Optical-mechanical module and near-eye display device
By optimizing the matching design of the scanning unit and the waveguide in the optomechanical module, the problem of secondary diffraction of the beam in the coupling region is solved, improving the imaging quality and adapting to the miniaturization requirements of near-eye display devices.
Patent Information
- Application Number
- CN202521978131.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-09-15
- Publication Date
- 2026-08-25
- Estimated Expiration
- 2035-09-15
AI Technical Summary
In waveguide design, increasing the size of the coupling region leads to more secondary diffraction of the beam entering the coupling region. Existing technologies make it difficult to ensure the matching between the beam spot and the coupling region, which affects the imaging quality.
Design an optomechanical module including a scanning unit and a waveguide. By limiting the scanning unit to be close to the coupling region of the waveguide at the light convergence point in the first display direction and located at the galvanometer at the light convergence point in the second display direction, ensure that the light spot at the exit pupil of the optomechanical module matches the coupling region of the waveguide. The combination of lens and galvanometer is used to adjust the optical path and optimize the coupling efficiency of the beam.
It achieves the minimum beam size across the entire field of view when the light spot enters the coupling region, improving the imaging quality of the optomechanical module and making it suitable for miniaturized design of near-eye display devices.
Smart Images
Figure CN224682484U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of scanning display technology, specifically to an optomechanical module and a near-eye display device. Background Technology
[0002] Scanning display imaging, as an emerging display technology, can be used in various application scenarios such as projection display and near-eye display.
[0003] In waveguide design, an increase in the size of the coupling region will lead to an increase in secondary diffraction of the light beam entering the coupling region. Therefore, the light spots incident on the waveguide coupling region need to overlap as much as possible, and the size of the coupling region should be small enough while ensuring assembly tolerance.
[0004] Based on this, this specification provides an optomechanical module that matches the optomechanical exit pupil position with the waveguide coupling region. Utility Model Content
[0005] The purpose of this application is to provide an optomechanical module, including a scanning unit and a waveguide. The scanning unit includes a fiber optic scanner, a lens, and a galvanometer. The scanning fiber of the fiber optic scanner vibrates along a first vibration direction under the drive of a driving signal and forms a linear scanning trajectory. After passing through the lens, the light enters the reflecting surface of the galvanometer. The galvanometer vibrates along a second vibration direction, forming an image under the action of the galvanometer, which enters the coupling region of the waveguide. The angle between the side of the galvanometer near the waveguide and the side of the waveguide is not greater than 20 degrees, and the projection of the galvanometer on the waveguide at least partially overlaps with the coupling region of the waveguide. The distance between the light convergence point of the scanning unit in the first display direction and the coupling region of the waveguide is within 2 mm. The light convergence point of the scanning unit in the second display direction is located at the galvanometer.
[0006] In some embodiments of this application, the coupling region of the waveguide is elliptical with its major axis along the second display direction.
[0007] In some embodiments of this application, the first display direction and the second display direction are spatially perpendicular, corresponding to the horizontal and vertical orientations of the displayed image.
[0008] In some embodiments of this application, the angle between the reflecting surface of the galvanometer and the surface where the coupling region is located ranges from 30 to 60 degrees.
[0009] In some embodiments of this application, the light-emitting surface of the lens is disposed opposite to the reflective surface of the galvanometer, and the light emitted from the light-emitting surface of the lens is reflected by the reflective surface of the galvanometer to the coupling region of the waveguide.
[0010] In some embodiments of this application, an optical path deflection unit is further provided between the lens and the waveguide. The optical path deflection unit is located on the light output path of the lens, and the reflecting surface of the optical path deflection unit is parallel to one side of the galvanometer.
[0011] This application embodiment also provides a near-eye display device, including an eyeglass body and the above-mentioned optomechanical module, wherein the eyeglass body includes a frame and temples, the waveguide is located in the frame, and the fiber optic scanner, the lens and the galvanometer are disposed on the temples or the frame.
[0012] The technical solution adopted in this application embodiment can achieve the following technical effects: by limiting the scanning unit to the coupling region of the waveguide at the light convergence point in the first display direction and to the galvanometer at the light convergence point in the second display direction, the light spot at the exit pupil position of the optomechanical module is matched with the coupling region of the waveguide, thereby ensuring that the beam size of the entire field of view is minimized when the light spot enters the coupling region, and improving the imaging quality of the optomechanical module.
[0013] Other features and advantages of this application will be set forth in the following description, and will be apparent in part from the description, or may be learned by practicing the technical solutions of this application. The objectives and other advantages of this application may be realized and obtained by means of the structures and / or processes particularly pointed out in the description, claims and drawings. Attached Figure Description
[0014] Other features, objects, and advantages of this application will become more apparent from the following detailed description of non-limiting embodiments with reference to the accompanying drawings:
[0015] Figure 1 This is a schematic diagram of the optical-mechanical module provided in the embodiments of this application;
[0016] Figure 2 This is a schematic diagram of the scanning unit provided in an embodiment of this application;
[0017] Figure 3 This is a schematic diagram of the structure of the near-eye display device provided in the embodiments of this application;
[0018] Figure 4 This is a schematic diagram of the structure of the galvanometer and waveguide provided in the embodiments of this application;
[0019] Figure 5 This is a schematic diagram of another state of the galvanometer and waveguide provided in an embodiment of this application;
[0020] Figure 6A and Figure 6B These are schematic diagrams of the optical path of the optomechanical module from different perspectives provided in the embodiments of this application;
[0021] Figure 7 Based on Figure 6A and Figure 6B A schematic diagram of the coupling region of the waveguide in the optical-mechanical module shown.
[0022] Figure 8A and Figure 8B These are schematic diagrams of the optical path of the optomechanical module from different perspectives provided in the embodiments of this application;
[0023] Figure 9 Based on Figure 8A and Figure 8B The diagram shows the structural schematic of the coupling region of the waveguide of the optomechanical module. Detailed Implementation
[0024] The present application will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, only the parts relevant to the invention are shown in the accompanying drawings.
[0025] Figure 1 This is a schematic diagram of the optical-mechanical module provided in an embodiment of this application. Please refer to it. Figure 1 The optomechanical module 100 may include a scanning unit and a waveguide 14. The scanning unit includes a fiber optic scanner 11, a lens 12, and a galvanometer 13. The fiber optic scanner 13 mainly includes a fiber optic actuator 111 and a scanning fiber 112.
[0026] The fiber optic actuator 111 can be a piezoelectric actuator and can be placed inside a base. Typically, the scanning fiber 112 can be cantilevered and mounted on the surface of the fiber optic actuator 111. That is, the emitting end of the scanning fiber 112 is suspended outside the fiber optic actuator 111, while the input end can be coupled to the laser emitter to receive the laser beam. The driving circuit of the fiber optic actuator 111 provides the driving signal, enabling the fiber optic actuator 111 to vibrate at a set operating frequency, further driving the scanning fiber 112 in a plane (e.g., ...). Figure 1 Vibration scanning within the XZ plane (as shown).
[0027] The scanning fiber 112, serving as a flexible transmission and mode-controlled laser transmission medium, typically employs a cantilever structure. One end of the scanning fiber 112 is fixed to the fiber actuator 111, while the other end serves as the light-emitting end for scanning. Its scanning mode can be achieved by controlling the vibration frequency and phase of the fiber actuator 111.
[0028] The laser beam projected by the scanning fiber 112 can always be monochromatic, achieving a monochromatic projected image. Alternatively, it can use time-division multiplexing to change the intensity and color of the laser beam projected by the scanning fiber 112 at different times, based on the image information to be displayed, so that the laser beam projected by the scanning fiber 112 matches the laser color and intensity at a specific projection point at a certain moment. Another method for color projection is to use an RGB single-mode fiber, directly projecting the mixed beam at the RGB light source input for each pixel. However, when the beam exits at the output end of the scanning fiber 112, interference and divergence are inevitable, affecting image quality.
[0029] When the light beam is emitted from the output end of the scanning fiber 112, it is inevitably subject to interference. Therefore, in order to improve the imaging quality, an optical component, such as a lens 12, can be set in the optical path so that the light beam emitted from the output end of the scanning fiber 112 can be adjusted. At the same time, it is necessary to minimize the volume and size of the entire laser scanning device as much as possible without affecting the imaging quality, so as to meet the miniaturization requirements of the application products.
[0030] The galvanometer 13, as a key actuator for beam deflection, achieves two-dimensional spatial deflection of the laser beam by changing the angle of the reflecting mirror surface. It is classified into two types: single-axis (line scanning) and dual-axis (area scanning). When the beam emitted from the light-emitting surface of the lens 12 is reflected by the galvanometer, the optical path can be adjusted to form an image on the desired imaging surface. Specifically, based on their working principle, galvanometers can be classified as piezoelectric galvanometers, electromagnetic galvanometers, etc. The galvanometer includes a reflecting mirror; under external drive, the reflecting mirror can rotate around an axis, which is related to... Figure 1 The X-direction shown is parallel and vibrates back and forth at a set frequency. The mirror can be connected to the rotating shaft in different ways, for example, it can be placed in a frame with a rotating shaft and rotatably fitted onto a rotating shaft. The galvanometer and the fiber optic actuator 111 can share a unified external circuit, which provides different driving signals so that the two have different operating frequencies.
[0031] Continue to refer to Figure 1 The scanning fiber 112 of the fiber optic scanner 11 is driven by a driving signal along a first vibration direction (e.g., Figure 1 The X-axis (as shown) vibrates and forms a linear scanning trajectory, which, after passing through lens 12, enters the reflecting surface of galvanometer 13. Galvanometer 13 vibrates along the second vibration direction (e.g., Figure 1 The vibration (shown on the Y-axis) forms an image under the action of the galvanometer 13 and enters the coupling region 141 of the waveguide 14.
[0032] It should be noted that in the embodiments of this specification, the first vibration direction and the second vibration direction are not consistent with the display direction of a conventional scanning display system. (Refer to...) Figure 2Ideally, an XYZ three-dimensional coordinate system is established with any point on the optomechanical module as the origin. One side of the galvanometer is parallel to the X-axis, so its vibration direction is consistent with the Y-axis. The scanning unit only needs to vibrate parallel to the X-axis. In this case, the direction perpendicular to the paper can be regarded as the first vibration direction (e.g., ...). Figure 2 The X-axis shown in the diagram), and the height direction of the fiber optic scanner and lens can be considered as the second vibration direction (e.g., the X-axis). Figure 2 (The Y-axis is shown in the diagram). To more clearly illustrate the relationship between the first vibration direction, the second vibration direction, the first display direction, and the second display direction, a three-dimensional xyz coordinate system is established here, with any point on the waveguide as the origin. Specifically, the length direction of the waveguide (the direction perpendicular to the paper) is the x-axis, the height direction of the waveguide is the y-axis, and the thickness direction of the waveguide is the z-axis. (Continue referring to...) Figure 2 Here, the first display direction is the same as the first vibration direction, and the second display direction is the same as the second vibration direction. However, in the design of near-eye display devices, to ensure wearing comfort, the lenses and temples are usually vertically aligned. The specific structure of the eyeglass frame is referenced... Figure 3 Furthermore, to ensure that the light output direction of the near-eye display device can be controlled in the central field of view, the fiber optic scanner of the optomechanical module rotates according to the reflected light path of the lens. Since there may be a deflection in the light path between the scanning unit and the galvanometer, the optical axis will rotate. When the vibration direction (e.g., the first vibration direction) rotates along one axis of the spatial coordinate system XYZ, it will cause the display direction (e.g., the first display direction) to rotate along the other axis. This results in the first vibration direction and the first display direction not being parallel in space. In practical applications, the rotation is performed in space according to the reflected light path of the lens, and the specific rotation angle is determined based on the angle between the temple and the lens. Further, the first display direction and the second display direction remain perpendicular in space, corresponding to the horizontal and vertical axes of the displayed image, respectively.
[0033] Reference Figure 4 To ensure minimal beam separation of the image light reflected by the galvanometer 13 upon reaching the coupling region of the waveguide 14, thereby improving the coupling efficiency, the galvanometer 13 needs to be as close as possible to the waveguide 14. Specifically, the angle A between the side of the galvanometer 13 closest to the waveguide 14 and the coupling region 141 of the waveguide 14 should not be too large. Ideally, the angle A between the side of the galvanometer 13 closest to the waveguide 14 and the side surface of the waveguide 14 should not exceed 20 degrees, and the projection of the reflecting surface of the galvanometer 13 onto the waveguide 14 should at least partially overlap with the coupling region 141 of the waveguide 14. Preferably, the angle A between the side of the galvanometer 13 closest to the waveguide 14 and the side surface of the waveguide 14 should not exceed 10 degrees. (Refer to...) Figure 5 More preferably, the side of the galvanometer 13 closest to the waveguide 14 rests against the side of the waveguide 14.
[0034] Figure 6A and Figure 6B This is a schematic diagram of an optomechanical module provided in an embodiment of this specification. (Refer to...) Figure 6A The beam convergence point (i.e., the exit pupil position) at the output end of the scanning unit should be close to the coupling region 141 of the waveguide 14, and the beam spot at this convergence point should coincide as much as possible with the coupling region of the waveguide. Thus, the beam convergence point of the scanning unit needs to be located at the galvanometer or between the galvanometer and the coupling region of the waveguide, so that the beam spot emitted by the scanning unit can enter the coupling region 141 of the waveguide 14 as completely as possible, thereby improving the coupling efficiency of the emitted beam entering the coupling region 141. (Refer to...) Figure 6B The exit pupil position of the scanning unit in the second display direction needs to be located at the galvanometer 13. Specifically, the distance between the light convergence point of the scanning unit in the first display direction and the coupling region 141 of the waveguide 14 is within 2 mm; the light convergence point of the scanning unit in the second display direction is located at the galvanometer 13. Preferably, the distance between the light convergence point of the scanning unit in the first display direction and the coupling region 141 of the waveguide 14 is within 1 mm.
[0035] In the optomechanical module provided in the embodiments of this specification, by limiting the scanning unit to the coupling region of the waveguide at the light convergence point in the first display direction and to the galvanometer at the light convergence point in the second display direction, the light spot at the exit pupil position of the optomechanical module is matched with the coupling region 141 of the waveguide 14, thereby ensuring that the beam size of the entire field of view is minimized when the light spot enters the coupling region, and improving the imaging quality of the optomechanical module.
[0036] The coupling region 141 of waveguide 14 is typically circular to ensure that the area of the coupling region 141 is small while still matching the light spot projected by the scanning unit to the coupling region 141. Please refer to... Figures 6A to 7 The galvanometer vibrates along the second vibration direction. To ensure that the coupling region 141 of the waveguide 14 can match the diffusion direction of the light spot in the first and second display directions respectively, thereby improving coupling efficiency, and at the same time, the size of the coupling region 141 can be designed to be relatively small, in some embodiments, the coupling region 141 is elliptical with its major axis along the second display direction. It should be noted that the elliptical shape with its major axis along the second display direction is the preferred option for the coupling region 141. In other alternative embodiments, the coupling region 141 can also be rectangular, trapezoidal, or other shapes, where the length direction of the rectangular, trapezoidal, or other shapes is the same as the aforementioned second display direction. Furthermore, when the scanning unit rotates around the optical axis, Figure 7 The elliptical coupling region shown also rotates with the scanning unit.
[0037] In some embodiments, an optical path deflection unit may be provided between the lens and the waveguide of the optomechanical module. This unit changes the direction of the light rays and is located on the light-emitting path of the lens, with its reflective surface parallel to the reflective surface of the galvanometer. Light rays emitted from the lens's light-emitting surface enter the reflective surface of the galvanometer under the influence of the reflective surface of the optical path deflection unit. The galvanometer's reflective surface changes the light path, and simultaneously, the reflective surface vibrates along a second vibration direction. Under this influence, the light rays form a two-dimensional image, and the beam of the two-dimensional image is coupled into the coupling region of the waveguide. As an example only, the optical path deflection unit may include other optical elements used to change the direction of light rays, such as a plane mirror or prism.
[0038] This specification uses a plane mirror as a specific example to illustrate the embodiments of the optical path deflection unit. (Refer to...) Figure 6A A reflector 15 can also be provided between the lens and the waveguide 14 of the optomechanical module. The reflector 15 is located in the light output path of the lens, and the reflecting surface of the reflector 15 is parallel to the reflecting surface of the galvanometer 13. The light emitted from the light output surface of the lens enters the reflecting surface of the galvanometer 13 under the action of the reflecting surface of the reflector 15. The reflecting surface of the galvanometer 13 changes the light path. At the same time, the reflecting surface of the galvanometer 14 vibrates along the second vibration direction. Under this action, the light forms a two-dimensional image, and the beam of the two-dimensional image is coupled into the coupling region 141 of the waveguide 14.
[0039] The galvanometer 13 needs to receive light from the reflector 15 and simultaneously project that light onto the coupling region 141 of the waveguide 14. Therefore, the angle between the reflective surface of the galvanometer 13 and the plane containing the coupling region 141 affects the coupling efficiency of the light from the scanning unit to the coupling region 141. Specifically, when the angle between the reflective surface of the galvanometer 13 and the plane containing the coupling region 141 is too large, the incident light spot size requires a larger mirror size, which is detrimental to the miniaturization design of the optomechanical module. When the angle between the reflective surface of the galvanometer 13 and the plane containing the coupling region 141 is too small, the deflection angles of the reflector 15 and the galvanometer 13 are too large, resulting in a more complex light path and a larger optomechanical module size. When this optomechanical module is applied to a near-eye display device, it leads to a large size of the temple in the height direction, which is also detrimental to the miniaturization design of the near-eye display device. Based on the above problems, in the embodiments of this specification, the angle between the reflective surface of the galvanometer 13 and the plane containing the coupling region 141 is in the range of 30-60 degrees. In this way, the optomechanical module can be made smaller in size while ensuring the coupling efficiency of the light emitted from the scanning unit to the coupling area, thereby improving the imaging quality.
[0040] In some embodiments, a reflection unit may not be provided between the lens and the galvanometer, and the light emitted from the lens's emitting surface can be directly projected onto the galvanometer's reflecting surface. In this case, the emitting surface of the lens and the reflecting surface of the galvanometer are positioned opposite each other, and the light emitted from the emitting surface of the lens is reflected by the galvanometer's reflecting surface to the coupling region of the waveguide.
[0041] Figure 8A and Figure 8B This is a schematic diagram of another optomechanical module provided in the embodiments of this specification.
[0042] Figure 8A and Figure 8B The optical engine module shown is the same as the one described above. Figure 6A and Figure 6B The overall structure of the optical engine modules shown is roughly the same, with the biggest difference being the optical axis direction of the fiber scanner and lens in the optical engine module. Figure 8A The Z2 axis direction shown) and the second display direction ( Figure 8A The arrow (y-direction) shown is parallel to the light output path of the lens. Correspondingly, the reflecting surface of the galvanometer is on the light output path of the lens, and the projection of the reflecting surface of the galvanometer 13 onto the waveguide at least partially overlaps with the coupling region 141 of the waveguide 14. Specifically, the scanning fiber of the fiber optic scanner is driven by the driving signal along the first vibration direction (…). Figure 8A The light-emitting surface of the lens is directly projected onto the reflecting surface of the galvanometer 13 via the light-emitting surface of the lens (in the X2 axis direction shown in the image) and forms a linear scanning trajectory. The reflecting surface of the galvanometer 13 is along the second vibration direction (in the X2 axis direction shown in the image) to form a linear scanning trajectory. Figure 8A Vibration in the Y2 axis direction shown in the figure generates a two-dimensional image based on the light emitted from the light-emitting surface of the lens. The light beam of the two-dimensional image is coupled into the coupling region 141 of the waveguide 14.
[0043] Furthermore, the distance between the scanning unit at the light convergence point in the first display direction and the coupling region 141 of the waveguide 14 is within 2 mm; the light convergence point of the scanning unit in the second display direction is located at the galvanometer 13. Preferably, the distance between the scanning unit at the light convergence point in the first display direction and the coupling region 141 of the waveguide 14 is within 1 mm. In the optomechanical module provided in this specification embodiment, by limiting the scanning unit to be close to the coupling region of the waveguide at the light convergence point in the first display direction and to be located at the galvanometer in the second display direction, the light spot at the exit pupil position of the optomechanical module matches the coupling region 141 of the waveguide 14, thereby ensuring that the beam size across the entire field of view is minimized when the light spot enters the coupling region, and improving the imaging quality of the optomechanical module.
[0044] It should be noted that, Figure 8A and Figure 8BThe optical engine module shown is merely a specific example provided in this application. In other embodiments, the optical axis directions of the fiber scanner and lens in the optical engine module can form an angle with the second display direction. The goal is simply to allow light from the lens's output surface to enter the galvanometer, without further limiting the range of the angle. Given that the optical axis directions of the fiber scanner and lens in the optical engine module can form an angle with the second display direction, the first vibration direction and the second vibration direction after rotation are also relative to each other. Figure 8A and Figure 8B The first and second vibration directions shown change, but after rotation, the first and second vibration directions can still coincide with the first and second display directions respectively after a reverse rotation. Regarding the arrangement of the galvanometer relative to the waveguide, for example, the angle between the waveguide side and the side of the waveguide, please refer to the aforementioned... Figure 6A and Figure 6B The corresponding content and the angle between the reflecting surface of the galvanometer and the coupling region of the waveguide can be referred to the above. Figure 6A and Figure 6B The corresponding content will not be elaborated further here.
[0045] The coupling region 141 of waveguide 14 is typically circular to ensure that the area of the coupling region 141 is small while still matching the light spot projected by the scanning unit to the coupling region 141. Please refer to... Figures 8A to 9 The galvanometer vibrates along the second vibration direction. To ensure that the coupling region 141 of the waveguide 14 can match the diffusion direction of the light spot in the first and second display directions respectively, thereby improving coupling efficiency, and at the same time, the size of the coupling region 141 can be designed to be relatively small, in some embodiments, the coupling region 141 is elliptical with its major axis along the second display direction. It should be noted that the elliptical shape with its major axis along the second display direction is the preferred option for the coupling region 141. In other alternative embodiments, the coupling region 141 can also be rectangular, trapezoidal, or other shapes, where the length direction of the rectangular, trapezoidal, or other shapes is the same as the aforementioned second display direction. Furthermore, when the scanning unit rotates around the optical axis, Figure 7 The elliptical coupling region shown also rotates with the scanning unit.
[0046] In another possible implementation, this application also provides a near-eye display device, referring to... Figure 3 The near-eye display device includes a glasses body and the aforementioned optomechanical module. The glasses body includes a frame and temples, with a waveguide located in the frame and a fiber optic scanner, lens, and galvanometer mounted on the temples or frame.
[0047] The above description is merely a preferred embodiment of this application. Each embodiment is only used to illustrate the technical solution of this application and is not intended to limit this application. Any technical solution that can be obtained by those skilled in the art through logical analysis, reasoning or effective experimentation based on the concept of this application should be within the scope of this application.
[0048] The various embodiments in this application are described in a progressive manner. The same or similar parts between the various embodiments can be referred to each other. Each embodiment focuses on describing the differences from other embodiments.
[0049] The terms "first," "second," "first," or "second" as used in the various embodiments of this disclosure may modify various components regardless of their order and / or importance, but these terms do not limit the corresponding components. The above terms are configured only for the purpose of distinguishing one component from another.
Claims
1. An optomechanical module, characterized in that, It includes a scanning unit and a waveguide, wherein the scanning unit includes a fiber optic scanner, a lens, and a galvanometer; The scanning fiber of the fiber scanner vibrates along the first vibration direction under the drive signal and forms a linear scanning trajectory. After passing through the lens, it enters the reflecting surface of the galvanometer. The galvanometer vibrates along the second vibration direction and forms an image under the action of the galvanometer, which then enters the coupling region of the waveguide. Wherein, the angle between the side of the galvanometer close to the waveguide and the side of the waveguide is no greater than 20 degrees, and the projection of the galvanometer on the waveguide at least partially overlaps with the coupling region of the waveguide, the distance between the light convergence point of the scanning unit in the first display direction and the coupling region of the waveguide is within 2 mm; the light convergence point of the scanning unit in the second display direction is located at the galvanometer.
2. The optomechanical module according to claim 1, characterized in that, The coupling region of the waveguide is elliptical with its major axis along the second display direction.
3. The optomechanical module according to claim 1, characterized in that, The first display direction and the second display direction are spatially perpendicular, corresponding to the horizontal and vertical axes of the displayed image.
4. The optomechanical module according to claim 1, characterized in that, The angle between the reflecting surface of the galvanometer and the surface where the coupling region is located ranges from 30 to 60 degrees.
5. The optomechanical module according to any one of claims 1-4, characterized in that, The light-emitting surface of the lens is positioned opposite to the reflecting surface of the galvanometer, and the light emitted from the light-emitting surface of the lens is reflected by the reflecting surface of the galvanometer to the coupling region of the waveguide.
6. The optomechanical module according to any one of claims 1-4, characterized in that, An optical path deflection unit is also provided between the lens and the waveguide. The optical path deflection unit is located on the light output path of the lens, and the reflecting surface of the optical path deflection unit is parallel to one side of the galvanometer.
7. A near-eye display device, characterized in that, The glasses include a main body and an optomechanical module as described in claims 1-6, wherein the main body includes a frame and temples, the waveguide is located in the frame, and the fiber optic scanner, the lens, and the galvanometer are disposed on the temples or the frame.