Vacuum sputtering machine convenient for maintenance

Abstract

The utility model provides a kind of vacuum sputtering machine convenient to overhaul, including vacuum sputtering machine, overhaul cover body, turnover push rod assembly, by being provided with the overhaul cover body of multiple-angle overturning and lifting above vacuum sputtering machine, and by turnover push rod assembly realizes the automatic overturning and positioning lock of cover body, can effectively solve the problem that cover body is difficult to disassemble in traditional overhaul mode, inconvenient operation and big security risk;Nitrogen spring is used as driving device, hinged in the specific stress position of lifting arm, significantly reduce the output torque required by driving device, improve the stability and smoothness of overturning process;The overall stiffness is enhanced by reinforcing rib plate, further improve the structural reliability when cover body is opened and supported.And be provided with elastic self-locking type fixed bolt, bearing structure and wear-resistant bushing, both improve the convenience and safety when cover body is fixed, effectively reduce the wear between moving parts, prolong the overall service life of device.

Description

Technical Field

[0001] This utility model relates to the field of coating technology, and more specifically, to a vacuum sputtering machine that is easy to maintain. Background Technology

[0002] Vacuum sputtering equipment is widely used in high-tech fields such as electronics, semiconductors, and optics, primarily for depositing metal or compound thin films on substrate surfaces. Existing vacuum sputtering equipment typically employs a sealed vacuum chamber for the coating process. Due to the numerous internal components and complex structure of vacuum sputtering equipment, internal cleaning, maintenance, or repairs are often required after a period of use.

[0003] Existing vacuum sputtering machines typically connect the access cover to the machine using bolts or traditional hinges. Maintenance often requires manual removal of the cover and unscrewing of the bolts. This method is not only time-consuming and labor-intensive, but also prone to safety hazards such as uncontrolled cover tilting angles or accidental falls. Furthermore, traditional cover opening mechanisms usually only offer a single angle, failing to allow for flexible adjustment of the tilting angle to accommodate different maintenance positions, further reducing the convenience and efficiency of equipment maintenance.

[0004] Therefore, there is an urgent need to develop a vacuum sputtering machine maintenance cover flipping device that is more secure and stable in structure, easy to use, and capable of multi-angle adjustment, so as to effectively improve the maintenance efficiency, operational safety and service life of the equipment. Utility Model Content

[0005] In view of this, in order to solve the above problems, this utility model proposes a vacuum sputtering machine maintenance cover flipping device with a safer and more stable structure, convenient use and multi-angle adjustment.

[0006] A vacuum sputtering machine 1 for easy maintenance is characterized by: a vacuum sputtering machine 1, a maintenance cover 2, and a flip-up push rod assembly 3. The maintenance cover 2 is located on top of the vacuum sputtering machine 1. The maintenance cover 2 is flipped and lifted by the flip-up push rod assembly 3. The flip-up push rod assembly 3 includes a drive device 31, a lifting connection assembly 32, and a mounting base 33. The mounting base 33 is located on top of the vacuum sputtering machine 1. Both ends of the top of the mounting base 33 are rotating shaft mounting parts 331. At least two adjustment and fixing holes 332 are spaced apart below each rotating shaft mounting part 331. One end of the lifting connection assembly 32 is connected to the maintenance cover 2. The lifting connection assembly 32 is connected to a rotating part 321 and a fixing part 322 at the other end. The rotating part 321 of the lifting connection assembly 32 is rotatably connected to the rotating shaft mounting part 331. A driving device 31 is provided below the lifting connection assembly 32. One end of the driving device 31 is connected to the bottom of the mounting base 33, and the other end of the driving device 31 is connected to the bottom of the lifting connection assembly 32. The driving device 31 drives the lifting connection assembly 32 to flip and lift, so that when the lifting connection assembly 32 rotates and its fixing part 322 is aligned with the corresponding adjustment fixing hole 332, the fixing part 322 is connected to the adjustment fixing hole 332 by the fixing pin 34.

[0007] Furthermore, the lifting connection assembly 32 consists of two lifting arms 35, with adjacent lifting arms 35 arranged in parallel. One end of each lifting arm 35 is connected to the inspection cover 2, and the other end of each lifting arm 35 is provided with a corresponding rotating part 321 and a fixing part 322 in sequence. The rotating part 321 of each lifting arm 35 is rotatably connected to the rotating shaft mounting part 331, and each fixing part 322 is connected to the corresponding adjusting fixing hole 332 through a fixing pin 34.

[0008] Furthermore, the inspection cover 2 is tilted and lifted by the vacuum sputtering machine 1 via the flip push rod assembly 3 at an angle of 30° or 60°.

[0009] In some embodiments, at least two reinforcing ribs 36 are spaced apart between adjacent lifting arms 35 to enhance structural strength.

[0010] In some embodiments, the drive device 31 is a nitrogen spring, one end of which is hinged to the bottom or near the bottom of the mounting base 33, and the other end is hinged to the middle or lower part of the adjusting rotating arm 353 of the lifting connection assembly 32.

[0011] In some embodiments, the fixing pin 34 is an elastic self-locking fixing pin 34, which is provided with a backstop slot and a release button, enabling quick locking and unlocking with one hand.

[0012] In some embodiments, the rotating part 321 of the lifting connection assembly 32 is provided with a bearing structure 37, which is disposed between the rotating part 321 and the rotating shaft mounting part 331, so as to reduce the motion resistance when the lifting connection assembly 32 is flipped and improve the stability of the flipping action.

[0013] In some embodiments, the inner side of the adjustment and fixing hole 332 of the mounting base 33 is provided with a wear-resistant bushing to reduce the wear of the fixing pin 34 during frequent insertion and removal, thereby improving the structural durability.

[0014] The beneficial effects of this utility model are as follows: This utility model proposes a vacuum sputtering machine base that is easy to maintain, including a vacuum sputtering machine base 1, a maintenance cover 2, and a flip-up push rod assembly 3. By setting a maintenance cover that can be flipped and lifted at multiple angles above the vacuum sputtering machine base, and by using the flip-up push rod assembly to achieve automatic flipping and positioning locking of the cover, it can effectively solve the problems of difficult disassembly and assembly, inconvenient operation, and significant safety hazards in traditional maintenance methods. Using a nitrogen spring as the driving device, hinged at a specific force-bearing position of the lifting arm, significantly reduces the output torque required by the driving device, improving the stability and smoothness of the flipping process. Strengthening ribs enhance the overall rigidity, further improving the structural reliability of the cover during opening and support. In addition, this utility model is equipped with an elastic self-locking fixing pin, a bearing structure, and a wear-resistant bushing, which not only improves the convenience and safety of fixing the cover, but also effectively reduces wear between moving parts, extending the overall service life of the device. Attached Figure Description

[0015] Figure 1 This is an overall structural diagram of the vacuum sputtering machine platform of this utility model, which is easy to maintain.

[0016] Figure 2 This is an overall structural diagram of the vacuum sputtering machine platform of this utility model, which is easy to maintain.

[0017] Explanation of main component symbols

[0018] Vacuum sputtering machine base 1, inspection cover 2, tilting push rod assembly 3, drive device 31, lifting connection assembly 32, rotating part 321, fixing part 322, mounting base 33, rotating shaft mounting part 331, adjusting fixing hole 332, fixing pin 34, lifting arm 35, reinforcing rib 36, bearing structure 37.

[0019] The following detailed description, in conjunction with the accompanying drawings, will further illustrate this utility model. Detailed Implementation Example 1:

[0020] like Figure 1 The diagram shown is an overall structural diagram of the vacuum sputtering machine of this utility model, which is designed for easy maintenance. Figure 2 The figure shown is an overall structural diagram of the vacuum sputtering machine of this utility model that is easy to maintain.

[0021] A vacuum sputtering machine 1 for easy maintenance is characterized by: a vacuum sputtering machine 1, a maintenance cover 2, and a flip-up push rod assembly 3. The maintenance cover 2 is located on top of the vacuum sputtering machine 1. The maintenance cover 2 is flipped and lifted by the flip-up push rod assembly 3. The flip-up push rod assembly 3 includes a drive device 31, a lifting connection assembly 32, and a mounting base 33. The mounting base 33 is located on top of the vacuum sputtering machine 1. Both ends of the top of the mounting base 33 are rotating shaft mounting parts 331. At least two adjustment and fixing holes 332 are spaced apart below each rotating shaft mounting part 331. One end of the lifting connection assembly 32 is connected to the maintenance cover 2. The lifting connection assembly 32 is connected to a rotating part 321 and a fixing part 322 at the other end. The rotating part 321 of the lifting connection assembly 32 is rotatably connected to the rotating shaft mounting part 331. A driving device 31 is provided below the lifting connection assembly 32. One end of the driving device 31 is connected to the bottom of the mounting base 33, and the other end of the driving device 31 is connected to the bottom of the lifting connection assembly 32. The driving device 31 drives the lifting connection assembly 32 to flip and lift, so that when the lifting connection assembly 32 rotates and its fixing part 322 is aligned with the corresponding adjustment fixing hole 332, the fixing part 322 is connected to the adjustment fixing hole 332 by the fixing pin 34.

[0022] The lifting connection assembly 32 consists of two lifting arms 35, which are arranged in parallel. One end of each lifting arm 35 is connected to the inspection cover 2, and the other end of each lifting arm 35 is provided with a corresponding rotating part 321 and a fixing part 322 in sequence. The rotating part 321 of each lifting arm 35 is rotatably connected to the rotating shaft mounting part 331, and each fixing part 322 is connected to the corresponding adjusting fixing hole 332 through a fixing pin 34.

[0023] The inspection cover 2 is tilted and lifted by the vacuum sputtering machine base 1 via the flip push rod assembly 3 at an angle of 30° or 60°.

[0024] At least two reinforcing ribs 36 are also provided between adjacent lifting arms 35 to enhance the structural strength.

[0025] The drive device 31 is a nitrogen spring. One end of the nitrogen spring is hinged to the bottom or near the bottom of the mounting base 33, and the other end is hinged to the middle or lower part of the adjusting rotating arm 353 of the lifting connection assembly 32.

[0026] The fixing pin 34 is an elastic self-locking fixing pin 34, which is equipped with a backstop slot and a release button, and can be quickly locked and unlocked with one hand.

[0027] The rotating part 321 of the lifting connection assembly 32 is provided with a bearing structure 37. The bearing structure 37 is disposed between the rotating part 321 and the rotating shaft mounting part 331 to reduce the motion resistance when the lifting connection assembly 32 is flipped and improve the stability of the flipping action.

[0028] The mounting base 33 has a wear-resistant bushing inside the adjustment and fixing hole 332 to reduce the wear of the fixing pin 34 during frequent insertion and removal, and improve the structural durability.

[0029] The beneficial effects of this utility model are as follows: This utility model proposes a vacuum sputtering machine base that is easy to maintain, including a vacuum sputtering machine base 1, a maintenance cover 2, and a flip-up push rod assembly 3. By setting a maintenance cover that can be flipped and lifted at multiple angles above the vacuum sputtering machine base, and by using the flip-up push rod assembly to achieve automatic flipping and positioning locking of the cover, it can effectively solve the problems of difficult disassembly and assembly, inconvenient operation, and significant safety hazards in traditional maintenance methods. Using a nitrogen spring as the driving device, hinged at a specific force-bearing position of the lifting arm, significantly reduces the output torque required by the driving device, improving the stability and smoothness of the flipping process. Strengthening ribs enhance the overall rigidity, further improving the structural reliability of the cover during opening and support. In addition, this utility model is equipped with an elastic self-locking fixing pin, a bearing structure, and a wear-resistant bushing, which not only improves the convenience and safety of fixing the cover, but also effectively reduces wear between moving parts, extending the overall service life of the device.

[0030] Although this application discloses several aspects and embodiments, other aspects and embodiments will be obvious to those skilled in the art. Various modifications and improvements can be made without departing from the concept of this application, and these all fall within the scope of protection of this application. The various aspects and embodiments disclosed in this application are for illustrative purposes only and are not intended to limit this application. The actual scope of protection of this application is determined by the claims.

Claims

1. A vacuum sputtering machine that is easy to maintain, characterized in that: Vacuum sputtering machine (1), inspection cover (2), and flip push rod assembly (3). The inspection cover (2) is located above the vacuum sputtering machine (1). The inspection cover (2) is flipped and lifted by the vacuum sputtering machine (1) through the flip push rod assembly (3). The flip push rod assembly (3) includes a drive device (31), a lifting connection assembly (32), and a mounting base (33). The mounting base (33) is located above the vacuum sputtering machine (1). Both ends of the top of the mounting base (33) are rotating shaft mounting parts (331). At least two adjustment and fixing holes (332) are spaced apart below each rotating shaft mounting part (331). One end of the lifting connection assembly (32) is connected to the inspection cover (2). The lifting connection assembly (33) is connected to the inspection cover (2) through the flip push rod assembly (32). 2) The other end is provided with a rotating part (321) and a fixing part (322) in sequence. The rotating part (321) of the lifting connection assembly (32) is rotatably connected to the rotating shaft mounting part (331). A driving device (31) is provided below the lifting connection assembly (32). One end of the driving device (31) is connected to the bottom of the mounting base (33), and the other end of the driving device (31) is connected to the bottom of the lifting connection assembly (32). The driving device (31) drives the lifting connection assembly (32) to flip and lift, so that when the lifting connection assembly (32) rotates and its fixing part (322) is moved to the corresponding adjustment fixing hole (332), the fixing part (322) is connected to the adjustment fixing hole (332) by the fixing pin (34).

2. The vacuum sputtering machine as described in claim 1, characterized in that: The lifting connection assembly (32) consists of two lifting arms (35), with adjacent lifting arms (35) arranged in parallel. One end of each lifting arm (35) is connected to the inspection cover (2), and the other end of each lifting arm (35) is provided with a corresponding rotating part (321) and a fixing part (322) in sequence. The rotating part (321) of each lifting arm (35) is rotatably connected to the rotating shaft mounting part (331), and each fixing part (322) is connected to the corresponding adjusting fixing hole (332) through a fixing pin (34).

3. The vacuum sputtering machine as described in claim 1, characterized in that: The inspection cover (2) is tilted and lifted by the vacuum sputtering machine (1) via the flip push rod assembly (3) at an angle of 30° or 60°.

4. The vacuum sputtering machine as described in claim 1, characterized in that: At least two reinforcing ribs (36) are also provided between the adjacent lifting arms (35) to enhance the structural strength.

5. The vacuum sputtering machine as described in claim 1, characterized in that: The drive device (31) is a nitrogen spring. One end of the nitrogen spring is hinged to the bottom or near the bottom of the mounting base (33), and the other end is hinged to the middle or lower part of the adjusting rotating arm (353) of the lifting connection assembly (32).

6. The vacuum sputtering machine as described in claim 1, characterized in that: The fixing pin (34) is an elastic self-locking fixing pin (34) with a backstop slot and a release button, which can realize quick locking and unlocking with one hand.

7. The vacuum sputtering machine as described in claim 1, characterized in that: The rotating part (321) of the lifting connection assembly (32) is provided with a bearing structure (37). The bearing structure (37) is located between the rotating part (321) and the rotating shaft mounting part (331) to reduce the motion resistance when the lifting connection assembly (32) is flipped and improve the stability of the flipping action.

8. The vacuum sputtering machine as described in claim 1, characterized in that: The mounting base (33) has a wear-resistant bushing inside the adjustment and fixing hole (332) to reduce the wear of the fixing pin (34) during frequent insertion and removal, and improve the structural durability.

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