Wafer sorting and conveying device

Abstract

The utility model relates to wafer processing technical field, and disclose a kind of wafer sorting conveying device, including base, the upper surface of base is fixedly installed with three groups of conveying components, the upper surface of base is located the top of conveying component and is provided with three groups of sorting components, the both sides outer wall of base is fixedly installed with extension block, the upper surface of two extension blocks is respectively fixedly installed with first detection station, second detection station and third detection station, fourth detection station.The utility model in the present application, three groups of sorting components and three groups of conveying components can be detected to wafer in three modes, and the qualified wafer and the defective wafer in the detection process are sorted, the wafer is sorted between different detection steps conveniently and effectively, to avoid wafer to appear wrong detection, miss detection and so on, improve the detection and sorting efficiency of wafer.

Claims

1. A wafer sorting and conveying device, comprising a base (1), characterized in that: Three sets of conveying components (4) are fixedly installed on the upper surface of the base (1). Three sets of sorting components are set on the upper surface of the base (1) above the conveying components (4). Extension blocks (2) are fixedly installed on both outer walls of the base (1). The upper surfaces of the two extension blocks (2) are respectively fixedly installed with the first detection station (6), the second detection station (7), the third detection station (8), and the fourth detection station (9). The sorting component includes the first electric telescopic rod (12) fixedly installed on the upper surface of the base (1) on both sides of the conveying components (4). The upper surfaces of the two first electric telescopic rods (12) are fixedly connected to two symmetrically arranged second sliding rails (11). A picking structure is slidably installed between the two second sliding rails (11).

2. The wafer sorting and conveying device according to claim 1, characterized in that: The picking structure includes a sliding seat (13), which is slidably positioned between two second sliding rails (11). A second electric telescopic rod (15) is fixedly installed on the bottom surface of the sliding seat (13), and a second suction cup (16) is fixedly installed at the output end of the second electric telescopic rod (15).

3. The wafer sorting and conveying device according to claim 2, characterized in that: The second inspection station (7) and the third inspection station (8) are respectively located below the two ends of the second sliding rail (11) in the middle sorting component, and the first inspection station (6) is located on the same side as the second inspection station (7), and the fourth inspection station (9) is located on the same side as the third inspection station (8). The first inspection station (6) and the fourth inspection station (9) are respectively located below the ends of the second sliding rail (11) in the other two sorting components.

4. A wafer sorting and conveying device according to claim 3, characterized in that: The upper surface of the base (1) is fixedly mounted above the input end of the transmission assembly (4) with a first mounting bracket (3) and the bottom surface of the first mounting bracket (3) is fixedly mounted above the transmission assembly (4) with a scanner (14).

5. A wafer sorting and conveying device according to claim 4, characterized in that: Two symmetrically arranged first sliding rails (5) are fixedly installed on the upper surface of the two extension blocks (2), and a picking structure is also slidably installed between the two first sliding rails (5).

6. A wafer sorting and conveying device according to claim 5, characterized in that: Both of the extension blocks (2) are fixedly installed with a defective product unloading platform (10) at their ends, and the defective product unloading platform (10) is set in correspondence with the output end of the conveying component (4).

7. A wafer sorting and conveying device according to claim 6, characterized in that: The conveying assembly (4) includes a second mounting bracket (401), inside which a rotatable conveyor belt (402) is installed, and a plurality of equidistantly distributed first suction cups (403) are fixedly connected to the outer wall of the conveyor belt (402).

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