Non-contact Hall Mobility Host

Abstract

1. The name of the product of this design: Non-contact Hall mobility host station. 2. Purpose of this design product: This design product is the main unit part of a non-contact Hall mobility product. This design product uses a microwave source and waveguide system to detect the signal changes of TE10 waves and TE11 waves of semiconductor wafers with and without magnetic fields, thereby calculating the wafer's square resistance, Hall coefficient, carrier concentration, and electrical parameters of Hall mobility. 3. The design key point of this appearance design product lies in the shape. 4. The picture or photo that best illustrates the design points: three-dimensional picture.

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