A wet electronic chemical defoaming device
Patent Information
- Application Number
- CN202521977523.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-09-15
- Publication Date
- 2026-09-04
- Estimated Expiration
- 2035-09-15
AI Technical Summary
[0004]为了弥补以上不足,本实用新型提供了一种湿电子化学品除泡装置,旨在改善现有技术中现有的去泡设备存在拆卸与维修困难、连接不便等问题,导致设备的维护效率低的问题
[0021] 1. In this utility model, electronic chemicals are fed into the filter membrane frame through the connection port and conduit. The vacuum pump is started to create a vacuum in the defoaming chamber. The negative pressure causes the air in the electronic chemicals to pass through the gas membrane and defoam. During maintenance, pressing the connection moves the connecting rod to squeeze the spring, and then rotating the delivery pipe moves the elastic block to the groove. Pulling down the vacuum pipe completes the disassembly. This realizes the removal of bubbles in electronic chemicals and the convenient disassembly and installation of the vacuum pipe, thereby reducing the difficulty of internal pipeline maintenance and improving work efficiency.
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Figure CN224711624U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of chemical defoaming technology, and in particular to a wet electronic chemical defoaming device. Background Technology
[0002] A wet electronic chemical defoaming device is a specialized device for removing air bubbles or foam from wet electronic chemicals (such as cleaning solutions, chemical reagents, surface treatment liquids, etc.). Because wet electronic chemicals are widely used in industries such as semiconductors, liquid crystal displays, and photovoltaics, the presence of foam can affect process stability and even lead to defects. Therefore, specialized equipment has been developed to remove these air bubbles.
[0003] During the handling and transportation of electronic chemicals, bubbles are often generated due to stirring, heating, or the introduction of air bubbles. If these bubbles are not removed in time, they may affect the cleaning effect of the product, the chemical reaction process, or cause production defects. However, existing defoaming equipment suffers from problems such as difficulty in disassembly and maintenance, and inconvenient connection, resulting in low equipment maintenance efficiency. Therefore, a wet electronic chemical defoaming device is proposed to solve the above problems. Utility Model Content
[0004] To overcome the above shortcomings, this utility model provides a wet electronic chemical defoaming device, which aims to improve the existing defoaming equipment in the prior art, which has problems such as difficulty in disassembly and maintenance, inconvenient connection, and low maintenance efficiency.
[0005] To achieve the above objectives, the present invention adopts the following technical solution: a defoaming device for wet electronic chemicals, comprising a base plate, with support frames fixedly connected to both upper sides of the base plate, a defoaming chamber fixedly connected to the upper part of the support frames, connection ports fixedly connected to both the left and right sides of the exterior of the defoaming chamber, a connecting pipe fixedly connected to the bottom inside the defoaming chamber, an installation ring fixedly connected to the lower end of the connecting pipe, an installation sleeve fixedly connected to the bottom of the installation ring, an air extraction pipe engaged inside the installation sleeve, fixing components fixedly connected to both outer sides of the air extraction pipe, the fixing components being used to install and fix the air extraction pipe, and an air pump fixedly connected to one end of the air extraction pipe.
[0006] As a further description of the above technical solution:
[0007] A sealing ring 1 is engaged with one side of the connector. A spring ring is provided inside the sealing ring 1. Four connecting sleeves are engaged with one side of the sealing ring 1. Each connecting sleeve has an insertion hole inside. An insert is engaged with the insertion hole inside. A sealing ring 2 is fixedly connected to one end of the insert. The sealing ring 2 is engaged with the other side of the connector.
[0008] As a further description of the above technical solution:
[0009] The fixing component includes an elastic block, which is fixedly connected to both sides of the outside of the suction pipe. The inner side of the mounting sleeve has grooves on both the front and back, and the inner other side of the mounting sleeve has arc-shaped grooves on both the front and back. The elastic block is slidably connected inside the grooves and arc-shaped grooves.
[0010] As a further description of the above technical solution:
[0011] Support members are fixedly connected to both sides of the outer side of the mounting sleeve. A connecting rod is slidably connected inside the support member. A pull block is fixedly connected to one end of the connecting rod. A return spring is sleeved on the outer side of the connecting rod.
[0012] As a further description of the above technical solution:
[0013] One end of the reset spring is fixedly connected to one side of the pull block, and the other end of the reset spring is fixedly connected to the outer side of the support member.
[0014] As a further description of the above technical solution:
[0015] Each of the connectors has a conduit that is snapped into place inside. A filter membrane holder is fixedly connected to the corresponding end of each conduit. The filter membrane holder is located inside the defoaming chamber.
[0016] As a further description of the above technical solution:
[0017] The conduit is engaged within sealing ring one and sealing ring two.
[0018] As a further description of the above technical solution:
[0019] The air pump is fixedly connected to the upper front side of the base plate.
[0020] This utility model has the following beneficial effects:
[0021] 1. In this utility model, electronic chemicals are fed into the filter membrane frame through the connection port and conduit. The vacuum pump is started to create a vacuum in the defoaming chamber. The negative pressure causes the air in the electronic chemicals to pass through the gas membrane and defoam. During maintenance, pressing the connection moves the connecting rod to squeeze the spring, and then rotating the delivery pipe moves the elastic block to the groove. Pulling down the vacuum pipe completes the disassembly. This realizes the removal of bubbles in electronic chemicals and the convenient disassembly and installation of the vacuum pipe, thereby reducing the difficulty of internal pipeline maintenance and improving work efficiency.
[0022] 2. In this utility model, the spring ring of the inner sealing ring one is tightened, the plug is inserted into the socket to make the connecting sleeve engage, and the connecting sealing ring two is installed with the sealing ring one. The double sealing ensures the sealing performance between the conduit and the connection port, and achieves double protection of the sealing effect between the conduit and the connection port. This improves the sealing performance of the external connection pipeline when transporting electronic chemicals and reduces the possibility of leakage during water transportation. Attached Figure Description
[0023] Figure 1 This is a perspective view of a wet electronic chemical defoaming device proposed in this utility model;
[0024] Figure 2 This is a front view of the defoaming chamber of a wet electronic chemical defoaming device proposed in this utility model;
[0025] Figure 3 This is a schematic diagram of the sealing structure of a wet electronic chemical defoaming device proposed in this utility model;
[0026] Figure 4 This is a schematic diagram of the vacuum equipment installation structure of a wet electronic chemical defoaming device proposed in this utility model.
[0027] Legend:
[0028] 1. Base plate; 2. Support frame; 3. Defoaming chamber; 4. Connection port; 5. Filter membrane holder; 6. Guide tube; 7. Sealing ring one; 8. Spring ring; 9. Sealing ring two; 10. Insert; 11. Connecting sleeve; 12. Insertion hole; 13. Air pump; 14. Air extraction pipe; 15. Elastic block; 16. Mounting sleeve; 17. Groove; 18. Arc-shaped inclined groove; 19. Support component; 20. Connecting rod; 21. Pull block; 22. Return spring; 23. Mounting ring; 24. Connecting pipe. Detailed Implementation
[0029] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0030] Reference Figure 1 , Figure 2 , Figure 4This utility model provides an embodiment of a defoaming device for wet electronic chemicals, comprising a base plate 1, with support frames 2 fixedly connected to both sides of the upper part of the base plate 1, a defoaming chamber 3 fixedly connected to the upper part of the support frames 2, connection ports 4 fixedly connected to both sides of the exterior of the defoaming chamber 3, a connecting pipe 24 fixedly connected to the bottom side of the interior of the defoaming chamber 3, a mounting ring 23 fixedly connected to the lower end of the connecting pipe 24, a mounting sleeve 16 fixedly connected to the bottom of the mounting ring 23, and an exhaust pipe 14 engaged inside the mounting sleeve 16. Both sides of the outer surface are fixedly connected to a fixing component, which is used to install and fix the air extraction pipe 14. One end of the air extraction pipe 14 is fixedly connected to an air pump 13. The fixing component includes an elastic block 15, which is fixedly connected to both sides of the outer surface of the air extraction pipe 14. The inner side of the mounting sleeve 16 has grooves 17 on both the front and back, and the inner side of the mounting sleeve 16 has arc-shaped inclined grooves 18 on both the front and back. The elastic block 15 is slidably connected inside the grooves 17 and the arc-shaped inclined grooves 18. The air pump 13 is fixedly connected to the upper front side of the base plate 1.
[0031] Support members 19 are fixedly connected to both sides of the outer side of the mounting sleeve 16. A connecting rod 20 is slidably connected inside the support member 19. A pull block 21 is fixedly connected to one end of the connecting rod 20. A return spring 22 is sleeved on the outer side of the connecting rod 20. One end of the return spring 22 is fixedly connected to one side of the pull block 21, and the other end of the return spring 22 is fixedly connected to the outer side of the support member 19. A conduit 6 is snapped into the inside of the connecting port 4. A filter membrane frame 5 is fixedly connected to the corresponding end of the conduit 6. The filter membrane frame 5 is set inside the defoaming chamber 3. The conduit 6 is snapped into the inside of the sealing ring 1 7 and the sealing ring 2 9.
[0032] Electronic chemicals are transported through connection port 4 and conduit 6 into the filter membrane holder 5. Then, the vacuum pump 13 is activated, drawing air from the degassing chamber 3 via the vacuum pipe 14 and connecting pipe 24, creating a vacuum. Under this negative pressure, air in the electronic chemicals passes through the degassing membrane outside the filter membrane holder 5, thus removing air bubbles. For maintenance, the pull block 21 is pressed, moving the connecting rod 20 and simultaneously squeezing the return spring 22, generating a rebound force that compresses the elastic block 15. As the elastic block 15 is compressed, the vacuum pipe 14 rotates, moving the elastic block 15 into the groove 17. Then, the vacuum pipe 14 is pulled downwards, allowing the elastic block 15 to slide out of the groove 17, completing the disassembly of the vacuum pipe 14. This facilitates the removal of air bubbles from electronic chemicals and the convenient disassembly and installation of the vacuum pipe 14, reducing the difficulty of internal pipeline maintenance and improving work efficiency.
[0033] Reference Figure 1 , Figure 2 , Figure 3 A sealing ring 7 is engaged with one side of the inside of the connector 4. A spring ring 8 is provided inside the sealing ring 7. Four connecting sleeves 11 are engaged with one side of the inside of the sealing ring 7. Each connecting sleeve 11 has an insertion hole 12 inside. An insert 10 is engaged with the inside of the insertion hole 12. A sealing ring 9 is fixedly connected to one end of the insert 10. The sealing ring 9 is engaged with the other side of the inside of the connector 4.
[0034] The sealing rings 7 and 9 installed inside the connection port 4 ensure the airtightness of the conduit 6 during the transportation of electronic chemicals to the external pipeline. The spring ring 8 inside the sealing ring 7 tightens the sealing ring 7, making it fit tightly against the outside of the conduit 6. The insert 10 is inserted into the socket 12, fixing it to the connecting sleeve 11, which in turn connects the sealing ring 9 to the sealing ring 7. Under the action of the sealing ring 9, the airtightness between the conduit 6 and the external pipeline is further ensured, achieving a double guarantee of the sealing effect between the conduit 6 and the external pipeline, improving the airtightness during the transportation of electronic chemicals, and reducing the possibility of leakage during water transportation.
[0035] Working principle: When the device is needed, electronic chemicals are transported through the connection port 4 and the conduit 6 into the filter membrane holder 5. Then, the vacuum pump 13 is started, which, under the action of the vacuum pipe 14 and the connecting pipe 24, evacuates the air in the degassing chamber 3, creating a vacuum inside. Under the negative pressure, the air in the electronic chemicals passes through the degassing membrane outside the filter membrane holder 5, thereby removing the bubbles in the electronic chemicals. When maintenance is required, the pull block 21 is pressed, which moves the connecting rod 20 and simultaneously squeezes the return spring 22. While the elastic block 15 is being squeezed, the vacuum pipe 14 is rotated and moved into the groove 17. Then, the vacuum pipe 14 is pulled down to complete the disassembly of the vacuum pipe 14. This achieves the removal of bubbles in electronic chemicals and the convenient disassembly and installation of the vacuum pipe 14, reducing the difficulty of internal pipeline maintenance and improving work efficiency.
[0036] The sealing ring 7 installed inside the connection port 4 is tightened by the spring ring 8 inside the sealing ring 7. The spring ring 8 is then inserted into the socket 12 via the plug 10, which engages with the connecting sleeve 11. This allows the sealing ring 9 to be installed and connected to the sealing ring 7. With the double sealing of the sealing ring 7 and the sealing ring 9, the sealing performance between the conduit 6 and the connection port 4 is ensured. This provides double protection for the sealing effect between the conduit 6 and the connection port 4, improves the sealing performance of the external pipeline when transporting electronic chemicals, and reduces the possibility of leakage during water transportation.
[0037] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.
Claims
1. A defoaming device for wet electronic chemicals, comprising a base plate (1), characterized in that: Support frames (2) are fixedly connected to both sides of the upper part of the base plate (1). A defoaming chamber (3) is fixedly connected to the upper part of the support frame (2). Connection ports (4) are fixedly connected to both the left and right sides of the exterior of the defoaming chamber (3). A connecting pipe (24) is fixedly connected to the bottom side of the interior of the defoaming chamber (3). An installation ring (23) is fixedly connected to the bottom end of the connecting pipe (24). An installation sleeve (16) is fixedly connected to the bottom of the installation ring (23). An air extraction pipe (14) is snapped into the interior of the installation sleeve (16). Fixing components are fixedly connected to both sides of the exterior of the air extraction pipe (14). The fixing components are used to install and fix the air extraction pipe (14). An air pump (13) is fixedly connected to one end of the air extraction pipe (14).
2. The wet electronic chemical defoaming device according to claim 1, characterized in that: A sealing ring (7) is engaged with one side of the connection port (4). A spring ring (8) is provided inside the sealing ring (7). Four connecting sleeves (11) are engaged with one side of the sealing ring (7). Each connecting sleeve (11) has an insertion hole (12) inside. An insert (10) is engaged with the inside of the insertion hole (12). A sealing ring (9) is fixedly connected to one end of the insert (10). The sealing ring (9) is engaged with the other side of the connection port (4).
3. The wet electronic chemical defoaming device according to claim 1, characterized in that: The fixing component includes an elastic block (15), which is fixedly connected to both sides of the outside of the suction pipe (14). The mounting sleeve (16) has grooves (17) on both the front and back of one side of the inside, and arc-shaped grooves (18) on both the front and back of the other side of the inside. The elastic block (15) is slidably connected inside the grooves (17) and the arc-shaped grooves (18).
4. The wet electronic chemical defoaming device according to claim 1, characterized in that: Support members (19) are fixedly connected to both sides of the outer side of the mounting sleeve (16). A connecting rod (20) is slidably connected inside the support member (19). A pull block (21) is fixedly connected to one end of the connecting rod (20). A return spring (22) is sleeved on the outer side of the connecting rod (20).
5. A defoaming device for wet electronic chemicals according to claim 4, characterized in that: One end of the return spring (22) is fixedly connected to one side of the pull block (21), and the other end of the return spring (22) is fixedly connected to the outer side of the support (19).
6. The wet electronic chemical defoaming device according to claim 5, characterized in that: The connection port (4) is fitted with a conduit (6), and a filter membrane holder (5) is fixedly connected to the corresponding end of the conduit (6). The filter membrane holder (5) is located inside the defoaming chamber (3).
7. A defoaming device for wet electronic chemicals according to claim 6, characterized in that: The conduit (6) is engaged inside the sealing ring one (7) and the sealing ring two (9).
8. A defoaming device for wet electronic chemicals according to claim 1, characterized in that: The air pump (13) is fixedly connected to the upper front side of the base plate (1).