Semiconductor micro-environment monitoring device based on ion chromatography technology

Abstract

The utility model discloses a kind of semiconductor microenvironment monitoring devices based on ion chromatography technique, sample gas is collected by gas collection assembly being set in semiconductor dust-free room, through impact bottle component, anion and cation in sample gas are dissolved as sample solution, the responsiveness of anion and cation in sample solution by different concentration gradient standard solution by ion chromatography analyzer, establish standard curve to carry out quantitative analysis, calculate the concentration of anion and cation, realize to the gaseous pollutant possibly existing in semiconductor clean room is monitored, the standard solution mother liquor and ultrapure water are evenly mixed by setting standard solution dilution bottle in the application, dilute into the standard solution of different concentration gradient, ensure the accuracy of dilution concentration, the reliability and accuracy of standard curve established by ion chromatography analyzer are significantly improved, make baseline more stable, signal-to-noise ratio increases, so that standard solution response is more accurate, realizes the accurate quantitative analysis of anion and cation concentration in semiconductor dust-free room.

Description

Technical Field

[0001] This invention belongs to the field of ion chromatography analysis technology and relates to the monitoring of semiconductor microenvironments, specifically a semiconductor microenvironment monitoring device based on ion chromatography technology. Background Technology

[0002] With the continuous advancement of semiconductor manufacturing processes, linewidth dimensions are shrinking, process complexity is increasing, and the cleanliness requirements for the production environment are becoming increasingly stringent. Airborne molecular contaminants (AMCs) have become one of the key factors affecting wafer yield. Among them, cations and anions (such as NH4+)... + Cl - SO4 2- Anions and cations (ACs, etc.) are important components of AMC (Anion and Cation Concentration Management). If deposited on the wafer surface, they can lead to defects, corrosion, or deterioration of film performance, thereby affecting device reliability and process stability. Therefore, real-time and accurate monitoring of cation and anion concentrations in the semiconductor cleanroom environment is crucial.

[0003] Ion chromatography (IC) is one of the mainstream technologies currently used for AMC monitoring. Based on the principle of liquid chromatography, it can efficiently separate and detect cations and anions. In quantitative analysis, the standard curve method is the most commonly used method, which involves establishing a response curve using standard solutions of different concentration gradients, and then calculating the ion concentration based on the sample's response signal.

[0004] However, in existing technologies, the dilution of standard solutions of different concentrations typically involves using two separate pumps to extract the standard solution stock solution and ultrapure water, which are then directly transported into the ion chromatograph for mixing in a specific ratio. Due to the lack of effective mixing methods, the dilution homogeneity is insufficient, and the concentration of the diluted standard solution may be uneven, leading to poor linearity of the standard curve and affecting the accuracy of quantitative analysis. Furthermore, without proper mixing, bubbles are easily generated when the standard solution stock solution is mixed with ultrapure water. These bubbles, once introduced into the ion chromatograph, can cause baseline fluctuations, reduced signal-to-noise ratio, and even peak distortion, severely impacting the reliability of the detection results. Utility Model Content

[0005] To address the technical problems existing in the background art, this utility model proposes a semiconductor microenvironment monitoring device based on ion chromatography technology, which can achieve precise dilution and uniform mixing of standard solutions, thereby improving the accuracy and stability of ion chromatography analysis and better serving semiconductor microenvironment monitoring.

[0006] The objective of this utility model can be achieved through the following technical solutions:

[0007] A semiconductor microenvironment monitoring device based on ion chromatography technology includes:

[0008] A gas collection component is installed inside the semiconductor cleanroom to collect sample gases within the cleanroom.

[0009] The impact bottle assembly is connected to the gas collection assembly to dissolve the anions and cations in the sample gas to obtain a sample solution;

[0010] The standard solution dilution bottle is connected to the standard solution stock solution bottle and the ultrapure water storage bottle respectively, so as to mix the standard solution stock solution and ultrapure water evenly according to the preset ratio and dilute them into standard solutions with different concentration gradients.

[0011] The ion chromatograph is connected to the standard solution dilution bottle and the shock bottle assembly, respectively. By using the response of standard solutions of different concentration gradients to the anions and cations in the sample solution, a standard curve is established for quantitative analysis.

[0012] Furthermore, the top of the standard solution dilution bottle is connected to a first nitrogen gas line, and the bottom of the standard solution dilution bottle is equipped with a bubbler. The first nitrogen gas line is inserted into the bottom of the standard solution dilution bottle and connected to the bubbler.

[0013] Furthermore, the top of the standard solution dilution bottle is equipped with a spiral tube, one end of which is inserted into the standard solution dilution bottle and communicates with it.

[0014] Furthermore, the standard solution dilution bottle is connected to the standard solution mother liquor bottle via a first flow pump, and the standard solution dilution bottle is connected to the ultrapure water storage bottle via a second flow pump. The ion chromatograph is connected to the standard solution dilution bottle via a liquid extraction pump.

[0015] Furthermore, the gas acquisition component includes: multiple monitoring nodes, a switching valve, and a vacuum pump. The multiple monitoring nodes are evenly distributed within the semiconductor cleanroom. Each monitoring node is connected to the switching valve via a PFA pipeline. The switching valve is connected to the vacuum pump, and the vacuum pump is connected to the impact bottle assembly.

[0016] Furthermore, the impact bottle assembly includes an impact bottle, one end of which is connected to a gas collection component and the other end of which is connected to an ion chromatograph. The impact bottle contains a fixed volume of ultrapure water, a second nitrogen line is connected to the top of the impact bottle, and a drain port is provided at the bottom of the impact bottle.

[0017] Furthermore, the impact bottle is equipped with a liquid level sensor, and the impact bottle is connected to an ultrapure water storage bottle via a third flow pump.

[0018] Furthermore, the impact bottle assembly also includes an anti-backflow bottle, which is connected to the impact bottle, and a leakage sensor is provided at the connection between the anti-backflow bottle and the impact bottle.

[0019] Furthermore, the monitoring device also includes a detector, which is communicatively connected to an ion chromatograph and outputs the data of anions and cations in the form of a report based on the quantitative analysis results of the ion chromatograph.

[0020] The beneficial effects of this utility model are as follows: The semiconductor microenvironment monitoring device provided in this application collects sample gas through a gas collection component installed in a semiconductor cleanroom. An anion and cation in the sample gas are dissolved into a sample solution through an impact bottle assembly. An ion chromatograph establishes a standard curve for quantitative analysis by measuring the response of standard solutions of different concentration gradients to the anions and cations in the sample solution, calculating the concentration of anions and cations. This enables the monitoring of gaseous pollutants that may exist in the semiconductor cleanroom. This application uses a standard solution dilution bottle to uniformly mix the standard solution stock solution and ultrapure water, diluting it into standard solutions of different concentration gradients. This ensures accurate dilution concentrations, significantly improving the reliability and accuracy of the standard curve established by the ion chromatograph. Furthermore, it avoids air bubbles entering the detection instrument, resulting in a more stable baseline, increased signal-to-noise ratio, and more accurate standard solution response. This achieves precise quantitative analysis of the anion and cation concentrations within the semiconductor cleanroom. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the present invention.

[0022] Figure 2 This is a schematic diagram of the impact bottle assembly of this utility model.

[0023] Figure 3 This is a schematic diagram of the standard dilution bottle of this utility model.

[0024] Figure 4 This is a standard curve of ammonium ions obtained by diluting the standard solution using existing technology.

[0025] Figure 5 This is a standard curve of ammonium ions obtained by diluting the standard solution according to this invention. Detailed Implementation

[0026] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0027] like Figure 1As shown, this utility model provides a semiconductor microenvironment monitoring device based on ion chromatography technology, including: a gas collection component, an impact bottle component, a standard solution dilution bottle, an ion chromatograph, and a detector. The gas collection component is installed in a semiconductor cleanroom to collect the gas inside the cleanroom as the sample gas. The impact bottle component is connected to the gas collection component to dissolve the anions and cations in the sample gas collected by the gas collection component in water to obtain a sample solution. The standard solution dilution bottle is connected to a standard solution stock solution bottle and an ultrapure water storage bottle to mix the standard solution stock solution and ultrapure water at a preset ratio to dilute them into standard solutions of different concentration gradients. The ion chromatograph is connected to the standard solution dilution bottle and the impact bottle component. By using the response of the different concentration gradient standard solutions provided by the standard solution dilution bottle to the anions and cations in the sample solution, a standard curve is established for quantitative analysis to calculate the concentrations of anions and cations. The detector is communicatively connected to the ion chromatograph. Based on the quantitative analysis results of the ion chromatograph, the data of anions and cations are output in report form to determine whether they exceed the limits. If they do, retesting and investigation of the cause are required.

[0028] The gas acquisition component includes: multiple monitoring nodes CH01, CH02, ..., a switching valve, and a vacuum pump. The multiple monitoring nodes are evenly distributed within the semiconductor cleanroom. Due to process requirements, each monitoring node is connected to a switching valve via a PFA pipeline. The switching valve is connected to the vacuum pump, and the vacuum pump is connected to the impact bottle assembly. This allows for the selective acquisition of gas near any monitoring node within the semiconductor cleanroom and its delivery to the impact bottle assembly for dissolution. Specifically, the switching valve controls the monitoring node from which sample gas is extracted, and the flow rate and time of the vacuum pump are controlled to extract a preset volume of sample gas from the vicinity of the corresponding monitoring node.

[0029] like Figure 2 As shown, the impact bottle assembly includes an impact bottle and an anti-backflow bottle. The impact bottle contains a fixed volume of ultrapure water. One end of the impact bottle is connected to a gas collection component, which introduces the collected sample gas into the ultrapure water within the impact bottle to dissolve it, obtaining a sample solution. Bubbling of the sample gas in the water increases the contact area and improves the efficiency of dissolving anions and cations in the sample gas in water. The other end of the impact bottle is connected to an ion chromatograph. A second nitrogen line is connected to the top of the impact bottle, and a drain port is located at the bottom. Driven by N2 introduced through the second nitrogen line, a portion of the sample solution in the impact bottle is transported to the ion chromatograph for detection, while excess sample solution is discharged into the waste liquid through the drain port.

[0030] The impact flask is equipped with a level sensor. It is connected to an ultrapure water storage bottle via a third flow pump. The level sensor collects real-time data on the ultrapure water level in the impact flask, and the third flow pump controls the flow rate and time of the ultrapure water entering the impact flask to ensure a constant volume of ultrapure water. An anti-backflow bottle is connected to the impact flask, and a leakage sensor is installed at the connection point. When backflow occurs in the impact flask, the overflowing sample solution enters the anti-backflow bottle, preventing short circuits caused by sample solution spillage. Simultaneously, the leakage sensor detects the overflowing sample solution and issues an alarm signal, prompting personnel to stop the operation immediately.

[0031] like Figure 3 As shown, the standard solution dilution bottle is connected to the standard solution stock bottle via a first flow pump to quantitatively draw the standard solution stock solution from the stock bottle. The standard solution dilution bottle is connected to the ultrapure water storage bottle via a second flow pump to quantitatively draw ultrapure water from the ultrapure water storage bottle, ensuring thorough mixing of the standard solution stock solution and ultrapure water within the standard solution dilution bottle. Taking the analysis of ammonium ions as an example, an ammonium standard solution stock solution of 12 ppb needs to be diluted to concentration gradients of 0.1, 0.5, 1.0, 1.5, 2.0, and 2.5 ppb. Specifically, when diluting the 12 ppb ammonium standard solution stock solution to 18 ml of 2.0 ppb ammonium standard solution, the flow rate and time of the first flow pump are controlled to ensure that the volume of the 12 ppb standard solution stock solution entering the standard solution dilution bottle is 3 ml, and the flow rate and time of the second flow pump are controlled to ensure that the volume of ultrapure water entering the standard solution dilution bottle is 15 mL.

[0032] The standard solution dilution bottle has a first nitrogen gas line connected to its top and a bubbler at its bottom. The first nitrogen gas line is inserted into the bottom of the bottle and connected to the bubbler. N2 is introduced into the bottle through the first nitrogen gas line, and the bubbler agitates the solution by controlling the flow rate and time of the N2, ensuring uniform mixing of the standard solution stock solution and ultrapure water and guaranteeing accurate dilution concentration. Simultaneously, to prevent excessive bubbling, a spiral tube is installed at the top of the bottle. One end of the spiral tube is inserted into the bottle and connected to it. This allows the diluted standard solution to be subjected to centrifugal force within the spiral tube, causing the liquid to move towards the outer wall of the tube, forming a combined axial and vertical flow. Based on fluid dynamics equilibrium, this process of repeated mixing and settling of the diluted standard solution prevents overflow from the bottle while maintaining the correct dilution concentration.

[0033] The ion chromatograph is connected to a standard solution dilution bottle via a pump to draw standard solutions of different concentration gradients from the bottle. After the sample solution in the bottle is injected into the ion chromatograph, different anions and cations exhibit specific responses. A standard curve is established based on the different response areas of the standard solutions at different concentration gradients. The sample solution is then quantified according to the standard curve to calculate the concentrations of the anions and cations. Specifically, for example... Figure 4-5 As shown, Figure 4 The figure shows the correlation coefficient R of the standard curve of ammonium ions obtained when the standard solution mother liquor and ultrapure water are directly transported to the ion chromatograph for mixing in a proportional manner in the existing technology. 2 =0.9961, and Figure 5 The standard curve of ammonium ions obtained when the standard solution stock solution and ultrapure water are extracted in proportion and mixed evenly in a standard solution dilution bottle before being transferred to an ion chromatograph in this application, with a correlation coefficient R. 2 =1. Obviously, by using a standard solution dilution bottle to uniformly mix the standard solution stock solution and ultrapure water, the concentration of the standard solution is accurate, which significantly improves the accuracy and reliability of the standard curve. Furthermore, the baseline fluctuation is more stable, the signal-to-noise ratio is increased, and the standard solution response is more accurate.

[0034] The above description is merely an example and illustration of the structure of this utility model. Those skilled in the art can make various modifications or additions to the specific embodiments described or use similar methods to replace them, as long as they do not deviate from the structure of the utility model or exceed the scope defined in the claims, they should all fall within the protection scope of this utility model.

Claims

1. A semiconductor microenvironment monitoring device based on ion chromatography technology, characterized in that, include: A gas collection component is installed inside the semiconductor cleanroom to collect sample gases within the cleanroom. The impact bottle assembly is connected to the gas collection assembly to dissolve the anions and cations in the sample gas to obtain a sample solution; The standard solution dilution bottle is connected to the standard solution stock solution bottle and the ultrapure water storage bottle respectively, so as to mix the standard solution stock solution and ultrapure water evenly according to the preset ratio and dilute them into standard solutions with different concentration gradients. The ion chromatograph is connected to the standard solution dilution bottle and the shock bottle assembly, respectively. By using the response of standard solutions of different concentration gradients to the anions and cations in the sample solution, a standard curve is established for quantitative analysis.

2. The monitoring device according to claim 1, characterized in that, The standard solution dilution bottle is connected to a first nitrogen line at the top and a bubbler at the bottom. The first nitrogen line is inserted into the bottom of the standard solution dilution bottle and connected to the bubbler.

3. The monitoring device according to claim 2, characterized in that, The standard solution dilution bottle is equipped with a spiral tube at the top, with one end of the spiral tube inserted into the standard solution dilution bottle and connected to it.

4. The monitoring device according to claim 1, characterized in that, The standard solution dilution bottle is connected to the standard solution stock bottle via a first flow pump, and the standard solution dilution bottle is connected to the ultrapure water storage bottle via a second flow pump. The ion chromatograph is connected to the standard solution dilution bottle via a liquid extraction pump.

5. The monitoring device according to claim 1, characterized in that, The gas acquisition component includes: multiple monitoring nodes, switching valves, and a vacuum pump. The multiple monitoring nodes are evenly distributed in the semiconductor cleanroom. Each monitoring node is connected to a switching valve through a PFA pipeline. The switching valve is connected to the vacuum pump, and the vacuum pump is connected to the impact bottle assembly.

6. The monitoring device according to claim 1, characterized in that, The impact bottle assembly includes an impact bottle, one end of which is connected to a gas collection component and the other end to an ion chromatograph. The impact bottle contains a fixed volume of ultrapure water, a second nitrogen line is connected to the top of the impact bottle, and a drain port is provided at the bottom of the impact bottle.

7. The monitoring device according to claim 6, characterized in that, The impact bottle is equipped with a liquid level sensor and is connected to an ultrapure water storage bottle via a third flow pump.

8. The monitoring device according to claim 6, characterized in that, The impact bottle assembly also includes an anti-backflow bottle, which is connected to the impact bottle, and a leakage sensor is provided at the connection between the anti-backflow bottle and the impact bottle.

9. The monitoring device according to claim 1, characterized in that, It also includes a detector, which is connected to the ion chromatograph and outputs the anion and cation data in report form based on the quantitative analysis results of the ion chromatograph.

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