A method and apparatus for determining 
capacitance of wires in an 
integrated circuit is described. The 
capacitance information derived according to the invention can be used, for example, to calibrate a 
parasitic extraction engine or to calibrate an 
integrated circuit fabrication process. The 
capacitance information can also be used for timing and 
noise circuit simulations, particularly for deep sub-Micron 
circuit design simulations. Briefly, the invention allows measurement of both total capacitance of a line and cross 
coupling capacitance between two lines by applying predetermined 
voltage signals to specific circuit elements. The resulting current allows 
simple computation of total capacitance and cross 
coupling capacitance. Multiple cross 
coupling capacitance can be measured with a single device, thus improving the art of 
library generation, and the overall method is free of uncertainties related to 
transistor capacitance couplings. The capacitance values obtained can then be used to calibrate procedures, processes, devices, etc.