A substrate transport device suitable for high vacuum

Abstract

The utility model relates to a kind of substrate transport device suitable for high vacuum, characteristics are: substrate transport mechanism includes moving assembly, mobile drive mechanism, mechanical gripper and gripper opening and closing control mechanism;Moving assembly includes moving plate, gyro wheel, front side gyro wheel support, rear side gyro wheel support and guide optical axis;Two guide optical axes are fixed on the left and right side walls in vacuum cavity front and back in parallel, the front and back two sides of moving plate close left end are respectively fixed with two side gyro wheel supports, upper gyro wheel and lower gyro wheel are installed on two side gyro wheel supports, respectively with the upper and lower part of corresponding side guide optical axis Rolling contact;The left end of two gripper pieces is hinged with the right end of moving plate in outer part;The terminal power output piece of mobile drive mechanism is driven connection with rear side gyro wheel support;The terminal power output piece of gripper opening and closing control mechanism is thrust nut, its front and rear parts are respectively hinged with the left end of two gripper inner part.The device structure is compact, transmission is reliable, and repeat positioning precision is high.

Description

Technical Field

[0001] This invention belongs to the field of thin film deposition technology, specifically relating to a substrate transport device suitable for high vacuum. Background Technology

[0002] In equipment used for magnetron sputtering of substrates, a transfer device is required to move substrate trays between two different processing units. This transfer process necessitates actions such as picking up, transferring, and placing the substrates, while also meeting the requirements for high-vacuum operation.

[0003] Existing substrate transfer devices include rotary and linear motion types. Rotary devices have complex structures, while existing linear reciprocating motion transfer devices require interaction with a liftable substrate tray support unit to perform actions such as picking up, transferring, and placing substrates. The lifting structure of the substrate tray support unit is complex, and long-term sliding friction may lead to the risk of vacuum seal leakage. In addition, the reliability of transmission and the repeatability of positioning accuracy of existing linear reciprocating motion transfer devices need further improvement. Utility Model Content

[0004] This invention addresses the shortcomings of existing technologies by proposing a substrate transfer device suitable for high vacuum that features a compact structure, reliable transmission, and high repeatability.

[0005] The above-mentioned objective of this utility model is achieved through the following technical solution: A substrate transfer device suitable for high vacuum includes a vacuum chamber and a substrate transfer mechanism. The substrate transfer mechanism includes a moving component, a moving drive mechanism, mechanical grippers, and a gripper opening and closing control mechanism. The moving component includes a moving plate, rollers, a front roller support, a rear roller support, and guide optical shafts. Two guide optical shafts are fixed parallel to each other on the left and right sides of the vacuum chamber. The moving plate is positioned between the two guide optical shafts. The front and rear sides of the moving plate near its left end are fixedly connected to the front roller support and the rear roller support, respectively. Each of the front and rear roller supports has a [missing information - likely a device or mechanism]. One roller at the top and two rollers at the bottom roll in contact with the upper and lower parts of the corresponding guide optical shafts, respectively, so that the moving plate is slidably connected to the two guide optical shafts in the left and right directions; the mechanical gripper consists of two gripper pieces arranged symmetrically front and back, and the left ends of the two gripper pieces are hinged to the right end of the moving plate near the outer position; the moving drive mechanism adopts a linear drive mechanism, and the end power output component of the moving drive mechanism is drivenly connected to the rear roller bracket; the end power output component of the gripper opening and closing control mechanism is a left and right moving thrust nut, and the front and rear parts of the thrust nut are respectively hinged to the left ends of the two grippers near the inner position.

[0006] Furthermore, a mechanical gripper upper support plate and a mechanical gripper lower support plate are fixed at the front and rear of the right end of the movable plate. Mounting holes are provided opposite to each other on the mechanical gripper upper support plate and the mechanical gripper lower support plate. The left ends of the two gripper pieces are respectively inserted into the space between the corresponding mechanical gripper upper support plate and the mechanical gripper lower support plate. By inserting hinge pins into the mounting holes on the mechanical gripper upper support plate and the mechanical gripper lower support plate and into the mounting holes on the gripper pieces, the gripper pieces can be rotatably mounted on the movable plate.

[0007] Furthermore, the moving drive mechanism includes a moving drive motor and a ball screw assembly. The moving drive motor is located at the rear left side of the vacuum chamber. The output end of the moving drive motor is connected to a driving synchronous pulley, which is connected to a driven synchronous pulley via a synchronous belt. The driven synchronous pulley is fixed to one end of the rotating shaft of the first rotary sealing assembly, and the other end of the rotating shaft of the first rotary sealing assembly is connected to the lead screw of the ball screw assembly. The lead screw is supported on both sides within the vacuum chamber, and a nut connected to the lead screw is fixed to a flange connector. The flange connector is fixedly connected to the rear roller bracket. An encoder is also installed on the rotor of the moving drive motor.

[0008] Furthermore, the gripper opening and closing control mechanism also includes a mechanical gripper control shaft, a mechanical gripper drive shaft, and a gripper opening and closing drive cylinder. The gripper opening and closing drive cylinder is located at the front left side of the vacuum chamber. The gripper opening and closing drive cylinder is driven and connected to the second rotary sealing assembly through a set of transmission gears. The second rotary sealing assembly is driven and connected to the left end of the mechanical gripper control shaft. The right end of the mechanical gripper control shaft is driven and connected to the mechanical gripper drive shaft through a connector. The mechanical gripper drive shaft is rotatably mounted at the lower center of the moving plate through a front bearing and a rear bearing seat. The right end of the mechanical gripper control shaft adopts an external thread structure and is connected to the thrust nut. The front and rear parts of the thrust nut are provided with connecting ears. The front connecting ears and the rear connecting ears are hinged to the inner left side of the two gripper pieces through pins. The hole for the pin on the mechanical gripper is an oblong hole.

[0009] The advantages and positive effects of this utility model are as follows: 1. This utility model connects the mechanical gripper to the front end of the moving plate. The moving plate achieves linear guidance through the cooperation of the guide optical shaft and the roller. Each side is equipped with three rollers, one on top and two on the bottom. This layout enhances the tightness of the fit between the roller and the guide optical shaft, thereby solving the problem of repeatability accuracy of the substrate transfer mechanism. The repeatability accuracy has reached ±0.01mm.

[0010] 2. The gripper opening and closing control mechanism of this utility model adopts a transmission form of drive cylinder, drive shaft and thrust nut. When the thrust nut is pushed to the right, the mechanical gripper opens accordingly; conversely, when the thrust nut is pushed back, the mechanical gripper closes and clamps the substrate tray. Through this transmission mechanism, the substrate transfer mechanism successfully realizes the efficient picking and placing function of the substrate tray.

[0011] 3. In this utility model, a mobile drive motor located outside the vacuum chamber is connected to a lead screw located inside the vacuum chamber via a first rotary sealing assembly. Simultaneously, a gripper opening and closing drive cylinder located outside the vacuum chamber is connected to a mechanical gripper control shaft located inside the vacuum chamber via a second rotary sealing assembly. The two rotary sealing assemblies can adopt existing rotary sealing assembly shapes. Through the two rotary sealing assemblies, two external power source components can be connected to the structural components inside the vacuum chamber in a sealed and isolated manner, ensuring that the substrate transfer device is suitable for high vacuum operating environments.

[0012] 4. Compared with existing transmission devices, the substrate transmission device of this utility model simplifies the transmission and structure, has a high degree of integration, reliable transmission, fast response speed, stable and robust structure, and reduces costs. Attached Figure Description

[0013] Figure 1 This is a first state diagram of the substrate transmission mechanism of this utility model; Figure 2 yes Figure 1 A schematic diagram of the structure with part of the vacuum chamber removed; Figure 3 This is the second state diagram of the substrate transmission mechanism of this utility model; Figure 4 This is a cross-sectional view of the rotary sealing assembly of this utility model (taking the first rotary sealing component as an example); Figure 5 This is a cross-sectional view of the connection between the two rotary sealing components of this utility model and the vacuum chamber.

[0014] In the figure: 1. Vacuum chamber; 2. Substrate transfer mechanism; 2-1. Mechanical gripper; 2-2. Moving component; 2-2-1. Moving plate; 2-2-2. Roller; 2-2-3. Front roller bracket; 2-2-4. Rear roller bracket; 2-2-5. Guide optical axis; 2-3. Moving drive mechanism; 2-3-1. Moving drive motor; 2-3-2. First rotary seal assembly; 2-3-2-1. Rotary seal mounting base; 2-3-2-2. Rotating shaft; 2-3-2-3. O-ring seal. 2-3-2-4, Ball bearing; 2-3-2-5, Lip seal; 2-3-3, Flange connector; 2-3-4, Nut; 2-3-5, Lead screw; 2-3-6, Encoder; 2-4, Gripper opening and closing control mechanism; 2-4-1, Thrust nut; 2-4-2, Mechanical gripper drive shaft; 2-4-3, Connector; 2-4-4, Mechanical gripper control shaft; 2-4-5, Second rotary seal assembly; 2-4-6, Gripper opening and closing drive cylinder; 3, Pressure block; 4, Flange vacuum tube. Detailed Implementation

[0015] The structure of this utility model will be further described below with reference to the accompanying drawings and embodiments. It should be noted that these embodiments are descriptive and not limiting.

[0016] For a substrate transfer mechanism suitable for high vacuum, please refer to [link / reference]. Figures 1-5 It mainly includes a vacuum chamber 1 and a substrate transfer mechanism 2. The vacuum chamber is used to provide a vacuum environment for substrate transfer. The substrate transfer mechanism is a reciprocating linear motion transfer mechanism.

[0017] The vacuum chamber has a substrate inlet / outlet at its rear end for connecting to other substrate processing equipment.

[0018] The substrate transfer mechanism mainly includes a moving component 2-2, a mechanical gripper 2-1, a moving drive mechanism 2-3, and a gripper opening and closing control mechanism 2-4. The moving component includes a moving plate 2-2-1, rollers 2-2, a front roller bracket 2-2-3, a rear roller bracket 2-2-4, and guide optical axes 2-2-5. There are two guide optical axes, which are fixed parallel to each other on the left and right sides of the vacuum chamber. The moving plate is positioned between the two guide optical axes. The front and rear sides of the moving plate near its left end are fixedly connected to the front and rear roller brackets, respectively. Each of the front and rear roller brackets has one upper roller and two lower rollers, which roll in contact with the upper and lower parts of the corresponding guide optical axes, respectively, allowing the moving plate to slide slidably onto the two guide optical axes in the left-right direction. Furthermore, there is one upper roller and two lower rollers arranged front and rear.

[0019] The moving drive mechanism includes a moving drive motor 2-3-1 and a ball screw assembly. The moving drive motor is mounted on the top of the frame 1, located on the left rear side outside the vacuum chamber. The moving drive motor drives the active synchronous pulley, which in turn drives the driven synchronous pulley via a synchronous belt. The driven synchronous pulley is connected to one end of the rotating shaft of the first rotary sealing assembly 2-3-2. The other end of the rotating shaft of the first rotary sealing assembly is connected to the lead screw 2-3-5 of the ball screw assembly via a rigid coupling. The lead screw is supported horizontally within the vacuum chamber. A nut 2-3-4 connected to the lead screw is fixed to the first flange connector 2-3-3, which is fixedly connected to the rear roller bracket. An encoder 2-3-6 is also installed on the rotor of the moving drive motor for checking and providing feedback on the movement stroke.

[0020] The mechanical gripper consists of two gripper plates. An upper support plate and a lower support plate are fixed to the front and rear of the right end of the moving plate, respectively. Mounting holes are provided opposite to each other on the upper and lower support plates. The two gripper plates are symmetrically arranged at the right end of the moving plate. The left ends of the two gripper plates are respectively inserted into the space between the corresponding upper and lower support plates. Hinges are inserted into the mounting holes on the upper and lower support plates and the gripper plates to allow the gripper plates to be rotatably mounted on the moving plate.

[0021] The gripper opening and closing control mechanism includes a mechanical gripper control shaft 2-4-4, a mechanical gripper drive shaft 2-4-2, a thrust nut 2-4-1, and a gripper opening and closing drive cylinder 2-4-6. The gripper opening and closing drive cylinder is installed on the top of the frame 1 at the front left side outside the vacuum chamber. The gripper opening and closing drive cylinder is driven by a set of transmission gears to the second rotary seal assembly 2-4-5. The second rotary seal assembly is driven by a grooved coupling to the left end of the mechanical gripper control shaft. The right end of the mechanical gripper control shaft is driven to the mechanical gripper drive shaft via connector 2-4-3. The mechanical gripper drive shaft is rotatably mounted at the lower center of the moving plate via a front bearing and a rear bearing seat. The right end of the mechanical gripper control shaft has an external thread structure and is connected to a thrust nut 2-4-1. The front and rear parts of the thrust nut are provided with connecting ears. The front connecting ears and the rear connecting ears are hinged to the inner left side of the two gripper pieces via pins. The hole for the pin on the mechanical gripper is an oblong hole.

[0022] In addition, on the front and rear side walls of the vacuum chamber, near the inlet and outlet of the substrate, there are oppositely installed photoelectric transmitters and receivers, respectively, for real-time detection of whether there are foreign objects blocking the valve plate of the gate valve assembly.

[0023] The substrate transmission mechanism has the following characteristics: Cross-region transfer: The function of this substrate transfer mechanism is to transfer the substrate tray from the vacuum chamber to the sputtering vacuum chamber, achieving cross-region transfer. This cross-region transfer function is achieved by a moving component driving the mechanical grippers and the substrate tray to move linearly left and right.

[0024] Stable Linear Transmission: This substrate transmission mechanism possesses reliable linear transmission capabilities. The precision of linear transmission benefits from the coordinated operation of the guide shaft and rollers, effectively ensuring the stable movement of the moving components along a straight line. The guide shaft is firmly fixed between the rear flange of the vacuum chamber and the valve body, forming a stable linear motion reference. The rollers are respectively mounted on the front and rear roller supports, with three rollers on each side, distributed vertically (two at the bottom and one at the top). This layout enhances the tightness of the fit between the rollers and the guide shaft, thus solving the problem of repeatability accuracy in the substrate transmission mechanism. Currently, the repeatability accuracy of this mechanism has reached ±0.01mm, fully meeting the requirements of current operating conditions.

[0025] Structural Horizontal Adjustability: This substrate transfer mechanism works in conjunction with the substrate holder that supports the substrate tray during substrate tray loading and unloading operations. The substrate holder has extremely high horizontality; if the moving plate in the substrate transfer mechanism is not level, the substrate tray will shift. The horizontality of the moving plate is crucial to ensure precise alignment. The mechanism adjusts the horizontality of the moving component using six set screws on the moving plate, with the lower ends of the set screws abutting the upper surfaces of the front and rear roller supports, respectively. Measurements are taken using a level, and the positions of the six set screws are continuously fine-tuned until the moving component is perfectly horizontal. This precise adjustment process effectively solves the horizontality problem of the substrate transfer mechanism, ensuring the accuracy and stability of substrate tray loading and unloading operations.

[0026] Highly efficient pick-and-place function: This substrate transfer mechanism is capable of efficiently picking up and placing substrate trays. Its pick-and-place function primarily relies on the clamping and releasing actions of the mechanical grippers. The clamping and releasing actions of the mechanical grippers are powered by a gripper opening and closing drive cylinder. This cylinder drives the drive gear and driven gear to rotate. The driven gear is connected to one end of the rotating shaft of the second rotary seal assembly, while the other end of the rotating shaft is connected to the mechanical gripper control shaft via a grooved coupling. The mechanical gripper control shaft is hexagonal prism-shaped and precisely meshes with the hexagonal guide block (connector 2-4-3) through a contour connection. Since the hexagonal guide block is fixed to the mechanical gripper drive shaft with screws, the mechanical gripper control shaft can indirectly drive the mechanical gripper drive shaft to rotate. The mechanical gripper drive shaft and the thrust nut are connected by threads. The thrust nut is made of bronze, which has excellent self-lubricating properties. Each time the mechanical gripper drive shaft rotates one revolution, the thrust nut moves forward one thread pitch. The mechanical grippers and the thrust nut are connected by a cylindrical pin for positioning. This means that when the thrust nut pushes forward, the mechanical grippers open; conversely, when the thrust nut retracts, the mechanical grippers close and clamp the substrate tray. Through this transmission mechanism, the substrate transfer mechanism successfully achieves efficient loading and unloading of the substrate tray, ensuring automation and high-precision operation of the entire production process.

[0027] Sealing: The substrate transport mechanism is connected to the vacuum chamber via a rotary sealing assembly. The rotary sealing assembly consists of a rotary sealing mounting base 2-3-2-1, a ball bearing 2-3-2-4, a rotating shaft 2-3-2-2, an O-ring 2-3-2-3, and a lip seal 2-3-2-5. Since the substrate transport mechanism contains two shaft systems, two rotary sealing assemblies are required to achieve sealing performance, namely the first and second rotary sealing assemblies described above.

[0028] The first rotary sealing assembly is pressed and sealed to the rear flange of the vacuum chamber by pressure block 3. The second rotary sealing assembly is locked and sealed to the flanged vacuum tube 4 by clamps; furthermore, the flanged vacuum tube and the rear flange of the vacuum chamber are also pressed and sealed by pressure block 3. In this way, the sealing problem at the connection between the substrate transfer mechanism and the vacuum chamber is cleverly solved, ensuring the sealing performance and stability of this critical part during equipment operation.

[0029] Excellent load-bearing capacity: This substrate transport mechanism possesses excellent load-bearing capacity. The substrate tray is made of oxygen-free copper, which has good thermal and electrical conductivity. Currently, the substrate tray used in this mechanism weighs approximately 2 kg. Through mechanical simulation analysis and actual equipment operation, it has been proven that this substrate transport mechanism is fully capable of transporting the substrate tray in magnetron sputtering equipment.

[0030] Speed ​​Stability Control: This substrate transmission mechanism enables precise and stable speed control. This speed control is primarily achieved through an encoder, which monitors the operating status of the moving drive motor in real time and feeds the data back to the PC-PLC system. This allows for precise regulation of the moving drive motor, ensuring the speed stability of the substrate transmission mechanism during linear transmission. As for the gripper opening and closing drive cylinder, its speed control is handled by a pressure regulating valve in the air circuit. The valve adjusts the intake and exhaust speeds to control the movement of the gripper opening and closing drive cylinder, thus precisely controlling the opening and closing speed of the mechanical grippers. Through this design, the substrate transmission mechanism achieves stable overall speed control, ensuring smooth and efficient equipment operation.

[0031] In addition, multiple interfaces are provided on the side wall of the vacuum chamber, connecting to a vacuum pump, vacuum gauges, a process gas input interface, and an exhaust valve. The vacuum pumps include mechanical pumps and molecular pumps; the mechanical pump achieves low-vacuum evacuation, while the molecular pump achieves high-vacuum evacuation. A gate valve is installed between the molecular pump and the vacuum chamber, playing a crucial role in isolation, protection, ease of maintenance, and staged evacuation. This is essential for the safe and efficient operation of the vacuum system and also controls the concentration of process gases inside the chamber. Vacuum gauges may include a Pirani vacuum gauge to detect the primary vacuum level of the chamber, a capacitance vacuum gauge to monitor the vacuum level during sputtering processes, and a full-scale vacuum gauge to detect the ultimate vacuum level. The process gas input interface is used to input argon gas for etching the substrate.

[0032] Although embodiments and drawings of the present invention have been disclosed for illustrative purposes, those skilled in the art will understand that various substitutions, variations and modifications are possible without departing from the spirit and scope of the present invention and the appended claims. Therefore, the scope of the present invention is not limited to the contents disclosed in the embodiments and drawings.

Claims

1. A substrate transfer device suitable for high vacuum, characterized in that: The system includes a vacuum chamber and a substrate transfer mechanism. The substrate transfer mechanism includes a moving component, a moving drive mechanism, a mechanical gripper, and a gripper opening and closing control mechanism. The moving component includes a moving plate, rollers, a front roller bracket, a rear roller bracket, and guide optical shafts. There are two guide optical shafts, which are fixed parallel to each other on the left and right sides of the vacuum chamber. The moving plate is positioned between the two guide optical shafts. The front and rear sides of the moving plate near its left end are fixedly connected to the front roller bracket and the rear roller bracket, respectively. Each of the front and rear roller brackets has a roller located at its upper part. The two rollers at the bottom make rolling contact with the upper and lower parts of the corresponding guide optical shafts, respectively, so that the moving plate can be slidably connected to the two guide optical shafts in the left and right directions; the mechanical gripper is composed of two gripper pieces arranged symmetrically front and back, and the left end of the two gripper pieces is hinged to the right end of the moving plate near the outer position; the moving drive mechanism adopts a linear drive mechanism, and the end power output component of the moving drive mechanism is drivenly connected to the rear roller bracket; the end power output component of the gripper opening and closing control mechanism is a left and right moving thrust nut, and the front and rear parts of the thrust nut are respectively hinged to the left end of the two grippers near the inner position.

2. The substrate transfer device suitable for high vacuum according to claim 1, characterized in that: Mechanical gripper upper support plate and mechanical gripper lower support plate are fixed at the front and rear of the right end of the movable plate. Mounting holes are provided opposite to each other on the mechanical gripper upper support plate and mechanical gripper lower support plate. The left ends of the two gripper pieces are respectively inserted into the space between the mechanical gripper upper support plate and mechanical gripper lower support plate on the corresponding side. By inserting hinge pins into the mounting holes on the mechanical gripper upper support plate and mechanical gripper lower support plate and into the mounting holes on the gripper pieces, the gripper pieces can be rotatably mounted on the movable plate.

3. The substrate transfer device suitable for high vacuum according to claim 1, characterized in that: The moving drive mechanism includes a moving drive motor and a ball screw assembly. The moving drive motor is located at the rear left side of the vacuum chamber. The output end of the moving drive motor is connected to a driving synchronous pulley, which is connected to a driven synchronous pulley via a synchronous belt. The driven synchronous pulley is fixed to one end of the rotating shaft of the first rotary sealing assembly. The other end of the rotating shaft of the first rotary sealing assembly is connected to the lead screw of the ball screw assembly. The lead screw is supported on both sides of the vacuum chamber. A nut connected to the lead screw is fixed to a flange connector, which is fixedly connected to the rear roller bracket. An encoder is also installed on the rotor of the moving drive motor.

4. The substrate transfer device suitable for high vacuum according to claim 1, characterized in that: The gripper opening and closing control mechanism further includes a mechanical gripper control shaft, a mechanical gripper drive shaft, and a gripper opening and closing drive cylinder. The gripper opening and closing drive cylinder is located at the front left side of the vacuum chamber. The gripper opening and closing drive cylinder is driven to the second rotary sealing assembly through a set of transmission gears. The second rotary sealing assembly is driven to the left end of the mechanical gripper control shaft. The right end of the mechanical gripper control shaft is driven to the mechanical gripper drive shaft through a connector. The mechanical gripper drive shaft is rotatably mounted at the lower center of the moving plate through a front bearing and a rear bearing seat. The right end of the mechanical gripper control shaft adopts an external thread structure and is connected to the thrust nut. The front and rear parts of the thrust nut are provided with connecting ears. The front connecting ears and the rear connecting ears are hinged to the inner left side of the two gripper pieces through pins. The hole for the pin on the mechanical gripper is an oblong hole.

Images