Method for approaching a microcontact needle along an approach direction to an approach target object and particle beam microscope
The particle beam microscope method captures multiple images to control the approach direction, preventing damage to microcontact needles and optimizing contact speed, addressing the fragility and time issues of existing methods.
DE102024135697A1Pending Publication Date: 2026-06-03CARL ZEISS MICROSCOPY GMBH
Patent Information
- Authority / Receiving Office
- DE · DE
- Patent Type
- Applications
- Current Assignee / Owner
- CARL ZEISS MICROSCOPY GMBH
- Filing Date
- 2024-12-02
- Publication Date
- 2026-06-03
Smart Images
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Abstract
The present invention relates to a method for approaching a microcontact needle along an approach direction to an approach target object. The approach target object is, in particular, another microcontact needle or a component for an electrical or electronic circuit. The method uses a particle beam microscope. The particle beam microscope comprises a positioning device configured to move the microcontact needle along the approach direction relative to the approach target object. The method includes: capturing multiple images, each depicting the approach target object and the microcontact needle, from different viewing directions using the particle beam microscope.The method further includes: controlling the positioning device based on the recorded images such that the positioning device either moves the microcontact needle along the approach direction relative to the approach target object or maintains a positioning of the microcontact needle along the approach direction relative to the approach target object.
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