A vapor deposition furnace facilitating disposal of exhaust gas

Abstract

A kind of gas deposition furnace for facilitating waste gas treatment, belong to gas deposition furnace equipment technical field;Including furnace body, its characterized in that: the top of the furnace body is fixedly installed with exhaust pipe, one end of the exhaust pipe is fixedly installed with purification tank, the top of the purification tank is fixedly installed with electric telescopic rod, the telescopic end of the electric telescopic rod enters the purification tank and is fixedly installed with lifting seat, the side of the lifting seat is opened to cavity;The utility model discloses electric telescopic rod is arranged on the top of purification tank, the bottom of electric telescopic rod is respectively provided with lifting seat and scraper by penetrating purification tank, scraper can be inserted inside by the way of up and down moving and towards exhaust pipe side is scraped, prevent surface has particle and is blocked with adhering, simultaneously, the front and back movement of scraper in lifting seat is realized by first spring and electromagnet, the residual particles on the top and bottom of scraper can be hung.

Description

Technical Field

[0001] This utility model belongs to the technical field of vapor deposition furnace equipment, specifically relating to a vapor deposition furnace that facilitates the treatment of waste gas. Background Technology

[0002] Chemical vapor deposition (CVD) is a process in which gaseous substances undergo a chemical reaction on a solid surface to produce solid deposits. It generally involves three steps: (1) forming volatile substances; (2) transferring these substances to the deposition area; and (3) generating a chemical reaction on the solid to produce solid substances. CVD is a widely used process for producing carbon-carbon composite materials. Existing CVD furnaces typically have a workpiece placement platform. The workpiece is placed on the platform, and carbon source gas is introduced into the furnace through the bottom inlet pipe. The carbon source gas is directly introduced into the furnace at a certain flow rate and velocity, and after pyrolysis, it forms matrix carbon deposits inside the workpiece.

[0003] In the prior art, such as Chinese Patent CN 216320584 U, a vapor deposition furnace with exhaust gas treatment function includes a furnace body and an exhaust gas filter. The furnace body has a reaction chamber, and the top of the furnace body has an exhaust gas discharge pipe communicating with the reaction chamber, which in turn connects to the exhaust gas filter. The exhaust gas filter includes a shell and a filter element. The shell has a receiving cavity, and the filter element is disposed within the receiving cavity. The bottom of the shell has an inlet pipe communicating with the receiving cavity and the exhaust gas discharge pipe. The top of the shell has an exhaust pipe communicating with the receiving cavity. The vapor deposition furnace with exhaust gas treatment function provided in this application discharges the exhaust gas generated in the reaction chamber into the exhaust gas filter by connecting the exhaust gas discharge pipe to the exhaust gas filter in the furnace body. The exhaust gas is filtered by the filter element in the exhaust gas filter, thereby reducing the harmful substances contained in the exhaust gas. However, this patent still has the following problems.

[0004] Although the aforementioned patent incorporates a filter element to filter the exhaust gas and reduce harmful substances in it, the exhaust gas from a vapor deposition furnace may still contain solid particulate pollutants such as dust and debris. These solid pollutants may adhere to the surface of the baffle plate and then fall into the bottom shell or even into the furnace body, leading to a decrease in subsequent adsorption efficiency and contamination inside the furnace. Utility Model Content

[0005] The present invention aims to solve the technical problems existing in the prior art and provide a gas phase deposition furnace that facilitates the treatment of waste gas.

[0006] The above-mentioned technical problems of this utility model are mainly solved by the following technical solution: a gas phase deposition furnace for easy treatment of waste gas, comprising a furnace body, characterized in that: an exhaust pipe is fixedly installed on the top of the furnace body, a purification box is fixedly installed at one end of the exhaust pipe, an electric telescopic rod is fixedly installed on the top of the purification box, the telescopic end of the electric telescopic rod enters the purification box and is fixedly installed with a lifting seat, an inward cavity is opened on one side of the lifting seat, an electromagnet is provided at one end of the cavity, a plurality of first springs are fixedly installed on the outward side of the electromagnet, a scraper is fixedly installed at the outward end of the first spring, a discharge port is provided through the bottom of the purification box corresponding to the lower part of the scraper, a fixed frame is provided on the lower outer ring of the discharge port, a collection box is inserted into the fixed frame, two placement frames are slidably inserted into one side of the purification box, a plurality of ventilation holes are opened through the side of the placement frame facing the exhaust pipe, a filter cotton is provided on one side of the placement frame through the feed port, a connecting plate is provided between the two placement frames, and the two placement frames are connected by the connecting plate.

[0007] Preferably, the outer wall of the fixed frame is provided with a fixed groove, the inner wall of the fixed groove is fixedly installed with a second spring, one end of the second spring is fixedly installed with a movable plate, one end of the movable plate is fixedly installed with an L-shaped plate, and the inside of the purification box is provided with two placement frames.

[0008] Preferably, the top surface inside the purification box has a sliding groove, a sliding plate is fixedly installed on the top of the placement frame, and a slot is provided on one side of the middle section of the sliding plate.

[0009] Preferably, the purification box has an outwardly penetrating limiting groove on one side of the corresponding slot. The inner wall of the limiting groove is provided with a threaded hole, and a threaded rod is threadedly connected inside the threaded hole. A handle is fixedly installed at one end of the threaded rod, and a locking block is movably connected to the end of the threaded rod away from the handle. The locking block and the slot are slidably inserted into each other.

[0010] Preferably, insert plates are provided on both sides of the feed inlet on the side of the two placement frames that are far apart from each other. The bottom of the insert plates is provided with connecting grooves. A box door is provided on the side of the placement frame corresponding to the feed inlet. The box door is provided on the side corresponding to the feed inlet and is inserted into the insert plates.

[0011] Preferably, a support plate is fixedly installed on the outer wall of the door, a third spring is fixedly installed on one side of the top of the support plate, a pull plate is fixedly installed on the top of the third spring, a control plate that is interlocked with the connecting groove is fixedly installed on the top of the pull plate, a limiting plate that supports the pull plate is installed on one side of the top of the support plate, the limiting plate is located on the other side of the third spring, and one end of the limiting plate is slidably inserted into the support plate.

[0012] The beneficial effects of this utility model are:

[0013] 1. An electric telescopic rod is installed at the top of the purification box. The bottom of the electric telescopic rod passes through the purification box and is equipped with a lifting seat and a scraper. The scraper can scrape the material into the placement frame and towards the exhaust pipe by moving up and down, preventing particles from adhering and clogging the surface. At the same time, the scraper moves back and forth in the lifting seat through the first spring and electromagnet, which can hang down the residual particles at the top and bottom of the scraper.

[0014] 2. By setting up two placement frames, which are connected to each other by a connecting plate, when the filter cotton inside one placement frame needs to be replaced, you only need to push one placement frame to push the other placement frame into the purification box. This allows the filter cotton to be replaced without stopping the machine, increasing overall work efficiency. Attached Figure Description

[0015] Figure 1 This is a three-dimensional structural schematic diagram of the present invention;

[0016] Figure 2 This is a cross-sectional structural diagram of the purification box of this utility model;

[0017] Figure 3 This is a schematic diagram of a combined structure of the lifting seat and scraper of this utility model;

[0018] Figure 4 This is a schematic diagram of a combined structure of the collection box and the L-shaped plate of this utility model;

[0019] Figure 5 This is a three-dimensional structural diagram of the placement frame of this utility model.

[0020] In the diagram: 1. Furnace body; 2. Exhaust pipe; 3. Purification box; 4. Electric telescopic rod; 5. Lifting seat; 6. Discharge port; 7. Fixing frame; 9. Placement frame; 10. Vent hole; 11. Filter cotton; 12. Slide groove; 13. Slide plate; 14. Slot; 15. Limiting slot; 16. Threaded hole; 17. Threaded rod; 18. Handle; 19. Locking block; 20. Electromagnet; 21. First spring; 22. Scraper; 23. Collection box; 24. Fixing slot; 25. Second spring; 26. Moving plate; 27. L-shaped plate; 28. Connecting plate; 29. ​​Box door; 31. Insert plate; 32. Connecting slot; 33. Support plate; 34. Third spring; 35. Pull plate; 36. Control plate; 37. Limiting plate. Detailed Implementation

[0021] The technical solution of this utility model will be further described in detail below through embodiments and in conjunction with the accompanying drawings.

[0022] Example: A vapor deposition furnace for easy treatment of waste gas, such as Figures 1-5As shown, the furnace includes a furnace body 1. An exhaust pipe 2 is fixedly installed on the top of the furnace body 1. A purification chamber 3 is fixedly installed at one end of the exhaust pipe 2. An electric telescopic rod 4 is fixedly installed on the top of the purification chamber 3. The telescopic end of the electric telescopic rod 4 enters the purification chamber 3 and is fixedly installed with a lifting seat 5. An electromagnet 20 is fixedly installed on the inner wall of the lifting seat 5. A first spring 21 is fixedly installed on the outer wall of the electromagnet 20. A scraper 22 is fixedly installed at one end of the first spring 21. A discharge port 6 is opened through the bottom surface of the purification chamber 3. A collection box 23 is provided at the bottom of the purification chamber 3. A fixing frame 7 is fixedly installed at the bottom of the purification chamber 3. A fixing groove 24 is provided on the outer wall. A second spring 25 is fixedly installed on the inner wall of the fixing groove 24. A movable plate 26 is fixedly installed on one end of the second spring 25. An L-shaped plate 27 is fixedly installed on one end of the movable plate 26. Two placement frames 9 are provided inside the purification box 3. The placement frames 9 are located on the other side of the scraper 22, so that one side of the purification box 3 is used to insert the placement frames 9 and the other side can be used for the operation of the scraper 22. A connecting plate 28 is fixedly installed between the two placement frames 9. Multiple evenly distributed air holes 10 are opened through both sides of the placement frames 9. Filter cotton 11 is provided inside the placement frames 9.

[0023] The outer wall of the fixed frame 7 is provided with a fixed groove 24, and a second spring 25 is fixedly installed on the inner wall of the fixed groove 24. A movable plate 26 is fixedly installed on one end of the second spring 25, and an L-shaped plate 27 is fixedly installed on one end of the movable plate 26. The L-shaped plate 27 supports the bottom of the collection box.

[0024] The purification box 3 has a sliding groove 12 on its inner top surface. A sliding plate 13 is fixedly installed on the top of the placement frame 9. A slot 14 is opened on one side of the middle section of the sliding plate 13. A limiting groove 15 extending outward is opened on the side of the purification box 3 corresponding to the slot. A threaded hole 16 is provided on the inner wall of the limiting groove 15. A threaded rod 17 is provided inside the threaded hole 16. A handle 18 is fixedly installed on one end of the threaded rod 17. A locking block 19 is movably connected to the end of the threaded rod 17 away from the handle 18. The locking block 19 and the slot 14 slide and insert into each other.

[0025] Two insertion plates 31 are provided on both sides of the feed inlet on the opposite side of the two placement frames 9. The bottom of the insertion plate 31 is provided with a connecting groove 32. A box door 29 is provided on the side of the placement frame 9 corresponding to the feed inlet. The box door 29 is provided on the side of the feed inlet and is inserted into the insertion plate 31. A support plate 33 is fixedly installed on the outer wall of the box door 29. A third spring 34 is fixedly installed on one side of the top of the support plate 33. A pull plate 35 is fixedly installed on the top of the third spring 34. A control plate 36 is fixedly installed on the top of the pull plate 35 and is inserted into the connecting groove 32. A limiting plate 37 is installed on one side of the top of the support plate 33 to support the pull plate 35. The limiting plate 37 is located on the other side of the third spring 34. One end of the limiting plate 37 is slidably inserted into the support plate 33.

[0026] The principle of this utility model is as follows: During use, the exhaust gas generated inside the furnace body 1 enters the purification box 3 through the exhaust pipe 2. Solid particles remain on the outside of the placement frame 9 and finally enter the collection box 23. The exhaust situation on the other side is used to judge whether there are too many particles on the outer wall of the placement frame 9. When there are too many particles on the outer wall of the placement frame 9, the operator activates the electric telescopic rod 4. The telescopic end of the electric telescopic rod 4 extends, pushing the lifting seat 5 down. The scraper 22 contacts the outer wall of the placement frame 9 and scrapes off the particles. This operation is repeated several times to scrape off the particles on one side of the placement frame 9, so that the particles fall down through the discharge port 6 into the collection box 23. When there are a lot of particles in the collection box 23, the operator pulls the L-shaped plate 27. The L-shaped plate 27 leaves the bottom of the collection box 23, and the second spring 25 extends. Then the operator removes the collection box 23, cleans the garbage inside, and resets it at the discharge port. The L-shaped plate 27 is released, and the elastic force of the second spring 25 pushes the L-shaped plate 27 back to its original position, supporting the bottom of the collection box 23, so that the collection box 23 is installed at the discharge port 6.

[0027] At this time, the scraper 22 is located above the discharge port 6. When the operator activates the electromagnet 20, the iron scraper 22 is sucked into the lifting seat 5. The first spring 21 is compressed, and the telescopic end of the electric telescopic rod 4 retracts, so that the particles remaining on the top and bottom of the scraper are hung off by the lifting seat 5. After opening and closing the electromagnet 20 several times, the elastic force of the first spring 21 pushes the scraper 22 to reset, thus making it easy to clean solid particles.

[0028] During filtration, exhaust gas enters the placement frame 9 through the vent 10, passes through the filter cotton 11, and exits from the purification box 3. Meanwhile, the other side of the placement frame 9, exposed outside the purification box 3, does not contain the filter cotton 11 to prevent it from becoming contaminated after prolonged periods of non-use. When the filter cotton 11 needs to be replaced, the operator rotates the handle 18, causing the threaded rod 17 to rotate and insert the filter cotton 11 into the outer placement frame 9. After the locking block 19 disengages from the slot 14, the two placement frames 9 can slide left and right inside the purification box 3. Then, the operator pushes the other placement frame 9 into the purification box 3 and rotates the handle 18 in the opposite direction, causing the locking block 19 to enter the slot 14 of the other placement frame 9, thus limiting the position of the two placement frames 9.

[0029] The staff pulls the pull plate 35 next to the placement frame 9, causing the pull plate 35 to move towards the limiting plate 37. The control plate 36 will then leave the connecting groove 32. At this time, the box door 29 can be removed, and a new filter cotton 11 can be replaced. The insert plate 31 is then inserted back into the box door 29. The insert plate 31 contacts the inclined surface of the control plate 36, and the third spring 34 is compressed. When the connecting groove 32 moves next to the control plate 36, the elastic force of the third spring 34 pushes the control plate 36 into the connecting groove 32, thus completing the fixation. This facilitates the replacement of the filter cotton 11 without stopping the machine, improving the purification efficiency.

[0030] Finally, it should be noted that the above embodiments are merely representative examples of this utility model. Obviously, this utility model is not limited to the above embodiments and many variations are possible. Any simple modifications, equivalent changes, and alterations made to the above embodiments based on the technical essence of this utility model should be considered to fall within the protection scope of this utility model.

Claims

1. A vapor deposition furnace for easy treatment of waste gas, comprising a furnace body (1), characterized in that: An exhaust pipe (2) is fixedly installed on the top of the furnace body (1). A purification box (3) is fixedly installed at one end of the exhaust pipe (2). An electric telescopic rod (4) is fixedly installed on the top of the purification box (3). The telescopic end of the electric telescopic rod (4) enters the purification box (3) and is fixedly installed with a lifting seat (5). An inward opening is made on one side of the lifting seat. An electromagnet (20) is installed at one end of the opening. Multiple first springs (21) are fixedly installed on the outward side of the electromagnet (20). A scraper (22) is fixedly installed at the outward end of the first spring (21). Inside the purification box (3) The bottom of the part is provided with a discharge port (6) through the scraper (22) below. A fixed frame (7) is provided on the outer ring below the discharge port (6). A collection box (23) is inserted into the fixed frame (7). Two placement frames (9) are slidably inserted into one side of the purification box (3). Multiple ventilation holes (10) are opened through the side of the placement frame (9) facing the exhaust pipe (2). A filter cotton (11) is provided on one side of the placement frame (9) through the feed port. A connecting plate (28) is provided between the two placement frames (9) and the two placement frames (9) are connected by the connecting plate (28).

2. The vapor deposition furnace for easy treatment of waste gas according to claim 1, characterized in that: The outer wall of the fixed frame (7) is provided with a fixed groove (24), and a second spring (25) is fixedly installed on the inner wall of the fixed groove (24). A movable plate (26) is fixedly installed on one end of the second spring (25), and an L-shaped plate (27) is fixedly installed on one end of the movable plate (26). Two placement frames (9) are provided inside the purification box (3).

3. A vapor deposition furnace for easy waste gas treatment according to claim 1, characterized in that: The purification box (3) has a sliding groove (12) on its inner top surface, and a sliding plate (13) is fixedly installed on the top of the placement frame (9). A slot (14) is provided on one side of the middle section of the sliding plate (13).

4. A vapor deposition furnace for easy waste gas treatment according to claim 3, characterized in that: The purification box (3) has an outwardly penetrating limiting groove (15) on one side corresponding to the slot. The inner wall of the limiting groove (15) is provided with a threaded hole (16). A threaded rod (17) is threadedly connected inside the threaded hole (16). A handle (18) is fixedly installed at one end of the threaded rod (17). A locking block (19) is movably connected to the end of the threaded rod (17) away from the handle (18). The locking block (19) and the slot (14) slide and insert into each other.

5. A vapor deposition furnace for easy treatment of waste gas according to claim 1, characterized in that: Both sides of the feed inlet of the two placement frames (9) are provided with insert plates (31), and the bottom of the insert plates (31) is provided with connecting grooves (32). The placement frame (9) is provided with a box door (29) on the side corresponding to the feed inlet. The box door (29) is provided on the side corresponding to the feed inlet and is inserted into the insert plates (31).

6. A vapor deposition furnace for easy treatment of waste gas according to claim 5, characterized in that: A support plate (33) is fixedly installed on the outer wall of the box door (29). A third spring (34) is fixedly installed on one side of the top of the support plate (33). A pull plate (35) is fixedly installed on the top of the third spring (34). A control plate (36) that is interlocked with the connecting groove (32) is fixedly installed on the top of the pull plate (35). A limiting plate (37) that supports the pull plate (35) is installed on one side of the top of the support plate (33). The limiting plate (37) is located on the other side of the third spring (34). One end of the limiting plate (37) is slidably inserted into the support plate (33).

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