Wafer boat for preventing wafer sub-slippage

Abstract

The utility model discloses a prevent the boat of wafer sub -slip, including flange, be equipped with support column no.

Description

Technical Field

[0001] This utility model relates to the field of wafer boat technology, specifically to a boat that prevents wafers from slipping out. Background Technology

[0002] During diffusion furnace tube processes, wafers need to be placed on boats and transferred into the furnace tube. However, in some special processes, the contact area between the wafer and the boat is relatively smooth, which can cause the wafer to slide or even slide out of the boat, causing trouble for the transfer of the wafer and damaging it.

[0003] Therefore, a boat to prevent wafers from slipping off is urgently needed for research. Utility Model Content

[0004] The purpose of this invention is to provide a boat that prevents wafers from slipping out, thereby solving the problems mentioned in the background art.

[0005] To solve the above-mentioned technical problems, this utility model provides the following technical solution:

[0006] This utility model discloses a boat for preventing wafers from slipping out, comprising a flange, on which are provided a first support column and a second support column, each of which has two symmetrically arranged supports. The first support column has a first groove platform at its top, and the second support column has a second groove platform at its top. The first and second groove platforms are used to hold wafers. The feature is that the first groove platform has an arc-shaped step around its periphery, the top surface of which is lower than the top surface of the first support column, and the wafer is located within the arc of the arc-shaped step.

[0007] As an improvement, the radius of the arc of the curved step is smaller than that of the wafer.

[0008] The advantages of this invention compared to the prior art are as follows: the wafer is placed on the first and second tanks and enters the furnace tube with the boat. The arc-shaped steps can prevent the wafer from sliding out of the boat, ensuring smooth transfer of the wafer and avoiding damage to the wafer. Attached Figure Description

[0009] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings listed below are only some structural schematic diagrams of this utility model, and not all of them.

[0010] Figure 1 This is a diagram showing the usage state of a boat that prevents wafers from slipping out, according to this utility model.

[0011] Figure 2 This is a top view of the boat used to prevent wafers from slipping out, according to this utility model.

[0012] Figure 3 This is a schematic diagram of the structure of a boat for preventing wafers from slipping out, according to this utility model.

[0013] Figure label:

[0014] 1. Flange; 2. Support column 1; 3. Support column 2; 4. Slot platform 1; 5. Slot platform 2; 6. Wafer; 7. Curved step. Detailed Implementation

[0015] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0016] In the description of the embodiments of this utility model, it should be noted that if terms such as "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" appear, the indicated orientation or positional relationship is based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship that the utility model product is usually placed in during use. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0017] Furthermore, the terms "first," "second," and "third" are used only for distinguishing descriptions and should not be interpreted as indicating or implying relative importance. The use of terms such as "horizontal," "vertical," and "suspended" does not imply that the component must be absolutely horizontal or suspended, but rather that it can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," not that the structure must be perfectly horizontal, but can be slightly tilted.

[0018] In the description of the embodiments of this utility model, the terms "multiple" or "several" refer to at least two.

[0019] In the description of the embodiments of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0020] This embodiment is combined with the appendix Figures 1 to 3 The document provides a detailed description of a boat designed to prevent wafers from slipping off.

[0021] This embodiment discloses a boat for preventing wafers from slipping out, comprising a flange 1, on which are provided support columns 1 2 and 2 support columns 3. Each support column 1 2 and support column 2 3 has two symmetrically arranged supports, distributed circumferentially without staggering. The interval between the two support columns 1 2 is greater than the interval between the two support columns 2 3. The top of the support column 1 2 is provided with a slot platform 4, and the distance between the outer edges of the two slot platforms 1 4 is greater than the diameter of the wafer 6. The top of the support column 2 3 is provided with a slot platform 2 5. The slot platforms 1 4 and 2 5 are used to hold the wafer 6. All the above features adopt existing designs. The outer periphery of the slot platform 1 4 is provided with an arc-shaped step 7, the top surface of the arc-shaped step 7 is lower than the top surface of the support column 1 2, and the wafer 6 is located within the arc of the arc-shaped step 7.

[0022] The radius of the arc of the arc-shaped step 7 is smaller than that of the wafer 6.

[0023] In practice, the wafer 6 is placed on the first tank 4 and the second tank 5 and enters the furnace tube with the boat. The arc-shaped step 7 can prevent the wafer 6 from sliding out of the boat, ensuring the smooth transfer of the wafer 6 and avoiding damage to the wafer 6.

[0024] The present invention and its embodiments have been described above. This description is not restrictive, and the actual scope of protection is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this invention should be included within the scope of protection of this invention. Therefore, the scope of protection of this invention should be determined by the scope of the claims.

Claims

1. A boat for preventing wafers from slipping out, comprising a flange (1), wherein the flange (1) is provided with a first support column (2) and a second support column (3), wherein each of the first support column (2) and the second support column (3) has two symmetrically arranged columns, wherein the first support column (2) is provided with a first groove platform (4) at its top, and the second support column (3) is provided with a second groove platform (5) at its top, wherein the first groove platform (4) and the second groove platform (5) are used to hold wafers (6), characterized in that, The outer periphery of the first slot (4) is provided with an arc-shaped step (7), the top surface of the arc-shaped step (7) is lower than the top surface of the first support column (2), and the wafer (6) is located inside the arc of the arc-shaped step (7).

2. The boat for preventing wafers from slipping out according to claim 1, characterized in that, The radius of the arc of the arc step (7) is smaller than that of the wafer (6).

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