The invention relates to a probe needle
system (1, 2, 3, 4) and a method for using the probe needle
system (1, 2, 3, 4). The probe needle
system (1, 2, 3, 4) comprises a plate (100, 200, 300, 400), a temperature-controlled substrate holder (12, 22, 32, 42), a test
assembly (14, 24, 34, 44), and an active
heat control mechanism (16, 26, 36, 46). The temperature-controlled substrate holder (12, 22, 32, 42) supports a substrate (18, 28, 38, 48) containing a
device under test (DUT). The temperature-controlled substrate holder (12, 22, 32, 42) regulates the temperature of the substrate (18, 28, 38, 48). The test
assembly (14, 24, 34, 44) is arranged on the plate (100, 200, 300, 400). The test
assembly (14, 24, 34, 44) includes a
waveguide interface instrument (140, 240, 340, 440) and a
waveguide probe needle (142, 242, 342, 442).The
waveguide probe needle (142, 242, 342, 442) has a probe needle tip (T1, T2, T3, T4) configured to contact the test specimen. The active
thermal control mechanism (16, 26, 36, 46) is configured to stabilize the
thermal state of the waveguide probe needle (142, 242, 342, 442) and block heat conduction from the temperature-controlled substrate holder (12, 22, 32, 42) to the waveguide probe needle (142, 242, 342, 442).