Automated equipment (high throughput ALD)
CN309976982SActive Publication Date: 2026-05-12WUXI SONGYU TECH CO LTD
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Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- WUXI SONGYU TECH CO LTD
- Filing Date
- 2025-08-26
- Publication Date
- 2026-05-12
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Figure 000007_ABST
Abstract
1. Name of the design product: automation equipment (high-capacity ALD). 2. Use of the design product: used for ALD process equipment, automatic feeding and discharging equipment. 3. Design points of the design product: in shape. 4. Picture or photo best indicating the design points: perspective view 1.
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