Cleaning apparatus

Abstract

The utility model belongs to the technical field of chemical cleaning discloses cleaning equipment, in cleaning equipment, connecting rod is rotatably connected in base, and the end of connecting rod away from base is installed to the holding structure of piece to be washed, and the holding structure of piece to be washed is used for placing piece to be washed and holding cleaning agent, first drive assembly is used for driving connecting rod to swing back and forth in first plane, to shake the holding structure of piece to be washed, second drive assembly is used for driving connecting rod to swing back and forth in second plane, to shake the holding structure of piece to be washed, first plane and second plane are perpendicular, thereby can shake the holding structure of piece to be washed through first drive assembly and second drive assembly, make cleaning agent flow fully, take out the reaction product and bubble on the surface of piece to be washed, to improve the cleaning efficiency, in addition, the cooperation between first drive assembly and second drive assembly can drive the holding structure of piece to be washed to realize the motion of multiple forms.

Description

Technical Field

[0001] This utility model relates to the field of chemical cleaning technology, and in particular to cleaning equipment. Background Technology

[0002] Wet chemical cleaning is a process that uses liquid chemical reagents to remove contaminant particles, residual organic materials, metal plating, or oxides from the surface of a sample. It is an essential step in the field of semiconductor micro- and nano-fabrication technology. During the cleaning process, the products of the reaction between the reagent and impurities on the sample surface can accumulate on the surface, preventing unreacted reagents from continuing to contact the impurities. In addition, when removing certain specific impurities, the reaction between the reagent and the impurities can generate bubbles that adhere to the sample surface, causing the sample to float. All of these situations can lead to a decrease in cleaning efficiency or even cleaning failure.

[0003] The current common solution is to manually shake the container to allow the reagents inside to carry away the reaction products and bubbles. However, this method has the problem that it requires manual shaking, which is time-consuming and labor-intensive. Furthermore, since the cleaning reagents are mostly high-risk chemicals, there may be dangerous situations such as large-scale gas generation, heat generation, and solution splashing during the cleaning process, which may endanger the operators. Utility Model Content

[0004] This utility model provides a cleaning device to solve the problems of existing technology that require manual shaking, which is time-consuming and labor-intensive, and may cause dangerous situations such as large-scale gas generation, heat generation, and solution splashing during cleaning, posing a hazard to operators.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] Cleaning equipment, including:

[0007] Base;

[0008] A connecting rod is rotatably connected to the base;

[0009] A cleaning component receiving structure is installed at the end of the connecting rod away from the base, and the cleaning component receiving structure is used to place the cleaning component and hold the cleaning agent.

[0010] The first drive assembly is used to drive the connecting rod to reciprocate within the first plane;

[0011] The second drive assembly is used to drive the connecting rod to swing back and forth in a second plane, wherein the first plane is perpendicular to the second plane.

[0012] As a preferred embodiment of the cleaning equipment, the structure for accommodating the part to be cleaned includes:

[0013] A container fixing plate is installed at the end of the connecting rod away from the base;

[0014] A container is placed on the container fixing plate and is used to hold the items to be cleaned and to hold the cleaning agent;

[0015] A clamping element is provided on the container fixing plate and is used to clamp or release the container.

[0016] As a preferred embodiment of the cleaning equipment, the container fixing plate has multiple sliding grooves, and the clamping member includes multiple clamping blocks. The multiple clamping blocks are slidably disposed in the multiple sliding grooves in a one-to-one correspondence, and the multiple clamping blocks can abut against the side wall of the container to clamp the container.

[0017] As a preferred embodiment of the cleaning equipment, the container fixing plate includes a container fixing plate body and a plurality of extensions disposed on the outside of the container fixing plate body, and the plurality of grooves are correspondingly formed on the plurality of extensions.

[0018] As a preferred embodiment of the cleaning equipment, the container fixing plate has through holes.

[0019] As a preferred embodiment of the cleaning equipment, the upper surface of the container fixing plate has a groove, which communicates with the through hole.

[0020] As a preferred embodiment of the cleaning equipment, the first driving assembly includes a first driving member and a first transmission structure. The first driving member is connected to the connecting rod through the first transmission structure and can drive the connecting rod to reciprocate within the first plane. The second driving assembly includes a second driving member and a second transmission structure. The second driving member is connected to the connecting rod through the second transmission structure and can drive the connecting rod to reciprocate within the second plane.

[0021] As a preferred embodiment of the cleaning equipment, the first transmission structure includes a first transmission rod, a first connecting structure, and a second transmission rod. The output end of the first driving member is provided with a first sleeve. The first connecting structure is provided with a second sleeve and a third sleeve, and the first connecting structure is configured to allow relative rotation between the second sleeve and the third sleeve. The connecting rod is provided with a fourth sleeve. One end of the first transmission rod is inserted into the first sleeve, and the other end is inserted into the second sleeve. The first transmission rod is slidable relative to at least one of the first sleeve and the second sleeve. One end of the second transmission rod is inserted into the third sleeve, and the other end is inserted into the fourth sleeve. The second transmission rod is slidable relative to at least one of the third sleeve and the fourth sleeve; and / or,

[0022] The second transmission structure includes a third transmission rod, a second connecting structure, and a fourth transmission rod. The output end of the second driving member is provided with a fifth sleeve. The second connecting structure is provided with a sixth sleeve and a seventh sleeve, and the second connecting structure is configured to allow the sixth sleeve and the seventh sleeve to rotate relative to each other. The connecting rod is provided with an eighth sleeve. One end of the third transmission rod is inserted into the fifth sleeve, and the other end is inserted into the sixth sleeve. The third transmission rod is slidable relative to at least one of the fifth sleeve and the sixth sleeve. One end of the fourth transmission rod is inserted into the seventh sleeve, and the other end is inserted into the eighth sleeve. The fourth transmission rod is slidable relative to at least one of the seventh sleeve and the eighth sleeve.

[0023] As a preferred embodiment of the cleaning equipment, it further includes a housing fixedly connected to the base, the base and the housing together forming an inner cavity, the first drive assembly and the second drive assembly are both disposed in the inner cavity, the top wall of the housing has an opening communicating with the inner cavity, and the connecting rod passes through the opening.

[0024] As a preferred embodiment of the cleaning equipment, the opening is located at the center of the top wall of the outer casing, and the height of the center of the top wall of the outer casing is higher than the height of the outer edge of the top wall of the outer casing.

[0025] The beneficial effects of this utility model are:

[0026] This utility model provides a cleaning device, including a base, a connecting rod, a workpiece receiving structure, a first driving assembly, and a second driving assembly. The connecting rod is rotatably connected to the base. The workpiece receiving structure is installed at the end of the connecting rod away from the base and is used to place the workpiece to be cleaned and hold the cleaning agent. The first driving assembly drives the connecting rod to reciprocate within a first plane to shake the workpiece receiving structure. The second driving assembly drives the connecting rod to reciprocate within a second plane to shake the workpiece receiving structure. The first and second planes are perpendicular, thereby allowing the cleaning agent to flow fully and carry away reaction products and bubbles from the surface of the workpiece, thus improving cleaning efficiency. Furthermore, the cooperation between the first and second driving assemblies can drive the workpiece receiving structure to achieve various forms of movement. Attached Figure Description

[0027] Figure 1 This is a schematic diagram of the structure of the first cleaning device in the embodiments of this utility model;

[0028] Figure 2 This is a schematic diagram of the structure of the second type of cleaning equipment in this utility model embodiment;

[0029] Figure 3 This is a schematic diagram of the structure of the third type of cleaning equipment in this utility model embodiment;

[0030] Figure 4 This is a schematic diagram of the structure of the fourth type of cleaning equipment in this utility model embodiment;

[0031] Figure 5 This is a partial structural schematic diagram of the cleaning equipment in an embodiment of this utility model;

[0032] Figure 6 This is a schematic diagram of the first structure of the first driving component in an embodiment of the present invention (the connecting rod is in the initial position);

[0033] Figure 7 This is a schematic diagram of the second structure of the first drive component in an embodiment of the present invention (the connecting rod is located at the deflection position);

[0034] Figure 8 This is a schematic diagram of the third structure of the first driving component in an embodiment of this utility model (the connecting rod is in the initial position);

[0035] Figure 9 This is a schematic diagram of the fourth structure of the first driving component in this embodiment of the present invention (the connecting rod is located in the deflection position).

[0036] In the picture:

[0037] 1. Base;

[0038] 2. Connecting rod; 21. First universal joint; 22. Fourth sleeve; 23. Eighth sleeve; 24. Mounting sleeve;

[0039] 3. First drive assembly; 31. First drive component; 311. First sleeve; 32. First transmission rod; 33. First connecting structure; 331. Second sleeve; 332. Third sleeve; 34. Second transmission rod;

[0040] 4. Second drive assembly; 41. Second drive component; 411. Fifth sleeve; 42. Third transmission rod; 43. Second connecting structure; 431. Sixth sleeve; 432. Seventh sleeve; 44. Fourth transmission rod;

[0041] 5. Container fixing plate; 51. Container fixing plate body; 52. Extension; 53. Slide groove; 54. Through hole; 55. Groove;

[0042] 6. Clamping components; 61. Clamping blocks;

[0043] 7. Outer shell; 71. Opening. Detailed Implementation

[0044] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, not the entire structure.

[0045] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0046] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0047] In the description of this embodiment, the terms "upper," "lower," "left," and "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0048] During the cleaning process, the products resulting from the reaction between the reagent and impurities on the sample surface accumulate on the surface, preventing unreacted reagent from continuing to contact the impurities. Furthermore, when removing certain impurities, the reaction between the reagent and the impurities generates bubbles that adhere to the sample surface, causing the sample to float. All of these situations can lead to decreased cleaning efficiency or even cleaning failure. Currently, the commonly used method is to manually shake the container to allow the reagent inside to carry away the reaction products and bubbles. However, this method has problems: it requires manual shaking, which is time-consuming and labor-intensive. Moreover, since the cleaning reagents are often highly hazardous chemicals, the cleaning process may result in dangerous situations such as large-scale gas generation, heat generation, and solution splashing, posing hazards to the operators.

[0049] In response, this embodiment provides a cleaning device to solve the problems of existing technologies that require manual shaking, which is time-consuming and labor-intensive, and may cause dangerous situations such as large-scale gas generation, heat generation, and solution splashing during cleaning, posing a hazard to operators. It can be used in the field of chemical cleaning technology, specifically in the field of semiconductor micro-nano processing technology, for cleaning semiconductor materials.

[0050] Reference Figures 1-5 The cleaning equipment includes a base 1, a connecting rod 2, a cleaning component receiving structure, a first drive assembly 3, and a second drive assembly 4. The connecting rod 2 is rotatably connected to the base 1. The cleaning component receiving structure is installed at the end of the connecting rod 2 away from the base 1, and is used to place the cleaning component and hold the cleaning agent. The first drive assembly 3 drives the connecting rod 2 to swing back and forth in a first plane to shake the cleaning component receiving structure. The second drive assembly 4 drives the connecting rod 2 to swing back and forth in a second plane to shake the cleaning component receiving structure. The first plane and the second plane are perpendicular, so that the cleaning agent can flow fully by shaking the cleaning component receiving structure through the first drive assembly 3 and the second drive assembly 4, and the reaction products and bubbles on the surface of the cleaning component can be carried out to improve the cleaning efficiency. Furthermore, the cooperation between the first driving component 3 and the second driving component 4 can drive the cleaning-receiving structure to achieve various forms of movement. For example, in this embodiment, the first driving component 3 and the second driving component 4 work simultaneously, and the period and amplitude of the reciprocating swing of the connecting rod 2 driven by them are consistent. When the phase difference between the first driving component 3 and the second driving component 4 is one-quarter or three-quarters of a period, the movement path of the cleaning-receiving structure can be circular. In other embodiments, the amplitudes of the reciprocating swing of the connecting rod 2 driven by the first driving component 3 and the second driving component 4 can be set differently to make the movement path of the cleaning-receiving structure elliptical. Through circular or elliptical movement trajectories, the collision force between the sample and the sidewall of the cleaning-receiving structure can be reduced, or even the collision can be eliminated. In other embodiments, one of the first driving component 3 and the second driving component 4 can be driven to reciprocate the connecting rod 2 first, and then the other of the first driving component 3 and the second driving component 4 can be driven to reciprocate the connecting rod 2, so that the cleaning-receiving structure first moves in one direction and then moves in another direction.

[0051] Continue to refer to Figures 1-5The cleaning device includes a container fixing plate 5, a container, and a clamping member 6. The container fixing plate 5 is installed at the end of the connecting rod 2 away from the base 1. The container is placed on the container fixing plate 5 and is used to hold the cleaning device and the cleaning agent. The clamping member 6 is located on the container fixing plate 5 and is used to clamp or release the container. Before cleaning, the container can be clamped by the clamping member 6 to prevent the container from coming off the container fixing plate 5 during shaking. After cleaning, the container can be released to facilitate the operator's disassembly.

[0052] Continue to refer to Figures 1-5 The container fixing plate 5 has multiple sliding grooves 53, and the clamping member 6 includes multiple clamping blocks 61. The multiple clamping blocks 61 are slidably disposed in the multiple sliding grooves 53 in a one-to-one correspondence. The multiple clamping blocks 61 can abut against the side wall of the container to clamp the container. Specifically, the multiple clamping blocks 61 are spaced apart along the circumference of the container, so that the force on different positions of the container is balanced when clamping the container. Correspondingly, the multiple sliding grooves 53 are radially distributed.

[0053] The specific structures of the container fixing plate 5 include the following:

[0054] The first structure is as follows Figure 1 As shown, the container fixing plate 5 includes a container fixing plate body 51 and a plurality of extensions 52 disposed on the outside of the container fixing plate body 51. A plurality of grooves 53 are correspondingly provided on the plurality of extensions 52. This arrangement can reduce the size of the container fixing plate body 51, wherein the container fixing plate body 51 is circular.

[0055] The second structure is as follows: Figure 2 As shown, the container fixing plate 5 no longer has an extension 52. The container fixing plate 5 is square, and the sliding grooves 53 are opened at the four corners of the container fixing plate 5. This arrangement can improve the overall structural strength of the container fixing plate 5.

[0056] The third structure is as follows Figure 3 As shown, the container fixing plate 5 is also provided with a container fixing plate body 51 and multiple extensions 52. In addition, the container fixing plate 5 is provided with a through hole 54, which is specifically provided in the container fixing plate body 51. By providing the through hole 54, on the one hand, it is convenient for the operator to place the container on the surface of the container fixing plate 5. On the other hand, since the container needs to be shaken constantly, the cleaning agent contained in it may be shaken out. The cleaning agent can seep through the through hole 54 to the bottom of the container fixing plate 5 to avoid the cleaning agent accumulating on the surface of the container fixing plate 5, thereby preventing the container fixing plate 5 from being corroded by the cleaning agent.

[0057] The fourth structure is as follows: Figure 4As shown, the container fixing plate 5 is also provided with a container fixing plate body 51 and multiple extensions 52. The container fixing plate 5 has a through hole 54. In addition, the upper surface of the container fixing plate 5 has a groove 55, which communicates with the through hole 54. The through hole 54 and the groove 55 are specifically opened in the container fixing plate body 51. By providing the groove 55, the cleaning agent that has been shaken out can be guided through the groove 55 to the through hole 54 and leaked to the bottom of the container fixing plate 5 through the through hole 54, which can further prevent the cleaning agent from accumulating on the surface of the container fixing plate 5.

[0058] Continue to refer to Figures 1-5 In this embodiment, the specific structures of the first driving assembly 3 and the second driving assembly 4 are as follows: the first driving assembly 3 includes a first driving member 31 and a first transmission structure. The first driving member 31 is connected to the connecting rod 2 through the first transmission structure and can drive the connecting rod 2 to reciprocate in a first plane; the second driving assembly 4 includes a second driving member 41 and a second transmission structure. The second driving member 41 is connected to the connecting rod 2 through the second transmission structure and can drive the connecting rod 2 to reciprocate in a second plane. The connecting rod 2 can be connected to the base 1 via a first universal joint 21 or a first ball joint structure, so that the connecting rod 2 can rotate relative to the base 1. This embodiment exemplarily provides a scheme in which the connecting rod 2 is connected to the base 1 via a first universal joint 21.

[0059] Further, the first transmission structure includes a first transmission rod 32, a first connecting structure 33, and a second transmission rod 34. The output end of the first driving member 31 is provided with a first sleeve 311. The first connecting structure 33 is provided with a second sleeve 331 and a third sleeve 332. The first connecting structure is configured to allow relative rotation between the second sleeve 331 and the third sleeve 332. Specifically, the first connecting structure can be a second universal joint or a second ball joint structure. Both of these structures can achieve relative rotation between the second sleeve 331 and the third sleeve 332. This embodiment exemplarily provides a scheme where the first connecting structure is a second universal joint. The connecting rod 2 is provided with a fourth sleeve 22. One end of the first transmission rod 32 is inserted into the first sleeve 311, and the other end is inserted into the second sleeve 331. The first transmission rod 32 can at least rotate relative to the first sleeve 311 and... In this embodiment, the first transmission rod 32 is fixedly connected to the second sleeve 331 and slidably engaged with the first sleeve 311. In other embodiments, the first transmission rod 32 may also be fixedly connected to the first sleeve 311 and slidably engaged with the second sleeve 331. One end of the second transmission rod 34 is inserted into the third sleeve 332, and the other end is inserted into the fourth sleeve 22. The second transmission rod 34 can slide relative to at least one of the third sleeve 332 and the fourth sleeve 22. In this embodiment, the second transmission rod 34 is fixedly connected to the fourth sleeve 22 and slidably engaged with the third sleeve 332. In other embodiments, the second transmission rod 34 may also be fixedly connected to the third sleeve 332 and slidably engaged with the fourth sleeve 22, thereby realizing the power transmission between the first driving member 31 and the connecting rod 2.And / or, the second transmission structure includes a third transmission rod 42, a second connecting structure 43, and a fourth transmission rod 44. The output end of the second driving member 41 is provided with a fifth sleeve 411. The second connecting structure 43 is provided with a sixth sleeve 431 and a seventh sleeve 432. The second connecting structure is configured to allow relative rotation between the sixth sleeve 431 and the seventh sleeve 432. Specifically, the second connecting structure 43 can be a third universal joint or a third ball joint structure. Both of these structures can achieve relative rotation between the sixth sleeve 431 and the seventh sleeve 432. This embodiment exemplarily provides a scheme where the second connecting structure 43 is a third universal joint. The connecting rod 2 is provided with an eighth sleeve 23. One end of the third transmission rod 42 is inserted into the fifth sleeve 411, and the other end is inserted into the sixth sleeve 431. The third transmission rod 42 can at least rotate relative to the fifth sleeve 411. In this embodiment, the third transmission rod 42 is fixedly connected to the sixth sleeve 431 and slidably engaged with the fifth sleeve 411. In other embodiments, the third transmission rod 42 may also be fixedly connected to the fifth sleeve 411 and slidably engaged with the sixth sleeve 431. One end of the fourth transmission rod 44 is inserted into the seventh sleeve 432, and the other end is inserted into the eighth sleeve 23. The fourth transmission rod 44 can slide relative to at least one of the seventh sleeve 432 and the eighth sleeve 23. In this embodiment, the fourth transmission rod 44 is fixedly connected to the eighth sleeve 23 and slidably engaged with the seventh sleeve 432. In other embodiments, the fourth transmission rod 44 may also be fixedly connected to the seventh sleeve 432 and slidably engaged with the eighth sleeve 23, thereby realizing the power transmission between the second driving member 41 and the connecting rod 2. This embodiment exemplarily provides a scheme in which the first transmission structure includes a first transmission rod 32, a second universal joint 33, and a second transmission rod 34, and the second transmission structure includes a third transmission rod 42, a third universal joint 43, and a fourth transmission rod 44.

[0060] Optionally, the first driving component 31 can be a servo motor or a stepper motor, and is used to drive the first transmission rod 32 to reciprocate, thereby driving the second transmission rod 34 and the connecting rod 2 to reciprocate in the first plane. Similarly, the second driving component 41 can also be a servo motor or a stepper motor, and is used to drive the third transmission rod 42 to reciprocate, thereby driving the fourth transmission rod 44 and the connecting rod 2 to reciprocate in the second plane. This embodiment exemplarily provides a scheme where the first driving component 31 is a servo motor and the second driving component 41 is a servo motor.

[0061] Optionally, the outer wall of the connecting rod 2 is also provided with an installation sleeve 24, and the installation sleeve 24 is fixedly connected to the connecting rod 2. The fourth sleeve 22 and the eighth sleeve 23 are both fixedly connected to the installation sleeve 24. The installation sleeve 24, the fourth sleeve 22 and the eighth sleeve 23 together form a four-way connector.

[0062] Continue to refer to Figures 1-5 The cleaning equipment also includes a housing 7 fixedly connected to the base 1. The base 1 and the housing 7 together form an inner cavity. The first drive assembly 3 and the second drive assembly 4 are both located in the inner cavity. The top wall of the housing 7 has an opening 71 that communicates with the inner cavity. The connecting rod 2 passes through the opening 71. The housing 7 can provide a certain degree of protection for the first drive assembly 3 and the second drive assembly 4. The connecting rod 2 extends out through the opening 71. It is understood that since the connecting rod 2 needs to rotate continuously relative to the base 1, the size of the opening 71 should be set to be relatively large in order to avoid interfering with the movement of the connecting rod 2.

[0063] Optionally, the opening 71 is located at the center of the top wall of the outer casing 7, and the height of the center of the top wall of the outer casing 7 is higher than the height of the outer edge of the top wall of the outer casing 7, thereby forming a slope on the top wall of the outer casing 7. The cleaning agent that leaks to the top wall of the outer casing 7 can flow through the slope to the outer edge of the top wall of the outer casing 7, and then flow out of the top wall of the outer casing 7, preventing the cleaning agent from accumulating on the top wall of the outer casing 7. Optionally, the outer casing 7 is made of a material with strong corrosion resistance and a certain degree of heat resistance.

[0064] Continue to refer to Figures 1-5 The cleaning equipment also includes a controller, which drives the first drive component 31 and the second drive component 41 to move. In this embodiment, both the first drive component 31 and the second drive component 41 are servo motors. The rotation amplitude of the servo motors can be calculated by the following method:

[0065] Taking the first driving member 31 as an example, the first driving member 31 can drive the connecting rod 2 to reciprocate through the first transmission rod 32 and the second transmission rod 34, so that the connecting rod 2 has an initial position and a deflection position. When the connecting rod 2 is in the initial position, the center line of the connecting rod 2 is parallel to the vertical direction, and the center lines of the first transmission rod 32 and the second transmission rod 34 are both parallel to the horizontal plane.

[0066] like Figure 6 As shown, at this time, the connecting rod 2 is in the initial position. The intersection of the center line of the connecting rod 2 and the center line of the second transmission rod 34 is the first intersection point. The intersection of the center line of the first transmission rod 32 and the center line of the second transmission rod 34 is the second intersection point. The horizontal distance between the first intersection point and the second intersection point is L1. The distance between the first intersection point and the shaft of the first universal joint 21 is Z1. The inclination angle of the line connecting the second intersection point and the shaft of the first universal joint 21 relative to the horizontal plane is θ3.

[0067] like Figure 7 As shown, at this time, the connecting rod 2 is in the deflection position, the deflection angle of the connecting rod 2 relative to the initial position is θ1, and the inclination angle of the line connecting the second intersection point and the rotation axis of the first universal joint 21 relative to the horizontal plane becomes θ2, and the displacement of the second intersection point in the vertical direction is Z2.

[0068] The following formula can be easily obtained:

[0069] θ2 = θ1 + θ3;

[0070]

[0071] Z2 = L1tanθ2 - Z1.

[0072] like Figure 8 As shown, at this time, the connecting rod 2 is in the initial position, the intersection of the center line of the first transmission rod 32 and the center line of the output end of the first driving member 31 is the third intersection point, and the horizontal distance between the second intersection point and the third intersection point is L2.

[0073] like Figure 9 As shown, the connecting rod 2 is in the deflection position at this time. As mentioned earlier, Z2 is the displacement of the second intersection point in the vertical direction. Since the height of the third intersection point will not change with the deflection of the connecting rod 2, the vertical distance between the second intersection point and the third intersection point is also Z2. In addition, the tilt angle of the center line of the first transmission rod 32 relative to the horizontal plane is θ4.

[0074] The following formula can be obtained:

[0075]

[0076] Optionally, the controller controls the servo motor movement based on the high-level signal duration by modulating the proportion of the high-level signal.

[0077] High level time t h It can be calculated using the following formula:

[0078]

[0079] Correspondingly, the rotation amplitude A of the first driving member 31 is:

[0080]

[0081] Wherein, ω is a preset coefficient used to adjust the shaking speed, t is the running time, and t0 is the initial time used to control the phase difference between the first driving component 31 and the second driving component 41.

[0082] It is understood that this embodiment only provides an exemplary method for calculating the rotation amplitude of the first driving member 31. The rotation amplitude of the second driving member 41 can be obtained by a similar calculation method, which will not be repeated here.

[0083] The controller can simultaneously control the operation of the first driving component 31 and the second driving component 41, and the period and amplitude of the reciprocating swing of the connecting rod 2 driven by both components are consistent. When the phase difference between the first driving component 31 and the second driving component 41 is one-quarter or three-quarters of a period, the movement path of the container can be circular or elliptical. In addition, the controller can control the first driving component 31 to operate first, and then control the second driving component 41 to operate. Through the circular or elliptical movement trajectory, the collision force between the sample and the side wall of the container structure can be reduced, or even eliminated. Furthermore, the controller can control the second driving component 41 to operate first, and then control the first driving component 31 to operate, so that the container reciprocates in one direction first, and then reciprocates in the other direction.

[0084] Optionally, the controller is also equipped with a delayed start module, which allows operators a certain amount of time to move away from the cleaning equipment during operation, so as to avoid injury to the operators from splashed cleaning agents or volatile toxic gases.

[0085] Optionally, the controller also includes a timed stop module, which automatically shuts down after a set running time.

[0086] Optionally, the controller also includes an audible and visual alarm module, which can issue audible and visual warning messages when the equipment malfunctions or the cleaning work is completed. The control logic corresponding to the above modules is a conventional solution in this field and will not be described in detail.

[0087] Optionally, the cleaning equipment also includes a power supply and a power management circuit module. In this embodiment, the power supply may specifically be a lithium-ion battery, which is used to power the controller, the first drive unit 31, and the second drive unit, etc. The power management circuit module is mainly responsible for charging and discharging the lithium-ion battery, outputting power signals and electricity through the power output port, and receiving signals provided by the controller. In addition, the power management circuit module can also monitor the temperature of the lithium-ion battery through a thermistor. The thermistor body is attached to the surface of the lithium-ion battery and connected to the power management circuit module through wires.

[0088] The controller, power supply, and power management circuit module are all housed within the cavity formed by the base 1 and the outer casing 7. The surfaces of the controller and power management circuit module are coated with waterproof adhesive, and all wiring connections are wrapped with waterproof adhesive to enhance their durability in harsh environments such as acid mist.

[0089] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make various obvious changes, readjustments, and substitutions without departing from the protection scope of this utility model. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A cleaning device, characterized in that, include: Base (1); A connecting rod (2) is rotatably connected to the base (1); The cleaning component receiving structure is installed at the end of the connecting rod (2) away from the base (1), and the cleaning component receiving structure is used to place the cleaning component and hold the cleaning agent; The first drive assembly (3) is used to drive the connecting rod (2) to swing back and forth in the first plane; The second drive assembly (4) is used to drive the connecting rod (2) to swing back and forth in the second plane, wherein the first plane is perpendicular to the second plane.

2. The cleaning equipment according to claim 1, characterized in that, The structure for accommodating the part to be cleaned includes: A container fixing plate (5) is installed at the end of the connecting rod (2) away from the base (1); The container is placed on the container fixing plate (5) and is used to place the parts to be cleaned and to hold the cleaning agent; A clamping element (6) is disposed on the container fixing plate (5) and is used to clamp or release the container.

3. The cleaning equipment according to claim 2, characterized in that, The container fixing plate (5) has multiple sliding grooves (53), and the clamping member (6) includes multiple clamping blocks (61). The multiple clamping blocks (61) are slidably disposed in the multiple sliding grooves (53) in a one-to-one correspondence. The multiple clamping blocks (61) can abut against the side wall of the container to clamp the container.

4. The cleaning equipment according to claim 3, characterized in that, The container fixing plate (5) includes a container fixing plate body (51) and a plurality of extensions (52) disposed on the outside of the container fixing plate body (51), and a plurality of grooves (53) are correspondingly provided on the plurality of extensions (52).

5. The cleaning equipment according to claim 2, characterized in that, The container fixing plate (5) has a through hole (54).

6. The cleaning equipment according to claim 5, characterized in that, The upper surface of the container fixing plate (5) has a groove (55) that communicates with the through hole (54).

7. The cleaning equipment according to any one of claims 1-6, characterized in that, The first driving assembly (3) includes a first driving member (31) and a first transmission structure. The first driving member (31) is connected to the connecting rod (2) through the first transmission structure and can drive the connecting rod (2) to swing back and forth in the first plane. The second driving assembly (4) includes a second driving member (41) and a second transmission structure. The second driving member (41) is connected to the connecting rod (2) through the second transmission structure and can drive the connecting rod (2) to swing back and forth in the second plane.

8. The cleaning equipment according to claim 7, characterized in that, The first transmission structure includes a first transmission rod (32), a first connecting structure (33), and a second transmission rod (34). The output end of the first driving member (31) is provided with a first sleeve (311). The first connecting structure (33) is provided with a second sleeve (331) and a third sleeve (332). The first connecting structure (33) is configured to allow relative rotation between the second sleeve (331) and the third sleeve (332). The connecting rod (2) is provided with a fourth sleeve (22). The first transmission rod (34)... 2) One end of the first transmission rod (32) is inserted into the first sleeve (311), and the other end is inserted into the second sleeve (331). The first transmission rod (32) can slide relative to at least one of the first sleeve (311) and the second sleeve (331). One end of the second transmission rod (34) is inserted into the third sleeve (332), and the other end is inserted into the fourth sleeve (22). The second transmission rod (34) can slide relative to at least one of the third sleeve (332) and the fourth sleeve (22). And / or, The second transmission structure includes a third transmission rod (42), a second connecting structure (43), and a fourth transmission rod (44). The output end of the second driving member (41) is provided with a fifth sleeve (411). The second connecting structure (43) is provided with a sixth sleeve (431) and a seventh sleeve (432), and the second connecting structure (43) is configured to allow relative rotation between the sixth sleeve (431) and the seventh sleeve (432). The connecting rod (2) is provided with an eighth sleeve (23). The third transmission rod (44)... 2) One end of the third transmission rod (42) is inserted into the fifth sleeve (411) and the other end is inserted into the sixth sleeve (431). The third transmission rod (42) is at least able to slide relative to one of the fifth sleeve (411) and the sixth sleeve (431). One end of the fourth transmission rod (44) is inserted into the seventh sleeve (432) and the other end is inserted into the eighth sleeve (23). The fourth transmission rod (44) is at least able to slide relative to one of the seventh sleeve (432) and the eighth sleeve (23).

9. The cleaning equipment according to any one of claims 1-6, characterized in that, It also includes a housing (7) fixedly connected to the base (1), the base (1) and the housing (7) together form an inner cavity, the first drive assembly (3) and the second drive assembly (4) are both disposed in the inner cavity, the top wall of the housing (7) is provided with an opening (71) communicating with the inner cavity, and the connecting rod (2) passes through the opening (71).

10. The cleaning equipment according to claim 9, characterized in that, The opening (71) is located at the center of the top wall of the outer shell (7), and the height of the center of the top wall of the outer shell (7) is higher than the height of the outer edge of the top wall of the outer shell (7).

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