A special dismounting tool for a single crystal furnace bottom heater
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- CHENGDU ZHONGGUANG RUIHUA TECH CO LTD
- Filing Date
- 2025-09-08
- Publication Date
- 2026-08-07
AI Technical Summary
[0003]在实际操作使用过程中,单晶炉底部加热器通常为不规则形状结构,同时伴随价格昂贵,易碎等特点;长久以来皆由作业人员下至炉台底部,踩踏石英盖板进行手动拆卸;人员不仅承受高温炙烤,同时将近距离吸收炉台扬尘,危及人员人生安全;同时踩踏热场部件,亦会降低零部件使用寿命;为了解决这一现状,并提升作业效率,特此需要研发此工装
1、本实用新型一种单晶炉底部加热器专用拆卸工具通过楔形定位座定位在护筒上,利用楔形定位座上的中心连杆中心线作为夹具中心,通过均布在中心连杆四周的内撑夹持块和桁架机构,通过提升拉环盘实现对单晶炉底部加热器圆环内壁进行支撑夹持,夹持后通过夹具整体提升,实现单晶炉底部加热器拆除,从而达到提高设备维修效率的目的。
Smart Images

Figure CN224601510U_ABST
Abstract
Description
Technical Field
[0001] This utility model belongs to the technical field of auxiliary parts for the production of single crystal furnaces in the photovoltaic industry, and specifically relates to a special disassembly tool for the bottom heater of a single crystal furnace. Background Technology
[0002] A single crystal furnace is a device that melts polycrystalline materials such as polycrystalline silicon in an inert gas environment (mainly nitrogen and helium) using a graphite heater and grows dislocation-free single crystals using the Czochralski method. The single crystal furnace mainly includes a furnace body, electrical control cabinet, heater, power supply cabinet, main vacuum pump, auxiliary chamber vacuum pump, vacuum pipeline, hydraulic system, argon system, and cooling water system.
[0003] In actual operation, the bottom heater of a single crystal furnace is usually an irregularly shaped structure, and is also expensive and fragile. For a long time, workers have had to go down to the bottom of the furnace platform and step on the quartz cover plate to manually disassemble it. Workers not only have to endure the high temperature, but also have to inhale the dust from the furnace platform at close range, endangering their personal safety. At the same time, stepping on the hot zone components will also reduce the service life of the parts. In order to solve this problem and improve work efficiency, this tooling needs to be developed. Summary of the Invention
[0004] This utility model provides a special disassembly tool for the bottom heater of a single crystal furnace. This special disassembly tool for the bottom heater of a single crystal furnace is positioned on the protective cylinder by a wedge-shaped positioning seat. The center line of the central connecting rod on the wedge-shaped positioning seat is used as the center of the clamp. Through the inner support clamping blocks and truss mechanism evenly distributed around the central connecting rod, the inner wall of the ring of the bottom heater of the single crystal furnace is supported and clamped by the lifting ring plate. After clamping, the entire assembly is lifted by the clamp to remove the bottom heater of the single crystal furnace, thereby improving the efficiency of equipment maintenance.
[0005] To solve the above-mentioned technical problems, this utility model provides a special disassembly tool for the bottom heater of a single crystal furnace, including a wedge-shaped positioning seat centrally positioned on the central protective cylinder, a central connecting rod vertically arranged on the center line of the wedge-shaped positioning seat, and a clamp seat fitted around the bottom of the central connecting rod and supported on the wedge-shaped positioning seat. The clamp seat is evenly distributed with inner support clamping blocks and a truss mechanism for driving the inner support clamping blocks to unfold and extend. A transverse tie rod for lifting is provided at the top of the central connecting rod. A pull ring plate is fitted near the transverse tie rod of the central connecting rod and slides up and down along the central connecting rod. A connecting barb for hooking the pull ring plate is provided at the bottom of the transverse tie rod. A connecting rod connects the pull ring plate and the truss mechanism.
[0006] Furthermore, the bottom of the transverse tie rod is provided with a pair of barb mounting seats on both sides of the pull ring plate, and the connecting barbs are configured as a pair and respectively hinged to the barb mounting seats.
[0007] Furthermore, the truss mechanism includes an upper truss and a lower truss. The upper ends of both the upper and lower trusses are hinged to the clamping seat, and their lower ends are hinged to the upper part of the inner support clamping block. The lower end of the lower truss is hinged to the lower part of the inner support clamping block. The lower part of the connecting rod is hinged to the pull ring plate, and its lower part is hinged to the middle of the upper truss near the inner support clamping block.
[0008] Furthermore, the inner support clamping block is set to 4 blocks, and the truss mechanism and connecting rod are set to 4 groups, each corresponding to one of the inner support clamping blocks.
[0009] Furthermore, the inner support clamping block includes a clamping block mounting seat and an L-shaped clamping plate detachably mounted on the clamping block mounting seat. The clamping block mounting seat has a connecting groove for accommodating the upper truss and the lower truss. The upper and lower parts of the connecting groove are provided with an upper hinge shaft I and a lower hinge shaft I for hinged connection of the ends of the upper truss and the lower truss, respectively.
[0010] Furthermore, an L-shaped mounting plate for accommodating the L-shaped clamping plate is provided on the outer side of the clamping block mounting base, and the L-shaped clamping plate is made of PTFE plastic.
[0011] Furthermore, the tie rod is configured as a square plate, and the lower part of the directional plate is provided with a connecting rod connecting fork head that is hinged to the upper truss. The connecting rod connecting fork head is connected to the upper truss through the lower hinge shaft of the connecting rod.
[0012] Furthermore, the fixture seat has four connecting slots I for accommodating the upper and lower trusses. Each connecting slot I is formed by welding a pair of fixing plates, and a reinforcing rib is welded between the middle of adjacent pairs of fixing plates.
[0013] The beneficial effects of this utility model are as follows: 1. This utility model discloses a special disassembly tool for the bottom heater of a single crystal furnace. The tool is positioned on the protective cylinder by a wedge-shaped positioning seat. The center line of the central connecting rod on the wedge-shaped positioning seat is used as the center of the clamp. The inner support clamping blocks and truss mechanism are evenly distributed around the central connecting rod. The lifting ring plate supports and clamps the inner wall of the ring of the bottom heater of the single crystal furnace. After clamping, the entire tool is lifted by the clamp to remove the bottom heater of the single crystal furnace, thereby improving the efficiency of equipment maintenance.
[0014] 2. This utility model provides a special disassembly tool for the bottom heater of a single crystal furnace. It avoids the space of existing parts to determine the installation position; avoids the position of the central support rod to ensure its movement; and covers as much area as possible to improve energy efficiency. The bottom heater of the single crystal furnace is a central ring with S-shaped or serpentine rings on both sides. The installation position is reserved at the end of the outward extension. The overall shape is centrally symmetrical. The main purpose is to remove the central ring. Attached Figure Description
[0015] Figure 1 is a structural schematic diagram of the special disassembly tool for the bottom heater of the single crystal furnace of this utility model; Figure 2 is a schematic diagram of the pull ring disc in the special disassembly tool for the bottom heater of the single crystal furnace of this utility model; Figure 3 is a front view schematic diagram of the clamp seat in the special disassembly tool for the bottom heater of the single crystal furnace of this utility model; Figure 4 is a schematic diagram of the clamp seat in the special disassembly tool for the bottom heater of the single crystal furnace of this utility model.
[0016] Reference numerals: 1-Wedge-shaped positioning seat; 2-Clamping seat; 3-Central connecting rod; 4-Pull ring plate; 5-Connecting barb; 6-Transverse tie rod; 7-Inner support clamping block; 8-Truss mechanism; 9-Connecting rod; 10-Upper hinge seat of connecting rod; 11-Upper hinge shaft of connecting rod; 12-Barb mounting seat; 13-Upper truss; 14-Lower truss; 15-Clamping block mounting seat; 16-Upper hinge shaft; 17-Lower hinge shaft; 18-Upper hinge shaft I; 19-Lower hinge shaft I; 20-Lower hinge shaft of connecting rod; 21-Connecting fork head of connecting rod; 22-L-shaped clamping block; 23-Connecting groove; 24-Fixing plate; 25-Reinforcing rib. Detailed Implementation
[0017] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.
[0018] like Figure 1-4 This is a structural schematic diagram of a special disassembly tool for the bottom heater of a single crystal furnace proposed in this utility model. The special disassembly tool for the bottom heater of a single crystal furnace of this utility model includes a wedge-shaped positioning seat 1 centrally positioned on a central protective cylinder, a central connecting rod 3 vertically arranged on the center line of the wedge-shaped positioning seat 1, and a clamp seat 2 fitted around the bottom of the central connecting rod 3 and supported on the wedge-shaped positioning seat 1. The clamp seat 2 is evenly distributed with inner support clamping blocks 7 and a truss mechanism 8 for driving the inner support clamping blocks 7 to unfold and extend. A transverse tie rod 6 for lifting is provided at the top of the central connecting rod 3. A pull ring plate 4 is fitted on the central connecting rod 3 near the transverse tie rod 6 and slides up and down along the central connecting rod. A connecting barb 5 for hooking the pull ring plate 4 is provided at the bottom of the transverse tie rod 6. A connecting rod 9 connects the pull ring plate 4 and the truss mechanism 8.
[0019] In this embodiment, the wedge-shaped positioning seat 1 is positioned on the protective cylinder. The center line of the central connecting rod 3 on the wedge-shaped positioning seat 1 is used as the center of the clamp. The inner support clamping blocks 7 and the truss mechanism 8, which are evenly distributed around the central connecting rod 3, support and clamp the inner wall of the bottom heater ring of the single crystal furnace through the lifting ring plate 4. After clamping, the entire fixture is lifted to remove the bottom heater of the single crystal furnace, thereby improving the equipment maintenance efficiency.
[0020] In this embodiment, when disassembling down to the bottom heater, the intermediate support rod has been removed, exposing the central protective sleeve, which can be used for tooling positioning. After removing the fixing bolts at both ends of the bottom heater, the bottom heater will be in a detachable state. At this time, the bottom heater is only 47mm away from the bottom quartz cover plate, and the protective sleeve protrudes 16mm from the quartz cover plate. At the same time, the tooling operation dimensions are further refined due to the inner diameter of the ring being ∅350mm.
[0021] Before using this embodiment, manually adjust the position of the connecting hook 5 and place it above the pull ring plate 4; lower the horizontal pull rod 6 to lift and lower the whole thing; the bottom is designed as a wedge-shaped positioning seat 1 with the inner diameter of the protective cylinder, which can adopt a positioning cone structure, so that the center of the fixture coincides with the center of the bottom after placement.
[0022] After confirming that the alignment is complete, continue to lower the horizontal tie rod 6. At this time, the connecting hook 5 will pass over the pull ring plate 4 and be hooked onto the pull ring plate 4. After confirming that the hook is in place, when lifting the horizontal tie rod 6, the pull ring plate 4 will rise together. The pull ring plate 4 will drive the connecting rod 9, the truss mechanism 8 and the inner support clamping block 7 to gradually open until the support plate 5 is completely in contact with the inner wall of the ring. Continue to lift the horizontal tie rod. At this time, the pull ring, clamp and bottom heater are combined to form a fixed structure, thereby realizing the purpose of disassembling the bottom heater.
[0023] In a preferred embodiment, a pair of barb mounting seats 12 are provided at the bottom of the transverse pull rod 6 on both sides of the pull ring plate. The connecting barbs 5 are set as a pair and are respectively hinged to the barb mounting seats 12. In this embodiment, a structure of 3 or 4 hooks can be used. A ring plate is set near the middle of the transverse pull rod 6, and the barb mounting seats 12 are distributed at the bottom of the ring plate, which is conducive to connecting the barbs 5 to the pull ring plate 4.
[0024] In a preferred embodiment, the truss mechanism 8 includes an upper truss 13 and a lower truss 14. The upper ends of both the upper truss 13 and the lower truss 14 are hinged to the clamp seat 2, and their lower ends are hinged to the upper part of the inner support clamping block 7. The lower end of the lower truss 14 is hinged to the lower part of the inner support clamping block 7. The lower part of the connecting rod 9 is hinged to the pull ring plate 4, and its lower part is hinged to the middle part of the upper truss 13 near the inner support clamping block 7. In this embodiment, when the structure is emptied and the connecting hook 5 is not hooked on the pull ring plate 4, the upper truss 13 and the lower truss 14 are in a contracted state under the action of gravity. When the structure is in operation and the connecting hook 5 is hooked on the pull ring plate 4, the upper truss 13 and the lower truss 14 gradually open under the lifting action of the connecting rod until the inner support clamping block 7 completely fits the inner wall of the ring, thereby achieving the purpose of the overall lifting fixture.
[0025] In a preferred embodiment, the inner support clamping block 7 is set to 4 blocks, and the truss mechanism 8 and connecting rod 9 are set to 4 groups and are set one-to-one with the inner support clamping block 4. In this embodiment, the inner support clamping block 7 of the structure can also be set to 3, 5 or 6 blocks, which can be designed according to the diameter of the central protective cylinder.
[0026] In a preferred embodiment, the inner support clamping block 7 includes a clamping block mounting base 15 and an L-shaped clamping plate 22 detachably mounted on the clamping block mounting base. The clamping block mounting base 15 has a connecting groove 23 on its inner side to accommodate the upper truss 13 and the lower truss 14. The upper and lower parts of the connecting groove 23 are provided with an upper hinge shaft I17 and a lower hinge shaft I18 for hinged connection of the ends of the upper and lower trusses, respectively. The clamping block mounting base 15 has an L-shaped mounting plate on its outer side to accommodate the L-shaped clamping plate. The L-shaped clamping plate 22 is made of PTFE plastic. In this embodiment, the use of PTFE plastic plate helps to avoid excessive stress on the central casing, which could lead to deformation.
[0027] In a preferred embodiment, the tie rod 9 is configured as a square plate, and a connecting rod fork 21 is provided at the lower part of the directional plate and is hinged to the upper truss 13. The connecting rod fork 21 is connected to the upper truss through the lower hinge shaft of the connecting rod.
[0028] In a preferred embodiment, the clamp base 2 has four connecting slots I for accommodating the upper and lower trusses. Each connecting slot I is formed by welding a pair of fixing plates 24. A reinforcing rib 25 is welded between the middle of adjacent pairs of fixing plates 24. In this embodiment, the clamp material cost is low, the structure is simple, and the construction is convenient.
[0029] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.
Claims
1. A special disassembly tool for the bottom heater of a single crystal furnace, characterized in that: The device includes a wedge-shaped positioning seat centrally positioned on the central casing, a central connecting rod vertically arranged on the center line of the wedge-shaped positioning seat, and a clamp seat fitted around the bottom of the central connecting rod and supported on the wedge-shaped positioning seat. The clamp seat is surrounded by internal support clamping blocks and a truss mechanism for driving the internal support clamping blocks to unfold and extend. A transverse tie rod for lifting is provided at the top of the central connecting rod. A pull ring plate is fitted on the central connecting rod near the transverse tie rod and slides up and down along the central connecting rod. A connecting barb for hooking the pull ring plate is provided at the bottom of the transverse tie rod. A connecting rod connects the pull ring plate and the truss mechanism.
2. The special disassembly tool for the bottom heater of a single crystal furnace according to claim 1, characterized in that: The bottom of the transverse tie rod is provided with a pair of barb mounting seats on both sides of the pull ring plate. The connecting barbs are set as a pair and are respectively hinged to the barb mounting seats.
3. The special disassembly tool for the bottom heater of a single crystal furnace according to claim 2, characterized in that: The truss mechanism includes an upper truss and a lower truss. The upper ends of both the upper and lower trusses are hinged to the clamping seat, and their lower ends are hinged to the upper part of the inner support clamping block. The lower end of the lower truss is hinged to the lower part of the inner support clamping block. The lower part of the connecting rod is hinged to the pull ring plate, and its lower part is hinged to the middle of the upper truss near the inner support clamping block.
4. A special disassembly tool for the bottom heater of a single crystal furnace according to claim 3, characterized in that: The internal support clamping blocks are set to 4 pieces, and the truss mechanism and connecting rods are set to 4 groups, each corresponding to one of the internal support clamping blocks.
5. A special disassembly tool for the bottom heater of a single crystal furnace according to claim 4, characterized in that: The inner support clamping block includes a clamping block mounting base and an L-shaped clamping plate detachably mounted on the clamping block mounting base. The inner side of the clamping block mounting base is provided with a connecting groove for accommodating the upper truss and the lower truss. The upper part and the lower part of the connecting groove are provided with an upper hinge shaft I and a lower hinge shaft I, respectively, for hinged connection of the ends of the upper truss and the lower truss.
6. A special disassembly tool for the bottom heater of a single crystal furnace according to claim 5, characterized in that: An L-shaped mounting plate for accommodating an L-shaped clamping plate is provided on the outer side of the clamping block mounting base. The L-shaped clamping plate is made of PTFE plastic.
7. A special disassembly tool for the bottom heater of a single crystal furnace according to claim 5, characterized in that: The tie rod is configured as a square plate, and the lower part of the square plate is provided with a connecting rod connecting fork head that is hinged to the upper truss. The connecting rod connecting fork head is connected to the upper truss through the lower hinge shaft of the connecting rod.
8. A special disassembly tool for the bottom heater of a single crystal furnace according to claim 1, characterized in that: The fixture base has four connecting slots I for accommodating the upper and lower trusses. Each connecting slot I is formed by welding a pair of fixing plates, and a reinforcing rib is welded between the middle of adjacent pairs of fixing plates.