A surface grinding device

CN224737917UActive Publication Date: 2026-09-11VITAL MICRO-ELECTRONICS TECH CO LTD
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Patent Information

Application Number
CN202521750119.0
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-08-15
Publication Date
2026-09-11
Estimated Expiration
2035-08-15

AI Technical Summary

Technical Problem

[0005]本实用新型的目的是提供一种磨平面装置,以解决目前对晶棒磨平面的方法较为耗费人力,而且工序的连续性差,无法连续处理多个晶棒,加工效率低的技术问题

Benefits of technology

本实用新型磨平面装置主要由转动组件、磨平面组件、上料组件和下料组件组成,具体的,转动组件中,转动驱动器能够驱动转盘转动,进而使转盘上的容纳槽移动至不同的工位,位于不同工位的容纳槽对应于不同的部件,各工位对应不同的工序,如上料、磨平面、检测和下料等,进一步的,夹紧器对应容纳槽设于转盘,其夹紧驱动器能够驱动两个夹紧板相靠近和相远离,以实施夹紧晶棒和松开晶棒的动作;磨平面组件中,磨平面驱动器连接于砂轮,使砂轮能够转动,进而对靠近砂轮的晶棒进行磨平面加工,第一移动驱动器能够驱动连接架从下至上移动,以使安装于转动的砂轮对晶棒的一侧进行磨平面加工;上料组件中,上料组件对应于转盘,并能够将晶棒上料于容纳槽;下料组件中,下料组件对应于转盘,并能够将容纳槽上的晶棒下料;进一步的,具体的加工工序如下:转盘转动,使容纳槽对应于上料组件,上料组件将未加工的晶棒上料至容纳槽,夹紧驱动器驱动两个夹紧板相靠近,以夹紧固定晶棒,转盘转动,使容纳槽对应于磨平面组件,第一移动驱动器驱动连接架从下至上移动,以使安装于连接架的砂轮对晶棒的一侧进行磨平面加工,转盘转动,使已加工的晶棒对应于下料组件,夹紧驱动器驱动两个夹紧板相远离,以松开晶棒,下料组件取下该已加工的晶棒;综上,本实用新型磨平面装置能够实施完成上料、夹紧固定、磨平面加工、松开和下料的工序,过程中无需手动干预,可以依次处理多个晶棒,加工效率高。

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Abstract

The utility model relates to the technical field of semiconductor substrate manufacturing, especially to a grinding plane device including rotating assembly, grinding plane subassembly, feeding assembly and discharging assembly, rotating assembly includes fixed frame, carousel, rotating drive and clamping ware, and the carousel is equipped with the accommodating groove, and the carousel rotates and is located in the fixed frame, and the rotating drive is connected in the carousel, and the clamping ware includes clamping drive and two clamping plates, and two clamping plates are equipped with both sides above the accommodating groove, and the clamping drive is installed in the carousel and is connected to two clamping plates, grinding plane subassembly includes grinding wheel, grinding plane drive, connecting frame, first mobile drive and grinding frame, and the grinding wheel and grinding plane drive are installed in the connecting frame, and the connecting frame is installed in the grinding frame, and the first mobile drive is connected to the connecting frame, the feeding assembly can feed the crystal bar to the accommodating groove, and the discharging assembly can discharge the crystal bar of the accommodating groove, and the grinding plane device has high processing efficiency.
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Description

Technical Field

[0001] This utility model relates to the field of semiconductor substrate manufacturing technology, and in particular to a grinding device. Background Technology

[0002] Indium phosphide substrate is a semiconductor substrate with indium phosphide as its core material. It is one of the key basic materials for the manufacture of microelectronic and optoelectronic devices and is widely used in fields such as high-frequency and high-power devices, optical fiber communication, wireless transmission, and radio frequency devices in radio astronomy.

[0003] In the indium phosphide substrate processing technology, in order to provide a crystal orientation reference for subsequent processes such as slicing, polishing and device fabrication, and to ensure that the crystal orientation of the final substrate meets the design requirements, and to avoid device performance degradation or failure due to crystal orientation deviation, one side of the crystal rod is ground into a flat surface before slicing the crystal rod to mark the specific crystal orientation of the crystal rod.

[0004] Currently, the typical indium phosphide substrate grinding process is as follows: the crystal ingot is manually mounted onto a fixture to secure it, then a grinding machine is used to grind away one side of the crystal ingot, and finally the fixture is manually released to remove the crystal ingot. This grinding process requires manual operation before and after the grinding operation, which is labor-intensive. Furthermore, the process lacks continuity, making it impossible to process multiple crystal ingots continuously, resulting in low processing efficiency. Utility Model Content

[0005] The purpose of this invention is to provide a grinding device to solve the technical problems of current methods for grinding crystal rods, which are labor-intensive, have poor process continuity, cannot process multiple crystal rods continuously, and have low processing efficiency.

[0006] To achieve the above objectives, this utility model provides a surface grinding device, comprising, A rotating assembly includes a fixed frame, a turntable, a rotating driver, and a clamping device. The top surface of the turntable has a receiving groove around its axis of rotation. The turntable is rotatably mounted on the fixed frame. The rotating driver is connected to the turntable and is used to drive the turntable to rotate. The clamping device includes a clamping driver and two clamping plates. The two clamping plates are located on both sides above the receiving groove. The clamping driver is mounted on the turntable and connected to the two clamping plates. The clamping driver can drive the two clamping plates to move closer together and further apart. A surface grinding assembly includes a grinding wheel, a surface grinding driver, a connecting frame, a first moving driver, and a grinding frame. The grinding wheel and the surface grinding driver are mounted on the connecting frame. The surface grinding driver is used to drive the grinding wheel to rotate. The connecting frame is mounted on the grinding frame. The first moving driver is connected to the connecting frame and is used to drive the connecting frame to move in the up-down direction. A feeding assembly capable of feeding crystal ingots into the receiving tank; A feeding assembly capable of feeding the crystal rods from the receiving tank.

[0007] Optionally, the clamping plate has an arc-shaped clamping groove extending in the vertical direction on the side opposite to the other clamping plate. The arc-shaped clamping groove is used to clamp the crystal rod, and the arc-shaped clamping grooves of the two clamping plates are provided correspondingly.

[0008] Optionally, a detection component is also included, which includes a vision sensor and a detection frame. The vision sensor is fixedly mounted on the detection frame and faces downward. The vision sensor is located above the turntable and is used to detect the crystal rod located in the receiving groove.

[0009] Optionally, the top surface of the turntable is provided with four receiving slots evenly distributed around its axis of rotation. The rotating assembly also includes four clamps, each clamp corresponding to one of the receiving slots. The feeding assembly, the grinding surface assembly, the detection assembly, and the unloading assembly are arranged sequentially around the turntable in a clockwise or counterclockwise direction, and are evenly distributed.

[0010] Optionally, the grinding surface assembly further includes a second moving drive. The grinding frame includes a first frame and a second frame. The first moving drive is mounted on the first frame. The connecting frame is slidably connected to the first frame in the vertical direction. The first frame is slidably connected to the second frame in the radial direction of the turntable. The second moving drive is mounted on the second frame and connected to the first frame. The second moving drive is used to drive the first frame to move radially along the turntable.

[0011] Optionally, the feeding assembly includes a feeding box and a feeder. The top surface of the feeding box is provided with a plurality of feeding holes for placing unprocessed crystal rods. The feeder can move the crystal rods located in the feeding holes to the receiving slot. The unloading assembly includes an unloading box and an unloader. The top surface of the unloading box is provided with a plurality of unloading holes for placing the processed crystal rods. The unloader can move the crystal rods located in the receiving tank to the unloading holes.

[0012] Optionally, the feeder includes a feed frame, a first feed guide rail, a feed slider, a first feed driver, a second feed driver, a feed clamping driver, and two feed clamping plates. The first feed guide rail extends radially along the turntable and is disposed on the feed frame. The feed slider is slidably connected to the feed frame along the radial direction of the turntable. The first feed driver is connected to the feed slider and is used to drive the feed slider to move radially along the turntable. The feed clamping driver is slidably connected to the feed slider in the up-down direction. The second feed driver is connected to the feed clamping driver and is used to drive the feed clamping driver to move in the up-down direction. The two feed clamping plates are disposed on both sides of the feed clamping driver and are fixedly connected to the feed clamping driver. The feed clamping driver is connected to the two feed clamping plates and can drive the two feed clamping plates to move closer together and further apart. The feeder includes a feed frame, a first feed guide rail, a feed slider, a first feed driver, a second feed driver, a feed clamping driver, and two feed clamping plates. The first feed guide rail extends radially along the turntable and is disposed on the feed frame. The feed slider is slidably connected to the feed frame radially along the turntable. The first feed driver is connected to the feed slider and is used to drive the feed slider to move radially along the turntable. The feed clamping driver is slidably connected to the feed slider in the up-down direction. The second feed driver is connected to the feed clamping driver. The second unloading driver is used to drive the unloading clamping driver to move in the vertical direction. The two unloading clamping plates are disposed on both sides of the unloading clamping driver and fixedly connected to the unloading clamping driver. The unloading clamping driver is connected to the two unloading clamping plates. The unloading clamping driver can selectively drive the two unloading clamping plates to move closer or further apart. The side of the loading clamping plate relative to the other loading clamping plate is provided with a loading clamping arc groove extending in the vertical direction. The loading clamping arc groove is used to clamp the crystal rod. The loading clamping arc grooves of the two loading clamping plates are correspondingly arranged. The unloading clamping plate has an unloading clamping arc groove extending in the vertical direction on its side relative to the other unloading clamping plate. The unloading clamping arc groove is used to clamp the crystal rod, and the unloading clamping arc grooves of the two unloading clamping plates are correspondingly arranged.

[0013] Optionally, a plurality of the feeding holes are arranged in a rectangular array on the top surface of the feeding box. The feeding assembly further includes a second feeding guide rail and a third feeding driver. The second feeding guide rail extends along a first direction and is disposed below the feeding box. The second feeding guide rail is slidably connected to the feeding box. The third feeding driver is connected to the feeding box and is used to drive the feeding box to move along the first direction. Multiple feeding holes are arranged in a rectangular array on the top surface of the feeding box. The feeding assembly also includes a second feeding guide rail and a third feeding driver. The second feeding guide rail extends along a second direction and is located below the feeding box. The second feeding guide rail is slidably connected to the feeding box. The third feeding driver is connected to the feeding box and is used to drive the feeding box to move along the second direction.

[0014] Optionally, the fixing frame includes a base and a plurality of supporting legs, the plurality of supporting legs being disposed on the bottom surface of the base around the axis of the base, the turntable being disposed on the top surface of the base and rotatably connected to the base, and the rotation driver being mounted on the bottom surface of the base.

[0015] Compared with the prior art, the surface grinding device implemented in this utility model has the following advantages: This utility model's surface grinding device mainly consists of a rotating assembly, a surface grinding assembly, a loading assembly, and a unloading assembly. Specifically, in the rotating assembly, a rotating driver drives the turntable to rotate, thereby moving the receiving slots on the turntable to different workstations. The receiving slots at different workstations correspond to different components, and each workstation corresponds to a different process, such as loading, surface grinding, inspection, and unloading. Furthermore, a clamping device is located on the turntable corresponding to the receiving slot, and its clamping driver can drive two clamping plates to move closer and further apart to perform clamping and releasing actions on the crystal rods. In the surface grinding assembly, a surface grinding driver is connected to the grinding wheel, enabling the grinding wheel to rotate and thus perform surface grinding on the crystal rods close to the grinding wheel. A first moving driver can drive the connecting frame to move from bottom to top, so that the grinding wheel mounted on the rotating assembly can perform surface grinding on one side of the crystal rod. In the loading assembly, the loading assembly corresponds to the turntable and is capable of loading the crystal rods. The device comprises a receiving tank and a feeding assembly, which corresponds to a turntable and is capable of feeding crystal rods from the receiving tank. Further, the specific processing steps are as follows: the turntable rotates, aligning the receiving tank with the feeding assembly, which feeds the unprocessed crystal rod into the receiving tank; a clamping driver drives two clamping plates to move closer together to clamp and fix the crystal rod; the turntable rotates, aligning the receiving tank with the grinding assembly; a first moving driver drives a connecting frame to move from bottom to top, so that the grinding wheel mounted on the connecting frame grinds one side of the crystal rod; the turntable rotates, aligning the processed crystal rod with the feeding assembly; the clamping driver drives the two clamping plates to move away from each other to release the crystal rod; and the feeding assembly removes the processed crystal rod. In summary, this grinding device can complete the feeding, clamping, grinding, releasing, and feeding processes without manual intervention, and can process multiple crystal rods sequentially, resulting in high processing efficiency. Attached Figure Description

[0016] Figure 1 This is a structural schematic diagram of the grinding surface device of this utility model from a first-view perspective.

[0017] Figure 2 for Figure 1 A magnified view of part A in the middle.

[0018] Figure 3 for Figure 1 A magnified view of part B in the middle.

[0019] Figure 4 This is a structural schematic diagram of the grinding surface device of this utility model from a second perspective.

[0020] Figure 5 This is a structural schematic diagram of the grinding surface device of this utility model from a third perspective.

[0021] Figure 6 for Figure 5 A magnified view of part C in the middle.

[0022] Figure 7 This is a top view of the grinding surface device of this utility model.

[0023] Figure 8 for Figure 7 A magnified view of part D in the middle.

[0024] Reference numerals: 1. Rotating assembly; 11. Fixed frame; 111. Base; 112. Support leg; 12. Turntable; 121. Receiving groove; 13. Rotating driver; 14. Clamping device; 141. Clamping driver; 142. Clamping plate; 1421. Arc-shaped clamping groove; 2. Grinding surface assembly; 21. Grinding wheel; 22. Grinding surface driver; 23. Connecting frame; 24. Grinding frame; 241. First frame; 242. Second frame; 25. First moving driver; 26. Second moving driver; 3. Feeding assembly; 31. Feeding box; 311. Feeding hole; 32. Feeder; 321. Feeding rack; 322. First feeding guide rail; 323. Upper... 324. Material slider; 325. First feeding driver; 326. Feeding clamping driver; 327. Feeding clamping plate; 3261. Feeding clamping arc groove; 33. Second feeding guide rail; 34. Third feeding driver; 4. Unloading assembly; 41. Unloading box; 411. Unloading hole; 42. Unloader; 421. Unloading frame; 422. First unloading guide rail; 423. Unloading slider; 424. First unloading driver; 425. Unloading clamping driver; 426. Unloading clamping plate; 4261. Unloading clamping arc groove; 43. Second unloading guide rail; 44. Third unloading driver; 5. Detection assembly; 51. Detection frame; 52. Vision sensor; 6. Crystal rod. Detailed Implementation

[0025] The specific embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples. The following examples are used to illustrate this utility model, but are not intended to limit its scope.

[0026] In the description of this utility model, it should be understood that the terms "top", "bottom", "inner", "outer", "circumferential", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0027] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0028] like Figures 1 to 8 As shown, a surface grinding device of this utility model includes a rotating assembly 1, a surface grinding assembly 2, a feeding assembly 3, and a discharging assembly 4. The rotating assembly 1 includes a fixed frame 11, a turntable 12, a rotating driver 13, and a clamping device 14. The top surface of the turntable 12 has a receiving groove 121 around its rotation axis. The turntable 12 is rotatably mounted on the fixed frame 11. The rotating driver 13 is connected to the turntable 12 and is used to drive the turntable 12 to rotate. The clamping device 14 includes a clamping driver 141 and two clamping plates 142. The two clamping plates 142 are located on both sides above the receiving groove 121. The clamping driver 141 is mounted on the turntable 12 and connected to the two clamping plates 142. 2. The clamping driver 141 can drive the two clamping plates 142 to move closer and further apart; the grinding surface assembly 2 includes a grinding wheel 21, a grinding surface driver 22, a connecting frame 23, a first moving driver 25, and a grinding frame 24. The grinding wheel 21 and the grinding surface driver 22 are mounted on the connecting frame 23. The grinding surface driver 22 is used to drive the grinding wheel 21 to rotate. The connecting frame 23 is mounted on the grinding frame 24. The first moving driver 25 is connected to the connecting frame 23. The first moving driver 25 is used to drive the connecting frame 23 to move in the up and down direction; the loading assembly 3 can load the crystal rod 6 into the receiving groove 121; the unloading assembly 4 can unload the crystal rod 6 from the receiving groove 121.

[0029] In the above technical solution, the grinding surface device mainly consists of a rotating assembly 1, a grinding surface assembly 2, a feeding assembly 3, and a discharging assembly 4. Specifically, in the rotating assembly 1, the rotating driver 13 can drive the turntable 12 to rotate, thereby moving the receiving slots 121 on the turntable 12 to different work positions. The receiving slots 121 located at different work positions correspond to different components, and each work position corresponds to different processes, such as feeding, grinding surface, inspection, and discharging. Furthermore, the clamping device 14 is located on the turntable 12 corresponding to the receiving slots 121, and its clamping driver 1... 41 can drive the two clamping plates 142 to move closer and further apart to perform the actions of clamping and releasing the crystal rod 6; in the grinding surface assembly 2, the grinding surface driver 22 is connected to the grinding wheel 21, enabling the grinding wheel 21 to rotate, thereby performing grinding surface processing on the crystal rod 6 close to the grinding wheel 21; the first moving driver 25 can drive the connecting frame 23 to move from bottom to top, so that the grinding wheel 21 mounted on the rotating plate can perform grinding surface processing on one side of the crystal rod 6; in the loading assembly 3, the loading assembly 3 corresponds to the turntable 12 and can load the crystal rod 6 onto the turntable 12. The receiving groove 121; in the unloading assembly 4, the unloading assembly 4 corresponds to the turntable 12 and can unload the crystal rod 6 from the receiving groove 121; further, the specific processing steps are as follows: the turntable 12 rotates so that the receiving groove 121 corresponds to the loading assembly 3, the loading assembly 3 loads the unprocessed crystal rod 6 into the receiving groove 121, the clamping driver 141 drives the two clamping plates 142 to move closer together to clamp and fix the crystal rod 6, the turntable 12 rotates so that the receiving groove 121 corresponds to the grinding surface assembly 2, and the first moving driver 25 drives the connecting frame 2. 3. Move from bottom to top so that the grinding wheel 21 installed on the connecting frame 23 grinds one side of the crystal rod 6. The turntable 12 rotates so that the processed crystal rod 6 corresponds to the unloading assembly 4. The clamping driver 141 drives the two clamping plates 142 to move away from each other to release the crystal rod 6. The unloading assembly 4 removes the processed crystal rod 6. In summary, the grinding surface device of this utility model can complete the processes of loading, clamping and fixing, grinding surface, releasing and unloading without manual intervention. It can process multiple crystal rods 6 in sequence and has high processing efficiency.

[0030] Furthermore, the clamping plate 142 is provided with an arc-shaped clamping groove 1421 extending in the vertical direction on the side of the other clamping plate 142. The arc-shaped clamping groove 1421 is used to clamp the crystal rod 6, and the arc-shaped clamping grooves 1421 of the two clamping plates 142 are provided correspondingly.

[0031] The arc-shaped clamping groove 1421 matches the outer wall of the crystal rod 6 and can contact the outer wall surface of the crystal rod 6 to reduce the pressure during the clamping process and prevent damage to the crystal rod 6.

[0032] Furthermore, it also includes a detection component 5, which includes a vision sensor 52 and a detection frame 51. The vision sensor 52 is fixedly mounted on the detection frame 51 and faces downward. The vision sensor 52 is located above the turntable 12 and is used to detect the crystal rod 6 located in the receiving groove 121.

[0033] The vision sensor 52 can be a camera. When the turntable 12 rotates and the processed crystal rod 6 is rotated to a position below the vision sensor 52, the vision sensor 52 takes a picture of the crystal rod 6 from top to bottom to detect whether the outline of the crystal rod 6 meets the standard.

[0034] Furthermore, the top surface of the turntable 12 is provided with four receiving slots 121 evenly distributed around its axis of rotation. The rotating assembly 1 also includes four clamping devices 14, each clamping device 14 being arranged one-to-one with the receiving slots 121. The feeding assembly 3, the grinding surface assembly 2, the detection assembly 5, and the unloading assembly 4 are arranged sequentially around the turntable 12 in a clockwise or counterclockwise direction, and the feeding assembly 3, the grinding surface assembly 2, the detection assembly 5, and the unloading assembly 4 are evenly distributed.

[0035] The four receiving slots 121 can correspond to the feeding component 3, the grinding surface component 2, the detection component 5 and the unloading component 4 at the same time, so that the feeding process, the grinding surface process, the detection process and the inspection process can be carried out simultaneously to improve processing efficiency. However, since the grinding surface process will generate a certain vibration, it is best to avoid the other three processes.

[0036] Furthermore, the grinding surface assembly 2 also includes a second moving drive 26. The grinding frame 24 includes a first frame 241 and a second frame 242. The first moving drive 25 is mounted on the first frame 241. The connecting frame 23 is slidably connected to the first frame 241 in the vertical direction. The first frame 241 is slidably connected to the second frame 242 in the radial direction of the turntable 12. The second moving drive 26 is mounted on the second frame 242 and connected to the first frame 241. The second moving drive 26 is used to drive the first frame 241 to move radially along the turntable 12.

[0037] The second moving drive 26 can drive the first frame 241 to approach and move away from the turntable 12, thereby driving the grinding wheel 21 to approach and move away from the turntable 12, so that the grinding wheel 21 can approach the turntable 12 when processing is needed and move away from the turntable 12 when processing is not needed, thus avoiding misprocessing.

[0038] Furthermore, the feeding assembly 3 includes a feeding box 31 and a feeder 32. The top surface of the feeding box 31 is provided with a plurality of feeding holes 311. The feeding holes 311 are used to place unprocessed crystal rods 6. The feeder 32 can move the crystal rods 6 located in the feeding holes 311 to the receiving groove 121. The unloading assembly 4 includes an unloading box 41 and an unloading device 42. The top surface of the unloading box 41 is provided with a plurality of unloading holes 411. The unloading holes 411 are used to place processed crystal rods 6. The unloading device 42 can move the crystal rods 6 located in the receiving groove 121 to the unloading holes 411.

[0039] The orientation of the crystal rod 6 prevented by the feeding hole 311 should be set in advance so that the grinding surface assembly 2 can process the specified position. The feeding device 32 can perform the feeding process of crystal rod 6 by clamping the crystal rod 6 located in the feeding hole 311, then pulling it upward until the crystal rod 6 is disengaged from the feeding hole 311, then moving the crystal rod 6 towards the turntable 12 to the top of the receiving groove 121, then lowering the crystal rod 6 into the receiving groove 121, and then releasing the crystal rod 6.

[0040] The unloader 42 can perform the unloading process by clamping the crystal rod 6 located in the receiving groove 121, then pulling it upward until the crystal rod 6 is detached from the receiving groove 121, then moving the crystal rod 6 away from the turntable 12 to above the unloading hole 411, then lowering the crystal rod 6 into the unloading hole 411, and then releasing the crystal rod 6.

[0041] Furthermore, the feeder 32 includes a feed rack 321, a first feed guide rail 322, a feed slider 323, a first feed driver 324, a second feed driver, a feed clamping driver 325, and two feed clamping plates 326. The first feed guide rail 322 extends radially along the turntable 12 and is disposed on the feed rack 321. The feed slider 323 is slidably connected to the feed rack 321 radially along the turntable 12. The first feed driver 324 is connected to the feed slider 323 and is used to drive the feed slider 323 radially along the turntable 12. The feeding clamping driver 325 is slidably connected to the feeding slider 323 in the vertical direction. The second feeding driver is connected to the feeding clamping driver 325 and is used to drive the feeding clamping driver 325 to move in the vertical direction. Two feeding clamping plates 326 are disposed on both sides of the feeding clamping driver 325 and are fixedly connected to the feeding clamping driver 325. The feeding clamping driver 325 is connected to the two feeding clamping plates 326 and can drive the two feeding clamping plates 326 to move closer and further apart.

[0042] The specific feeding process of the feeder 32 is as follows: The second feeding driver drives the feeding clamping driver 325 to move downward until the two feeding clamping plates 326 are located on both sides of the crystal rod 6. The feeding clamping driver 325 drives the two feeding clamping plates 326 to move closer together to clamp the crystal rod 6 located in the feeding hole 311. The second feeding driver drives the feeding clamping driver 325 to move upward until the crystal rod 6 is removed from the feeding hole 311. The first feeding driver 324 drives the feeding slider 323 to move towards the turntable 12 until the crystal rod 6 is located above the receiving groove 121. The second feeding driver drives the feeding clamping driver 325 to move downward until the crystal rod 6 is inserted into the receiving groove 121. The feeding clamping driver 325 drives the two feeding clamping plates 326 to move away from each other to release the crystal rod 6 located in the receiving groove 121. The feeding assembly 3 is reset.

[0043] Furthermore, the feeder 42 includes a feeder frame 421, a first feeder guide rail 422, a feeder slider 423, a first feeder driver 424, a second feeder driver, a feeder clamping driver 425, and two feeder clamping plates 426. The first feeder guide rail 422 extends radially along the turntable 12 and is disposed on the feeder frame 421. The feeder slider 423 is slidably connected to the feeder frame 421 radially along the turntable 12. The first feeder driver 424 is connected to the feeder slider 423 and is used to drive the feeder slider 423. 3. Moving radially along the turntable 12, the unloading clamping driver 425 is slidably connected to the unloading slider 423 in the up-down direction, the second unloading driver is connected to the unloading clamping driver 425, the second unloading driver is used to drive the unloading clamping driver 425 to move in the up-down direction, the two unloading clamping plates 426 are disposed on both sides of the unloading clamping driver 425, the unloading clamping driver 425 is connected to the two unloading clamping plates 426, the unloading clamping driver 425 can drive the two unloading clamping plates 426 to move closer and further apart.

[0044] The specific feeding process of the feeder 42 is as follows: the second feeding driver drives the feeding clamping driver 425 to move downward until the two feeding clamping plates 426 are respectively located on both sides of the crystal rod 6. The feeding clamping driver 425 drives the two feeding clamping plates 426 to move closer together to clamp the crystal rod 6 located in the receiving groove 121. The second feeding driver drives the feeding clamping driver 425 to move upward until the crystal rod 6 is removed from the receiving groove 121. The first feeding driver 424 drives the feeding slider 423 to move away from the turntable 12 until the crystal rod 6 is located above the feeding hole 411. The second feeding driver drives the feeding clamping driver 425 to move downward until the crystal rod 6 is inserted into the feeding hole 411. The feeding clamping driver 425 drives the two feeding clamping plates 426 to move away from each other to release the crystal rod 6 located in the receiving groove 121. The feeding assembly 4 is reset.

[0045] Furthermore, the feeding clamping plate 326 has a feeding clamping arc groove 3261 extending in the vertical direction on the side of the other feeding clamping plate 326. The feeding clamping arc groove 3261 is used to clamp the crystal rod 6, and the feeding clamping arc grooves 3261 of the two feeding clamping plates 326 are correspondingly arranged.

[0046] The feeding clamping arc groove 3261 matches the outer wall of the crystal rod 6 and can contact the outer wall surface of the crystal rod 6 to reduce the pressure during the clamping process and prevent damage to the crystal rod 6.

[0047] Furthermore, the unloading clamping plate 426 has an unloading clamping arc groove 4261 extending in the vertical direction on the side of the other unloading clamping plate 426. The unloading clamping arc groove 4261 is used to clamp the crystal rod 6, and the unloading clamping arc grooves 4261 of the two unloading clamping plates 426 are correspondingly arranged.

[0048] The unloading clamping arc groove 4261 matches the outer wall of the crystal rod 6 and can contact the outer wall surface of the crystal rod 6 to reduce the pressure during the clamping process and prevent damage to the crystal rod 6.

[0049] Furthermore, a plurality of feeding holes 311 are arranged in a rectangular array on the top surface of the feeding box 31. The feeding assembly 3 also includes a second feeding guide rail 33 and a third feeding driver 34. The second feeding guide rail 33 extends along a first direction and is disposed below the feeding box 31. The second feeding guide rail 33 is slidably connected to the feeding box 31. The third feeding driver 34 is connected to the feeding box 31 and is used to drive the feeding box 31 to move along the first direction.

[0050] The rectangular array of multiple loading holes 311 allows the loading box 31 to hold more crystal rods 6, thereby increasing the number of crystal rods 6 that can be loaded and reducing the number of loading times, thus improving processing efficiency. When the two loading clamping plates 326 are to clamp another column of crystal rods 6, the third loading driver 34 drives the loading box 31 to move along the first direction so that the two loading clamping plates 326 can correspond to another column of crystal rods 6.

[0051] Furthermore, a plurality of the feeding holes 411 are arranged in a rectangular array on the top surface of the feeding box 41. The feeding assembly 4 also includes a second feeding guide rail 43 and a third feeding driver 44. The second feeding guide rail 43 extends along a second direction and is disposed below the feeding box 41. The second feeding guide rail 43 is slidably connected to the feeding box 41. The third feeding driver 44 is connected to the feeding box 41 and is used to drive the feeding box 41 to move along the second direction.

[0052] The rectangular array of multiple feeding holes 411 allows the feeding box 41 to hold more crystal rods 6, thereby increasing the number of crystal rods 6 that can be loaded and reducing the number of loading times, thus improving processing efficiency. When the two feeding clamping plates 426 are about to place the crystal rods 6 into the feeding holes 411 of another column, the third feeding driver 44 drives the feeding box 41 to move along the second direction so that the two feeding clamping plates 426 can correspond to the feeding holes 411 of another column.

[0053] Furthermore, the fixing frame 11 includes a base 111 and a plurality of support legs 112. The plurality of support legs 112 are arranged around the axis of the base 111 on the bottom surface of the base 111. The turntable 12 is arranged on the top surface of the base 111 and rotatably connected to the base 111. The rotation driver 13 is mounted on the bottom surface of the base 111.

[0054] Furthermore, fixed setting and fixed connection refer to the fixed relative positional relationship of two components, including but not limited to fixing by connectors, fixing by welding, fixing by adhesive, fixing by integral molding, and fixing by snap-fit ​​connection.

[0055] Furthermore, sliding connection and sliding setting refer to the connection between two connected components, where one component can slide along a fixed trajectory on the other component, including but not limited to connection by sliding a slider into a groove, or connection by inserting a slider into a hole whose size and profile match the slider.

[0056] Furthermore, rotatable connection and rotatable setting refer to the ability of two connected components to rotate, including but not limited to connections via bearings or clearance fits.

[0057] Furthermore, the connectors include, but are not limited to, fasteners, straps, ropes, pneumatic connectors, hydraulic connectors, flanges, Velcro, and buttons.

[0058] Furthermore, each actuator can be an electric motor or a piston cylinder (electric cylinder, pneumatic cylinder, and hydraulic cylinder).

[0059] In summary, this utility model embodiment provides a surface grinding device, the technical effects of which are as follows: This utility model's surface grinding device mainly consists of a rotating assembly 1, a surface grinding assembly 2, a feeding assembly 3, and a discharging assembly 4. Specifically, in the rotating assembly 1, the rotating driver 13 can drive the turntable 12 to rotate, thereby moving the receiving groove 121 on the turntable 12 to different work positions. The receiving groove 121 at different work positions corresponds to different components, and each work position corresponds to different processes, such as feeding, surface grinding, inspection, and discharging. Furthermore, the clamping device 14 is located on the turntable 12 corresponding to the receiving groove 121, and its clamping driver 141... The two clamping plates 142 can be driven to move closer and further apart to perform clamping and releasing actions on the crystal rod 6; in the grinding assembly 2, the grinding driver 22 is connected to the grinding wheel 21, enabling the grinding wheel 21 to rotate, thereby performing grinding on the crystal rod 6 near the grinding wheel 21; the first moving driver 25 can drive the connecting frame 23 to move from bottom to top, so that the grinding wheel 21 mounted on the rotating grinding wheel can perform grinding on one side of the crystal rod 6; in the loading assembly 3, the loading assembly 3 corresponds to the turntable 12 and can load the crystal rod 6 into the container. The receiving groove 121; in the unloading assembly 4, the unloading assembly 4 corresponds to the turntable 12 and can unload the crystal rod 6 from the receiving groove 121; further, the specific processing steps are as follows: the turntable 12 rotates so that the receiving groove 121 corresponds to the loading assembly 3, the loading assembly 3 loads the unprocessed crystal rod 6 into the receiving groove 121, the clamping driver 141 drives the two clamping plates 142 to move closer together to clamp and fix the crystal rod 6, the turntable 12 rotates so that the receiving groove 121 corresponds to the grinding surface assembly 2, and the first moving driver 25 drives the connecting frame 23. The grinding wheel 21, mounted on the connecting frame 23, moves from bottom to top to grind one side of the crystal rod 6. The turntable 12 rotates so that the processed crystal rod 6 corresponds to the unloading assembly 4. The clamping driver 141 drives the two clamping plates 142 to move away from each other to release the crystal rod 6. The unloading assembly 4 then removes the processed crystal rod 6. In summary, the grinding device of this utility model can complete the processes of loading, clamping and fixing, grinding, releasing and unloading without manual intervention. It can process multiple crystal rods 6 in sequence, resulting in high processing efficiency.

[0060] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several improvements and substitutions can be made without departing from the technical principles of the present utility model, and these improvements and substitutions should also be considered within the protection scope of the present utility model.

Claims

1. A surface grinding device, characterized in that, include, A rotating assembly (1) includes a fixed frame (11), a turntable (12), a rotating driver (13), and a clamping device (14). The top surface of the turntable (12) is provided with a receiving groove (121) around its rotating axis. The turntable (12) is rotatably mounted on the fixed frame (11). The rotating driver (13) is connected to the turntable (12) and is used to drive the turntable (12) to rotate. The clamping device (14) includes a clamping driver (141) and two clamping plates (142). The two clamping plates (142) are located on both sides above the receiving groove (121). The clamping driver (141) is mounted on the turntable (12) and connected to the two clamping plates (142). The clamping driver (141) can drive the two clamping plates (142) to move closer together and further apart. A surface grinding assembly (2) includes a grinding wheel (21), a surface grinding driver (22), a connecting frame (23), a first moving driver (25), and a grinding frame (24). The grinding wheel (21) and the surface grinding driver (22) are mounted on the connecting frame (23). The surface grinding driver (22) is used to drive the grinding wheel (21) to rotate. The connecting frame (23) is mounted on the grinding frame (24). The first moving driver (25) is connected to the connecting frame (23) and is used to drive the connecting frame (23) to move in the up and down direction. The feeding assembly (3) is capable of feeding the crystal rod (6) into the receiving tank (121); The feeding assembly (4) is capable of feeding the crystal rod (6) into the receiving groove (121).

2. The grinder face apparatus of claim 1, wherein, The clamping plate (142) has an arc-shaped clamping groove (1421) extending in the vertical direction on the side opposite to the other clamping plate (142). The arc-shaped clamping groove (1421) is used to clamp the crystal rod (6). The arc-shaped clamping grooves (1421) of the two clamping plates (142) are provided correspondingly.

3. The grinder face apparatus of claim 1, wherein, It also includes a detection component (5), which includes a vision sensor (52) and a detection frame (51). The vision sensor (52) is fixedly mounted on the detection frame (51) and faces downward. The vision sensor (52) is located above the turntable (12) and is used to detect the crystal rod (6) located in the receiving groove (121).

4. The grinder face apparatus of claim 3, wherein, The top surface of the turntable (12) is provided with four receiving slots (121) evenly distributed around its axis of rotation. The rotating assembly (1) also includes four clamps (14), each clamp (14) being arranged in a corresponding manner to the receiving slots (121). The feeding assembly (3), the grinding surface assembly (2), the detection assembly (5), and the unloading assembly (4) are arranged sequentially in a clockwise or counterclockwise direction and around the turntable (12). The feeding assembly (3), the grinding surface assembly (2), the detection assembly (5), and the unloading assembly (4) are evenly distributed.

5. The grinder face apparatus of claim 1, wherein, The grinding surface assembly (2) further includes a second moving drive (26). The grinding frame (24) includes a first frame (241) and a second frame (242). The first moving drive (25) is mounted on the first frame (241). The connecting frame (23) is slidably connected to the first frame (241) in the vertical direction. The first frame (241) is slidably connected to the second frame (242) in the radial direction of the turntable (12). The second moving drive (26) is mounted on the second frame (242) and connected to the first frame (241). The second moving drive (26) is used to drive the first frame (241) to move radially along the turntable (12).

6. The grinder face apparatus of claim 1, wherein, The feeding assembly (3) includes a feeding box (31) and a feeder (32). The top surface of the feeding box (31) is provided with a plurality of feeding holes (311). The feeding holes (311) are used to place unprocessed crystal rods (6). The feeder (32) can move the crystal rods (6) located in the feeding holes (311) to the receiving groove (121). The unloading assembly (4) includes an unloading box (41) and an unloader (42). The top surface of the unloading box (41) is provided with a plurality of unloading holes (411). The unloading holes (411) are used to place the processed crystal rods (6). The unloader (42) can move the crystal rods (6) located in the receiving groove (121) to the unloading holes (411).

7. The grinding surface apparatus according to claim 6, characterized in that, The feeder (32) includes a feed rack (321), a first feed guide rail (322), a feed slider (323), a first feed driver (324), a second feed driver, a feed clamping driver (325), and two feed clamping plates (326). The first feed guide rail (322) extends radially along the turntable (12) and is disposed on the feed rack (321). The feed slider (323) is slidably connected to the feed rack (321) radially along the turntable (12). The first feed driver (324) is connected to the feed slider (323) and is used to drive the feed slider (323) to move along the turntable (12). 12) radial movement, the loading clamping driver (325) is slidably connected to the loading slider (323) in the up and down direction, the second loading driver is connected to the loading clamping driver (325), the second loading driver is used to drive the loading clamping driver (325) to move in the up and down direction, the two loading clamping plates (326) are disposed on both sides of the loading clamping driver (325) and fixedly connected to the loading clamping driver (325), the loading clamping driver (325) is connected to the two loading clamping plates (326), the loading clamping driver (325) can drive the two loading clamping plates (326) to move closer and further apart; The feeder (42) includes a feed frame (421), a first feed guide rail (422), a feed slider (423), a first feed driver (424), a second feed driver, a feed clamping driver (425), and two feed clamping plates (426). The first feed guide rail (422) extends radially along the turntable (12) and is disposed on the feed frame (421). The feed slider (423) is slidably connected to the feed frame (421) radially along the turntable (12). The first feed driver (424) is connected to the feed slider (423) and is used to drive the feed slider (423) to move along the turntable (12). 12) radial movement, the unloading clamping driver (425) is slidably connected to the unloading slider (423) in the up and down direction, the second unloading driver is connected to the unloading clamping driver (425), the second unloading driver is used to drive the unloading clamping driver (425) to move in the up and down direction, the two unloading clamping plates (426) are disposed on both sides of the unloading clamping driver (425) and fixedly connected to the unloading clamping driver (425), the unloading clamping driver (425) is connected to the two unloading clamping plates (426), the unloading clamping driver (425) can drive the two unloading clamping plates (426) to move closer and further apart.

8. The grinder face apparatus of claim 7, wherein, The feeding clamping plate (326) has a feeding clamping arc groove (3261) extending in the vertical direction on the side opposite to the other feeding clamping plate (326). The feeding clamping arc groove (3261) is used to clamp the crystal rod (6). The feeding clamping arc grooves (3261) of the two feeding clamping plates (326) are provided correspondingly. The unloading clamping plate (426) has an unloading clamping arc groove (4261) extending in the vertical direction on the side opposite to the other unloading clamping plate (426). The unloading clamping arc groove (4261) is used to clamp the crystal rod (6). The unloading clamping arc grooves (4261) of the two unloading clamping plates (426) are correspondingly arranged.

9. The grinder face apparatus of claim 6, wherein, Multiple feeding holes (311) are arranged in a rectangular array on the top surface of the feeding box (31). The feeding assembly (3) also includes a second feeding guide rail (33) and a third feeding driver (34). The second feeding guide rail (33) extends along a first direction and is located below the feeding box (31). The second feeding guide rail (33) is slidably connected to the feeding box (31). The third feeding driver (34) is connected to the feeding box (31) and is used to drive the feeding box (31) to move along the first direction. Multiple feeding holes (411) are arranged in a rectangular array on the top surface of the feeding box (41). The feeding assembly (4) also includes a second feeding guide rail (43) and a third feeding driver (44). The second feeding guide rail (43) extends along a second direction and is located below the feeding box (41). The second feeding guide rail (43) is slidably connected to the feeding box (41). The third feeding driver (44) is connected to the feeding box (41) and is used to drive the feeding box (41) to move along the second direction.

10. The grinder face apparatus of claim 1, wherein, The fixing frame (11) includes a base (111) and a plurality of support legs (112). The plurality of support legs (112) are arranged around the axis of the base (111) on the bottom surface of the base (111). The turntable (12) is arranged on the top surface of the base (111) and rotatably connected to the base (111). The rotation driver (13) is installed on the bottom surface of the base (111).