Warping correction device

Abstract

The utility model belongs to chip manufacturing technical field discloses a warping correction device, including support plate spare and a plurality of sucking disc mechanism, a plurality of sucking disc mechanism, all install in the lower surface of support plate spare, one sucking disc mechanism sets up in the center position of support plate spare, other sucking disc mechanism is along with the circumferential interval of the circle with the center position of support plate spare as the center and sets up on support plate spare, every sucking disc mechanism includes drive assembly and vacuum chuck, drive assembly installs on support plate spare, and vacuum chuck is connected in the output of drive assembly and is used for adsorbing warping workpiece, and drive assembly can drive corresponding vacuum chuck to carry out the lifting movement to correct the warping deformation of warping workpiece. The utility model aims at cry face and smile face and different warping type workpiece, can control the lifting action of center and edge sucking disc respectively, realizes local flattening or lifting correction, avoids the stress concentration and workpiece breakage problem caused by single direction depression.

Description

Technical Field

[0001] This utility model relates to the field of chip manufacturing technology, and in particular to a warpage correction device. Background Technology

[0002] In the chip manufacturing process, warpage is a frequent problem affecting the processing of critical components such as wafers and packaging substrates. Whether it's wafer deformation due to uneven surface stress distribution during heat treatment or thinning processes, or abnormal shape caused by a mismatch in the thermal expansion coefficients of the resin layer and the substrate layer leading to packaging substrate warpage, either a "crying face" or "smiling face" warpage will occur. A crying face warpage is characterized by a higher center and lower edges, while a smiling face warpage is characterized by a lower center and higher edges. Since the components need to be fixed by negative pressure adsorption on the processing platform, warpage leads to poor contact between the component and the holding surface, resulting in adsorption leakage. This directly affects the fixing effect and subsequent processing accuracy. Therefore, correcting component warpage has become a critical problem that urgently needs to be solved in chip manufacturing.

[0003] To address the aforementioned problems, existing technology discloses an adsorption mechanism for warped large plates, aiming to solve the workpiece fixing problem. This mechanism integrates a spring and a suction cup assembly, and its correction process involves adsorption, pressing, and warping correction. Specifically, the workpiece is first adsorbed using the suction cup, and then the pressing action of the mechanism flattens the warped large plate onto the processing platform surface, thereby improving the contact state between the workpiece and the platform.

[0004] However, the aforementioned mechanism can only effectively handle smiley face-shaped warped workpieces. For sad face-shaped warped workpieces, the downward pressure correction method will cause excessive stress on the edges of the workpiece, exceeding the tolerance limit of the workpiece material, which can easily lead to workpiece breakage. It cannot meet the safe and effective correction requirements for different warped workpiece types in chip manufacturing.

[0005] Therefore, there is an urgent need to propose a warping correction device to solve the above problems. Utility Model Content

[0006] The purpose of this invention is to provide a warping correction device that can correct two types of warped workpieces while avoiding damage to the warped workpieces.

[0007] To achieve this objective, the present invention adopts the following technical solution:

[0008] Warp correction device, including:

[0009] Support plate;

[0010] Multiple suction cup mechanisms are installed on the lower surface of the support plate. One suction cup mechanism is located at the center of the support plate, and the other suction cup mechanisms are spaced apart on the support plate along a circle centered at the center of the support plate. Each suction cup mechanism includes a drive assembly and a vacuum suction cup. The drive assembly is installed on the support plate, and the vacuum suction cup is connected to the output end of the drive assembly for adsorbing warped workpieces. The drive assembly can drive the corresponding vacuum suction cup to perform lifting and lowering movements to correct the warping deformation of the warped workpiece.

[0011] Preferably, the warpage correction device further includes a plurality of distance sensors arranged in a preset manner on the lower surface of the support plate, and each distance sensor is configured to detect the vertical distance between its installation position on the support plate and the surface of the warped workpiece.

[0012] Preferably, the preset arrangement includes:

[0013] With the center of the support plate as the center, at least two circular rings of different diameters are arranged circumferentially on the support plate.

[0014] Preferably, the number of distance sensors arranged at intervals along the same circumference is no less than three.

[0015] Preferably, the warpage correction device further includes at least three leveling components, which are vertically mounted on the top surface of the support plate and are coplanar but not collinear on the support plate. The end of each leveling component away from the support plate is connected to an external moving mechanism, and each leveling component can be independently lifted and lowered.

[0016] Preferably, the warpage correction device further includes a connecting plate for connecting the external moving mechanism, and the leveling assembly includes:

[0017] The column is connected at its lower end to the supporting plate.

[0018] The adjusting bolt has its lower end threaded to the column and its upper end threaded to the connecting plate.

[0019] The first locking nut is located below the connecting plate and screwed onto the adjusting bolt.

[0020] Preferably, the driving component includes:

[0021] The driving component is fixedly mounted on the support plate.

[0022] The lead screw is connected to the output end of the drive component;

[0023] A connector is screwed to the lead screw, and the vacuum suction cup is connected to the bottom of the connector;

[0024] The guide rod is vertically fixed to the connector and slides in cooperation with the support plate.

[0025] Preferably, the connector has a strip-shaped hole extending in the vertical direction, and the lead screw is screwed to the connector and vertically inserted into the strip-shaped hole.

[0026] Preferably, the connector includes a nut and a connecting seat, the strip hole is formed on the connecting seat, the top surface of the connecting seat has a through hole communicating with the strip hole, the nut is fixedly installed on the connecting seat, and the threaded hole of the nut is aligned with the through hole.

[0027] Preferably, the drive assembly includes at least two guide rods, which are evenly spaced around the lead screw on the connector.

[0028] The beneficial effects of this utility model are:

[0029] This invention proposes a warpage correction device. For a "crying face" shaped warped workpiece, the drive assembly of a suction cup mechanism at the center of the support plate drives a vacuum suction cup to adsorb the high area in the middle of the workpiece. Simultaneously, the drive assemblies of suction cup mechanisms spaced circumferentially adjust the height of the vacuum suction cups, adsorbing the low area at the edge of the workpiece and guiding it upwards appropriately, thus correcting the "crying face" shaped warped workpiece. During the correction process, the force applied to the edge area by multiple drive assemblies disperses the force on the workpiece edge, preventing excessive stress and breakage. For a "smiling face" shaped warped workpiece, the drive assembly of the central suction cup mechanism drives the vacuum suction cup upwards to adsorb the low area in the middle of the workpiece, while the circumferential suction cup mechanisms adsorb the edge, achieving effective correction. This warpage correction device can adapt to both types of warped workpieces and avoids stress overload damage through targeted height adjustment, meeting the requirements for safe and effective workpiece correction in chip manufacturing. Attached Figure Description

[0030] Figure 1 This is a schematic diagram of the warp correction device described in an embodiment of the present invention;

[0031] Figure 2 This is a bottom view of the warp correction device described in this embodiment of the utility model;

[0032] Figure 3 This is a schematic diagram of the suction cup mechanism described in an embodiment of the present invention;

[0033] Figure 4This is a schematic diagram of the leveling component described in an embodiment of the present invention.

[0034] In the picture:

[0035] 1. Support plate;

[0036] 2. Suction cup mechanism; 21. Drive assembly; 211. Drive component; 212. Lead screw; 213. Connector; 2130. Strip hole; 2131. Nut; 2132. Connecting seat; 214. Guide rod; 22. Vacuum suction cup;

[0037] 3. Distance sensor;

[0038] 4. Leveling assembly; 41. Column; 42. Adjusting bolt; 43. First locking nut; 44. Second locking nut;

[0039] 5. Connecting plate;

[0040] 6. Moving arm;

[0041] 7. Mounting plate. Detailed Implementation

[0042] The embodiments of this utility model are described in detail below. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar parts or parts having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain this utility model, and should not be construed as limiting this utility model.

[0043] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection or a detachable connection; a mechanical connection or an electrical connection; a direct connection or an indirect connection through an intermediate medium; or the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0044] In the description of this utility model, unless otherwise expressly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0045] The technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments.

[0046] like Figures 1-4 As shown, this utility model provides a warping correction device, including a support plate 1 and multiple suction cup mechanisms 2. The multiple suction cup mechanisms 2 are all installed on the lower surface of the support plate 1. One suction cup mechanism 2 is located at the center of the support plate 1, and the other suction cup mechanisms 2 are spaced apart on the support plate 1 along a circle centered at the center of the support plate 1. Each suction cup mechanism 2 includes a drive assembly 21 and a vacuum suction cup 22. The drive assembly 21 is installed on the support plate 1, and the vacuum suction cup 22 is connected to the output end of the drive assembly 21 for adsorbing the warped workpiece. The drive assembly 21 can drive the corresponding vacuum suction cup 22 to perform lifting and lowering movements to correct the warping deformation of the warped workpiece.

[0047] For a crying-face shaped warped workpiece, the drive component 21 of the suction cup mechanism 2 at the center of the support plate 1 drives the vacuum suction cup 22 to adsorb the high area in the middle of the workpiece. Simultaneously, the drive components 21 of the suction cup mechanisms 2 spaced along the circumference adjust the height of the vacuum suction cups 22, adsorbing the low area at the edge of the workpiece and guiding it upwards appropriately, thus correcting the crying-face shaped warped workpiece. During the correction process, the force applied to the edge area by multiple drive components 21 disperses the force on the workpiece edge, preventing excessive stress and breakage. For a smiling-face shaped warped workpiece, the drive component 21 of the central suction cup mechanism 2 drives the vacuum suction cup 22 upwards to adsorb the low area in the middle of the workpiece, while the vacuum suction cups 22 of the circumferential suction cup mechanism 2 adsorb the edge, achieving effective correction. This warping correction device can adapt to both types of warped workpieces and avoids stress overload damage through targeted lifting and lowering adjustments, meeting the requirements for safe and effective workpiece correction in chip manufacturing.

[0048] like Figure 2 As shown, in this embodiment, the support plate 1 is a square plate, and there are five suction cup mechanisms 2. One suction cup mechanism 2 is located at the center of the support plate 1, and the other four suction cup mechanisms 2 are located at the four corners of the support plate 1.

[0049] In other embodiments, the support plate 1 can also be circular, and the number of suction cup mechanisms 2 is seven, one of which is located at the center of the circle, and the other six are arranged at intervals around the center of the support plate 1. The shape of the support plate 1 and the number of suction cup mechanisms 2 are not specifically limited here, and can be flexibly adjusted according to the correction requirements of different warped workpieces.

[0050] Specifically, such as Figure 3As shown, the drive assembly 21 includes a drive component 211, a lead screw 212, a connector 213, and a guide rod 214. The drive component 211 is fixedly mounted on the support plate 1. The lead screw 212 is connected to the output end of the drive component 211. The connector 213 is threadedly connected to the lead screw 212. The vacuum suction cup 22 is connected to the bottom of the connector 213. The guide rod 214 is vertically fixed on the connector 213 and slides in cooperation with the support plate 1. When the drive component 211 drives the lead screw 212 to rotate, the connecting component 213 converts the rotational motion into linear motion through threaded engagement. Since the lead screw 212 has a fixed pitch, the vacuum chuck 22 can be precisely displaced by controlling the rotation angle of the drive component 211, avoiding over- or under-correction. The sliding fit between the guide rod 214 and the support plate 1 strictly restricts the degree of freedom of movement of the connecting component 213, allowing it to only move up and down in the vertical direction, avoiding the swaying or rotation of the connecting component 213 caused by the rotation of the lead screw 212, ensuring that the vacuum chuck 22 always moves in a direction perpendicular to the support plate 1, so that the correction force is accurately applied to the warped part of the workpiece.

[0051] The drive unit 211 can be a servo motor, a pneumatic motor, or a hydraulic motor.

[0052] More specifically, the connector 213 has a vertically extending slot 2130, and the lead screw 212 is screwed onto the connector 213 and vertically inserted into the slot 2130. The slot 2130 provides an independent space for the lead screw 212, avoiding rigid interference between the lead screw 212 and the connector 213 during rotation; at the same time, the relative positional relationship between the lead screw 212 and the connector 213 can be directly observed through the slot 2130, and the real-time movement status of the connector 213 can be clearly grasped.

[0053] More specifically, the connector 213 includes a nut 2131 and a connector 2132. A strip-shaped hole 2130 is formed on the connector 2132, and a through hole communicating with the strip-shaped hole 2130 is formed on the top surface of the connector 2132. The nut 2131 is fixedly installed on the connector 2132, and the threaded hole of the nut 2131 is aligned with the through hole. By combining the nut 2131 and the connector 2132, the complex process of directly machining the threaded hole on the connector 2132 can be avoided. Compared with machining high-precision threaded holes, the process of forming a through hole on the connector 2132 is simpler, requires lower precision from the machining equipment, reduces tool wear and process time, and reduces the risk of part scrap due to thread machining defects, significantly improving manufacturing efficiency and cost controllability.

[0054] More specifically, the drive assembly 21 includes at least two guide rods 214, which are evenly spaced around the lead screw 212 on the connector 213. The arrangement of multiple guide rods 214 can counteract the radial eccentric torque that may be generated during the transmission of the lead screw 212, further improving the stability of the connector 213 and the vacuum suction cup 22 in the vertical direction.

[0055] In this embodiment, four guide rods 214 are provided.

[0056] In this embodiment, three guide rods 214 may also be provided. The number of guide rods 214 is not specifically limited here.

[0057] Specifically, such as Figure 1 and Figure 2 As shown, the warpage correction device also includes multiple distance sensors 3, which are arranged in a preset pattern on the lower surface of the support plate 1. Each distance sensor 3 is configured to detect the vertical distance between its installation position on the support plate 1 and the surface of the warped workpiece. The distance sensors 3 arranged in the preset pattern on the lower surface of the support plate 1 can detect the vertical distance between their respective installation positions and the surface of the warped workpiece in real time. Through comprehensive analysis of the distance data from multiple points, the type and degree of warpage of the workpiece can be determined. Based on the distance detection data, the drive assembly 21 can be activated specifically to precisely control the lifting height and movement amplitude of the vacuum suction cups 22 at different positions, preventing stress damage to the workpiece caused by overcorrection.

[0058] In this embodiment, multiple distance sensors 3 collect the vertical distance information from their probes to the workpiece and transmit it to the computing unit. The computing unit can calculate the warpage of the workpiece and the next working parameters of the motor in the suction cup mechanism, such as rotation direction, speed, and number of revolutions. It should be noted that the computing unit is a conventional control module in the art, which can be implemented using a PLC controller, industrial computer, or dedicated microcontroller system. Its core function is to process and analyze the raw data collected by the distance sensors through a preset algorithm and generate drive control signals in combination with the correction process logic.

[0059] More specifically, the preset arrangement includes: with the center of the support plate 1 as the center, at least two rings of different diameters are arranged circumferentially on the support plate 1. This multi-ring arrangement design can cover the surface of the warped workpiece from multiple points in different radius dimensions. The small-diameter ring sensors on the periphery of the central area can accurately capture the warping details in the center of the warped workpiece, such as the height of the central bulge of a crying face warp and the depth of the central depression of a smiling face warp. The large-diameter ring sensors on the outer side can effectively detect the warping state of the workpiece edge. Based on this, the drive components 21 of each suction cup mechanism 2 can more accurately control the lifting and lowering of the vacuum suction cup 22, effectively ensuring the correction accuracy and workpiece safety.

[0060] In this embodiment, the preset arrangement is based on the center position of the support plate 1, and three rings of different diameters are arranged circumferentially on the support plate 1, thereby realizing multi-point detection of the warped workpiece from the center to the transition to the edge.

[0061] More specifically, there are no fewer than three distance sensors 3 arranged at intervals along the same circumference. Based on the principle of three points determining a plane, by comparing the vertical distance data of three or more points, the accuracy of determining whether the circumferential position of the corresponding workpiece is flat can be improved.

[0062] Specifically, such as Figure 1 As shown, the warpage correction device also includes at least three leveling components 4. The leveling components 4 are vertically mounted on the top surface of the support plate 1, and their mounting positions on the support plate 1 are coplanar but not collinear. The end of each leveling component 4 furthest from the support plate 1 is connected to an external moving mechanism. Each leveling component 4 can be independently raised and lowered. By controlling the raising and lowering height of each leveling component 4, the tilt of the support plate 1 caused by installation deviations of the external moving mechanism or vibrations during operation can be quickly compensated, ensuring that it remains horizontal at all times. This provides a horizontal detection reference for the distance sensor 3, avoiding misjudgments of warpage due to inclination of the reference, thus preventing inaccurate correction.

[0063] In this embodiment, four leveling components 4 are provided.

[0064] In other embodiments, five leveling components 4 may be provided. The number of leveling components 4 is not specifically limited here.

[0065] More specifically, such as Figure 1 and Figure 4 As shown, the warpage correction device also includes a connecting plate 5 for connecting to an external moving mechanism. The leveling assembly 4 includes a column 41, an adjusting bolt 42, and a first locking nut 43. The lower end of the column 41 is connected to the support plate 1; the lower end of the adjusting bolt 42 is threaded to the column 41, and the upper end passes through the connecting plate 5; the first locking nut 43 is located below the connecting plate 5 and is screwed to the adjusting bolt 42. When it is necessary to raise the support plate 1, the adjusting bolt 42 is rotated so that the lower end of the adjusting bolt 42 extends into the column 41, forcing the column 41 to drive the entire support plate 1 to move upward relative to the connecting plate 5. When it is necessary to lower the support plate 1, the first locking nut 43 is first rotated so that the first locking nut 43 moves downward, then the adjusting bolt 42 is rotated so that the lower end of the adjusting bolt 42 moves upward relative to the column 41, and finally the first locking nut 43 is rotated in the opposite direction, forcing the column 41 to drive the entire support plate 1 to move downward relative to the connecting plate 5.

[0066] More specifically, the leveling assembly 4 also includes a second locking nut 44, which is located below the first locking nut 43 and screwed onto the adjusting bolt 42. By tightening the second locking nut 44, it can be brought against the top surface of the column 41. After the height adjustment of the support plate 1 is completed, tightening the second locking nut 44 so that it abuts against the top surface of the column 41 can form a rigid lock with the threaded engagement of the adjusting bolt 42 and the column 41, effectively counteracting the loosening tendency caused by vibration and impact during operation and preventing relative displacement between the adjusting bolt 42 and the column 41.

[0067] like Figure 1 As shown, in this embodiment, the warp correction device further includes a vertically connected movable arm 6 and a mounting plate 7. The movable arm 6 is vertically connected to the external moving mechanism, and the connecting plate 5 is located below the mounting plate 7 and connected to the mounting plate 7. The outer periphery of the connecting plate 5 protrudes at least partially from the outer periphery of the mounting plate 7 for the insertion of the adjusting bolt 42.

[0068] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A warpage correction device, characterized in that, include: Support plate (1); Multiple suction cup mechanisms (2) are installed on the lower surface of the support plate (1). One of the suction cup mechanisms (2) is located at the center of the support plate (1), and the other suction cup mechanisms (2) are arranged circumferentially on the support plate (1) along a circle with the center of the support plate (1) as the center. Each suction cup mechanism (2) includes a drive assembly (21) and a vacuum suction cup (22). The drive assembly (21) is installed on the support plate (1), and the vacuum suction cup (22) is connected to the output end of the drive assembly (21) for adsorbing warped workpieces. The drive assembly (21) can drive the corresponding vacuum suction cup (22) to perform lifting and lowering movements to correct the warping deformation of the warped workpiece.

2. The warpage correction device according to claim 1, characterized in that, The warpage correction device also includes a plurality of distance sensors (3), which are arranged in a preset manner on the lower surface of the support plate (1). Each distance sensor (3) is configured to detect the vertical distance between its installation position on the support plate (1) and the surface of the warped workpiece.

3. The warpage correction device according to claim 2, characterized in that, The preset arrangement includes: With the center of the support plate (1) as the center, at least two circular rings of different diameters are arranged circumferentially on the support plate (1).

4. The warpage correction device according to claim 3, characterized in that, The number of distance sensors (3) arranged at intervals along the same circumference is no less than three.

5. The warpage correction device according to claim 1, characterized in that, The warping correction device also includes at least three leveling components (4), which are vertically installed on the top surface of the support plate (1) and are coplanar but not collinear on the support plate (1). The end of the leveling component (4) away from the support plate (1) is connected to an external moving mechanism, and each leveling component (4) can be independently lifted and driven.

6. The warpage correction device according to claim 5, characterized in that, The warpage correction device further includes a connecting plate (5) for connecting the external moving mechanism, and the leveling assembly (4) includes: The column (41) is connected at its lower end to the support plate (1); The adjusting bolt (42) is threaded to the column (41) at its lower end and passes through the connecting plate (5) at its upper end. The first locking nut (43) is located below the connecting plate (5) and screwed onto the adjusting bolt (42).

7. The warpage correction device according to any one of claims 1-6, characterized in that, The driving component (21) includes: The driving component (211) is fixedly installed on the support plate (1); A lead screw (212) is connected to the output end of the drive unit (211); The connector (213) is screwed to the lead screw (212), and the vacuum suction cup (22) is connected to the bottom of the connector (213); The guide rod (214) is vertically fixed to the connector (213) and slides in cooperation with the support plate (1).

8. The warpage correction device according to claim 7, characterized in that, The connector (213) has a strip-shaped hole (2130) extending vertically, and the lead screw (212) is screwed to the connector (213) and vertically inserted into the strip-shaped hole (2130).

9. The warpage correction device according to claim 8, characterized in that, The connector (213) includes a nut (2131) and a connecting seat (2132). The strip hole (2130) is opened on the connecting seat (2132). The top surface of the connecting seat (2132) is provided with a through hole communicating with the strip hole (2130). The nut (2131) is fixedly installed on the connecting seat (2132), and the threaded hole of the nut (2131) is aligned with the through hole.

10. The warpage correction device according to claim 7, characterized in that, The drive assembly (21) includes at least two guide rods (214), which are evenly spaced around the lead screw (212) on the connector (213).

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