Head protection device for single wafer rods

Abstract

The utility model provides a kind of head protection device for single wafer rod, it is related to single wafer rod technical field.The head protection device, comprising: first clamping pressboard, second clamping pressboard, U-shaped clamping piece and adjusting screw.The one end of first clamping pressboard is provided with first installation slot, and the side of first clamping pressboard is provided with first clamping opening for clamping single wafer rod.The one end of second clamping pressboard is provided with second installation slot, and the side of second clamping pressboard is provided with second clamping opening for clamping single wafer rod.The opening end of clamping piece is inserted into first installation slot and second installation slot, and the first clamping opening and second clamping opening are formed between clamping through-hole for fixing single wafer rod.Adjusting screw is used to fix first clamping pressboard, second clamping pressboard and clamping piece.The head of single wafer rod is completely wrapped, to avoid the head of single wafer rod to cause harm to pedestrian.

Description

Technical Field

[0001] This utility model relates to the field of single crystal wafer rod technology, and in particular to a head protection device for single crystal wafer rods. Background Technology

[0002] In traditional processes, the head of a single crystal wafer is not properly protected during transfer, or is only temporarily protected with tape, which has the following drawbacks: 1. Adhesive tape application can easily leave adhesive residue, which can contaminate the surface of the round bar and affect the quality of subsequent processing. 2. The tape's protective strength is insufficient, and the head of the round bar still poses a safety hazard of injury; 3. Frequent application / removal of tape leads to low operational efficiency; 4. The tape material is not resistant to high temperatures and is prone to failure in some process environments. Utility Model Content

[0003] To solve the above-mentioned technical problems, this utility model provides a head protection device for single crystal wafer rods. The device completely covers the head of the single crystal wafer rod, preventing the head of the single crystal wafer rod from causing injury to pedestrians.

[0004] The technical solution adopted in this utility model is: A head protection device for a single crystal wafer includes: The first clamping pressure plate has a first mounting groove at one end and a first clamping opening for clamping a single crystal rod on one side. The second clamping pressure plate has a second mounting groove at one end and a second clamping opening for clamping a single crystal rod on one side. The U-shaped clamping member has a plate at the open end that is inserted into the first mounting groove and the second mounting groove, thereby forming a clamping through hole for fixing a single crystal rod between the first clamping opening and the second clamping opening. Adjust the screws to fix the clamping member to the first clamping plate and the second clamping plate.

[0005] Optionally, the first clamping plate and the second clamping plate are made of polytetrafluoroethylene (PTFE).

[0006] Optionally, the clamping through hole includes a cylindrical fixing hole and a trumpet-shaped transition hole. The fixing hole matches the head of the single crystal wafer rod, and the transition hole matches the transition section of the single crystal wafer rod. The transition hole is located at the bottom end away from the clamping member.

[0007] Optionally, the clamping element is made of manganese steel.

[0008] Optionally, the included angle of the orthographic projection of the transition hole is 30 degrees.

[0009] Optionally, the clamping member is integrally stamped.

[0010] Optionally, the width of the clamping member is greater than the diameter of the clamping through hole.

[0011] Compared with the prior art, the beneficial effects of this utility model are: 1. This protective device completely encloses the head of the single crystal wafer rod, preventing the head of the single crystal wafer rod from causing injury to pedestrians.

[0012] 2. Avoid using tape to prevent adhesive contamination.

[0013] 3. Avoid wasting time on using and removing adhesive tape, and avoid wasting time on cleaning adhesive residue from the surface of single crystal wafers. Attached Figure Description

[0014] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0015] Figure 1 A three-dimensional structural schematic diagram of a head protection device for a single crystal wafer.

[0016] Figure 2 This is a schematic diagram of the planar structure of a head protection device for a single crystal wafer.

[0017] Figure 3 for Figure 2 A schematic diagram of the cross-sectional structure of AA.

[0018] Figure 4 for Figure 2 Schematic diagram of the cross-sectional structure of BB.

[0019] Figure 5 A top view schematic diagram of the head protection device for a single crystal wafer rod.

[0020] Figure 6 A schematic diagram of the disassembled structure of the head protection device for a single crystal wafer.

[0021] Figure 7 A diagram showing the actual usage of a head protection device for single-crystal ingots.

[0022] Figure label: 1. First clamping pressure plate; 11. First mounting groove; 12. First clamping opening; 2. Second clamping pressure plate; 21. Second mounting groove; 22. Second clamping opening; 3. Clamping components; 4. Clamping through hole; 41. Fixing hole; 42. Transition hole; 5. Adjusting screw. Detailed Implementation

[0023] In the following description, only certain exemplary embodiments are briefly described. As those skilled in the art will recognize, the described embodiments can be modified in various ways without departing from the spirit or scope of this invention. Therefore, the drawings and description are considered exemplary in nature and not restrictive.

[0024] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0025] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a communication connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0026] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0027] The following disclosure provides many different embodiments or examples for implementing various structures of this invention. To simplify the disclosure, specific examples of components and arrangements are described below. These are merely examples and are not intended to limit the scope of the invention. Furthermore, reference numerals and / or letters may be repeated in different examples; such repetition is for simplification and clarity and does not in itself indicate a relationship between the various embodiments and / or arrangements discussed. In addition, examples of various specific processes and materials are provided, but those skilled in the art will recognize the application of other processes and / or the use of other materials.

[0028] The embodiments of this utility model will now be described in detail with reference to the accompanying drawings.

[0029] like Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 6 and Figure 7 As shown, this utility model embodiment provides a head protection device for a single-crystal ingot, including: a first clamping pressure plate 1, a second clamping pressure plate 2, a U-shaped clamping member 3, and an adjusting screw 5. One end of the first clamping pressure plate 1 is provided with a first mounting groove 11, and one side of the first clamping pressure plate 1 is provided with a first clamping opening 12 for clamping the single-crystal ingot. One end of the second clamping pressure plate 2 is provided with a second mounting groove 21, and one side of the second clamping pressure plate 2 is provided with a second clamping opening 22 for clamping the single-crystal ingot. The plate at the open end of the clamping member 3 is inserted into the first mounting groove 11 and the second mounting groove 21, forming a clamping through hole 4 for fixing the single-crystal ingot between the first clamping opening 12 and the second clamping opening 22. The adjusting screw 5 is used to fix the first clamping pressure plate 1, the second clamping pressure plate 2, and the clamping member 3.

[0030] During use, the first clamping plate 1 and the second clamping plate 2 are engaged with the head of the single crystal ingot, so that the head of the single crystal ingot is enclosed within the clamping through hole 4, preventing the head of the single crystal ingot from being exposed. During the clamping process, the inner diameter of the clamping through hole 4 can be adjusted by the clamping component 3 to accommodate single crystal ingots of different sizes.

[0031] The clamping through-hole 4 in the middle of the first clamping plate 1 and the second clamping plate 2 can be adapted to the thickness of existing fine seed crystals (single crystal rods). The clamping member 3 is fixed to the tail of the first clamping plate 1 and the second clamping plate 2 to provide clamping force to the first clamping plate 1 and the second clamping plate 2. The first clamping plate 1, the second clamping plate 2 and the clamping member 3 are fixed together by adjusting screws 5, so that the extension length of the clamping member 3 can be adjusted, thereby realizing the adjustment of the clamping force.

[0032] In one embodiment, the first clamping plate 1 and the second clamping plate 2 are made of tetrafluoroethylene, which gives the first clamping plate 1 and the second clamping plate 2 higher temperature resistance.

[0033] In one embodiment, such as Figure 4 , Figure 5 and Figure 7 As shown, the clamping through hole 4 includes a cylindrical fixing hole 41 and a trumpet-shaped transition hole 42. The fixing hole 41 matches the head of the single crystal rod, and the transition hole 42 matches the transition section of the single crystal rod. The transition hole 42 is located at the bottom end away from the clamping member 3.

[0034] In order to make the clamping through hole 4 fit with the head of single crystal rods of different sizes, the clamping through hole 4 includes a fixing hole 41 and a transition hole 42.

[0035] In one embodiment, the clamping member 3 is made of manganese steel in order to give the clamping member 3 sufficient structural strength.

[0036] In one embodiment, such as Figure 5 As shown, in order to better match the clamping through hole 4 with the single crystal rod, the included angle of the orthographic projection of the transition hole 42 is 30 degrees.

[0037] In one embodiment, to improve the structural strength of the clamping member 3, the clamping member 3 is integrally stamped.

[0038] In one embodiment, such as Figure 5 As shown, in order to prevent the single crystal rod from passing through the clamping through hole 4, the width of the clamping member 3 is greater than the diameter of the clamping through hole 4.

[0039] Finally, it should be noted that the above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A head protection device for a single crystal wafer rod, characterized in that, include: The first clamping pressure plate has a first mounting groove at one end and a first clamping opening for clamping a single crystal rod on one side. The second clamping pressure plate has a second mounting groove at one end and a second clamping opening for clamping a single crystal rod on one side. The U-shaped clamping member has a plate at the open end that is inserted into the first mounting groove and the second mounting groove, thereby forming a clamping through hole for fixing a single crystal rod between the first clamping opening and the second clamping opening. Adjust the screws to fix the clamping member to the first clamping plate and the second clamping plate.

2. The head protection device for a single crystal wafer rod according to claim 1, characterized in that, The first clamping plate and the second clamping plate are made of polytetrafluoroethylene.

3. The head protection device for a single-crystal ingot according to claim 1 or 2, characterized in that, The clamping through-hole includes a cylindrical fixing hole and a trumpet-shaped transition hole. The fixing hole matches the head of the single crystal wafer rod, and the transition hole matches the transition section of the single crystal wafer rod. The transition hole is located at the bottom end away from the clamping member.

4. The head protection device for a single crystal wafer rod according to claim 1, characterized in that, The clamping component is made of manganese steel.

5. The head protection device for a single crystal wafer rod according to claim 3, characterized in that, The included angle of the orthographic projection of the transition hole is 30 degrees.

6. The head protection device for a single crystal wafer rod according to claim 1, characterized in that, The clamping component is integrally stamped.

7. The head protection device for a single crystal wafer rod according to claim 1, characterized in that, The width of the clamping member is greater than the diameter of the clamping through hole.

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