Mating portion of wafer holding unit

Abstract

1. The name of the design product: the fitting part of wafer holding unit. 2. The use of the design product: the design product as a whole is used as a wafer holding unit installed in a processing tank of wafer processing device, and the claimed part is used as a fitting part to avoid the deviation of installation position by fitting with the concave-convex provided in the processing tank. 3. The design points of the design product: the shape of the part shown in solid line. 4. The picture or photo that best shows the design points: the enlarged view of part B. 5. Other circumstances that need to be explained: the part design of the claimed design product is claimed, and the unclaimed part is shown in dotted line in the design picture.

Images