Coating tail gas recycling system

Abstract

The utility model discloses the field of photovoltaic manufacturing, disclose a kind of coating tail gas recycling system.The system includes recovery device, pulse device and plating boat equipment, recovery device extracts coating equipment tail gas by first power piece, is stored in storage tank after filtering by first filter piece, pulse device connects storage tank and plating boat equipment, pulse delivery is used again to tail gas in storage tank to plating boat equipment, wherein, when oxygen measuring sensor detects that tail gas oxygen content is overproof, control valve guides tail gas to combustion furnace, otherwise it is stored in storage tank;When pressure sensor detects that storage tank pressure exceeds preset value, control valve exhaust pressure reduction.Visible, implementation this system can realize the recycling of coating tail gas in plating boat process, simultaneously utilize pulse device to solve the equipment jam problem in tail gas delivery process, and have production safety and resource economy.

Description

Technical Field

[0001] This application relates to the field of photovoltaic manufacturing, and in particular to a coating exhaust gas recovery and reuse system. Background Technology

[0002] In the coating process of the photovoltaic industry, special gases such as silane and ammonia are required. After coating, coating exhaust gases are usually generated. In order to recover the coating exhaust gases, liquefaction separation technology is often used to separate these special gases. This separation method not only has harsh process conditions (silane gas usually needs to be cooled to -112℃ (its boiling point at normal pressure) to liquefy), but also has high equipment construction costs and consumes a lot of electricity during operation, which is not conducive to cost control. Utility Model Content

[0003] This application discloses a coating exhaust gas recovery and reuse system, which can realize the targeted recovery and reuse of special gases in coating exhaust gas, improve the utilization rate of special gases, and has both process adaptability and environmental and economic benefits.

[0004] To achieve the above objectives, this application discloses a coating exhaust gas recovery and reuse system, comprising:

[0005] A recovery device includes a first power unit, a first filter element, and a storage tank. The first power unit is configured to be connected to a coating equipment via a pipeline to pump the exhaust gas to be recovered in the coating equipment. The first filter element is connected to the storage tank and the pipeline of the first power unit. The first filter element is used to filter the exhaust gas to be recovered pumped by the first power unit. The storage tank is used to store the filtered exhaust gas to be recovered.

[0006] A pulse device, wherein the pulse device is connected to the storage tank via a conduit;

[0007] The pulse device is also connected to the plating equipment via a pipeline to deliver the exhaust gas to be recovered from the storage tank to the plating equipment.

[0008] As an optional implementation, the recycling device further includes a first control valve, which includes a first interface, a second interface, and a third interface. The first interface is connected to the first filter element, the second interface is connected to the storage tank, and the third interface is connected to the combustion furnace.

[0009] The first filter element is equipped with an oxygen measurement sensor, which is used to detect the oxygen content of the exhaust gas to be recovered entering the first filter element;

[0010] The first control valve is used to control the third interface to open when the oxygen measurement sensor detects that the oxygen content of the exhaust gas to be recovered is greater than or equal to a preset content, so as to transmit the exhaust gas to be recovered in the first filter to the combustion furnace.

[0011] The first control valve is also used to control the second interface to open when the oxygen measurement sensor detects that the oxygen content of the exhaust gas to be recovered is less than a preset content, so as to transfer the exhaust gas to be recovered in the first filter to the storage tank.

[0012] By installing a first control valve and an oxygen measurement sensor in the recovery device, when the oxygen measurement sensor detects that the oxygen content of the exhaust gas to be recovered is greater than or equal to a preset content, the first control valve controls the third interface to open, directly transmitting the exhaust gas to the combustion furnace. This avoids safety hazards caused by excessive oxygen content. When the oxygen content is less than the preset content, the second interface is opened, allowing the exhaust gas to enter the storage tank. Therefore, the coating exhaust gas recovery and reuse system of this application can automatically treat the exhaust gas according to its oxygen content, thereby avoiding potential dangerous accidents due to oxygen content issues and ensuring the stable operation of the system.

[0013] As an optional implementation, the recovery device further includes a second filter element, which is connected in a pipe between the storage tank and the pulse device. The second filter element is used to filter the exhaust gas to be recovered flowing out of the storage tank so that the filtered exhaust gas to be recovered enters the pulse device.

[0014] By installing a second filter between the storage tank and the pulse device, the exhaust gas flowing out of the storage tank is filtered again to further remove impurities. After two filtrations, the exhaust gas entering the pulse device and plating equipment contains fewer impurities, thereby reducing the impact of impurities on the pulse device and plating equipment, ensuring their normal operation, and improving the quality and stability of the plating process.

[0015] As an optional implementation, the recycling device further includes a second control valve, which includes a fourth interface, a fifth interface, and a sixth interface. The fourth interface is connected to the storage tank, the fifth interface is connected to the second filter element, and the sixth interface is connected to the combustion furnace.

[0016] The storage tank is equipped with a pressure sensor, which is used to detect the gas pressure entering the storage tank.

[0017] The second control valve is used to control the sixth interface to open when the pressure sensor detects that the gas pressure in the storage tank is greater than or equal to a preset value, so as to transfer the exhaust gas to be recovered in the storage tank to the combustion furnace;

[0018] The second control valve is also used to control the fifth interface to open when the pressure sensor detects that the gas pressure in the storage tank is less than a preset content, so as to transfer the exhaust gas to be recovered in the storage tank to the second filter element.

[0019] By incorporating a second control valve and a pressure sensor, when the pressure sensor detects that the gas pressure inside the storage tank is greater than or equal to a preset pressure, the second control valve opens the sixth port to transfer some of the exhaust gas to the combustion furnace, preventing excessive pressure inside the storage tank and ensuring its safety. When the pressure is less than the preset pressure, the fifth port opens, allowing the exhaust gas to enter the second filter element. This method effectively controls the gas pressure inside the storage tank, preventing safety issues caused by abnormal pressure, ensuring the structural safety of the storage tank and the stable operation of the recovery system, while also reducing equipment maintenance costs due to abnormal pressure.

[0020] As an optional implementation, the second filter element is of the same type as the first filter element.

[0021] This approach facilitates standardized management and maintenance of the filter components, reducing system maintenance costs. Furthermore, using identical filter components ensures consistent filtration standards for impurities in the exhaust gas, guaranteeing stable exhaust gas quality entering the plating equipment and improving the stability and consistency of the plating process.

[0022] As an optional implementation, the pulse device includes a pulse generator, a first delivery pipe and a second delivery pipe, the pulse generator being connected to the second control valve through the first delivery pipe, and the pulse generator also being connected to the plating equipment through the second delivery pipe.

[0023] Compared to methods such as direct pumping via pipelines or pumps, this pulse delivery method utilizes periodic pulse pressure output from a pulse generator. Through periodic changes in airflow velocity (high-speed periods drive dust movement, while stagnant periods allow dust to settle), dust particles in the exhaust gas are less likely to accumulate continuously within the flow meter or pipeline. This prevents flow meter blockage caused by small amounts of dust in the exhaust gas, ensuring a stable gas delivery to the boat plating equipment. The stable airflow provides favorable process conditions for boat plating, improving product quality stability and reducing process adjustments and equipment failures caused by airflow issues.

[0024] As an optional implementation, the plating boat equipment is provided with a first inlet and a second inlet. The first inlet pipe is connected to the pulse device, and the second inlet is used to connect to an external gas supply source. The plating boat equipment is provided with a gas concentration detector, which is used to detect the concentration of the exhaust gas to be recovered in the plating boat equipment. The second inlet is used to connect to the gas supply source when the concentration of the exhaust gas to be recovered in the plating boat equipment is lower than a preset concentration, so as to replenish the gas to the plating boat equipment.

[0025] This design enables the boat plating equipment to automatically replenish gas according to the exhaust gas concentration, ensuring the stability of gas concentration in the boat plating process, improving the adaptability of the boat plating process to different working conditions, ensuring the quality and effect of the boat plating process, and enabling the system to meet the needs of different boat plating processes.

[0026] As an optional implementation, the coating exhaust gas recovery and reuse system further includes a second power unit, which is connected by a pipeline to the coating boat equipment and the combustion furnace. The second power unit is used to pump the gas discharged from the coating boat equipment into the combustion furnace.

[0027] By installing a second power unit in the coating exhaust gas recovery and reuse system, the gas discharged from the boat coating equipment is directly pumped into the combustion furnace, achieving effective treatment of the exhaust gas from the boat coating equipment and avoiding environmental pollution caused by direct gas emission. This makes the exhaust gas recovery and reuse system more energy-efficient and environmentally friendly.

[0028] As an optional implementation, the coating exhaust gas recovery and reuse system includes a control device, which is electrically connected to the first power component, the pulse device, and the coating boat equipment. The control device is used to control the operation of the first power component, the pulse device, and the coating boat equipment.

[0029] By electrically connecting the control equipment with the first power component, the pulse device, and the coating boat equipment, the entire coating exhaust gas recovery and reuse system can be automatically controlled. According to different working conditions and needs, the operating status of each device can be precisely controlled, which improves the system's operating efficiency and intelligence, reduces manual intervention, lowers labor costs, and also improves the system's stability and reliability.

[0030] As an optional implementation, the first power component is also connected to the combustion furnace via a pipeline, and the coating exhaust gas recovery and reuse system has a working state and a non-working state.

[0031] In the operating state, the control device controls the first power component to start so as to pump the exhaust gas to be recovered to the first filter element;

[0032] In the non-operating state, the control device controls the first power component to start pumping inert gas to the combustion furnace.

[0033] The first power unit is also connected to the combustion furnace via piping. The system has both operating and non-operating states. In the operating state, the exhaust gas to be recovered is pumped to the first filter element. In the non-operating state, inert gas is pumped to the combustion furnace. The inert gas has stable chemical properties and can effectively remove residual combustible exhaust gas from the system, preventing its accumulation and reducing safety risks such as explosions, thus ensuring the safety of the system and the surrounding environment. Furthermore, this gas delivery arrangement under different operating states allows the system to flexibly adapt to different working conditions, improving the safety and reliability of system operation and ensuring the more stable and efficient operation of the entire coating exhaust gas recovery and reuse system.

[0034] Compared with the prior art, the beneficial effects of this application are as follows:

[0035] This application provides a coating exhaust gas recovery and reuse system. The exhaust gas to be recovered from the coating equipment is pumped by a first power component, filtered by a first filter element, and stored in a storage tank. During the operation of the coating boat equipment, the exhaust gas in the storage tank can be transported to the coating boat equipment via a pulse device, thereby enabling the exhaust gas to be reused. This improves the utilization rate of special gases and combines process adaptability with environmental and economic benefits. Furthermore, using a pulse device for exhaust gas transport avoids gas flow fluctuations during the transport process, further improving the operational reliability and safety of the coating exhaust gas recovery and reuse system. Attached Figure Description

[0036] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0037] Figure 1 This is a schematic diagram of a coating exhaust gas recovery and reuse system disclosed in an embodiment of this application;

[0038] Figure 2 This is another structural schematic diagram of a coating exhaust gas recovery and reuse system disclosed in the embodiments of this application;

[0039] Figure 3 This is another structural schematic diagram of a coating exhaust gas recovery and reuse system disclosed in the embodiments of this application.

[0040] Explanation of reference numerals in the attached figures:

[0041] A coating exhaust gas recovery and reuse system-100;

[0042] Recovery device-1; First power unit-10; First filter element-11; Storage tank-12; First control valve-13; First interface-131; Second interface-132; Third interface-133; Oxygen measuring sensor-14; Second filter element-15; Second control valve-16; Fourth interface-161; Fifth interface-162; Sixth interface-163; Pressure sensor-17; Coating equipment-18;

[0043] Pulse device-2; Pulse generator-20; First delivery pipe-21; Second delivery pipe-22;

[0044] Boat plating equipment -3; First inlet -30; Second inlet -31; Gas concentration detector -32;

[0045] Second power component-4; control equipment-5; combustion furnace-6. Detailed Implementation

[0046] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0047] In this application, the terms "upper," "lower," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are primarily for the purpose of better describing this application and its embodiments, and are not intended to limit the indicated device, element, or component to having a specific orientation, or to be constructed and operated in a specific orientation.

[0048] Furthermore, in addition to indicating location or positional relationship, some of the aforementioned terms may also have other meanings. For example, the term "above" may also be used in some cases to indicate a certain dependency or connection relationship. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0049] Furthermore, the terms "installation," "setting," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral structure; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium, or an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0050] Furthermore, the terms "first," "second," etc., are primarily used to distinguish different devices, elements, or components (which may be the same or different in specific type and construction), and are not intended to indicate or imply the relative importance or quantity of the indicated devices, elements, or components. Unless otherwise stated, "a plurality of" means two or more.

[0051] In the photovoltaic industry, some special gases (such as a mixture of silane, ammonia and nitrogen) can be used in a variety of processes, such as low-pressure chemical vapor deposition, HJT (amorphous silicon thin film heterojunction cell) amorphous silicon thin film deposition and PERC (Passivated Emitter and Rear Cell) cell passivation layer preparation. However, the use of special gases and the treatment of their exhaust gases face many challenges.

[0052] In coating processes, such as the PECVD coating process in photovoltaic cell production, a mixture of silane, ammonia, and nitrogen reacts in a plasma environment to deposit a silicon nitride antireflective film on the silicon wafer surface. Due to limitations in gas-phase reaction conversion rates, the utilization rate of these special gases is only about 5%-8%. Direct incineration of the exhaust gas would result in a waste of resources. While liquefaction methods could be used to recover the exhaust gas, the process conditions are extremely demanding, and the equipment construction and operating costs are very high, resulting in a very low return on investment.

[0053] The inventors discovered that a special gas is also required in the boat plating process of a boat plating machine. If the special gas in the exhaust gas generated in the coating process can be applied to the boat plating process, the recycling rate of the exhaust gas in the coating process will be greatly improved.

[0054] In view of this, this application proposes a coating exhaust gas recovery and reuse system, which aims to achieve efficient recovery of exhaust gas and secondary utilization of special gases, reduce production costs, improve resource utilization, simplify the recovery process, and reduce environmental impact.

[0055] The technical solution of this application will be further described below with reference to specific embodiments and accompanying drawings.

[0056] Please see Figures 1 to 3This application provides a coating exhaust gas recovery and reuse system 100, comprising: a recovery device 1, a pulse device 2, and a coating boat equipment 3. The recovery device 1 includes a first power component 10, a first filter element 11, and a storage tank 12. The first power component 10 is configured to be pipe-connected to the coating boat equipment 18 to pump the exhaust gas to be recovered from the coating boat equipment 18. The first filter element 11 is pipe-connected to the storage tank 12 and the first power component 10, and is used to filter the exhaust gas to be recovered pumped by the first power component 10. The storage tank 12 is used to store the filtered exhaust gas to be recovered. The pulse device 2 is pipe-connected to the storage tank 12. The pulse device 2 is also pipe-connected to the coating boat equipment 3 to transport the exhaust gas to be recovered from the storage tank 12 to the coating boat equipment 3.

[0057] Understandably, the first power component 10 can be a vacuum pump, which is connected to the exhaust gas outlet of the coating equipment 18 via a pipeline, and is used to pump the exhaust gas to be recovered generated in the coating process. The main components of the exhaust gas to be recovered are silane and ammonia, and may also contain silicon nitride dust, oxygen, etc.

[0058] It is understood that the first filter element 11 can be a membrane gas filter, which is connected to the first power element 10 and the storage tank 12. The filter membrane pore size inside can specifically filter silicon nitride dust in the exhaust gas and use the molecular sieving principle to intercept large molecular gases such as nitrogen, allowing small molecular gases such as silane and ammonia to pass through. The filtered exhaust gas enters the storage tank 12 for temporary storage.

[0059] In this embodiment, the pulse device 2 is connected to the storage tank 12 and the plating boat equipment 3 via a pipeline, and can deliver the exhaust gas in the storage tank 12 to the plating boat equipment 3 in a pulsed form. Specifically, the pulse device 2 converts the continuous airflow into a pulsed airflow through periodic airflow regulation, avoiding airflow fluctuations caused by silicon nitride dust in the exhaust gas clogging the flow meter, and ensuring that the exhaust gas is stably delivered to the plating boat equipment 3. The plating boat equipment 3 is connected to the pulse device 2 via a pipeline. It requires a mixed gas of silane and ammonia in the plating process, which is consistent with the exhaust gas composition of the coating process. Therefore, it can receive the exhaust gas to be recovered from the storage tank 12 for depositing a silicon nitride protective layer on the silicon wafer surface.

[0060] The coating exhaust gas recovery and reuse system disclosed in this application effectively extracts exhaust gas through a first power component 10. After being filtered by a membrane gas filter to remove impurities such as silicon nitride dust and nitrogen, the exhaust gas is temporarily stored in a storage tank 12 and then stably delivered to the coating boat equipment 3 via a pulse device 2, thus realizing the recovery and reuse of coating exhaust gas. This system avoids the waste of special gas resources caused by direct combustion of exhaust gas, improves the utilization rate of special gas in the back coating process through secondary utilization, and solves the problem of gas flow fluctuation by means of pulse delivery. This makes the recovered exhaust gas suitable for the process requirements of the coating boat equipment 3, combining process adaptability and environmental protection and economy, and requires no complex equipment with low modification costs.

[0061] In some embodiments, such as Figures 1 to 3 As shown, the coating exhaust gas recovery and reuse system includes a control device 5, which is electrically connected to the first power unit 10, the pulse device 2, and the coating boat equipment 3. The control device 5 is used to control the operation of the first power unit 10, the pulse device 2, and the coating boat equipment 3.

[0062] In this way, through control device 5, the entire coating exhaust gas recovery and reuse system can be automatically controlled. Based on different operating conditions and needs, the operating status of each device can be precisely controlled, improving the system's operating efficiency and intelligence, reducing manual intervention and labor costs, and significantly decreasing the frequency of equipment inspections. Simultaneously, the fault self-diagnosis function quickly locates anomalies, shortening downtime. This integrated control method not only improves the stability and reliability of system operation but also further optimizes the utilization rate of special gases through precise parameter adjustment, significantly enhancing the intelligence and process adaptability of the entire recovery and reuse system.

[0063] It is understandable that the control device could be, for example, an electrical control box or an electrical control board.

[0064] In some embodiments, such as Figures 1 to 3 As shown, the recycling device 1 also includes a first control valve 13, which includes a first interface 131, a second interface 132 and a third interface 133. The first interface 131 is connected to the first filter element 11, the second interface 132 is connected to the storage tank 12 and the third interface 133 is connected to the combustion furnace 6.

[0065] The first filter element 11 is equipped with an oxygen measuring sensor 14, which is used to detect the oxygen content of the exhaust gas to be recovered entering the first filter element 11. The first control valve 13 is used to control the third interface 133 to open when the oxygen measuring sensor 14 detects that the oxygen content of the exhaust gas to be recovered is greater than or equal to a preset content, so as to transmit the exhaust gas to be recovered in the first filter element 11 to the combustion furnace 6. The first control valve 13 is also used to control the second interface 132 to open when the oxygen measuring sensor 14 detects that the oxygen content of the exhaust gas to be recovered is less than a preset content, so as to transmit the exhaust gas to be recovered in the first filter element 11 to the storage tank 12.

[0066] Understandably, the first control valve 13 can be a three-way solenoid valve, controlling the opening and closing of different ports via electrical signals. The oxygen measurement sensor 14 can be an electrochemical sensor, capable of quickly and accurately detecting the oxygen concentration in the exhaust gas. When the exhaust gas to be recovered generated in the coating process enters the first filter element 11, if the oxygen measurement sensor 14 detects that the oxygen content exceeds the standard, it indicates that air may be mixed in the exhaust gas, posing a risk of explosion due to the mixing of flammable gas and oxygen. At this time, the first control valve 13 switches to the third port 133, sending the exhaust gas to the combustion furnace 6 for harmless treatment; if the oxygen content does not exceed the standard, it indicates that the exhaust gas composition meets the recovery requirements, and the first control valve 13 switches to the second port 132, allowing the exhaust gas to enter the storage tank 12 for subsequent use.

[0067] By coordinating the work of the oxygen measurement sensor 14 and the first control valve 13, the flow direction can be automatically adjusted according to the oxygen content in the exhaust gas, avoiding safety hazards caused by excessive oxygen content and improving the safety and reliability of the system operation. At the same time, by promptly treating exhaust gas that does not meet the recovery conditions, the stable operation of the storage tank 12 and subsequent equipment is ensured, reducing the risk of equipment failure due to abnormal gas composition.

[0068] Understandably, this preset content can be set according to actual conditions, for example, the oxygen content of the mixed exhaust gas can be less than or equal to 10 milligrams per liter.

[0069] In some embodiments, such as Figures 1 to 3 As shown, the recovery device 1 also includes a second filter element 15, which is connected in a pipe between the storage tank 12 and the pulse device 2. The second filter element 15 is used to filter the exhaust gas to be recovered flowing out of the storage tank 12 so that the filtered exhaust gas to be recovered enters the pulse device 2.

[0070] Specifically, during system operation, the first filter element 11 performs initial filtration of the exhaust gas, removing most of the silicon nitride dust and nitrogen. However, the gas in the storage tank 12 may experience slight dust settling or an increase in nitrogen partial pressure due to settling. The second filter element 15 further purifies the gas, preventing pulse frequency instability in the pulse generator 20 caused by impurity accumulation, and also preventing dust blockage of the gas distributor in the boat plating equipment 3. This dual filtration reduces the impurity content of the exhaust gas entering the boat plating equipment 3 to a certain range, while also reducing the maintenance frequency of the pulse device 2.

[0071] In some embodiments, such as Figures 1 to 3 As shown, the second filter element 15 is the same type of filter element as the first filter element 11.

[0072] Understandably, the second filter element 15 can adopt the same membrane gas filter structure as the first filter element 11. When the exhaust gas in the storage tank 12 flows into the second filter element 15 through the pipeline, the filter membrane intercepts residual silicon nitride dust particles through the sieving effect and further separates nitrogen molecules that may be present in the exhaust gas, ensuring that the dust content in the gas entering the pulse device 2 is less than a preset value. This design can prevent dust from clogging the airflow channel of the pulse device 2, while reducing the impact of nitrogen on the gas ratio in the boat plating process.

[0073] Furthermore, using the same filter element simplifies equipment management processes. Since both filter elements have the same specifications and interface dimensions, spare parts can be managed in a standardized manner, reducing the variety of inventory. For example, when a filter element needs to be replaced, maintenance personnel do not need to distinguish between the first filter element and the second filter element 15; they can directly use the same model of filter element, reducing the risk of operational errors.

[0074] In some embodiments, such as Figures 1 to 3 As shown, the recycling device 1 also includes a second control valve 16, which includes a fourth port 161, a fifth port 162 and a sixth port 163. The fourth port 161 is connected to the storage tank 12, the fifth port 162 is connected to the second filter element 15, and the sixth port 163 is connected to the combustion furnace 6.

[0075] The storage tank 12 is equipped with a pressure sensor 17, which is used to detect the gas pressure entering the storage tank 12. The second control valve 16 is used to control the sixth interface 163 to open when the pressure sensor 17 detects that the gas pressure in the storage tank 12 is greater than or equal to a preset pressure, so as to transfer the exhaust gas to be recovered in the storage tank 12 to the combustion furnace 6; the second control valve 16 is also used to control the fifth interface 162 to open when the pressure sensor 17 detects that the gas pressure in the storage tank 12 is less than the preset pressure, so as to transfer the exhaust gas to be recovered in the storage tank 12 to the second filter element 15.

[0076] It is understandable that the second control valve 16 can be a three-way solenoid valve structure, whose valve core is driven by an electrical signal to switch the interface connection state.

[0077] Understandably, the preset pressure value can be set according to the design pressure resistance parameters of the storage tank 12. When the pressure sensor 17 detects that the gas pressure inside the tank is greater than or equal to the preset pressure, the control device controls the sixth interface 163 to open. At this time, part of the exhaust gas in the storage tank 12 is transported to the combustion furnace 6 for combustion treatment through the pipeline of the sixth interface 163. When the pressure is less than the preset pressure, the control device controls the fifth interface 162 to open, and the exhaust gas enters the second filter element 15 for secondary filtration through the fifth interface 162. In addition, to ensure the accuracy of pressure detection, the range of the pressure sensor 17 needs to cover the pressure range of the storage tank 12 during normal operation, and its pressure tap is located at the top of the storage tank 12 to avoid liquid or dust deposition affecting the detection results. Through the control of the pressure sensor 17 and the second control valve 16, the gas pressure inside the storage tank 12 is automatically regulated, avoiding safety problems caused by abnormal pressure in the storage tank 12 and ensuring the stable operation of the recovery system. At the same time, this mechanism can reduce equipment failures caused by pressure fluctuations, ensure the normal operation of the pulse device 2 and the filter element, and reduce system maintenance costs.

[0078] In some embodiments, such as Figures 1 to 3 As shown, the pulse device 2 includes a pulse generator 20, a first delivery pipe 21 and a second delivery pipe 22. The pulse generator 20 is connected to the second control valve 16 through the first delivery pipe 21, and the pulse generator 20 is also connected to the plating equipment 3 through the second delivery pipe 22.

[0079] Understandably, the pulse generator 20 has a built-in electrically controlled pulse valve, which converts continuous airflow into pulsed airflow by periodically opening and closing the valve. Its operating frequency can be adjusted according to the requirements of the plating process.

[0080] Understandably, both the first conveying pipe 21 and the second conveying pipe 22 are made of stainless steel with polished inner walls to reduce dust adhesion. The outer diameter of the pipes is designed according to the exhaust gas flow rate and is equipped with an insulation layer to maintain a stable exhaust gas temperature. When the exhaust gas after secondary filtration enters the pulse generator 20, the electrically controlled pulse valve opens and closes at a set frequency, causing the gas to enter the plating equipment 3 in a pulsed form through the second conveying pipe 22. This conveying method utilizes pulse kinetic energy to drive the trace dust in the exhaust gas through the pipes, avoiding the blockage problem caused by dust deposition in the pipes. In addition, the stable airflow reduces the risk of pipe blockage in the plating equipment 3, extends the equipment maintenance cycle, improves equipment utilization, and reduces operation and maintenance costs while improving product quality.

[0081] In some embodiments, such as Figures 1 to 3As shown, the plating boat equipment 3 is provided with a first inlet 30 and a second inlet 31. The first inlet 30 is connected to the pulse device 2, and the second inlet 31 is used to connect to an external gas supply source. The plating boat equipment 3 is provided with a gas concentration detector 32, which is used to detect the concentration of the tail gas to be recovered in the plating boat equipment 3. The second inlet 31 is used to connect to the gas supply source when the concentration of the tail gas to be recovered in the plating boat equipment 3 is lower than the preset concentration, so as to replenish the gas to the plating boat equipment 3.

[0082] Specifically, the recovered tail gas is introduced into the plating boat equipment 3 via the first inlet 30 in a pulsed manner through the pulse device 2. As the reaction proceeds, the concentrations of silane and ammonia in the recovered tail gas gradually decrease. When the gas concentration detector 32 detects that the concentration has dropped to a certain value, the control device triggers the opening of the second inlet 31, thereby replenishing the plating boat equipment with silane and ammonia in a preset ratio from the second inlet, ensuring a stable concentration of the reaction gases. This design allows the plating boat equipment 3 to both reduce costs by using recovered tail gas and flexibly adapt to different process parameters by supplementing with fresh gas, avoiding unstable coating quality caused by fluctuations in the concentration of recovered tail gas.

[0083] The dynamic adjustment of gas concentration in the boat plating process is achieved through the coordinated operation of the first inlet 30, the second inlet 31, and the gas concentration detector 32. Simultaneously, the system's adaptability to different processes allows the equipment to accommodate various boat plating requirements, reducing downtime for adjustments due to process switching. Furthermore, in the event of a malfunction in the recovery system, gas can be introduced into the boat plating equipment 3 through the second inlet 31, ensuring production continuity and reducing the risk of downtime.

[0084] In some embodiments, such as Figures 1 to 3 As shown, the coating exhaust gas recovery and reuse system also includes a second power unit 4. The second power unit 4 is connected to the plating boat equipment 3 and the combustion furnace 6 by a pipeline. The second power unit 4 is used to pump the gas discharged from the plating boat equipment 3 into the combustion furnace 6.

[0085] Understandably, after the plating equipment 3 completes the coating process, the control system opens the exhaust valve of the plating equipment 3, and the remaining exhaust gas enters the combustion furnace 6 under the suction action of the second power component 4. This achieves effective treatment of the exhaust gas from the plating equipment 3, avoiding direct emission of these gases that would cause environmental pollution and resource waste, further improving the environmental friendliness and resource utilization of the system, and perfecting the function of the entire exhaust gas recovery and reuse system.

[0086] In some embodiments, such as Figures 1 to 3 As shown, the first power component 10 is also connected to the combustion furnace 6 by a pipeline, and the coating exhaust gas recovery and reuse system has a working state and a non-working state.

[0087] When in operation, the control device 5 controls the first power unit 10 to start pumping the exhaust gas to be recovered to the first filter element 11; when not in operation, the control device 5 controls the first power unit 10 to start pumping inert gas to the combustion furnace 6.

[0088] Specifically, in the operating state, when the coating equipment 18 begins to generate exhaust gas, the control device 5 sends a start signal to the first power unit 10 and opens the pipeline valve leading to the first filter element 11. The first power unit 10 pumps the exhaust gas to be recovered (mainly containing silane and ammonia) generated in the coating process through the first filter element 11, removing dust and nitrogen before storing it in the storage tank 12. At this time, the valve leading to the combustion furnace 6 is closed, ensuring that the exhaust gas enters the recovery process. In the non-operating state, such as during the shutdown maintenance or process change of the coating equipment 18, the control device 5 triggers the first power unit 10 to switch operating modes. At this time, the system introduces an inert gas, such as nitrogen, through pipelines. The first power unit 10 pumps the inert gas through the entire recovery system pipeline and opens the valve leading to the combustion furnace 6. The inert gas purging process can effectively remove residual silane and ammonia in the system, preventing these combustible gases from accumulating in the pipeline and forming an explosive mixture. When inert gas is purged at a certain flow rate to remove residual combustible exhaust gas from the system and carried into the combustion furnace 6 for harmless treatment, it can be ensured that the concentration of residual exhaust gas in the pipeline is reduced to below the safe threshold.

[0089] In this way, gas delivery under two different operating conditions can be achieved using the same power pump, avoiding the cost of setting up an additional purging pump. At the same time, this automated switching mechanism allows the system to flexibly adapt to different operating conditions of the coating equipment 18, reducing manual intervention and improving the safety and reliability of system operation.

[0090] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. A coating tail gas recycling system, characterized in that, include: A recovery device includes a first power unit, a first filter element, and a storage tank. The first power unit is configured to be connected to a coating equipment via a pipeline to pump the exhaust gas to be recovered in the coating equipment. The first filter element is connected to the storage tank and the pipeline of the first power unit. The first filter element is used to filter the exhaust gas to be recovered pumped by the first power unit. The storage tank is used to store the filtered exhaust gas to be recovered. A pulse device, wherein the pulse device is connected to the storage tank via a conduit; The pulse device is also connected to the plating equipment via a pipeline to deliver the exhaust gas to be recovered from the storage tank to the plating equipment.

2. The coating exhaust gas recovery and reuse system according to claim 1, characterized in that, The recycling device further includes a first control valve, which includes a first interface, a second interface, and a third interface. The first interface pipe is connected to the first filter element, the second interface pipe is connected to the storage tank, and the third interface pipe is connected to the combustion furnace. The first filter element is equipped with an oxygen measurement sensor, which is used to detect the oxygen content of the exhaust gas to be recovered entering the first filter element; The first control valve is used to control the third interface to open when the oxygen measurement sensor detects that the oxygen content of the exhaust gas to be recovered is greater than or equal to a preset content, so as to transmit the exhaust gas to be recovered in the first filter to the combustion furnace. The first control valve is also used to control the second interface to open when the oxygen measurement sensor detects that the oxygen content of the exhaust gas to be recovered is less than a preset content, so as to transfer the exhaust gas to be recovered in the first filter to the storage tank.

3. The coating exhaust gas recovery and reuse system according to claim 1, characterized in that, The recycling device also includes: The second filter element is connected between the storage tank and the pulse device. The second filter element is used to filter the exhaust gas to be recovered flowing out of the storage tank so that the filtered exhaust gas to be recovered enters the pulse device.

4. The coating exhaust gas recovery and reuse system according to claim 3, characterized in that, The recycling device further includes a second control valve, which includes a fourth interface, a fifth interface, and a sixth interface. The fourth interface is connected to the storage tank, the fifth interface is connected to the second filter element, and the sixth interface is connected to the combustion furnace. The storage tank is equipped with a pressure sensor, which is used to detect the gas pressure entering the storage tank. The second control valve is used to control the sixth interface to open when the pressure sensor detects that the gas pressure in the storage tank is greater than or equal to a preset pressure, so as to transfer the exhaust gas to be recovered in the storage tank to the combustion furnace; The second control valve is also used to control the fifth interface to open when the pressure sensor detects that the gas pressure in the storage tank is less than a preset value, so as to transfer the exhaust gas to be recovered in the storage tank to the second filter element.

5. The coating exhaust gas recovery and reuse system according to claim 4, characterized in that, The second filter element is the same type of filter element as the first filter element.

6. The coating exhaust gas recovery and reuse system according to claim 4, characterized in that, The pulse device includes a pulse generator, a first delivery pipe, and a second delivery pipe. The pulse generator is connected to the second control valve through the first delivery pipe, and the pulse generator is also connected to the plating equipment through the second delivery pipe.

7. The coating exhaust gas recovery and reuse system according to any one of claims 1-6, characterized in that, The plating boat equipment is provided with a first inlet and a second inlet. The first inlet pipe is connected to the pulse device, and the second inlet is used to connect to an external gas supply source. The plating boat equipment is provided with a gas concentration detector, which is used to detect the concentration of the exhaust gas to be recovered in the plating boat equipment. The second inlet is used to connect to the gas supply source when the concentration of the exhaust gas to be recovered in the plating boat equipment is lower than a preset concentration, so as to replenish the gas to the plating boat equipment.

8. The coating exhaust gas recovery and reuse system according to claim 7, characterized in that, The coating exhaust gas recovery and reuse system also includes a second power component, which is connected to the coating boat equipment and the combustion furnace via a pipeline. The second power component is used to pump the gas discharged from the coating boat equipment into the combustion furnace.

9. The coating exhaust gas recovery and reuse system according to any one of claims 1-6, characterized in that, The coating exhaust gas recovery and reuse system includes a control device, which is electrically connected to the first power component, the pulse device, and the coating boat equipment. The control device is used to control the operation of the first power component, the pulse device, and the coating boat equipment.

10. The coating exhaust gas recovery and reuse system according to claim 9, characterized in that, The first power component is also connected to the combustion furnace via a pipeline, and the coating exhaust gas recovery and reuse system has a working state and a non-working state; In the operating state, the control device controls the first power component to start so as to pump the exhaust gas to be recovered to the first filter element; In the non-operating state, the control device controls the first power component to start pumping inert gas to the combustion furnace.

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