Thin film gauge vacuum meter
CN309974877SActive Publication Date: 2026-05-12SHANGHAI RES TECH CO LTD
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Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- SHANGHAI RES TECH CO LTD
- Filing Date
- 2025-08-29
- Publication Date
- 2026-05-12
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Figure 000007_ABST
Abstract
1. The name of the design product: thin film gauge vacuum meter. 2. The use of the design product: vacuum chamber pressure monitoring for industrial vacuum processes such as vacuum coating, semiconductor manufacturing, vacuum heat treatment, and scientific research experiments. 3. The design points of the design product: in shape. 4. The picture or photo that best indicates the design points: perspective view.
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