along a direction perpendicular to the product transport path. The product is transferred from the feeding component 2 to the second conveyor belt 33, and the scanning unit 32 is activated to scan and recognize the product information. The recognized information can be transmitted to the control system, providing a basis for setting processing parameters for subsequent processing components 4. The fixed base 31 in the scanning and recognition component 3 can slide along a direction perpendicular to the product transport path, allowing the second conveyor belt 33 to flexibly adjust its position to better receive products from different positions on the feeding component 2, and also facilitating cooperation with the gripping component 5. The fixing frame 34 is installed on one side of the fixed base 31, and the scanning unit 32 is located directly above the second conveyor belt 33, ensuring that the scanning unit 32 can stably and accurately recognize information about the products on the second conveyor belt 33.

[0053] In some embodiments, see Figure 15 The upper surface of the lifting platform 41 has two bearing surfaces 411 formed along the direction perpendicular to the product transport path. The second conveyor belt 33 can move along the fixed seat 31 along the direction perpendicular to the product transport path to transfer the product to one of the two bearing surfaces 411.

[0054] In this embodiment, after the scanning and recognition component 3 identifies the product, the second conveyor belt moves perpendicular to the product transport path according to the instructions of the control system, transferring the product to one of the two carrier surfaces 411. For example, when a product is waiting to be processed or other operations related to the product are being performed on one carrier surface 411, the newly identified product can be transferred to the other carrier surface 411 to avoid mutual interference between products and ensure smooth processing. The arrangement of two carrier surfaces 411 on the lifting platform 41, combined with the function of the second conveyor belt moving perpendicular to the product transport path, provides more options for product transfer. It allows for flexible transfer of products to one of the carrier surfaces 411 according to different processing sequences or equipment operating states, improving equipment efficiency and the ability to handle complex production situations.

[0055] It should be noted that the fixed seat 31 where the second conveyor belt 33 is located slides in a direction perpendicular to the product transport path and is driven by a drive component. The drive component moving the equipment is a conventional technology in this field. It is possible to use a servo motor to move the fixed seat 31 or a telescopic cylinder to move the fixed seat 31.

[0056] The general usage process of this embodiment is as follows: The product is first placed on the first conveyor belt 21 of the feeding component 2. The first conveyor belt 21 extends along the product transport path and passes through the inlet 111, transporting the product to the scanning and recognition component 3. The second conveyor belt 33 of the scanning and recognition component 3 receives the product, and the scanning unit 32 above it identifies the product information so that corresponding parameter settings can be performed based on the product information in subsequent processing. The gripping unit 5 moves along the product transport path and clamps the product from the second conveyor belt 33. The gripping unit 5 and the processing component 4 are spaced apart in a direction perpendicular to the product transport path. The gripping unit can accurately move the product to the processing component 4 for etching. After processing, the unloading component 6 receives the product and removes it from the unloading port 112, completing the entire product processing flow. The protective shell 11 provides a relatively closed environment for the entire processing, reducing interference from external factors. At the same time, the opening positions of the inlet 111 and the unloading port 112, in conjunction with the layout of each component, ensure the smoothness of the product transport path.

[0057] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. An automatic feed plasma etching machine, characterized by, It includes a workbench (1), and a feeding assembly (2), a processing assembly (4), a gripping assembly (5), and a discharging assembly (6) arranged sequentially on the workbench (1) according to the product transportation path; The workbench (1) has a feeding end and a discharging end at its two ends along the product transport path; The feeding assembly (2) is provided with a first conveyor belt (21) extending along the product transport path, and the first conveyor belt (21) is located at the feeding end; The processing component (4) is used to perform etching processing on the product; The gripping assembly (5) has a gripping part that moves along the product transport path, the gripping part being able to clamp the product from the first conveyor belt (21) and move the product to the processing assembly (4); The discharge assembly (6) is used to receive the product processed from the processing assembly (4) and remove it from the discharge end.

2. The automatically fed plasma etching machine of claim 1, wherein, The feeding assembly (2) also includes: Multiple support plates (22) are spaced apart along a direction perpendicular to the product transport path. Each support plate (22) has a drive wheel (221) and multiple driven wheels (222) rotatably connected to its top side. The driven wheels (222) are spaced apart along the product transport path. The drive wheel (221) is rotatably located at the bottom side of the support plate (22). The first conveyor belt (21) is fitted around the outer periphery of the drive wheel (221) and the multiple driven wheels (222) to achieve synchronous rotation of the drive wheel (221) and the multiple driven wheels (222). Multiple drive components (223) are corresponding one-to-one with the support plate (22). The drive component (223) is installed at the bottom of the corresponding support plate (22). The drive component (223) has an output end that meshes with the corresponding transmission wheel (221). The output end drives the transmission wheel (221) to rotate.

3. The automatically fed plasma etching machine of claim 2, wherein, The feeding assembly (2) further includes a plurality of first slides (23), each of which corresponds to a support plate (22). The plurality of first slides (23) are respectively arranged at intervals on the workbench (1) along the product transport path. Each first slide (23) extends in a direction perpendicular to the product transport path. The support plate (22) is slidably disposed on the top of the corresponding first slide (23) in a direction perpendicular to the product transport path.

4. The automatically fed plasma etching machine of claim 1, wherein, The processing component (4) includes: A lifting platform (41) is installed on the workbench (1) in a height-adjustable manner, and the top of the lifting platform (41) is used to support the product; A support frame (42) is mounted on the workbench (1) and located on one side of the lifting platform (41); and The processing body (43) is installed on the top of the support frame (42). The processing body (43) has a downward-opening processing cavity. The lifting platform (41) rises and seals the opening to form a sealed processing space.

5. The automatically fed plasma etching machine of claim 4, wherein, The top of the workbench (1) is covered with a protective shell (11), and the two sides of the protective shell (11) are respectively provided with a feed port (111) and a discharge port (112) corresponding to the feed end and the discharge end; The top of the inner cavity of the protective shell (11) is provided with a heat dissipation fan (44), and the air outlet of the heat dissipation fan (44) faces the processing body (43).

6. The automatically fed plasma etching machine of claim 4, wherein, The crawling component (5) includes: A sliding seat (51) is installed on the worktable (1), and the top of the sliding seat (51) has a sliding block that slides along the product transport path; A sliding table (52) is connected at one end to the sliding block, and the sliding table (52) slides above the discharge assembly (6) and the lifting table (41); A clamping member (53) is slidably disposed at the bottom of the sliding table (52) in a direction perpendicular to the product transport path. The clamping member (53) has a clamping space on its side near the feed end. This clamping space can clamp the product from the first conveyor belt (21) and place the product on the lifting platform (41) as the sliding table (52) moves. A pusher (54) is provided on the side of the clamping member (53) facing the discharge end. The pusher (54) can push the processed product into the discharge assembly (6) along the product transport path as the sliding table (52) moves.

7. The automatically fed plasma etching machine of claim 6, wherein, The clamping member (53) includes: The base (531) is installed at the bottom of the sliding table (52); The clamping seat (532) is slidably connected to one side of the base (531) and can be raised and lowered. The first clamping plate (533) is slidably connected to the side of the clamping seat (532) near the feed end in the vertical direction; The second clamping plate (534) is located directly below the first clamping plate (533) and is slidably connected to the first conveyor belt (21). The clamping space is located between the first clamping plate (533) and the second clamping plate (534). The pusher (54) is located on the bottom of the second clamping plate (534) near the discharge end.

8. The automatically fed plasma etching machine of claim 7, wherein, The second clamping plate (534) includes an integrally formed vertical plate (5341) and a horizontal plate (5342). The horizontal plate (5342) is located on the bottom side of the vertical plate (5341) and is used to fit tightly against the lower side of the product.

9. The automatically fed plasma etching machine of claim 4, wherein, The automated feeding plasma etching machine further includes a scanning and recognition component (3), which includes: A fixed base (31) is slidably disposed on the worktable (1) in a direction perpendicular to the product transport path; A second conveyor belt (33) is installed on top of the fixed base (31) and located between the feeding assembly (2) and the processing assembly (4), and the second conveyor belt (33) extends along the product transport path; A fixing bracket (34) is installed on one side of the fixing base (31); and The scanning unit (32) is mounted on the top of the fixture (34) and located directly above the second conveyor belt (33). The scanning unit (32) is used to identify product information.

10. The automatically fed plasma etching machine of claim 9, wherein, The upper surface of the lifting platform (41) is formed with two bearing surfaces (411) in the direction perpendicular to the product conveying path, and the second conveying belt is movable along with the fixed seat (31) in the direction perpendicular to the product conveying path to transfer the product to one of the two bearing surfaces (411).

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