Waste liquid recovery device of flow channel type uniform coating developing machine

Abstract

The utility model discloses a guide groove formula even glue developing machine waste liquid recovery unit, including recovery dolly, the upper end of recovery dolly is installed with waste liquid recovery jar, the upper end of waste liquid recovery jar is installed with reaction reagent inlet pipe, install the switch control valve on reaction reagent inlet pipe, the upper end of waste liquid recovery jar is installed with waste gas discharge pipe, the inside installation of waste gas discharge pipe has activated carbon waste gas filter layer, the shell of waste liquid recovery jar includes heat -proof layer and corrosion -resistant protection inner bag. The utility model discloses through installing reaction reagent inlet pipe on waste liquid recovery jar, the chemical reaction reagent is conveniently transported to the inside of waste liquid recovery jar and carries out chemical reaction to waste liquid, after removing the harmful substance in waste liquid, and through waste gas discharge pipe can filter and safely discharge the waste gas of reaction, and the heat -proof and corrosion -resistant protection design to waste liquid recovery jar can further improve the security of waste liquid storage.

Description

Technical Field

[0001] This utility model relates to the field of waste liquid recycling technology, specifically a waste liquid recycling device for a guide trough type homogenizer and developer. Background Technology

[0002] The spin coater is a device that completes all photolithography processes except for exposure, including the coating of photolithography materials, baking, development, cleaning of the back side of the wafer, and rinsing of the wafer surface with deionized water for immersion processes. Therefore, after developing with developer, the spin coater needs to clean the wafer surface to remove the developer adsorbed on the wafer surface.

[0003] Chinese patent document CN217932418U relates to the field of waste liquid recycling technology, specifically a waste liquid recycling device for a spin coater. This utility model provides a waste liquid recycling device for a spin coater capable of fully filtering and purifying the waste liquid from the spin coater. The device includes a storage tank, a filter screen, a drain pipe, and activated carbon cotton. The upper part of the storage tank is connected to a filter screen for initial filtration of the waste liquid. A drain pipe is installed at the connection between the upper and lower parts of the storage tank, and the drain pipe is connected to a matching activated carbon cotton for further purification of the liquid after filtration. The waste liquid undergoes initial filtration through the filter screen, secondary filtration through the activated carbon cotton, and the combination of a heating element and a heat-conducting plate achieves thorough filtration and purification of the waste liquid, thus realizing the waste liquid recycling function.

[0004] The existing technologies mentioned above do not remove harmful chemicals from the waste liquid, nor can they filter the generated exhaust gas. The safety protection effect of the waste liquid storage device is poor, which makes the waste liquid susceptible to environmental impact during the recycling and storage process. Therefore, it is necessary to develop a guide trough type waste liquid recycling device for spin coaters. Utility Model Content

[0005] The purpose of this invention is to provide a waste liquid recovery device for a spin coater and developer with a guide channel, in order to solve the problems mentioned in the background art, such as the failure to remove harmful chemicals from the waste liquid, the inability to filter the generated exhaust gas, and the poor safety protection effect of the waste liquid storage device, which makes the waste liquid susceptible to environmental impact during the recovery and storage process.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a waste liquid recovery device for a guide channel type spin coater and developer, comprising a recovery trolley, a waste liquid recovery tank installed at the upper end of the recovery trolley, a reaction reagent inlet pipe installed at the upper end of the waste liquid recovery tank, a switch control valve installed on the reaction reagent inlet pipe, an exhaust gas discharge pipe installed at the upper end of the waste liquid recovery tank, an activated carbon exhaust gas filter layer installed inside the exhaust gas discharge pipe, a waste liquid recovery pipeline installed at the bottom of the waste liquid recovery tank, a filter pump sealed to the waste liquid recovery pipeline via a flange, and the outer shell of the waste liquid recovery tank comprising a heat insulation protective layer and a corrosion-resistant protective inner liner, the corrosion-resistant protective inner liner being wrapped and disposed on the inner surface of the heat insulation protective layer.

[0007] Preferably, the filtrate pump is equipped with an impurity filtration chamber inside, and one end of the impurity filtration chamber is sealed to a discharge main pipe via a flange.

[0008] Preferably, a hydraulic gauge is installed on the main discharge pipe, and a discharge switch valve is installed at the outlet end of the main discharge pipe.

[0009] Preferably, the recycling trolley is equipped with a PLC control box, and the PLC control box is electrically connected to the filtrate pump.

[0010] Preferably, the upper surface of the waste liquid recovery tank is provided with a liquid inlet, and a sealing cap is provided at the upper end of the liquid inlet. The two ends of the sealing cap are connected to the waste liquid recovery tank by locking components.

[0011] Preferably, the bottom of the waste liquid recovery tank is fixedly connected to the upper surface of the recovery trolley via a support frame, and a locking bolt is provided at the connection between the support frame and the recovery trolley.

[0012] Preferably, the bottom of the recycling trolley is equipped with movable wheels, and the upper end of the recycling trolley is welded and fixed with a trolley handle.

[0013] Compared with the prior art, the beneficial effects of this utility model are: This invention features a reaction reagent inlet pipe installed on the waste liquid recovery tank, facilitating the delivery of chemical reaction reagents into the tank for chemical reaction. This removes harmful substances from the waste liquid, and the resulting waste gas is safely discharged through a waste gas emission pipe. The waste liquid recovery tank is also designed with heat insulation and corrosion resistance to further enhance the safety of waste liquid storage. The entire device is mounted on a mobile trolley structure, offering high mobility and allowing for flexible movement to a designated location to connect with a spin coater and developer, thus enabling faster and more convenient collection and treatment of waste liquid. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a side view of the present invention. Figure 3 This is the front view of the present invention; Figure 4 This is a schematic diagram of the outer shell structure of the waste liquid recovery tank of this utility model.

[0015] In the diagram: 1. Liquid inlet; 2. PLC control box; 3. Moving wheels; 4. Recycling trolley; 5. Support frame; 6. Waste liquid recycling pipe; 7. Sealing cap; 8. Reagent inlet pipe; 9. Switch control valve; 10. Locking element; 11. Waste liquid recycling tank; 12. Trolley handle; 13. Exhaust gas discharge pipe; 14. Filter pump; 15. Flange; 16. Impurity filter chamber; 17. Drain switch valve; 18. Main discharge pipe; 19. Hydraulic gauge; 20. Activated carbon exhaust gas filter layer; 21. Heat insulation protective layer; 22. Corrosion-resistant protective inner liner. Detailed Implementation

[0016] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0017] Please see Figure 1-4 An embodiment of this utility model provides a waste liquid recovery device for a flow channel type spin coater, including a recovery trolley 4, a waste liquid recovery tank 11 installed at the upper end of the recovery trolley 4, a reaction reagent inlet pipe 8 installed at the upper end of the waste liquid recovery tank 11, a switch control valve 9 installed on the reaction reagent inlet pipe 8, an exhaust gas discharge pipe 13 installed at the upper end of the waste liquid recovery tank 11, an activated carbon exhaust gas filter layer 20 installed inside the exhaust gas discharge pipe 13, a waste liquid recovery pipeline 6 installed at the bottom of the waste liquid recovery tank 11, and a filter pump 14 sealed to the waste liquid recovery pipeline 6 through a flange 15. The outer shell of the waste liquid recovery tank 11 includes a heat insulation protective layer 21 and a corrosion-resistant protective inner liner 22, with the corrosion-resistant protective inner liner 22 covering the inner surface of the heat insulation protective layer 21.

[0018] Furthermore, the filter pump 14 is equipped with an impurity filtration chamber 16. One end of the impurity filtration chamber 16 is connected to the discharge main pipe 18 through a flange seal. By turning on the filter pump 14, the waste liquid flowing inside the waste liquid recovery pipe 6 can be further filtered. The filter pump 14 is a filter pump in the prior art, model IHGB150-160B.

[0019] Furthermore, a hydraulic gauge 19 is installed on the discharge main pipe 18 to monitor the internal liquid pressure of the discharge main pipe 18. A drain valve 17 is installed at the outlet end of the discharge main pipe 18. By opening the drain valve 17, the treated waste liquid can be discharged and collected through the discharge main pipe 18.

[0020] Furthermore, a PLC control box 2 is installed on the recycling trolley 4. The PLC control box 2 is electrically connected to the filtrate pump 14 and can be used to quickly switch the filtrate pump 14 on and off, which has the advantage of convenient electrical control.

[0021] Furthermore, the upper surface of the waste liquid recovery tank 11 is provided with an inlet 1, and a sealing cover 7 is provided at the upper end of the inlet 1. The two ends of the sealing cover 7 are connected to the waste liquid recovery tank 11 through locking parts 10, so that the waste liquid inside the spin coater can be poured into the interior of the waste liquid recovery tank 11 from the inlet 1. Then the sealing cover 7 is put on to seal the inlet 1.

[0022] Furthermore, the bottom of the waste liquid recovery tank 11 is fixedly connected to the upper surface of the recovery trolley 4 via a support frame 5. Locking bolts are provided at the connection between the support frame 5 and the recovery trolley 4 to quickly install, fix, support, and stabilize the waste liquid recovery tank 11.

[0023] Furthermore, the bottom of the recycling trolley 4 is equipped with mobile wheels 3, and the upper end of the recycling trolley 4 is welded and fixed with a trolley handle 12. The entire device is set on the structure of the recycling trolley 4, which has strong mobility and can be flexibly moved to a designated position to dock with the spin coater and developer, thereby collecting and treating the waste liquid more quickly and conveniently.

[0024] Working Principle: During use, a waste liquid recovery tank 11 is installed on the upper end of the recycling trolley 4. The entire device is mounted on the structure of the recycling trolley 4, providing strong mobility and allowing it to be flexibly moved to a designated location to dock with the spin coater and developer, thus enabling faster and more convenient collection and treatment of waste liquid. The waste liquid inside the spin coater and developer is poured into the waste liquid recovery tank 11 through the inlet 1, and then the sealing cap 7 is placed on top to seal the inlet 1. A reaction reagent inlet pipe 8 is installed on the upper end of the waste liquid recovery tank 11, and a switch control valve 9 is installed on the reaction reagent inlet pipe 8. Opening the switch control valve 9 facilitates the delivery of chemical reaction reagents into the waste liquid recovery tank 11 to carry out a chemical reaction in the waste liquid, removing harmful substances from the waste liquid. After that, an exhaust gas emission pipe 13 is installed on the upper end of the waste liquid recovery tank 11. An activated carbon exhaust gas filter layer 20 is installed inside the exhaust gas discharge pipe 13. The exhaust gas generated by the reaction can be filtered and safely discharged through the activated carbon exhaust gas filter layer 20 inside the exhaust gas discharge pipe 13. The outer shell of the waste liquid recovery tank 11 includes a heat insulation protective layer 21 and a corrosion-resistant protective inner liner 22. At the same time, the waste liquid recovery tank 11 is designed with heat insulation and corrosion resistance to further improve the safety of waste liquid storage. A waste liquid recovery pipe 6 is installed at the bottom of the waste liquid recovery tank 11. The waste liquid recovery pipe 6 is sealed to a filter pump 14 through a flange 15. By turning on the filter pump 14, the waste liquid flowing inside the waste liquid recovery pipe 6 can be further filtered. Finally, by opening the drain valve 17, the treated waste liquid can be discharged and collected through the discharge main pipe 18.

[0025] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0026] All standard parts used in this application can be purchased from the market. The specific connection methods of each part are all conventional methods such as bolts, rivets, and welding that are mature in the prior art. The machinery, parts and equipment are all conventional models in the prior art. In addition, the circuit connection adopts conventional connection methods in the prior art, and will not be described in detail here.

[0027] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A waste liquid recovery device for a guide channel type spin coater and developer, comprising a recovery trolley (4), characterized in that, The upper end of the recycling trolley (4) is equipped with a waste liquid recycling tank (11), the upper end of the waste liquid recycling tank (11) is equipped with a reaction reagent inlet pipe (8), the reaction reagent inlet pipe (8) is equipped with a switch control valve (9), the upper end of the waste liquid recycling tank (11) is equipped with a waste gas discharge pipe (13), the inside of the waste gas discharge pipe (13) is equipped with an activated carbon waste gas filter layer (20), the bottom of the waste liquid recycling tank (11) is equipped with a waste liquid recycling pipe (6), the waste liquid recycling pipe (6) is sealed and connected to a filter pump (14) through a flange (15), the outer shell of the waste liquid recycling tank (11) includes a heat insulation protective layer (21) and a corrosion-resistant protective liner (22), the corrosion-resistant protective liner (22) is covered and set on the inner surface of the heat insulation protective layer (21).

2. The waste liquid recovery device for a guide channel type spin coater and developer according to claim 1, characterized in that: The filter pump (14) is equipped with an impurity filter chamber (16) inside, and one end of the impurity filter chamber (16) is connected to the discharge main pipe (18) through a flange seal.

3. The waste liquid recovery device for a guide channel type spin coater and developer according to claim 2, characterized in that: A hydraulic gauge (19) is installed on the main discharge pipe (18), and a drain valve (17) is installed at the outlet end of the main discharge pipe (18).

4. The waste liquid recovery device for a guide channel type spin coater and developer according to claim 1, characterized in that: The recycling trolley (4) is equipped with a PLC control box (2), which is electrically connected to the filter pump (14).

5. The waste liquid recovery device for a guide channel type spin coater and developer according to claim 1, characterized in that: The upper surface of the waste liquid recovery tank (11) is provided with a liquid inlet (1), and a sealing cover (7) is provided at the upper end of the liquid inlet (1). The two ends of the sealing cover (7) are connected to the waste liquid recovery tank (11) through locking parts (10).

6. The waste liquid recovery device for a guide channel type spin coater and developer according to claim 1, characterized in that: The bottom of the waste liquid recycling tank (11) is fixedly connected to the upper surface of the recycling trolley (4) via a support frame (5), and a locking bolt is provided at the connection between the support frame (5) and the recycling trolley (4).

7. The waste liquid recovery device for a guide channel type spin coater and developer according to claim 1, characterized in that: The bottom of the recycling trolley (4) is equipped with movable wheels (3), and the upper end of the recycling trolley (4) is welded and fixed with a trolley handle (12).

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