A coating machine for electronic components

Abstract

The utility model discloses a kind of coating machines for electronic component processing, including vacuum box, the middle part of the two side walls of vacuum box is fixed with electric push rod along vertical direction, the upper end of the output end of electric push rod is fixed with sealing cover, and sealing cover is parallel to the upper end of vacuum box, the upper end of vacuum box inner wall is equipped with component pick-and-place mechanism, and the bottom in vacuum box is equipped with displacement mechanism;The component pick-and-place mechanism includes sprocket rotationally connected on the inner wall of vacuum box, and sprocket is equipped with four groups and symmetrically divided on the inner wall of vacuum box, and the two groups of sprocket on the same side are connected by chain, and the side wall of chain is uniformly distributed with fixed clamping piece along extension direction, and the fixed clamping piece is inserted and plugged with support plate;Displacement mechanism is connected with support rod, and the middle of support rod upper end is equipped with position sensor, and the end of support rod is equipped with sputtering target.

Description

Technical Field

[0001] This utility model belongs to the field of electronic component processing technology, specifically referring to a coating machine for processing electronic components. Background Technology

[0002] Most electronic components consist of circuit boards, capacitors, inductors, etc. In order to improve their performance and provide protection against short circuits, aging, etc., it is usually necessary to coat their surfaces with a film. Sputtering coating is widely used for coating high-melting-point metals, alloys, semiconductors and compound materials because of its strong adhesion and high purity.

[0003] However, existing sputtering coating machines use single magnetron sputtering, which easily produces a shadowing effect in micropores. On the surface of complex structural components, uneven thickness (low step coverage) and poor film adhesion are common problems. Furthermore, multiple target / cavity changes are required for multi-material composite coatings, resulting in low efficiency and interface contamination. In particular, frequent opening and closing of the vacuum chamber is required during loading and unloading, and each opening and closing only coats one group of electronic components, which is inefficient and wasteful. Summary of the Invention

[0004] In view of the above situation and to overcome the defects of the prior art, this utility model provides a coating machine for electronic component processing, which effectively solves the problems of low efficiency and high operating costs caused by the need for multiple target changes and the ability to coat only a single component when multiple materials are coated by existing vacuum sputtering coating machines.

[0005] The technical solution adopted by this utility model is as follows: This utility model proposes a coating machine for processing electronic components, including a vacuum chamber. Electric push rods are fixed vertically along the middle of both side walls of the vacuum chamber. A sealing cover is fixed to the upper end of the output end of each electric push rod, and the sealing cover is parallel to the upper end of the vacuum chamber. A component picking and placing mechanism is provided at the upper end of the inner wall of the vacuum chamber, and a shifting mechanism is provided at the bottom of the vacuum chamber. The component picking and placing mechanism includes sprockets rotatably connected to the inner wall of the vacuum chamber. Four sets of sprockets are symmetrically distributed on the inner wall of the vacuum chamber. Two sets of sprockets on the same side are connected by a chain. Fixing clips are evenly distributed along the extension direction on the side wall of the chain, and support plates are inserted and pulled onto the fixing clips. A support rod is connected to the shifting mechanism, and a position sensor is provided in the middle of the upper end of the support rod. Sputtering targets are provided at the ends of the support rods.

[0006] As an improvement to this solution, the displacement mechanism consists of a cross slide and a moving stage. The cross slide is located at the bottom of the vacuum chamber, and the moving stage slides on a set of guide rails on the upper part of the cross slide. The upper end of the moving stage is rotatably connected to a rotating base, and a support rod is fixed on the rotating base. A rotating motor is provided at the bottom of the moving stage, and the output shaft of the rotating motor is connected to the bottom of the rotating base.

[0007] As an improvement to this solution, the fixing clip is pluggable and connected with fixing screws, and the fixing screws pass through both ends of the support plate and are threaded to the side wall of the lower end of the fixing clip. Each of the four corners of the support plate is threaded with a screw perpendicular to it, and a pressure plate is rotatably connected to the screw.

[0008] As an improvement to this solution, the two symmetrical sprockets inside the vacuum chamber are connected by a connecting shaft, and both ends of the connecting shaft pass through the side wall of the vacuum chamber and are rotatably connected to the side wall of the vacuum chamber. A drive motor is fixed on the outer wall of the vacuum chamber, and the output shaft of the drive motor is connected to the connecting shaft.

[0009] As an improvement to this solution, the front end of the vacuum chamber is provided with an operation panel and an observation window, with the observation window located above the operation panel.

[0010] The beneficial effects of this utility model by adopting the above structure are as follows: 1. The component pick-and-place mechanism can be used to place multiple sets of electronic components. The rotation of the chain and sprockets allows for convenient pick-and-place of electronic components from the top of the vacuum chamber. The operation is simple and can achieve coating of multiple sets of electronic components in one opening and closing, which is highly efficient and has low operating costs. 2. By using multiple sets of sputtering targets mounted on a rotating base, the number of target / cavity changes can be reduced during multi-material composite coating, which can reduce external contamination while improving coating accuracy and quality. Attached Figure Description

[0011] Figure 1 This is a schematic diagram of the overall structure of a coating machine for processing electronic components proposed in this utility model; Figure 2 This is a schematic diagram of the internal structure of a coating machine for processing electronic components proposed in this utility model; Figure 3 This is a cross-sectional view of a coating machine for processing electronic components according to the present invention. Figure 4 This is a schematic diagram of the structure of the shifting mechanism component in this embodiment; Figure 5 This is a schematic diagram of the component pick-and-place mechanism in this embodiment; Figure 6 This is a partial structural diagram of the component pick-and-place mechanism in this embodiment.

[0012] The components include: 1. Vacuum chamber; 2. Electric actuator; 3. Sealing cover; 4. Component handling mechanism; 5. Shifting mechanism; 6. Sprocket; 7. Chain; 8. Fixing clip; 9. Support plate; 10. Support rod; 11. Position sensor; 12. Sputtering target; 13. Cross slide; 14. Moving stage; 15. Rotating base; 16. Rotating motor; 17. Fixing screw; 18. Screw; 19. Pressing plate; 20. Connecting shaft; 21. Drive motor; 22. Operation panel; 23. Observation window.

[0013] The accompanying drawings are provided to further understand the present invention and form part of the specification. They are used together with the embodiments of the present invention to explain the present invention and do not constitute a limitation thereof. Detailed Implementation

[0014] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the protection scope of the present utility model.

[0015] like Figure 1 , Figure 2 and Figure 3 As shown, the present invention proposes a coating machine for processing electronic components, including a vacuum chamber 1. Electric push rods 2 are fixed vertically in the middle of the two side walls of the vacuum chamber 1. A sealing cover 3 is fixed at the upper end of the output end of the electric push rod 2, and the sealing cover 3 is parallel to the upper end of the vacuum chamber 1. A component picking and placing mechanism 4 is provided at the upper end of the inner wall of the vacuum chamber 1, and a displacement mechanism 5 is provided at the bottom of the vacuum chamber 1. The component picking and placing mechanism 4 includes a sprocket 6 rotatably connected to the inner wall of the vacuum chamber 1. The sprocket 6 is provided in four sets and symmetrically distributed on the inner wall of the vacuum chamber 1. The two sets of sprockets 6 on the same side are connected by a chain 7. Fixing clips 8 are evenly distributed along the extension direction on the side wall of the chain 7. A support plate 9 is inserted and pulled onto the fixing clip 8.

[0016] like Figure 3 and Figure 4 As shown, in order to achieve the goal of not needing to frequently replace the target head when multi-material composite coating, the shifting mechanism 5 is connected to a support rod 10, and a position sensor 11 is provided in the middle of the upper end of the support rod 10. Sputtering targets 12 are provided at the ends of the support rod 10. The shifting mechanism 5 consists of a cross slide 13 and a moving stage 14. The cross slide 13 is located at the bottom of the vacuum chamber 1. The moving stage 14 slides on a set of guide rails on the upper layer of the cross slide 13. The upper end of the moving stage 14 is rotatably connected to a rotating base 15, and the support rod 10 is fixed on the rotating base 15. A rotating motor 16 is provided at the bottom of the moving stage 14, and the output shaft of the rotating motor 16 is connected to the bottom of the rotating base 15.

[0017] like Figure 5 and Figure 6 As shown, in order to clamp and fix the electronic components, a fixing screw 17 is inserted and pulled on the fixing clip 8, and the fixing screw 17 passes through both ends of the support plate 9 and is threaded to the side wall of the lower end of the fixing clip 8. Each of the four corners of the support plate 9 is threaded with a screw 18 perpendicular to it, and a pressure plate 19 is rotatably connected to the screw 18.

[0018] like Figure 2 As shown, two symmetrical sprockets 6 inside the vacuum chamber 1 are connected by a connecting shaft 20, and both ends of the connecting shaft 20 are set through the side wall of the vacuum chamber 1 and are rotatably connected to the side wall of the vacuum chamber 1. A drive motor 21 is fixed on the outer wall of the vacuum chamber 1, and the output shaft of the drive motor 21 is connected to the connecting shaft 20.

[0019] like Figure 1 As shown, the front end of the vacuum chamber 1 is provided with an operation panel 22 and an observation window 23, and the observation window 23 is located above the operation panel 22.

[0020] In practical use, the electric actuator 2 is opened, pushing the sealing cover 3 upwards to open it. The coating target is placed on the sputtering target 12. Then, the drive motor 21 drives the sprocket 6 to rotate, and the chain 7 moves with the rotation of the sprocket 6. The fixing clip 8 on the chain 7 drives the support plate 9 to move to the upper layer of the chain 7. Then, the electronic components are placed on the support plate 9, and the four corner screws 18 are rotated, so that the screws 18 drive the pressure plate 19 rotating on them to press against the electronic components until the pressure plate 19 and the support plate 9 clamp the electronic components. Then, the sprocket 6 is rotated again, and the chain 7 on it... The support plate 9 is rotated to the lower layer of the chain 7, and then the moving table 14 is moved by the cross slide 13. The position of the electronic components above is monitored by the position sensor 11. Then the sputtering target 12 is opened to complete the coating of the electronic components. Under the drive of the cross slide 13, the sputtering target 12 can uniformly coat the surface of the electronic components. When it is necessary to change to another material for coating, simply turn on the rotating motor 16 to drive the rotating base 15 to rotate, so that another set of sputtering targets 12 is below the electronic components. The above is the entire operation process of the coating machine for processing electronic components.

[0021] The present invention and its embodiments have been described above. This description is not restrictive, and the accompanying drawings are only one embodiment of the present invention; the actual structure is not limited thereto. In conclusion, if those skilled in the art are inspired by this description and design similar structures and embodiments without departing from the inventive spirit of the present invention, such designs should fall within the protection scope of the present invention.

Claims

1. A coating machine for processing electronic components, comprising a vacuum chamber (1), wherein electric push rods (2) are fixed vertically along the middle of both side walls of the vacuum chamber (1), and a sealing cover (3) is fixed at the upper end of the output end of the electric push rods (2), and the sealing cover (3) is parallel to the upper end of the vacuum chamber (1), characterized in that: The upper end of the inner wall of the vacuum box (1) is provided with a component picking and placing mechanism (4), and the bottom of the vacuum box (1) is provided with a shifting mechanism (5). The component handling mechanism (4) includes a sprocket (6) rotatably connected to the inner wall of the vacuum chamber (1), and the sprocket (6) is provided in four sets and symmetrically distributed on the inner wall of the vacuum chamber (1). The two sets of sprockets (6) on the same side are connected by a chain (7). Fixing clips (8) are evenly distributed along the extension direction on the side wall of the chain (7), and a support plate (9) is inserted and pulled on the fixing clip (8). The shifting mechanism (5) is connected to a support rod (10), and a position sensor (11) is provided in the middle of the upper end of the support rod (10). Sputtering targets (12) are provided at the ends of the support rod (10).

2. The coating machine for electronic components according to claim 1, wherein: The shifting mechanism (5) consists of a cross slide (13) and a moving stage (14). The cross slide (13) is located at the bottom of the vacuum chamber (1). The moving stage (14) slides on a set of guide rails on the upper layer of the cross slide (13). The upper end of the moving stage (14) is rotatably connected to a rotating base (15), and a support rod (10) is fixed on the rotating base (15). A rotating motor (16) is provided at the bottom of the moving stage (14), and the output shaft of the rotating motor (16) is connected to the bottom of the rotating base (15).

3. A coating machine for processing electronic components according to claim 1 or 2, characterized in that: The fixing clip (8) is connected to a fixing screw (17), and the fixing screw (17) passes through both ends of the support plate (9) and is threaded to the side wall of the lower end of the fixing clip (8). The four corners of the support plate (9) are threaded with screws (18) perpendicular to them, and pressure plates (19) are rotatably connected to the screws (18).

4. The coating machine for electronic components according to claim 3, wherein: The two symmetrical sprockets (6) inside the vacuum chamber (1) are connected by a connecting shaft (20), and the two ends of the connecting shaft (20) pass through the side wall of the vacuum chamber (1) and are rotatably connected to the side wall of the vacuum chamber (1). A drive motor (21) is fixed on the outer wall of the vacuum chamber (1), and the output shaft of the drive motor (21) is connected to the connecting shaft (20).

5. The coating machine for electronic components according to claim 4, wherein: The front end of the vacuum chamber (1) is provided with an operation panel (22) and an observation window (23), and the observation window (23) is located above the operation panel (22).

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