Adjustable gear resistance structure

Abstract

The utility model discloses a kind of adjustable gear resistance structures, with: driving tooth, rotation is driven by driving mechanism;Driving shaft, rotation is installed on rack;Driving gear, fixedly installed on driving shaft;Driving gear is engaged with driving tooth;Guide shaft, fixedly installed on rack;Damping tooth, rotation is installed on guide shaft;Damping tooth is engaged with driving gear;Brake pad, circumferentially limit but axially slidingly installed on guide shaft;Pressure regulating mechanism, brake pad is contacted with damping tooth by pressure regulating mechanism.Adjusting mechanism, so that brake pad and gear contact friction force size can be adjusted, so that the tooth gap in transmission process can be controlled, offset the reverse radial force generated in transmission process, reduce gear play, improve transmission accuracy.Reach the demand of promotion whole machine machining accuracy.

Description

Technical Field

[0001] This utility model belongs to the field of double-sided grinding / polishing technology, and particularly relates to an adjustable gear resistance structure. Background Technology

[0002] In high-precision manufacturing fields, such as semiconductor and ceramic substrate processing, double-sided grinding / polishing technology is a key process for achieving global planarization and ultra-smooth, damage-free surfaces. Traditional double-sided grinding / polishing machines typically employ a planetary gear system. The workpiece is placed in a carrier (planetary gears) and driven by a central gear and an internal gear ring, performing complex planetary motions between two polishing pads to achieve uniform material removal.

[0003] In the process of realizing this utility model, the inventors discovered that the prior art has at least the following problems:

[0004] During the polishing process, instability of the gear ring, planetary gear, and center tooth can lead to surface defects such as "wavy" texture, protrusions, and depressions on the workpiece, resulting in excessive global flatness (TTV, GBIR) indicators. The root cause is that the vibration and speed fluctuations of the gear ring and center tooth are directly transmitted to the workpiece carrier through gear meshing, causing the workpiece's movement trajectory on the polishing pad to deviate from the ideal smooth curve and become chaotic. This unstable movement results in inconsistent material removal rate (MRR) at different points on the workpiece surface, making it impossible to achieve uniform removal and thus compromising surface accuracy.

[0005] CN212893291U - Rope and Gear Tension Adjustment Fixer, relates to the technical field of rope and belt winding and fixing devices, and solves the technical shortcomings of existing rope and gear tension adjustment fixers, which are inconvenient to operate. It includes: a main housing, a winding wheel, a bottom cover, a handle wheel and transmission gears; the bottom of the main housing is provided with a winding wheel cavity, and the winding wheel is located in the winding wheel cavity; however, it still cannot solve the above-mentioned technical problems. Utility Model Content

[0006] The technical problem this invention aims to solve is to provide an adjustable gear resistance structure. By adjusting the nut, the frictional force between the brake pad and the gear can be adjusted, allowing control of the backlash during transmission. This counteracts the reverse radial force generated during transmission, reduces gear slippage, and improves transmission accuracy, thereby meeting the requirement of improving the overall machining accuracy.

[0007] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is: an adjustable gear resistance structure, having:

[0008] The drive gear is driven to rotate via a drive mechanism;

[0009] The drive shaft is rotatably mounted on the frame.

[0010] A drive gear is fixedly mounted on the drive shaft; the drive gear meshes with the driving gear.

[0011] The guide shaft is fixedly mounted on the frame;

[0012] A damping tooth is rotatably mounted on the guide shaft; the damping tooth meshes with the drive tooth;

[0013] The brake pad is circumferentially limited but axially slidable on the guide shaft;

[0014] A pressure regulating mechanism is provided, in which the brake pad contacts the damping teeth.

[0015] The guide shaft is provided with a retaining ring that limits the axial position of the damping teeth.

[0016] The pressure regulating mechanism includes an adjusting nut and a spring. The adjusting nut is threadedly connected to the guide shaft. The spring is fitted onto the guide shaft, and its two ends are connected to the brake pad and the adjusting nut, respectively.

[0017] The guide shaft is provided with a guide block, and the brake pad is provided with a guide groove that matches the guide block.

[0018] The brake pad is also provided with an auxiliary piece on one side, which is circumferentially limited but axially slidable on the guide shaft.

[0019] The drive mechanism includes a motor and a reducer, and the drive gear is connected to the reducer.

[0020] One of the above technical solutions has the following advantages or beneficial effects: by adjusting the nut, the frictional force between the brake pad and the gear can be adjusted, allowing control of the backlash during transmission, counteracting the reverse radial force generated during transmission, reducing gear movement, and improving transmission accuracy. This achieves the goal of improving the overall machining accuracy. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the adjustable gear resistance structure provided in the embodiments of this utility model;

[0022] Figure 2 for Figure 1 A schematic diagram of the adjustable gear resistance structure;

[0023] The markings in the above diagrams are as follows: 1. Motor, 2. Reducer, 3. Drive gear, 4. Drive shaft, 5. Drive gear, 6. Damping gear, 7. Guide shaft, 8. Spring, 9. Retaining ring, 10. Adjusting nut, 11. Brake pad, 12. Auxiliary plate. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0025] Example 1

[0026] See Figures 1-2 An adjustable gear resistance structure comprises: a driving gear 3, driven to rotate by a drive mechanism; a drive shaft 4, rotatably mounted on a frame; a drive gear 5, fixedly mounted on the drive shaft 4; the drive gear 5 meshes with the driving gear 3; a guide shaft 7, fixedly mounted on the frame; a damping gear 6, rotatably mounted on the guide shaft 7; the damping gear 6 meshes with the drive gear 5; a brake pad 11, circumferentially limited but axially slidingly mounted on the guide shaft 7; and a pressure adjustment mechanism, through which the brake pad 11 contacts the damping gear 6. The adjustment mechanism allows for adjustment of the frictional force between the brake pad 11 and the gear, enabling control of the backlash during transmission, counteracting the reverse radial force generated during transmission, reducing gear slippage, and improving transmission accuracy. This achieves the goal of improving the overall machining accuracy.

[0027] The guide shaft 7 is provided with a retaining ring 9 that limits the axial position of the damping teeth 6, which serves to limit the axial position of the damping teeth 6.

[0028] The pressure adjustment mechanism includes an adjusting nut 10 and a spring 8. The adjusting nut 10 is threadedly connected to the guide shaft 7; the spring 8 is fitted onto the guide shaft 7, and its two ends are connected to the brake pad 11 and the adjusting nut 10, respectively. By adjusting the nut 10, the frictional force between the brake pad 11 and the gear can be adjusted, allowing control of the backlash during transmission, counteracting the reverse radial force generated during transmission, reducing gear runout, and improving transmission accuracy. This achieves the goal of improving the overall machining accuracy.

[0029] The guide shaft 7 is provided with a guide block, and the brake pad 11 is provided with a guide groove that matches the guide block. The brake pad 11 is circumferentially limited but axially slidingly mounted on the guide shaft 7, which is achieved by the guide block and the guide groove.

[0030] The transmission system consists of shafts, gears, springs 8, wear-resistant brake pads, bolts, and other parts. The drive gear 3 is driven by a motor 1 reducer and transmits the power to the drive gear 5 through gear meshing. An adjustable damping gear 6 structure is added at the symmetrical position of its transmission linear velocity meshing to reduce gear meshing backlash, increase stability during gear transmission, ensure operational accuracy, and suppress vibration.

[0031] Operation process: During operation, the motor drives the reducer, the reducer drives the active gear 3, the active gear 3 drives the driven gear, and an adjustable gear structure is added to the side of the driven gear. By tightening the adjusting nut 10, the contact friction between the brake pad 11 and the gear is adjusted by the spring 8, so that when the transmission between the active gear 3 and the driven gear is resisted, the gear structure cannot rotate.

[0032] With the above structure, the friction between the brake pad 11 and the gear can be adjusted by adjusting the nut 10, thus controlling the backlash during transmission, counteracting the reverse radial force generated during transmission, reducing gear movement, and improving transmission accuracy. This achieves the goal of improving the overall machining accuracy.

[0033] Example 2

[0034] In this embodiment, an auxiliary plate 12 is also provided on one side of the brake pad 11. The auxiliary plate 12 is circumferentially limited but axially slidingly mounted on the guide shaft 7. The drive mechanism includes a motor 1 and a reducer 2, and the drive gear 3 is connected to the reducer 2.

[0035] An adjustable gear resistance structure comprises: a driving gear 3, driven to rotate by a drive mechanism; a drive shaft 4, rotatably mounted on a frame; a drive gear 5, fixedly mounted on the drive shaft 4; the drive gear 5 meshes with the driving gear 3; a guide shaft 7, fixedly mounted on the frame; a damping gear 6, rotatably mounted on the guide shaft 7; the damping gear 6 meshes with the drive gear 5; a brake pad 11, circumferentially limited but axially slidingly mounted on the guide shaft 7; and a pressure adjustment mechanism, through which the brake pad 11 contacts the damping gear 6. The adjustment mechanism allows for adjustment of the frictional force between the brake pad 11 and the gear, enabling control of the backlash during transmission, counteracting the reverse radial force generated during transmission, reducing gear slippage, and improving transmission accuracy. This achieves the goal of improving the overall machining accuracy.

[0036] The guide shaft 7 is provided with a retaining ring 9 that limits the axial position of the damping teeth 6, which serves to limit the axial position of the damping teeth 6.

[0037] The pressure adjustment mechanism includes an adjusting nut 10 and a spring 8. The adjusting nut 10 is threadedly connected to the guide shaft 7; the spring 8 is fitted onto the guide shaft 7, and its two ends are connected to the brake pad 11 and the adjusting nut 10, respectively. By adjusting the nut 10, the frictional force between the brake pad 11 and the gear can be adjusted, allowing control of the backlash during transmission, counteracting the reverse radial force generated during transmission, reducing gear runout, and improving transmission accuracy. This achieves the goal of improving the overall machining accuracy.

[0038] The guide shaft 7 is provided with a guide block, and the brake pad 11 is provided with a guide groove that matches the guide block. The brake pad 11 is circumferentially limited but axially slidingly mounted on the guide shaft 7, which is achieved by the guide block and the guide groove.

[0039] The transmission system consists of shafts, gears, springs 8, wear-resistant brake pads, bolts, and other parts. The drive gear 3 is driven by a motor 1 reducer and transmits the power to the drive gear 5 through gear meshing. An adjustable damping gear 6 structure is added at the symmetrical position of its transmission linear velocity meshing to reduce gear meshing backlash, increase stability during gear transmission, ensure operational accuracy, and suppress vibration.

[0040] Operation process: During operation, the motor drives the reducer, the reducer drives the active gear 3, the active gear 3 drives the driven gear, and an adjustable gear structure is added to the side of the driven gear. By tightening the adjusting nut 10, the contact friction between the brake pad 11 and the gear is adjusted by the spring 8, so that when the transmission between the active gear 3 and the driven gear is resisted, the gear structure cannot rotate.

[0041] With the above structure, the friction between the brake pad 11 and the gear can be adjusted by adjusting the nut 10, thus controlling the backlash during transmission, counteracting the reverse radial force generated during transmission, reducing gear movement, and improving transmission accuracy. This achieves the goal of improving the overall machining accuracy.

[0042] In the description of this utility model, it should be understood that the terms "coaxial", "bottom", "one end", "top", "middle", "other end", "upper", "side", "top", "inner", "front", "center", "both ends", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0043] In this utility model, unless otherwise explicitly specified and limited, the terms "installation", "setting", "connection", "fixing", "screw connection", etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Unless otherwise explicitly limited, those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0044] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. An adjustable gear resistance structure, characterized in that, have: The drive gear is driven to rotate via a drive mechanism; The drive shaft is rotatably mounted on the frame. A drive gear is fixedly mounted on the drive shaft; the drive gear meshes with the driving gear. The guide shaft is fixedly mounted on the frame; A damping tooth is rotatably mounted on the guide shaft; the damping tooth meshes with the drive tooth; The brake pad is circumferentially limited but axially slidable on the guide shaft; A pressure regulating mechanism is provided, in which the brake pad contacts the damping teeth.

2. The adjustable gear resistance structure as described in claim 1, characterized in that, The guide shaft is provided with a retaining ring that limits the axial position of the damping teeth.

3. The adjustable gear resistance structure as described in claim 2, characterized in that, The pressure regulating mechanism includes an adjusting nut and a spring. The adjusting nut is threadedly connected to the guide shaft. The spring is fitted onto the guide shaft, and its two ends are connected to the brake pad and the adjusting nut, respectively.

4. The adjustable gear resistance structure as described in claim 3, characterized in that, The guide shaft is provided with a guide block, and the brake pad is provided with a guide groove that matches the guide block.

5. The adjustable gear resistance structure as described in claim 4, characterized in that, The brake pad is also provided with an auxiliary piece on one side, which is circumferentially limited but axially slidable on the guide shaft.

6. The adjustable gear resistance structure as described in claim 5, characterized in that, The drive mechanism includes a motor and a reducer, and the drive gear is connected to the reducer.

Images