Wafer carrier cleaning apparatus

Abstract

The embodiment of the utility model provides a kind of wafer carrier cleaning equipment, it is related to semiconductor production technical field.The wafer carrier cleaning equipment provided by the utility model includes rack, its inside has cleaning space;Sheet box frame is used to accommodate box body and box cover respectively;Rotary table is rotationally arranged in cleaning space, with multiple cleaning stations for installing sheet box frame;Fixed spray head is arranged in rack, to be used for spraying cleaning fluid towards rotary table;Rotary frame is rotationally arranged in rack, and spray head assembly is arranged on rotary frame;When rotary table drives sheet box frame to rotate to be close to rotary frame, rotary frame drives spray head assembly to rotate to the inside of box body, to be used for cleaning the inside of box body.The wafer carrier cleaning equipment provided by the utility model can clean sheet box comprehensively, and improve the cleaning effect of sheet box.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and more specifically, to a wafer carrier cleaning device. Background Technology

[0002] Currently, in the process of cleaning wafer carriers (cassettes), the cassette body and cover are generally installed on the cassette holder, and cleaning fluid is sprayed onto the surface and inside of the cassette through nozzles set on the cassette holder to achieve cleaning of the cassette.

[0003] The inventors discovered that the fixed installation position of the nozzles on the current tablet holders prevents existing cleaning equipment from thoroughly cleaning the inside of the tablet holders, resulting in blind spots in the cleaning process. Utility Model Content

[0004] The purpose of this invention is to provide a wafer carrier cleaning device that can perform all-round cleaning of wafer cassettes.

[0005] The embodiments of this utility model can be implemented as follows: In a first aspect, this utility model provides a wafer carrier cleaning device, comprising: The rack has an internal cleaning space; The disc holder is used to separately hold the disc body and the disc lid; A turntable is rotatably positioned in the cleaning space and has multiple cleaning stations for mounting the disc holders; A fixed nozzle is mounted on the frame for spraying cleaning fluid toward the turntable; A rotating frame is rotatably mounted inside the machine frame, and a nozzle assembly is mounted on the rotating frame; When the turntable rotates the cartridge holder to a position close to the rotating frame, the rotating frame drives the nozzle assembly to rotate into the cartridge body for cleaning the inside of the cartridge body.

[0006] In an optional embodiment, the rotating frame includes a driving member, a rotating part, and an extension part. The driving member is disposed within the frame, the rotating part is connected to the driving member, the extension part is horizontally connected to the rotating part, and the nozzle assembly is disposed at the end of the extension part away from the rotating part. The driving member is used to drive the rotating part to rotate.

[0007] In an optional embodiment, the driving element includes a drive motor.

[0008] In an optional embodiment, at least one extension is provided on the rotating part.

[0009] In an optional embodiment, the extension is detachably connected to the rotating part.

[0010] In an optional embodiment, the nozzle assembly includes a rotating member, a first nozzle, and a second nozzle. The first nozzle is fixedly disposed at one end of the extension away from the rotating part, the rotating member is disposed at one end of the extension away from the rotating part, and the second nozzle is disposed on the rotating member. The rotating member is used to drive the second nozzle to rotate.

[0011] In an optional embodiment, the output direction of the first nozzle is along the length direction of the extension, the output direction of the second nozzle is perpendicular to the output direction of the first nozzle, and the second nozzle rotates about the length direction of the extension.

[0012] In an optional embodiment, the first nozzle is provided with at least one at the end of the extension.

[0013] In an optional embodiment, at least two second nozzles are provided on the rotating member.

[0014] In an optional embodiment, multiple fixed nozzles are arranged within the frame surrounding the disc holder.

[0015] The beneficial effects of the wafer carrier cleaning equipment provided in this embodiment of the present invention include: By setting up a turntable and a rotating frame, the turntable drives the tablet holder to rotate. When the turntable drives the tablet holder to rotate close to the rotating frame, the rotating frame drives the spray head assembly to rotate into the inside of the tablet, thereby thoroughly cleaning the inside of the tablet. During the rotation of the turntable, the fixed spray head located in the frame sprays cleaning fluid onto the turntable, cleaning the tablet body and lid located on the turntable, thereby thoroughly cleaning the inside and outside of the tablet and improving the cleaning effect of the tablet. Attached Figure Description

[0016] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a schematic diagram of the current wafer carrier cleaning equipment; Figure 2 This is a schematic diagram of the wafer carrier cleaning equipment provided in this embodiment from a first-view perspective; Figure 3 This is a schematic diagram of the rotating frame in the wafer carrier cleaning equipment provided in this embodiment.

[0018] Icons: 110-Box body; 120-Box cover; 200-Frame; 210-Cleaning space; 300-Plate holder; 400-Turntable; 410-Cleaning station; 500-Fixed nozzle; 600-Rotating frame; 610-Drive component; 620-Rotating part; 630-Extension part; 700-Nozzle assembly; 710-Rotating component; 720-First nozzle; 730-Second nozzle. Detailed Implementation

[0019] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0020] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0021] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0022] In the description of this utility model, it should be noted that if terms such as "upper," "lower," "inner," or "outer" are used to indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the utility model product is usually placed during use, they are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0023] Furthermore, the terms "first" and "second" are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.

[0024] It should be noted that, where there is no conflict, the features in the embodiments of this utility model can be combined with each other.

[0025] In semiconductor manufacturing, cleaning wafer cassettes (also known as wafer carriers or FOUPs) is a crucial step, offering advantages such as preventing contamination, ensuring process stability, and avoiding cross-contamination. A wafer cassette typically consists of a housing and a cover that fit together. Currently, during cleaning, the housing and cover are usually installed at different positions on a wafer cassette holder. Cleaning fluid is then sprayed onto the surface and interior of the wafer cassette through nozzles mounted on the holder.

[0026] Reference Figure 1 The cartridge body 110 and the cover 120 are fixedly mounted to the wafer cassette holder 300. Currently, the nozzle installation position on the wafer cassette holder 300 is fixed, which means that the existing cleaning equipment can only clean the fixed area of ​​the wafer cassette. The four corners of the wafer cassette are not cleaned, making it impossible to achieve all-around cleaning. This results in poor wafer cassette cleaning performance and may cause wafer contamination and other problems during subsequent use.

[0027] To address the problem that current cleaning equipment cannot perform comprehensive cleaning of wafer cassettes, this invention provides a wafer carrier cleaning device. The overall structure, working principle, and technical effects of the wafer carrier cleaning device provided by this invention are described in detail below through embodiments and accompanying drawings.

[0028] Please refer to Figure 2 and Figure 3 This utility model provides a wafer carrier cleaning device for cleaning wafer carriers (also known as wafer cassettes or FOUPs), and can perform all-round cleaning of wafer carriers, thus improving the problem that current cleaning devices cannot perform all-round cleaning of wafer carriers.

[0029] Please refer to Figure 2 and Figure 3 This utility model provides a wafer carrier cleaning device including a frame 200, a wafer cassette holder 300, a turntable 400, a fixed nozzle 500, and a rotating frame 600. In this embodiment, the frame 200 has a rectangular frame structure and a cleaning space 210 within it. The wafer cassette holder 300 has space for accommodating a cassette body 110 and a cassette cover 120. In this embodiment, as... Figure 1As shown, the tablet holder 300 has several placement positions for accommodating tablets 110, arranged vertically. This allows multiple tablets 110 to be placed vertically within the tablet holder 300, enabling simultaneous cleaning of multiple tablets 110 and improving cleaning efficiency. A turntable 400 is installed within the cleaning space 210 inside the frame 200. The turntable 400 has multiple cleaning stations 410, and the tablet holder 300 can be installed at one of the cleaning stations 410 of the turntable 400, which can rotate the tablet holder 300. A fixed nozzle 500 is mounted on the frame 200 and located within the cleaning space 210, spraying cleaning fluid towards the turntable 400. Furthermore, a rotating frame 600 is mounted on the frame 200 and located within the cleaning space 210, and a nozzle assembly 700 is mounted on the rotating frame 600. When the rotating mechanism drives the cartridge holder 300 to rotate close to the rotating frame 600, the rotating frame 600 drives the nozzle assembly 700 to rotate into the interior of the cartridge body 110. The spray surface emitted by the nozzle assembly 700 can cover the inner wall of the cartridge body 110, thereby thoroughly cleaning the interior of the cartridge body 110.

[0030] By setting up a turntable 400 and a rotating frame 600, the turntable 400 drives the tablet holder 300 to rotate. When the turntable 400 drives the tablet holder 300 to rotate close to the rotating frame 600, the rotating frame 600 drives the nozzle assembly 700 to rotate into the inside of the box 110, thereby thoroughly cleaning the inside of the box 110. During the rotation of the turntable 400, the fixed nozzle 500 located in the frame 200 sprays cleaning fluid onto the turntable 400 to clean the box 110 and the box cover 120 located on the turntable 400, thereby thoroughly cleaning the inside and outside of the box 110 and improving the cleaning effect of the tablets.

[0031] Please refer to Figure 2 and Figure 3 In some optional embodiments, the rotating component 710 includes a driving component 610, a rotating portion 620, and an extension portion 630. The driving component 610 is disposed in the cleaning space 210 within the frame 200. The rotating portion 620 is connected to the driving component 610, and the extension portion 630 is horizontally connected to the rotating portion 620. A nozzle assembly 700 is disposed at the end of the extension portion 630 away from the rotating portion 620. The driving component 610 drives the rotating portion 620 to rotate, thereby causing the extension portion 630 to rotate and reach the interior of the housing 110. The nozzle assembly 700 at the end of the extension portion 630 then thoroughly rinses the interior of the housing. In this embodiment, the rotating portion 620 is a swing arm, vertically mounted on the driving component 610. The extension portion 630 is a crossbeam, horizontally connected to the swing arm. The driving component 610 includes a drive motor.

[0032] Furthermore, at least one extension 630 is provided on the rotating part 620. To improve the cleaning effect on the inside of the box 110, multiple extensions 630 can be provided. When cleaning the box 110, multiple extensions 630 rotate simultaneously into the box 110, so that the nozzle assemblies 700 at the ends of multiple extensions 630 simultaneously rinse the inside of multiple boxes 110, thereby improving the cleaning efficiency of the equipment. Please refer to... Figure 2 and Figure 3 To improve the cleaning effect, two extensions 630 are provided, with the two extensions 630 spaced apart on the rotating part 620. Furthermore, to facilitate the production and transportation of the rotating frame 600, and to facilitate the replacement of the extensions 630 during use, in this embodiment, the extensions 630 are detachably mounted on the rotating part 620.

[0033] Understandably, since the tablet holder 300 has multiple placement positions for accommodating the tablets 110, in this embodiment, a rotating frame 600 is provided on the frame 200, and multiple nozzle assemblies 700 are provided on the rotating frame 600, that is, one nozzle assembly 700 is provided on one extension 630, and multiple nozzle assemblies 700 correspond one-to-one with multiple placement positions. Thus, when the rotating frame 600 rotates, multiple nozzle assemblies 700 can enter into different tablets 110 respectively, and perform comprehensive cleaning of the inside of multiple tablets 110 at the same time, thereby improving the cleaning efficiency of the tablets.

[0034] Please refer to Figure 2 and Figure 3 In some optional embodiments, the nozzle assembly 700 includes a rotating member 710, a first nozzle 720, and a second nozzle 730. The first nozzle 720 is fixedly disposed at the end of the extension 630 away from the rotating portion 620, the rotating member 710 is disposed at the end of the extension 630 away from the rotating portion 620, and the second nozzle 730 is disposed on the rotating member 710. Specifically, the output direction of the first nozzle 720 is along the length direction of the extension 630, that is, the first nozzle 720 sprays cleaning fluid away from the extension 630. The output direction of the second nozzle 730 is perpendicular to the output direction of the first nozzle 720, and when the rotating member 710 drives the second nozzle 730 to rotate, the second nozzle 730 rotates about the length direction of the extension 630 as its axis of rotation. In some optional embodiments, the second nozzle 730 can be rotated by the rotating member 710.

[0035] By setting the nozzle assembly 700 as the first nozzle 720 and the second nozzle 730, during the process of the extension 630 rotating into the housing 110, the rotating component 710 synchronously drives the second nozzle 730 to rotate, so that the second nozzle 730 sprays cleaning fluid around the extension 630 in an upward circular motion. This, combined with the first nozzle 720 continuously spraying cleaning fluid along the length of the extension 630, thoroughly rinses the inside of the housing 110 and improves the rinsing effect on the inside of the housing 110.

[0036] For further details, please refer to Figure 2 and Figure 3 In this embodiment, one first nozzle 720 is provided at the end of the extension 630, and two second nozzles 730 are provided on the rotating member 710. The output directions of the two second nozzles 730 are opposite to each other, and the two second nozzles 730 are connected by a tube. In some optional embodiments, multiple first nozzles 720 may be provided at the end of the extension 630 to improve the rinsing effect along the length of the extension 630; at the same time, multiple second nozzles 730 may also be provided to improve the rinsing effect around the extension 630.

[0037] Furthermore, the multiple second nozzles 730 are rotationally symmetrical about the axis of the extension 630. Thus, in this embodiment, the second nozzles 730 can also rotate on their own under the reaction force of the sprayed water flow to achieve a thorough rinsing of the inside of the housing 110.

[0038] Please refer to Figure 2 and Figure 3 Multiple fixed nozzles 500 are arranged around the frame 200. When cleaning the film cassette, multiple fixed nozzles 500 spray cleaning fluid towards the film cassette holder 300 together, improving the cleaning effect on the surface of the cassette body 110 and the cassette cover 120.

[0039] In summary, the implementation principle of the wafer carrier cleaning equipment provided by this utility model is as follows: by setting up a turntable 400 and a rotating frame 600, the turntable 400 drives the wafer cassette holder 300 to rotate. When the turntable 400 drives the wafer cassette holder 300 to rotate close to the rotating frame 600, the rotating frame 600 drives the nozzle assembly 700 to rotate into the inside of the cassette 110, thereby thoroughly cleaning the inside of the cassette 110; and during the rotation of the turntable 400, the fixed nozzle 500 located in the frame 200 sprays cleaning fluid onto the turntable 400, cleaning the cassette 110 and the cassette cover 120 located on the turntable 400, thereby thoroughly cleaning the inside and outside of the cassette 110 and improving the cleaning effect of the wafer cassette.

[0040] The above description is only a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model.

Claims

1. A wafer carrier cleaning device, characterized in that, include: The rack has an internal cleaning space; The cassette holder is used to separately hold the cassette body and the cassette lid; A turntable is rotatably positioned in the cleaning space and has multiple cleaning stations for mounting the disc holders; A fixed nozzle is mounted on the frame for spraying cleaning fluid toward the turntable; A rotating frame is rotatably mounted inside the machine frame, and a nozzle assembly is mounted on the rotating frame; When the turntable rotates the disc holder to a position close to the rotating frame, the rotating frame rotates the nozzle assembly to the inside of the disc body, so that the spray surface formed by the nozzle assembly covers the inner wall of the disc body.

2. The wafer carrier cleaning equipment according to claim 1, characterized in that, The rotating frame includes a driving component, a rotating part, and an extension part. The driving component is disposed inside the frame, the rotating part is connected to the driving component, the extension part is horizontally connected to the rotating part, and the nozzle assembly is disposed at the end of the extension part away from the rotating part. The driving component is used to drive the rotating part to rotate.

3. The wafer carrier cleaning equipment according to claim 2, characterized in that, The cassette holder has several placement positions for accommodating the cassette body, and the multiple placement positions are arranged vertically.

4. The wafer carrier cleaning equipment according to claim 3, characterized in that, The rotating frame is provided with a plurality of nozzle assemblies that correspond one-to-one with the placement positions.

5. The wafer carrier cleaning equipment according to claim 2, characterized in that, At least one extension is provided on the rotating part.

6. The wafer carrier cleaning equipment according to claim 2, characterized in that, The nozzle assembly includes a rotating component, a first nozzle, and a second nozzle. The first nozzle is fixedly disposed at one end of the extension away from the rotating component. The rotating component is disposed at one end of the extension away from the rotating component. The second nozzle is disposed on the rotating component.

7. The wafer carrier cleaning equipment according to claim 6, characterized in that, The output direction of the first nozzle is along the length direction of the extension, the output direction of the second nozzle is perpendicular to the output direction of the first nozzle, and the second nozzle rotates about the length direction of the extension.

8. The wafer carrier cleaning equipment according to claim 6, characterized in that, At least two of the second nozzles are provided on the rotating component.

9. The wafer carrier cleaning equipment according to claim 6, characterized in that, The plurality of second nozzles are rotationally symmetrical about the axis of the extension.

10. The wafer carrier cleaning equipment according to any one of claims 1-9, characterized in that, Multiple fixed nozzles are arranged around the disc holder within the frame.

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