Non-electric control constant temperature and humidity loading wafer transport vehicle
Patent Information
- Application Number
- CN202522198167.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-10-17
- Publication Date
- 2026-08-28
- Estimated Expiration
- 2035-10-17
AI Technical Summary
[0002]晶圆的材质是硅，该材料对于对温度变化敏感，技术部门要求晶圆温度管控在：20±10°，湿度管控在：45±15%RH，温度波动会导致晶圆材料热胀冷缩，会引起晶圆弯曲或内部应力累积，这种形变会影响后续光刻工艺的对准精度，导致芯片出现图案偏移和分层缺陷，使不良率提高，并且如果在运输中若包装材料因温湿度变化收缩/膨胀，配合运输时候的轻微震动可能对晶圆施加额外压力，会造成微裂纹或边缘破损；还需补充的是高湿度的环境会加速晶圆表面氧化，过厚的氧化层会干扰薄膜沉积或刻蚀工艺，需要进行额外的清洗，增加成本，在晶圆已镀有金属层如铜、铝，湿度升高可能引发电化学腐蚀，导致导电性下降有断路风险
[0009]This utility model employs a cabinet, partitions, a quick-release visual self-regulating temperature and humidity module, and a grounding chain. It features two visual detection panels that monitor the temperature and humidity of the upper and lower layers of the placement chamber, respectively. Passive temperature control is achieved through the heat absorption/release characteristics of phase change material (PCM) boards. The PCM boards can be quickly installed and removed from their slots via a backplate. The specifications of the PCM boards within the quick-release visual self-regulating temperature and humidity module can be flexibly changed according to different seasons or the ambient temperature and humidity, ensuring that the temperature and humidity within the placement chamber are consistently maintained within the range of 20±10°C and 45±15%RH. This prevents unnecessary waste of raw materials caused by surface oxidation and avoids thermal expansion and contraction of the wafer materials due to temperature fluctuations. All functional modules are connected using bolts/slots, allowing for quick location and replacement in case of failure, reducing downtime risks. Furthermore, the absence of an electrical control system avoids safety hazards such as aging wiring and short circuits. It boasts low manufacturing and maintenance costs, making it suitable for use in high-cleanliness cleanrooms.
Smart Images
Figure CN224690177U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of transportation, and in particular to the field of stable wafer transportation technology, specifically a non-electrically controlled constant temperature and humidity loading wafer transport vehicle. Background Technology
[0002] The wafer is made of silicon, a material sensitive to temperature changes. The technical department requires wafer temperature control at 20±10°C and humidity control at 45±15%RH. Temperature fluctuations cause the wafer material to expand and contract, leading to wafer bending or internal stress accumulation. This deformation affects the alignment accuracy of subsequent photolithography processes, resulting in pattern misalignment and delamination defects, increasing the defect rate. Furthermore, if the packaging material shrinks / expands due to temperature and humidity changes during transportation, combined with slight vibrations, it may apply additional pressure to the wafer, causing microcracks or edge damage. It should also be noted that high humidity accelerates wafer surface oxidation. An excessively thick oxide layer can interfere with thin film deposition or etching processes, requiring additional cleaning and increasing costs. If the wafer has metal layers such as copper or aluminum deposited on it, increased humidity may trigger electrochemical corrosion, leading to decreased conductivity and the risk of open circuits. Summary of the Invention
[0003] In view of the shortcomings of the prior art described above, the purpose of this utility model is to provide a non-electrically controlled constant temperature and humidity loading wafer transport vehicle to solve the difficulties of the prior art.
[0004] To achieve the above and other related objectives, this utility model provides a non-electrically controlled constant temperature and humidity wafer transport vehicle, comprising: Cabinet 1, the cabinet 1 is a hollow placement cavity 11 formed by four side walls, the cabinet 1 has an opening on the front or rear side, a pair of cabinet doors 12 are hinged at the opening of the cabinet 1, and a movable module 2 is provided around the cabinet 1. The partition 13 is positioned in the center of the placement cavity 11, dividing the placement cavity 11 into an upper layer and a lower layer. The partition 13 is connected to the inner sidewalls of the cabinet 1 by welding. The quick-release visual self-regulating temperature and humidity module 3 is magnetically attached to one side of the cabinet door 12 away from the placement cavity 11, and the other side of the quick-release visual self-regulating temperature and humidity module 3 is located inside the placement cavity 11 and is welded to the inner walls of the left and right sides of the cabinet body 1. Grounding chain 16 is installed on one side of cabinet 1, and the bottom of grounding chain 16 is in contact with the ground.
[0005] According to the preferred embodiment, the mobile module 2 includes: Handles 21 are bolted to the top of the left and right sides of the cabinet body 1. The casters 22 are bolted together and installed around the bottom of the cabinet 1.
[0006] According to the preferred embodiment, the quick-release visual self-regulating temperature and humidity module 3 includes: The LCD panel mounting slot 31 is provided on the cabinet door 12. The LCD panel mounting slot 31 can be arranged side by side on the left or right cabinet door 12, or it can be arranged diagonally on a pair of cabinet doors 12. The bottom of the LCD panel mounting slot 31 is provided with a through hole 32. Several through holes 32 are provided, and several through holes 32 communicate with the placement cavity 11. A visual detection panel 33 is installed in the LCD panel mounting slot 31 by a magnetic clip. A temperature sensor and a humidity sensor 34 are respectively provided on the side of the visual detection panel 33 near the placement cavity 11. A pair of visual detection panels 33 are provided. The bottom of the temperature sensor and humidity sensor 34 of the pair of visual detection panels 33 passes through the through hole 32 and enters the upper and lower layers of the placement cavity 11 respectively. Positioning blocks 35 are respectively welded to the left and right sides of the inner sidewalls of the top and bottom of the cabinet 1 and the left and right sides of the top and bottom of the partition plate 13 in the placement cavity 11. A slot 36 is formed between the positioning blocks 35 and the inner sidewalls of the left and right sides of the cabinet 1. The card plate 37 is disposed on the left and right sides of the upper and lower layers of the placement cavity 11. The card plate 37 is provided with an array of card plates. The top and bottom of the array of card plates 37 are locked in the card slot 36. A PCM plate 38 is bolted to the center of the side of the card plate 37 away from the side wall of the cabinet 1.
[0007] According to the preferred embodiment, a shock-absorbing plate 14 is placed at the top of the partition plate 13 and the bottom of the placement cavity 11, and an anti-static pad 15 is attached to the top of the shock-absorbing plate 14.
[0008] According to the preferred embodiment, the pair of cabinet doors 12 are double-opening.
[0009] This utility model employs a cabinet, partitions, a quick-release visual self-regulating temperature and humidity module, and a grounding chain. It features two visual detection panels that monitor the temperature and humidity of the upper and lower layers of the placement chamber, respectively. Passive temperature control is achieved through the heat absorption / release characteristics of phase change material (PCM) boards. The PCM boards can be quickly installed and removed from their slots via a backplate. The specifications of the PCM boards within the quick-release visual self-regulating temperature and humidity module can be flexibly changed according to different seasons or the ambient temperature and humidity, ensuring that the temperature and humidity within the placement chamber are consistently maintained within the range of 20±10°C and 45±15%RH. This prevents unnecessary waste of raw materials caused by surface oxidation and avoids thermal expansion and contraction of the wafer materials due to temperature fluctuations. All functional modules are connected using bolts / slots, allowing for quick location and replacement in case of failure, reducing downtime risks. Furthermore, the absence of an electrical control system avoids safety hazards such as aging wiring and short circuits. It boasts low manufacturing and maintenance costs, making it suitable for use in high-cleanliness cleanrooms.
[0010] The preferred embodiments of the present invention will be described in more detail below with reference to the accompanying drawings, so as to facilitate an understanding of the features and advantages of the present invention. Attached Figure Description
[0011] Figure 1 The diagram shown is a three-dimensional structural schematic of this utility model; Figure 2 This is a three-dimensional structural schematic diagram from another perspective of the present invention; Figure 3 The diagram shown is an enlarged three-dimensional structural diagram of the cabinet door in this utility model. Figure 4 The diagram shown is an enlarged three-dimensional structural schematic of the visual detection panel in this utility model. Figure 5 The diagram shown is a schematic diagram of the internal structure of the placement cavity in this utility model; Figure 6 The diagram shown is an enlarged three-dimensional structural diagram of the PCM board and the card plate in this utility model; Label Explanation 1. Cabinet body; 11. Storage cavity; 12. Cabinet door; 13. Divider; 14. Shock-absorbing plate; 15. Anti-static rubber pad; 16. Grounding chain; 2. Mobility module; 21. Handle; 22. Casters; 3. Quick-release visual self-adjusting temperature and humidity module; 31. LCD panel mounting slot; 32. Through hole; 33. Visual detection panel; 34. Temperature sensor and humidity sensor; 35. Positioning block; 36. Card slot; 37. Card plate; 38. PCM board; Detailed Implementation
[0012] To make the objectives, technical solutions, and advantages of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. The same reference numerals in the drawings represent the same components. It should be noted that the described embodiments are only some, not all, of the embodiments of this utility model. All other embodiments obtained by those skilled in the art based on the described embodiments of this utility model without creative effort are within the scope of protection of this utility model.
[0013] Compared to the embodiments shown in the accompanying drawings, feasible embodiments within the scope of protection of this utility model may have fewer components, have other components not shown in the drawings, different components, components arranged differently, or components with different connections, etc. Furthermore, two or more components shown in the drawings may be implemented in a single component, or a single component shown in the drawings may be implemented as multiple separate components.
[0014] Unless otherwise defined, the technical or scientific terms used herein shall have the ordinary meaning understood by one of ordinary skill in the art to which this invention pertains. The terms “first,” “second,” and similar terms used in this patent application specification and claims do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Similarly, “an” or “a” and similar terms do not necessarily indicate a quantity limitation. Terms such as “comprising” or “including” mean that the element or object preceding the word encompasses the element or object listed following the word and its equivalents, without excluding other elements or objects. Terms such as “connected” or “linked” are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. Terms such as “upper,” “lower,” “left,” and “right” are used only to indicate relative positional relationships; these relative positional relationships may change accordingly when the absolute position of the described object changes.
[0015] This utility model proposes a non-electrically controlled constant temperature and humidity wafer transport vehicle for wafer loading, storage and transportation processes. This utility model does not limit the specifications of the wafers to be transported, but the structure of the cabinet 1, the partition 13, the quick-release visual self-adjusting temperature and humidity module 3 and the grounding chain 16 is particularly suitable for wafer constant temperature and humidity storage and transportation.
[0016] In general, the non-electrically controlled constant temperature and humidity loading wafer transport vehicle proposed in this utility model mainly includes: a cabinet 1, a partition 13, a quick-release visual self-adjusting temperature and humidity module 3, and a grounding chain 16. (See also...) Figure 1 and 2It shows the arrangement of cabinet 1, partition 13, quick-release visual self-regulating temperature and humidity module 3, and grounding chain 16.
[0017] The non-electrically controlled constant temperature and humidity wafer transport vehicle proposed in this invention divides the wafer placement cavity 11 into upper and lower layers through a partition plate 13, and is equipped with two visual detection panels 33 to monitor the temperature and humidity of the upper and lower layers of the placement cavity 11 respectively. Passive temperature control is achieved through the heat absorption / release characteristics of phase change material plates such as PCM boards 38. The PCM boards 38 can be quickly installed and removed from the slots 36 through the back card plate 37. The specifications of the PCM boards 38 in the quick-release visual self-adjusting temperature and humidity module 3 can be flexibly changed according to different seasons or the ambient temperature and humidity of the day, so that the temperature and humidity in the placement cavity 11 are always maintained within the range of 20±10° and 45±15%RH. This non-electrically controlled constant temperature and humidity wafer transport vehicle design ensures normal temperature and humidity on the wafer surface, prevents unnecessary waste of raw materials caused by wafer surface oxidation, and adopts non-electrically controlled temperature and humidity control, resulting in low manufacturing and maintenance costs.
[0018] The aforementioned cabinet 1 consists of a hollow storage cavity 11 formed by four side walls. The cabinet 1 has an opening on the front or rear side, and a pair of cabinet doors 12 are hinged at the opening. The pair of cabinet doors 12 are double-opening, and the maximum opening angle of the double-opening cabinet doors 12 is 180°, which provides high flexibility for storing and retrieving wafers and reduces the risk of bumps. It should also be noted that the partition plate 13 is set in the center of the storage cavity 11, dividing the storage cavity 11 into an upper and lower layer. The partition plate 13 is connected to the inner side walls of the cabinet 1 by welding, which supports the classified storage of wafers such as different process stages or sizes, reducing the risk of physical contact. Shock-absorbing plates 14 are placed at the top of the partition plate 13 and the bottom of the storage cavity 11. The shock-absorbing plates 14 are made of rubber to reduce the impact of vibration on the wafers during transportation. Finally, a grounding chain 16 is set on one side of the cabinet 1 to continuously discharge static electricity from the cabinet, forming a double protection with the anti-static pad 15 attached to the top of the shock-absorbing plate 14.
[0019] The aforementioned movable module 2 is arranged around the cabinet 1. The movable module 2 includes: handle 21 and casters 22. The handle 21 is bolted to the top of the left and right sides of the cabinet 1, and the casters 22 are bolted to the bottom of the cabinet 1 to facilitate the movement and transportation of the cabinet 1.
[0020] The aforementioned quick-release visual self-regulating temperature and humidity module 3 is magnetically attached to one side of the cabinet door 12 away from the placement cavity 11. The other side of the module is welded to the inner walls of the left and right sides of the cabinet body 1 within the placement cavity 11. The quick-release visual self-regulating temperature and humidity module 3 includes: an LCD panel mounting slot 31, a visual detection panel 33, a positioning block 35, a locking plate 37, and a PCM board 38. The LCD panel mounting slots 31 are respectively located on the cabinet doors 12. There are two installation methods for the LCD panel mounting slots 31: the first is that they are arranged side-by-side on the left or right cabinet doors 12; the second is that they are diagonally arranged on a pair of cabinet doors 12. The bottom of the LCD panel mounting slot 31 has several through holes 32 that communicate with the placement cavity 11. The visual detection panel 33 is magnetically attached to the LCD panel mounting slot 31. Temperature and humidity sensors 34 are respectively installed on the side of the detection panel 33 near the placement cavity 11. A pair of visual detection panels 33 are provided. The bottom of the temperature and humidity sensors 34 of the pair of visual detection panels 33 passes through the through holes 32 and enters the upper and lower layers of the placement cavity 11 respectively. This avoids the blind spots of traditional single-point monitoring and obtains more accurate data inside the cavity. Positioning blocks 35 are welded to the left and right sides of the inner sidewalls of the top and bottom of the cabinet 1 and the left and right sides of the top and bottom of the partition plate 13 inside the placement cavity 11. The positioning blocks 35 and the inner sidewalls of the left and right sides of the cabinet 1 form a slot 36. The slot 36 is fitted with a card plate 37 at equal intervals. A PCM plate 38 is bolted to the center of the side of the card plate 37 away from the sidewall of the cabinet 1. The magnetic quick-release design of the visual detection panel 33 simplifies the maintenance process. The positioning and separate assembly of the card plate 37 and PCM plate 38 supports modular replacement.
[0021] The non-electrically controlled constant temperature and humidity loading wafer transport vehicle proposed in this utility model uses bolt / slot connections for all functional modules, which can be quickly located and replaced in case of failure, reducing the risk of downtime. Furthermore, the absence of an electrical control system avoids safety hazards such as aging wiring and short circuits, making it suitable for use in high-cleanliness cleanrooms.
[0022] The above embodiments are merely illustrative of the principles and effects of this utility model and are not intended to limit the scope of this utility model. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of this utility model. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in this utility model should still be covered by the claims of this utility model.
Claims
1. A non-electrically controlled constant temperature and humidity wafer transport vehicle, characterized in that, include: Cabinet (1), the cabinet (1) is a hollow placement cavity (11) formed by four side walls, the cabinet (1) has an opening on the front or back side, a pair of cabinet doors (12) are hinged at the opening of the cabinet (1), and a movable module (2) is provided around the cabinet (1). The partition (13) is set in the center of the placement cavity (11) to divide the placement cavity (11) into an upper layer and a lower layer. The partition (13) is connected to the inner side wall of the cabinet (1) by welding. The quick-release visual self-regulating temperature and humidity module (3) is magnetically attached to one side of the cabinet door (12) away from the placement cavity (11), and the other side of the quick-release visual self-regulating temperature and humidity module (3) is located inside the placement cavity (11) and is welded to the inner walls of the left and right sides of the cabinet body (1). A grounding chain (16) is provided on one side of the cabinet (1), and the bottom of the grounding chain (16) is in contact with the ground.
2. The non-electrically controlled constant temperature and humidity loading wafer transport vehicle according to claim 1, characterized in that, The mobile module (2) includes: Handles (21) are bolted to the top of the left and right sides of the cabinet (1); The casters (22) are bolted to the bottom of the cabinet (1) around the perimeter.
3. The non-electrically controlled constant temperature and humidity loading wafer transport vehicle according to claim 2, characterized in that, The quick-release visual self-adjusting temperature and humidity module (3) includes: The LCD panel mounting slot (31) is provided on the cabinet door (12) respectively. The LCD panel mounting slot (31) can be arranged side by side on the left or right cabinet door (12), or the LCD panel mounting slot (31) can be arranged diagonally on a pair of cabinet doors (12). The bottom of the LCD panel mounting slot (31) is provided with a through hole (32). Several through holes (32) are provided, and several through holes (32) communicate with the placement cavity (11). A visual detection panel (33) is installed in the LCD panel mounting slot (31) by magnetic snap-fit. A temperature sensor and a humidity sensor (34) are respectively provided on the side of the visual detection panel (33) near the placement cavity (11). A pair of temperature sensors and humidity sensors (34) of the visual detection panel (33) are provided. The bottom of the pair of temperature sensors and humidity sensors (34) of the visual detection panel (33) passes through the through hole (32) and enters the upper and lower layers of the placement cavity (11) respectively. Positioning blocks (35) are respectively welded to the left and right sides of the inner sidewalls of the top and bottom of the cabinet (1) and the left and right sides of the top and bottom of the partition plate (13) in the placement cavity (11). A slot (36) is formed between the positioning blocks (35) and the inner sidewalls of the left and right sides of the cabinet (1). The card plate (37) is set on the left and right sides of the upper and lower layers of the placement cavity (11). The card plate (37) is provided with an array. The top and bottom of the array card plate (37) are locked in the card slot (36). A PCM plate (38) is bolted to the center of the side of the card plate (37) away from the side wall of the cabinet (1).
4. The non-electrically controlled constant temperature and humidity loading wafer transport vehicle according to claim 3, characterized in that, A shock-absorbing plate (14) is placed at the top of the partition plate (13) and the bottom of the placement cavity (11), and an anti-static pad (15) is pasted on the top of the shock-absorbing plate (14).
5. The non-electrically controlled constant temperature and humidity loading wafer transport vehicle according to claim 4, characterized in that, The pair of cabinet doors (12) are double-opening.