Extreme ultraviolet light generator
CN309548133SActive Publication Date: 2025-10-17HEFEI HAOYU CORE LIGHT TECH CO LTD
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Patent Information
- Application Number
- CN202530050379.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-24
- Publication Date
- 2025-10-17
- Estimated Expiration
- 2040-01-24
Smart Images
Figure 000003_ABST
Abstract
1. Name of the design product: extreme ultraviolet light generator. 2. Use of the design product: the design product is used for generating extreme ultraviolet light. 3. Design points of the design product: in shape. 4. Picture or photo best indicating the design points: perspective view 1.
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