An overhead transport vehicle

CN224698265UActive Publication Date: 2026-08-28ZHEJIANG HANS FUCHENGDE TECH CO LTD
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Patent Information

Application Number
CN202521431099.0
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-07-09
Publication Date
2026-08-28
Estimated Expiration
2035-07-09

AI Technical Summary

Technical Problem

因此,晶圆盒的提升停止位置必须极其精确,否则如果提升过位,提升用的升降带会承受额外较大的拉力,导致升降带变形、影响重复定位精度和系统的稳定性,但如果提升未到位,抓取机构尚未完全定位,仍然处于一个自由的状态,天车在行驶过程中晶圆盒会晃动,会导致晶圆片的损坏,将会影响整个天车的运行

Benefits of technology

[0035]实际应用时,当需要抓取晶圆盒,行走组件沿高架滑轨移动至指定的晶圆盒抓取工位,升降机构带动抓取机构移动至抓取位置,抓取机构顺利抓取晶圆盒,升降机构使抓取机构移动至支撑位置,防掉落机构对晶圆盒进行支撑,以防止晶圆盒从抓取机构掉落,完成晶圆盒的抓取和防掉落,便于稳定搬运晶圆盒,从而便于完成晶圆盒的搬运和取放;由于升降机构设置有调节组件,所述调节组件用于调节抓取机构的放置姿态,以使得晶圆盒处于稳定的水平放置状态,保障天车行驶过程中晶圆盒晃动,防止晶圆损坏,保证天车的正常工作。

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Abstract

The utility model relates to wafer conveying equipment technical field, especially point to a kind of overhead transport vehicle, including the walking assembly for moving along overhead slide rail, the lifting mechanism connected with walking assembly, the grabbing mechanism and the anti-falling mechanism of driving connection with lifting mechanism, the grabbing mechanism is used to grab or loosen wafer box, the lifting mechanism drives grabbing mechanism to move up and down, the travel range of grabbing mechanism has grabbing position and support position, the support position is located above grabbing position;Lifting mechanism is provided with adjusting assembly, the adjusting assembly is used to adjust the placing posture of grabbing mechanism, so that wafer box is in stable horizontal placement state;The utility model can be convenient for completing the conveying and taking of wafer box, can make wafer box be in stable horizontal placement state, guarantee wafer box to shake in the process of travelling of headstock gear, guarantee the normal work of headstock gear.
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