ADAPTIVE TEMPERATURKOMPENSATION

Abstract

Coordinate measuring machine, with controlled machine axes (X, Y, Z, C) for performing measuring movements for component measurement, with at least one measuring device (4, 6) held by at least one of the machine axes (X, Y, Z, C) and movable by means of at least one of the machine axes (X, Y, Z, C), such as a tactile measuring device (4) or an optical measuring device (6), for acquiring uncompensated coordinate measurement values ​​(x1, y1, z1) on a component to be measured (8), with a device (10) for temperature compensation of the uncompensated coordinate measurement values ​​(x1, y1, z1) by means of a temperature model (12), wherein the temperature model (12) is configured to process one temperature measurement value (T1, T2) or several temperature measurement values ​​(T1, T2) as input variables, wherein the temperature model provides compensation parameters (dx, dy, dz) for the uncompensated has coordinate measurements and / or compensated coordinate measurements as output variables,where the temperature model (12) is adaptive and can be adjusted based on a database.

Description

[0001] The present invention relates to a coordinate measuring machine with controlled machine axes for performing measuring movements for component measurement, with at least one measuring device, such as a tactile measuring device or an optical measuring device, held by at least one of the machine axes and movable by means of at least one of the machine axes, for acquiring uncompensated coordinate measurement values ​​on a component to be measured, with a device for temperature compensation of the uncompensated coordinate measurement values ​​by means of a temperature model, wherein the temperature model is configured to process one or more temperature measurement values ​​as input variables and wherein the temperature model has compensation parameters for the uncompensated coordinate measurement values ​​and / or compensated coordinate measurement values ​​as output variables.The invention further relates to a method for setting up a temperature compensation of such a coordinate measuring machine.

[0002] Modern coordinate measuring machines are capable of measuring parameters and features on components with absolute values ​​of less than 1 micrometer. To ensure that such precise measurements are repeatable and reliable, corrections and compensations are performed on the respective coordinate measuring machine.

[0003] For example, errors of numerically controlled machine axes can be systematically recorded and superimposed inversely, sensors can be combined to achieve a reduction of residual error, and temperature tests can be carried out that make it possible to generate a temperature model of the temperature-related geometric behavior of a coordinate measuring machine.

[0004] Such a temperature model can be generated, for example, by performing measurements on a calibration sphere within the measuring volume of the coordinate measuring machine at various temperatures. The determined center point of the sphere serves as a reference point in subsequent measurements and can be the reference for a coordinate system of the coordinate measuring machine. The measurements are carried out under the influence of temperature control of the surrounding space, in which different temperature levels are set for defined time intervals. The measurement results obtained under the influence of temperature, e.g., the determination of the sphere's center point, are used with the prevailing temperatures to generate a static temperature model. The static temperature model is specified in such a way as to minimize the resulting measurement error.

[0005] Temperature tests on a single coordinate measuring machine (CMM) often last several days and take place in a climate chamber, which allows for the precise setting and maintenance of the required temperature levels. These tests are therefore time-consuming and expensive, and are only performed on a small number of CMMs within a machine series. The static temperature model determined using only a few CMMs from a machine series is then applied to all CMMs in that series. It is therefore assumed that identical CMMs will exhibit the same or at least similar temperature behavior.

[0006] Specifically, for each coordinate measuring machine of the relevant machine series, this means that the determined temperature model is statically fixed for every subsequent measurement. This means, for example, that a parameter set is generated which allows correction values ​​for one or more reference points in the coordinate system of the coordinate measuring machine to be calculated from a combination of various temperature values ​​measured during operation. This parameter set does not change for the entire operating time of the machine. It can therefore be described as a static parameter set for the static temperature model.

[0007] The temperature compensation method described above means that any coordinate measuring machine not directly used to determine the temperature model and corrected by it will only correct an average temperature-related error. In other words, any coordinate measuring machine not directly used to determine the temperature model and corrected by it will either be overcompensated or undercompensated.

[0008] Furthermore, coordinate measuring machines of a given machine series are exposed to different environmental conditions in practical operation. Each installation location differs in terms of temperature conditions, which are influenced, for example, by ventilation and air conditioning systems, windows, drafts and sunlight, as well as nearby heat or cold sources such as adjacent machines, units, pipelines, and the like.

[0009] Each coordinate measuring machine therefore experiences different environmental conditions at its installation location compared to other installation locations and, in particular, experiences different dynamic temperatures or heat influences from the static temperature of the climate chamber, the dynamics of which are not taken into account by the static temperature model.

[0010] Against this background, the present invention is based on the technical problem of providing an improved coordinate measuring machine and an improved method for setting up a temperature compensation of such a coordinate measuring machine, which in particular enables improved temperature compensation.

[0011] The technical problem described above is solved by the features of the independent claims. Further embodiments of the invention are described in the dependent claims and the following description.

[0012] According to a first aspect, the invention relates to a coordinate measuring machine with controlled machine axes for performing measuring movements for component measurement, with at least one measuring device, such as a tactile measuring device or an optical measuring device, held by at least one of the machine axes and movable by means of at least one of the machine axes, for acquiring uncompensated coordinate measurement values ​​on a component to be measured, with a device for temperature compensation of the uncompensated coordinate measurement values ​​by means of a temperature model, wherein the temperature model is configured to process one or more temperature measurement values ​​as input variables and wherein the temperature model has compensation parameters for the uncompensated coordinate measurement values ​​and / or compensated coordinate measurement values ​​as output variables.The coordinate measuring machine is characterized by the fact that the temperature model is adaptive and can be adjusted based on a database.

[0013] The coordinate measuring machine according to the invention enables improved temperature compensation by allowing the temperature model to be adapted to the individual machine. Thus, the temperature model can be individually adapted to the geometric temperature behavior of the respective coordinate measuring machine, and it is not simply a temperature model created under laboratory conditions that is adopted – as described in the introduction regarding the prior art.

[0014] The temperature model may be designed to process one or more measured temperature gradients as input variables.

[0015] In this case, the coordinate measuring machine according to the invention enables improved temperature compensation by also being able to compensate for temperature gradients. Under real operating conditions, temperature fluctuations in the environment of the coordinate measuring machine can occur repeatedly. This means that the ambient temperature changes for a specific time interval, and this temperature change can be measured as a temperature gradient in the environment and / or within the coordinate measuring machine. For this purpose, the coordinate measuring machine can have one or more temperature sensors to detect temperature gradients in addition to individual temperature measurements.

[0016] Under the influence of such a temperature change, the temperatures of the components of the coordinate measuring machine also change, and it is evident that the components of the coordinate measuring machine heat up or cool down to different degrees, at different rates and in a generally inhomogeneous manner, depending on their dimensions, position, material, mass and shape.

[0017] Temperature models determined under laboratory conditions for static temperature states do not allow for precise compensation of the dynamic effects under the influence of temperature gradients. In contrast, the coordinate measuring machine according to the invention enables temperature compensation even under the influence of temperature gradients. Here, the temperature model can be individually adapted to the ambient conditions and the machine-specific geometric behavior of the coordinate measuring machine, particularly at the end user's installation site.

[0018] The temperature model may include a base temperature compensation, where the base temperature compensation is determined based on tests under laboratory conditions at a location different from the coordinate measuring machine's installation site, such as a climate chamber or similar, on the coordinate measuring machine and / or an identical coordinate measuring machine. The temperature model may also include an individual temperature compensation that supplements, modifies, or replaces the base temperature compensation and is determined based on one or more reference measurements at the coordinate measuring machine's installation site. The installation site is, in particular, the current location of the coordinate measuring machine, especially at the end user's site. The location other than the installation site is, in particular, a location where the coordinate measuring machine was previously installed, such as an assembly hall or climate chamber.

[0019] While basic temperature compensation compensates for, for example, an average temperature error for the relevant machine series, individual temperature compensation enables a machine-specific improvement of this basic temperature compensation. This means that the coordinate measuring machine is already operational with basic temperature compensation and would be readily available for common tolerance requirements even without individual temperature compensation. Individual temperature compensation allows for a further, more significant improvement in achievable measurement accuracy, even under challenging environmental conditions, such as when the coordinate measuring machine is used outside of a climate-controlled measuring room.

[0020] According to one embodiment of the coordinate measuring machine, the basic temperature compensation may include compensation parameters for static temperature levels and, in particular, compensation parameters for temperature gradients. The basic temperature compensation may therefore already include compensation parameters for temperature gradients, which, for example, have been determined on an identical coordinate measuring machine. Again, the basic temperature compensation already enables very precise temperature compensation, which is further improved by the individual temperature compensation.

[0021] It may be provided that the individual temperature compensation has machine-specific adapted compensation parameters for temperature gradients, in particular that the individual temperature compensation has machine-specific adapted compensation parameters for both temperature gradients and static temperature levels.

[0022] According to one design of the coordinate measuring machine, it may be provided that the temperature model includes one or more of the following models: characteristic map, AI model, regression model.

[0023] The temperature model can include a characteristic map, which represents a temperature-related measurement deviation of the coordinate measuring machine. For example, measured temperatures and / or measured temperature gradients can serve as input variables for the characteristic map. Based on these input variables, one or more compensation parameters are then determined as output variables to compensate for the temperature-related measurement deviation.

[0024] Furthermore, the axis positions of the coordinate measuring machine can also serve as additional input variables for the characteristic map in order to determine one or more compensation parameters as output variables based on the characteristic map to compensate for the temperature-related measurement deviation.

[0025] The characteristic map can, in the usual way, be the mapping of one or more input variables to one or more output variables. If only one input and one output variable are present, it can be referred to as a characteristic curve.

[0026] The characteristic map may have been determined through practical experiments and / or simulation, e.g., FE simulation. Characteristic curves and / or curves of the characteristic map may have been determined using regression analysis.

[0027] For a characteristic map-based temperature compensation, it can be the case, in particular, that one or more temperatures and / or temperature gradients serve as input variables and that compensation parameters, which describe the temperature-related measurement deviation of the coordinate measuring machine in space, are the output variables.

[0028] The characteristic curve can be stored, for example, in tabular form, i.e., as a data set, and / or as a calculation rule, i.e., as a formula, function or family of curves, in a machine control system of the coordinate measuring machine.

[0029] Several characteristic maps for representing temperature-related measurement deviations of the coordinate measuring machine can be stored in the machine control system. For example, one characteristic map can be stored for each coordinate direction. For example, one characteristic map can be stored for each machine axis.

[0030] Alternatively or additionally, a regression model, or several regression models, can be provided to represent temperature-related measurement deviations of the coordinate measuring machine. Such a regression model can be a linear regression, a polynomial regression, or the like. For example, it can be provided that one regression model is stored for each coordinate direction. For example, it can be provided that one regression model is stored for each machine axis.

[0031] The temperature model can include an AI model, where the AI ​​model represents a temperature-related measurement deviation of the coordinate measuring machine. The AI ​​model can be a neural network. The neural network can be a radial basis function network. It can be designed so that the neural network includes radial basis functions or interpolation functions, such as linear and nonlinear regressions.

[0032] According to one embodiment of the coordinate measuring machine, the temperature model may therefore include at least one neural network. This neural network may have been trained using training data that was at least partially obtained at the end user's site where the coordinate measuring machine is installed.

[0033] In this case, training the neural network with training data obtained at least partially at the installation site of the coordinate measuring machine at the end user's site corresponds to the individual temperature compensation according to the invention.

[0034] Multiple or repeated reference measurements and / or calibrations at the installation site can increase the database and improve the neural network in terms of machine learning.

[0035] It may be planned that the training of the neural network is carried out until a predetermined model quality has been achieved.

[0036] The temperature model may be configured to process uncompensated coordinate measurements as input. The required compensation can depend not only on the measured temperature but also on the position of the measurement point within the available measurement volume. It is evident that the machine axes, whose superimposed movements enable the approach to measurement positions, do not exhibit purely linear geometric temperature behavior but require different temperature compensations depending on the axis position approached.

[0037] To take up the example of the neural network, in addition to measured temperatures and temperature gradients, uncompensated coordinate measurements and / or axis positions of the machine axes can also be used as input variables to account for the influence of the measurement position within the measurement volume on the deviations to be compensated. The terms measurement deviations and deviations are used synonymously in this text.

[0038] The outputs of such a neural network can either be compensation parameters for the uncompensated coordinate measurements, which are then calculated together, and / or they can be compensated coordinate measurements that can be directly output as measurement results. The neural network can therefore be used directly to output compensation parameters and / or compensated coordinate measurements.

[0039] The temperature model may include a characteristic map and / or a regression model configured for temperature compensation, with an AI model, such as a neural network, used to adapt the characteristic map and / or the regression model. In this case, the AI ​​model does not generate compensation parameters but is solely intended to improve or adapt the characteristic map and / or the regression model. Therefore, the compensation parameters during machine operation are determined using the characteristic map and / or regression model, and specifically not using the AI ​​model.

[0040] This approach has the advantage that the temperature compensation based on characteristic curves or regression in this way is less computationally intensive compared to an AI running live during machine operation.

[0041] The AI ​​model can, for example, represent a meta-model of the coordinate measuring machine, which is trained and improved using experimental results and / or FE simulations. Such an AI model can, in turn, be used to improve the characteristic map and / or regression model of the coordinate measuring machine or to generate compensation parameters.

[0042] In particular, it may be provided that the AI ​​model used to improve the characteristic map and / or regression model of the coordinate measuring machine runs on a computer or server external to the machine control, while the characteristic map and / or regression model are stored and used on the machine control. Alternatively, both the AI ​​model and the characteristic map and / or regression model can be stored and used on the machine control.

[0043] Input data for the neural network to improve the characteristic map and / or the regression model can be, for example, data and / or parameters of the characteristic map and / or the regression model, sensor data, axle position and the like, whereby output variables of the neural network can be supplemented, adapted or replaced data or parameters of the characteristic map and / or the regression model.

[0044] All aspects of the temperature model are preferably computer-implemented. That is, whenever a characteristic map, a regression model, an AI model, a neural network, and the like are mentioned, these are all computer-implemented.

[0045] According to one embodiment of the coordinate measuring machine, it may be provided that the database contains measurement results from reference measurements and / or calibrations, in particular where standards, such as a spherical standard or the like, have been measured.

[0046] It may be provided that each machine axis is assigned axis-specific compensation parameters.

[0047] Alternatively or additionally, it may be provided that each coordinate direction is assigned coordinate direction-specific compensation parameters.

[0048] Alternatively or additionally, it may be provided that the coordinate measurements are compensated vectorially.

[0049] According to a second aspect, the invention relates to a method for setting up a temperature compensation of a coordinate measuring machine according to the invention, comprising the method steps: providing the data basis; adapting the temperature model based on the data basis.

[0050] It may be envisaged that the database contains data from identical coordinate measuring machines, with data being provided via a network connection. For example, data from a machine series can be collected centrally and used to improve temperature models. The network connection can be wired and / or wireless, in particular an intranet connection and / or an internet connection.

[0051] The invention is described in more detail below with reference to an exemplary embodiment shown in a drawing. The drawing schematically depicts: Fig. 1 a coordinate measuring machine according to the invention; Fig. 2. a temperature compensation; Fig. 3 a temperature model using a neural network; Fig. 4 another temperature model using a neural network; Fig. 5 a temperature model with a neural network and a characteristic curve; Fig. 6 another temperature model with a neural network and a regression model; Fig. 7 process steps of a process according to the invention.

[0052] Fig. Figure 1 shows a coordinate measuring machine 2 according to the invention in a perspective view.

[0053] The coordinate measuring machine 2 has controlled machine axes X, Y, Z, C for performing measuring movements for component measurement. In particular, these are CNC-controlled machine axes.

[0054] The coordinate measuring machine 2 has three controlled linear axes X, Y, Z for performing translational relative movements in three mutually orthogonal spatial directions X, Y, Z. The coordinate measuring machine 2 has a controlled rotary axis C for performing a rotation of a component 8 to be measured.

[0055] The coordinate measuring machine 2 has measuring devices 4, 6, held by the machine axes X, Y, Z and movable by means of the machine axes X, Y, Z, namely a tactile measuring device 4 and an optical measuring device 6, for acquiring uncompensated coordinate measurement values ​​on the component 8 to be measured. The component 8 is in this case an externally helical gear.

[0056] The coordinate measuring machine 2 has a device 10 for temperature compensation of the uncompensated coordinate measurements by means of a temperature model 12.

[0057] The temperature compensation device 10 can be software assigned to a machine control 14 of the coordinate measuring machine 2.

[0058] The coordinate measuring machine 2 has at least one temperature sensor S and can have a plurality of temperature sensors S.

[0059] As far as the temperature in the environment U of the coordinate measuring machine 2 changes, the components of the coordinate measuring machine 2 experience temperature-related expansion or contraction. This means that the geometry of the coordinate measuring machine 2 is temperature-dependent. Consequently, the measuring devices 4, 6 also shift relative to the component 8 being measured due to temperature changes.

[0060] For a measuring point M1 (see Fig. 2) The coordinate measuring machine 2 therefore records different uncompensated measured values ​​for a first ambient temperature than for a different, second ambient temperature, even though in fact one and the same measuring point M1 is being probed on a component by means of the tactile measuring device 4.

[0061] Using temperature model 12, this temperature-related deviation of the measured values ​​can be compensated. Each uncompensated measured value has a value for the X-coordinate, the Y-coordinate, and the Z-coordinate. Temperature model 12 can provide a positive or negative compensation parameter dx, dy, dz for each uncompensated measured value, which is then applied to the uncompensated value, for example, by addition. In this way, compensated measured values ​​can be generated that are corrected for the influence of temperature.

[0062] For example, a temperature-related change in the position of the Z-axis, which is implemented as a linear axis, can result not only in longitudinal expansion in the Z direction but also in deviations in the X or Y direction, provided that the temperature influences cause the Z-axis to tilt or twist. Therefore, for all CNC-controlled machine axes X, Y, Z, C, each machine axis X, Y, Z, C can experience temperature-related deviations along and around every spatial direction, corresponding to the three rotational and three translational degrees of freedom in three-dimensional space.

[0063] The compensation parameters dx, dy, dz according to Fig. 2 therefore do not merely represent an axis-specific deviation, but summarize all components of the temperature-related deviations of all machine axes X, Y, Z, C in the respective spatial direction and thus compensate for the deviations of all machine axes X, Y, Z, C overall.

[0064] Temperature model 12 can be configured to take temperature readings T1, T2, ... T i , with index i = 1 to n, as input variables and can further be configured to process several measured temperature gradients Tg1, Tg2 .. Tg j The system can process values ​​with indices j (1 to m) as input variables. This allows for the use of multiple temperatures and / or temperature gradients as input variables. Averaged values ​​or values ​​calculated from sensor data can also be used as virtual temperatures Tv and / or virtual temperature gradients Tg. v can be used as input data.

[0065] Fig. Figure 3 shows this in an exemplary and schematic way for a neural network 16. The temperature model 12 can be configured to output compensation parameters dx, dy, dz for the uncompensated coordinate measurements as output variables ( Fig. 3).

[0066] Uncompensated measured values ​​x1, y1, and z1 and / or the axis positions of the machine axes X, Y, Z, and C can also be used as input variables. Providing these uncompensated measured values ​​x1, y1, and z1 and / or the axis positions of the machine axes X, Y, Z, and C as input variables serves to account for the influence of the position of the measured point on the required compensation.

[0067] As already mentioned, the geometric temperature behavior of the coordinate measuring machine 2 is not homogeneous. For a measuring point M1 (see Fig. 2) Therefore, different values ​​are required for temperature compensation than for a measuring point M2, which is recorded within a coverable measuring volume V at a position M2 away from M1.

[0068] The number of neurons and the hidden layer, as well as the transfer and activation functions of the respective neural network, can be adapted to the application, whereby all present representations of all figures are purely exemplary and schematic.

[0069] Temperature model 12 is adaptive and can be adjusted based on a database.

[0070] In its default state, the temperature model 12 has a basic temperature compensation, which is improved by test results obtained at the end user's site where the coordinate measuring machine is installed. For this purpose, measurement results from reference measurements and / or calibrations are generated, in particular by measuring standards such as a spherical standard or the like. Using this enhanced training data, the neural network 16 can, for example, be further trained to generate the individual temperature compensation at the end user's site. It may be necessary to repeatedly perform the reference measurements at the end user's site under different temperature conditions until the respective temperature model 12 achieves a predefined model accuracy.

[0071] The base temperature compensation may have been determined on the basis of tests under laboratory conditions at a location different from the installation location of the coordinate measuring machine at the end user's site, such as a climate chamber or the like, on the coordinate measuring machine and / or a coordinate measuring machine of identical construction.

[0072] Fig. Figure 4 shows an exemplary and schematic representation of another neural network 18. For example, it can be provided that one neural network 18 is trained for each coordinate direction, with dx being shown as an example of the output variable.

[0073] Fig. Figure 5 shows another temperature model 12, in which both a neural network 20 and a characteristic map 22 are used. Alternatively, several neural networks and several characteristic maps can be used. The neural network 20 serves to improve the characteristic map 22. The compensation parameters dx, dy, dz are determined only using the characteristic map 22 and not using the neural network 20.

[0074] Fig. Figure 6 shows another temperature model 12, which uses both a neural network 24 and a regression model 26. Alternatively, multiple neural networks and multiple regression models can be used. The neural network 24 serves to improve the regression model 26. The compensation parameters are determined only using the regression model 26 and not using the neural network 24.

[0075] Therefore, according to the invention, a method for setting up temperature compensation for a coordinate measuring machine 2 can be specified, comprising the following method steps: (A) providing the database; (B) adapting the temperature model 12 based on the database, wherein the database comprises data from identical coordinate measuring machines, and in particular, data is provided via a network connection ( Fig. 7).

[0076] Furthermore, process step (B) may include: providing a neural network as a temperature model and improving the neural network at the machine's installation location at the end user's site.

[0077] Alternatively, process step (B) may include: providing a neural network to improve a characteristic map and / or a regression model, wherein the characteristic map and / or the regression model serve to generate the compensation parameters and wherein the neural network does not serve to generate the compensation parameters.

Claims

[1] Coordinate measuring machine, - with controlled machine axes (X, Y, Z, C) for performing measuring movements for component measurement, - with at least one of the machine axes (X, Y, Z, C) held and movable by means of at least one of the machine axes (X, Y, Z, C), such as a tactile measuring device (4) or an optical measuring device (6), for acquiring uncompensated coordinate measurement values ​​(x1, y1, z1) on a component to be measured (8), - with a device (10) for temperature compensation of the uncompensated coordinate measurements (x1, y1, z1) using a temperature model (12), - wherein the temperature model (12) is configured to process one temperature measurement (T1, T2) or several temperature measurements (T1, T2) as input variables, - where the temperature model has compensation parameters (dx, dy, dz) for the uncompensated coordinate measurements and / or compensated coordinate measurements as output variables, characterized by , - that the temperature model (12) is adaptive and can be adjusted based on a data basis. [2] Coordinate measuring machine according to claim 1, characterized by , that - the temperature model has a basic temperature compensation, - wherein the basic temperature compensation was determined on the basis of tests under laboratory conditions at a location different from the installation location of the coordinate measuring machine, such as a climate chamber or the like, on the coordinate measuring machine and / or an identical coordinate measuring machine, and - the temperature model includes an individual temperature compensation that supplements, modifies or replaces the basic temperature compensation and has been determined on the basis of one or more reference measurements at the installation site of the coordinate measuring machine. [3] Coordinate measuring machine according to one of the preceding claims, characterized by , that the temperature model (12) is set up to process one measured temperature gradient (Tg1, Tg2) or several measured temperature gradients (Tg1, Tg2) as inputs. [4] Coordinate measuring machine according to claim 3, characterized by , that the basic temperature compensation has compensation parameters for static temperature levels (T1, T2) and in particular has compensation parameters for temperature gradients (Tg1, Tg2). [5] Coordinate measuring machine according to claim 3 or claim 4, characterized by, that the individual temperature compensation has machine-specific adapted compensation parameters for temperature gradients (Tg1, Tg2), in particular that the individual temperature compensation has machine-specific adapted compensation parameters for both temperature gradients (Tg1, Tg2) and static temperature levels (T1, T2). [6] Coordinate measuring machine according to one of the preceding claims, characterized by , that the temperature model (12) has one or more of the following models: characteristic map, AI model, regression model. [7] Coordinate measuring machine according to claim 6, characterized by , that the temperature model (12) has a neural network. [8] Coordinate measuring machine according to claim 7, characterized by , that the temperature model (12) has a characteristic map, wherein the neural network is set up to adapt the characteristic map. [9] Coordinate measuring machine according to one of the preceding claims, characterized by , that the temperature model (12) is set up to process uncompensated coordinate measurements (x1, x2, x3) as input variables. [10] Coordinate measuring machine according to one of the preceding claims, characterized by that the database contains measurement results from reference measurements and / or calibrations, in particular standards such as a spherical standard or the like. [11] Coordinate measuring machine according to one of the preceding claims, characterized by , that Each machine axis (X, Y, Z, C) is assigned axis-specific compensation parameters. and / or Each coordinate direction is assigned coordinate direction-specific compensation parameters. and / or The coordinate measurements are compensated vectorially. [12] Method for setting up a temperature compensation of a coordinate measuring machine according to one of the preceding claims, comprising the method steps: - Providing the database; - Adjusting the temperature model based on the data. [13] Method according to claim 12, characterized by , that the database contains data from identical coordinate measuring machines, with data being provided in particular via a network connection.

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