Environmental monitoring device, environmental monitoring system and environmental monitoring procedure

Abstract

Environmental monitoring device (100), environmental monitoring system, and environmental monitoring procedure. The environmental monitoring device (100) comprises a radio frequency identification (RFID) tag (10), a radio frequency (RF) reader module (20), and an investigation circuit (30). The RF identification tag (10) is configured to transmit air quality information about the interior of a target device (200). The RF reader module (20) is configured to receive and read the air quality information. The investigation circuit (30) is configured to determine whether the air quality information meets an air quality standard. If the air quality information does not meet the air quality standard, an alert message is generated.

Description

CROSS-REFERENCE TO RELATED PATENT APPLICATION

[0001] This application claims the priority benefit of Taiwanese patent application No. 113137481, filed on October 1, 2024. The entire content of the above-mentioned application is hereby incorporated by reference.

[0002] In the description of this disclosure / invention, certain references, which may include patents, patent applications, and various publications, may be cited and discussed. The citation and / or discussion of such references serves only to clarify the description of the present disclosure / invention and does not constitute an acknowledgment that any such reference represents "prior art" for the disclosure / invention described herein. All references cited and discussed in this description are hereby incorporated in their entirety and to the same extent as if each reference had been individually incorporated by reference. AREA OF REVELATION / INVENTION

[0003] The present disclosure / invention relates to a monitoring equipment and a monitoring method and in particular to an environmental monitoring device, an environmental monitoring system and an environmental monitoring method. BACKGROUND OF THE REVELATION / INVENTION

[0004] If the relative humidity (e.g., relative air humidity) in a wafer transfer box is too high, this can cause oxidation, corrosion, a short circuit, or a current leakage in the semiconductor wafers inside the wafer transfer box (e.g., a Front Opening Unified Pod, FOUP), thereby reducing the performance and lifetime of the semiconductor wafers.

[0005] Currently, the conventional method used to control the relative humidity (e.g., relative humidity) within the wafer transfer box involves the periodic injection of gas, such as clean, dry air or nitrogen, into the interior of the wafer transfer box via an air conditioning system to lower the relative humidity (e.g., relative humidity). However, the disadvantage of this conventional method is that the air conditioning system can continue to introduce gas to reduce the relative humidity even when it is normal inside the wafer transfer box, resulting in unnecessary gas waste. Alternatively, if the relative humidity (e.g.,If the relative humidity is already too high before the gas is introduced, defects may have already formed on the semiconductor wafers. EXPLANATION OF THE REVELATION / INVENTION

[0006] In response to the aforementioned technical shortcomings, the present disclosure / invention provides an environmental monitoring device, an environmental monitoring system and an environmental monitoring method for effectively improving the problems associated with conventional methods.

[0007] In one aspect, the present disclosure / invention provides an environmental monitoring device comprising a high-frequency identification tag, a high-frequency reading module, and a detection circuit. The high-frequency identification tag is configured to transmit air quality information about the interior of a target device. The high-frequency reading module is configured to read (e.g., extract) the air quality information. The detection circuit is configured to determine whether the air quality information meets an air quality standard. If the air quality information does not meet the air quality standard, a warning message (e.g., an alert) is generated.

[0008] In another aspect, the present disclosure / invention provides an environmental monitoring system comprising a targeting device, a high-frequency identification tag, a high-frequency reading module, and a detection circuit. The high-frequency identification tag is configured to transmit air quality information about the interior of the targeting device. The high-frequency reading module is configured to read (e.g., extract) the air quality information. The detection circuit is configured to determine whether the air quality information meets an air quality standard. If the air quality information does not meet the air quality standard, a warning message (e.g., an alert) is generated.

[0009] In yet another aspect, the present disclosure / invention provides an environmental monitoring method which comprises: transmitting air quality information via a high-frequency identification tag to the interior of a target device, reading (e.g., extracting) the air quality information via a high-frequency reading module, determining, via a detection circuit, whether the air quality information meets an air quality standard, and generating a warning message (e.g., a warning notification) if the air quality information does not meet the air quality standard.

[0010] An advantageous effect of the present disclosure / invention is that the environmental monitoring device, environmental monitoring system, and environmental monitoring method provided by the present disclosure / invention allow the relative humidity (e.g., relative air humidity) within the target device to be monitored in real time and the precise moment when the relative humidity (e.g., relative air humidity) is too high to be accurately identified. This enables the timely introduction of gas to reduce the relative humidity (e.g., relative air humidity) within the target device, thereby avoiding unnecessary gas waste and reducing the possibility of defects due to high relative humidity (e.g., high relative air humidity).

[0011] These and other aspects of the present disclosure / invention will become apparent from the following description of the embodiment in conjunction with the following drawings and their captions, although variations and modifications thereof may be made without deviating from the content and scope of the novel concepts of the disclosure / invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] The described embodiments can be better understood by referring to the following description and the accompanying drawings, in which: Fig. 1 a schematic view of an environmental monitoring system according to a first embodiment of the present disclosure / invention, Fig. 2. A flowchart of an environmental monitoring procedure of the in Fig. The environmental monitoring system shown in point 1 is, Fig. 3 a schematic view of the environmental monitoring system according to a second embodiment of the present disclosure / invention is, Fig. 4. A flowchart of the environmental monitoring procedure of the [organization / institution] Fig. The environmental monitoring system shown in section 3 is, Fig. 5 a schematic view of the environmental monitoring system according to a third embodiment of the present disclosure / invention, and Fig. 6. A flowchart of the environmental monitoring procedure of the [organization / institution] Fig. The environmental monitoring system shown in section 5 is shown. DETAILED DESCRIPTION OF EXEMPLARY EXECUTION FORMS

[0013] The present disclosure / invention is further described in the following examples, which are intended only for illustrative purposes, as numerous modifications and variations therein (e.g., therein) will be apparent to a person skilled in the art. Identical numbers in the drawings denote identical components across all views. As in the description herein and throughout the claims that follow, unless the context clearly requires otherwise, the meaning of "a" and "the" implies the plural, and the meaning of "in" implies "in" and "on / at". Titles or subtitles may be used herein for the convenience of the reader, but this shall not affect the scope of the present disclosure / invention.

[0014] The terms used herein generally have their usual technical meanings. In case of conflict, the present document, including all definitions given herein, shall prevail. The same part (e.g., "the same") may be expressed in more than one way. Alternative formulations and synonyms may be used for all terms discussed herein, and no particular significance should be attached to whether a term is further explained or discussed herein. The mention of one or more synonyms does not preclude the use of other synonyms. The use of examples at any point in this description, which includes examples of any terms, is merely illustrative and in no way limits the scope and meaning of the present disclosure / invention or of any term mentioned as an example.Likewise, the present disclosure / invention is not limited to the various embodiments given herein. Numbering terms, such as "first / first / first", "second / second / second", or "third / third / third", may be used to describe different components, signals, or the like, merely to distinguish one component / signal from another, and are not intended, nor should they be construed, as imposing any material limitations on the components, signals, or the like.

[0015] Fig. Figure 1 is a schematic view of an environmental monitoring system according to a first embodiment of the present disclosure / invention. With reference to Fig. 1 The environmental monitoring system comprises an environmental monitoring device 100, a targeting device 200, and a backend monitoring center 300. In the present embodiment, the targeting device 200 is a wafer transfer box or a front-opening unified pod (FOUP, e.g., a front-opening unified transport container), but the present disclosure / invention is not limited thereto. In other embodiments, the targeting device 200 may be a server rack or a battery box (e.g., a battery box).

[0016] The wafer transfer box has an inlet 2001, an outlet 2002, and multiple wafer slots 2003 at different height positions. The inlet 2001 is used to introduce clean, dry air or nitrogen, and each of the wafer slots 2003 is designed to hold (e.g., pick up) a wafer.

[0017] The environmental monitoring device 100 comprises a radio frequency identification (RFID) tag 10, a radio frequency (RF) reader module 20, and a detection circuit 30. The RF identification tag 10 can be a passive RF identification tag, and the detection circuit 30 can be an embedded control device, an application-specific integrated circuit (ASIC), a field-programmable gate array (FPGA), a microcontroller unit (MCU), a system-on-a-chip (SOC), or any combination thereof.

[0018] The high-frequency identification tag 10 is located below one of the lowest wafer slots 2003. The high-frequency read module 20 and the detection circuit 30 are both located outside the targeting device 200. The high-frequency read module 20 comprises a high-frequency antenna 201 and a high-frequency read circuit 202, the high-frequency antenna 201 being electrically connected to the high-frequency read circuit 202 by a high-frequency cable.

[0019] When the high-frequency antenna 201 receives an external high-frequency signal, it transmits the signal to the high-frequency reading circuit 202, which reads (e.g., extracts) data from the signal. The high-frequency reading circuit 202 can also generate a data-embedded high-frequency signal (e.g., a high-frequency signal with embedded data) and transmit this signal through the high-frequency antenna 201.

[0020] The high-frequency reading circuit 202 is electrically connected to the investigation circuit 30 via an Ethernet cable, and the investigation circuit 30 is connected to the backend monitoring center 300 via a network connection.

[0021] The high-frequency identification tag 10 is set up to detect air quality information inside (i.e., from an interior of) the wafer transport box, and the detection circuit 30 determines whether the air quality information meets an air quality standard.

[0022] The air quality information includes an oxygen concentration. The high-frequency identification tag 10 comprises a gas concentration detection circuit 101, a control circuit 102, a high-frequency signal processing circuit 103, a light-emitting element 104, and a high-frequency antenna 105. The control circuit 102 is electrically connected to the gas concentration detection circuit 101, the high-frequency signal processing circuit 103, and the light-emitting element 104. The high-frequency signal processing circuit 103 is electrically connected to the high-frequency antenna 105. The control circuit 102 can be an embedded control device, an application-specific integrated circuit (ASIC), a field-programmable gate array (FPGA), a microcontroller unit (MCU)."microcontroller unit", a system on a chip (SoC) or any combination thereof.

[0023] In other embodiments, the high-frequency identification tag 10 can be an active high-frequency identification tag with a built-in battery.

[0024] The gas concentration detection circuit 101 is an oxygen concentration sensor configured to detect the oxygen concentration within the wafer transfer box and to output the oxygen concentration to the control circuit 102. The control circuit 102 is configured to transmit the oxygen concentration to the high-frequency signal processing circuit 103.

[0025] The high-frequency signal processing circuit 103 is configured to generate a high-frequency signal embedded with the oxygen concentration (e.g., in which / which the oxygen concentration is embedded) and to transmit the high-frequency signal through the high-frequency antenna 105. The high-frequency antenna 201 of the high-frequency reading module 20 is configured to receive the high-frequency signal from the high-frequency identification tag 10 and to transmit the high-frequency signal to the high-frequency reading circuit 202.

[0026] The high-frequency reading circuit 202 is set up to read (e.g., extract) the oxygen concentration in the high-frequency signal and to transmit the oxygen concentration to the detection circuit 30.

[0027] The detection circuit 30 is set up to calculate the nitrogen concentration inside (i.e. from the interior of) the wafer transport box based on the oxygen concentration and to determine whether the nitrogen concentration inside the wafer transport box is less than a nitrogen concentration threshold (e.g. 94%).

[0028] When the detection circuit 30 detects that the nitrogen concentration inside the wafer transfer box is lower than the nitrogen concentration threshold, the detection circuit 30 generates an alarm signal (e.g., a warning signal) and transmits the alarm signal to the backend monitoring center 300. Simultaneously, the detection circuit 30 activates the light-emitting element 104 of the high-frequency identification tag 10 to emit light (e.g., so that it emits light), with the alarm signal and the light from the light-emitting element 104 serving as two different warning messages (e.g., alerts). In other words, as used herein, the term "warning message" refers broadly to any alarm information and can be a transmittable signal, a visual message (e.g., a visual alert), an audible signal, or a visual signal such as sound (e.g., a warning signal).exhibiting sound) or light, or a combination thereof, but is not limited to that.

[0029] In other embodiments, the light-emitting element 104 of the high-frequency identification tag 10 can be replaced by a buzzer. When the detection circuit 30 determines that the nitrogen concentration is lower than the nitrogen concentration threshold, the detection circuit 30 activates the buzzer of the high-frequency identification tag 10 to emit sound (e.g., a tone), the sound (e.g., the tone) serving as a warning message (e.g., a warning message).

[0030] In this way, whether it is the management personnel at (e.g. in) the backend monitoring center 300 or the management personnel in the factory, they can know that the nitrogen concentration in the wafer transport box at (e.g. on) the production line is currently too low by seeing the warning message.

[0031] The management staff can then check whether a leakage situation occurs in the wafer transport box.

[0032] Fig. 2 is a flowchart of an environmental monitoring procedure of the in Fig. 1 environmental monitoring system shown. With reference to Fig. 1 and Fig. 2 In step S201, the gas concentration detection circuit 101 outputs the oxygen concentration inside the wafer transfer box to the control circuit 102, where the gas concentration detection circuit 101 is an oxygen concentration sensor.

[0033] In step S202, the control circuit 102 reads the oxygen concentration (e.g., it reads it out) and transmits the oxygen concentration to the high-frequency signal processing circuit 103.

[0034] In step S203, the high-frequency signal processing circuit 103 transmits a high-frequency signal, which is embedded with the oxygen concentration (e.g. in which / which the oxygen concentration is embedded), through the high-frequency antenna 105.

[0035] In step S204, the high-frequency reading module 20 reads the oxygen concentration in the high-frequency signal (e.g., it reads it out) and transmits the oxygen concentration to the detection circuit 30.

[0036] In step S205, the detection circuit 30 calculates the nitrogen concentration inside the wafer transfer box based on the oxygen concentration and determines whether the nitrogen concentration is lower than the nitrogen concentration threshold.

[0037] If the detection circuit 30 determines that the nitrogen concentration is lower than the nitrogen concentration threshold, (then) the procedure continues with step S206.

[0038] If the detection circuit 30 determines that the nitrogen concentration is not less than the nitrogen concentration threshold, (then) the procedure returns to step S201.

[0039] In step S206, the investigation circuit 30 transmits an alarm signal to the backend monitoring center 300 and transmits a start command to the high-frequency reading module 20, where the alarm signal represents a warning message (e.g. a warning message).

[0040] In step S207, the high-frequency reading module 20 reads the start command (e.g., it reads it out) and transmits a high-frequency signal which is embedded with the start command (e.g., in which / which the start command is embedded).

[0041] In step S208, the high-frequency antenna 105 of the high-frequency identification tag 10 receives the high-frequency signal from the high-frequency reading module 20 and transmits the high-frequency signal to the high-frequency signal processing circuit 103.

[0042] In step S209, the high-frequency signal processing circuit 103 extracts the start command from the high-frequency signal and transmits the start command to the control circuit 102.

[0043] In step S210, the control circuit 102 controls the light-emitting element 104 of the high-frequency identification tag 10 to emit light (e.g., so that it emits light) based on the start command, with the light from the light-emitting element 104 serving as a further warning message (e.g., as a further warning message).

[0044] Specifically, the gas concentration detection circuit 101 is used to detect the oxygen concentration inside the wafer transport box, and the detection circuit 30 calculates the nitrogen concentration inside the wafer transport box based on the oxygen concentration. If the detection circuit 30 determines that the nitrogen concentration inside the wafer transport box is less than 94%, this indicates that there may be a potential leakage situation.

[0045] Fig. Figure 3 is a schematic view of the environmental monitoring system according to a second embodiment of the present disclosure / invention. Referring to Fig. 3, compared to Fig. 1, the difference is that the gas concentration detection circuit 101 of the high frequency identification tag 10 is replaced by a relative humidity detection circuit (e.g. a relative humidity detection circuit) 106, which is electrically connected to the control circuit 102.

[0046] The high-frequency identification tag 10 measures the relative humidity (e.g., relative air humidity) inside the wafer transport box by means of the relative humidity detection circuit 106, and the high-frequency signal processing circuit 103 of the high-frequency identification tag 10 is configured to generate a high-frequency signal which embeds the relative humidity (e.g., in which / which the relative humidity is embedded), and to transmit the high-frequency signal through the high-frequency antenna 105.

[0047] The high-frequency reading module 20 is set up to read the relative humidity in the high-frequency signal (e.g. to read it out) and to transmit the relative humidity to the detection circuit 30.

[0048] The detection circuit 30 is configured to determine whether the relative humidity is greater than a relative humidity threshold (e.g., 6%). If the detection circuit 30 determines that the relative humidity is greater than the relative humidity threshold, it transmits an alarm signal (e.g., a warning signal) to the backend monitoring center 300 and activates the light-emitting element 104 of the high-frequency identification tag 10 to emit light (e.g., so that it emits light), with the alarm signal and the light from the light-emitting element 104 serving as two different warning messages (e.g., alerts).

[0049] In this way, whether it's management personnel at (e.g., in) the backend monitoring center 300 or management personnel on the factory floor, they can know that the relative humidity inside the wafer transport box on (e.g., on) the production line is currently too high by seeing the warning message. The management personnel can then introduce clean, dry air into the interior of the wafer transport box to lower the relative humidity, thus preventing oxidation, corrosion, or short-circuiting in the wafers due to high relative humidity.

[0050] Fig. 4 is a flowchart of the environmental monitoring procedure of the in Fig. 3 environmental monitoring systems shown. The environmental monitoring procedure from Fig. 4 contains steps S401 to S410. Compared to Fig. 2. The differences are described below, and the similar steps (S406-S410) are not described here.

[0051] In step S401, the relative humidity detection circuit 106 outputs the relative humidity inside the wafer transfer box to the control circuit 102.

[0052] In step S402, the control circuit 102 transmits the relative humidity to the high-frequency signal processing circuit 103.

[0053] In step S403, the high-frequency signal processing circuit 103 transmits a high-frequency signal, which is embedded with the relative humidity (e.g. in which / which the relative humidity is embedded), through the high-frequency antenna 105.

[0054] In step S404, the high-frequency reading module 20 reads the relative humidity in the high-frequency signal (e.g., it reads it out) and transmits the relative humidity to the detection circuit 30.

[0055] In step S405, the detection circuit 30 determines whether the relative humidity is greater than the relative humidity threshold.

[0056] If the detection circuit 30 determines that the relative humidity is greater than the relative humidity threshold, (then) the procedure continues with step S406.

[0057] If the detection circuit 30 determines that the relative humidity is not greater than the relative humidity threshold, (then) the procedure returns to step S401.

[0058] Fig. Figure 5 is a schematic view of the environmental monitoring system according to a third embodiment of the present disclosure / invention. The difference between Fig. 5 and Fig. 1 as well as Fig. 3 (e.g., and the figures) Fig. 1 and Fig. 3) consists of the fact that the high-frequency identification tag 10 in Fig. 5 comprising both the gas concentration detection circuit 101 and the relative humidity detection circuit 106, wherein the gas concentration detection circuit 101 and the relative humidity detection circuit 106 are electrically connected to the control circuit 102.

[0059] The high-frequency signal processing circuit 103 of the high-frequency identification tag 10 is set up to generate a high-frequency signal which is embedded with the oxygen concentration and the relative humidity (e.g. in which / which the oxygen concentration and the relative humidity are embedded) and to transmit the high-frequency signal through the high-frequency antenna 105.

[0060] The high-frequency reading circuit 202 reads the oxygen concentration and the relative humidity in the high-frequency signal (e.g., it reads them out).

[0061] The detection circuit 30 calculates the nitrogen concentration within the wafer transfer box based on the oxygen concentration and determines whether the nitrogen concentration is lower than the nitrogen concentration threshold and whether the relative humidity is higher than the relative humidity threshold. If the nitrogen concentration is lower than the nitrogen concentration threshold and / or the relative humidity is higher than the relative humidity threshold, the detection circuit 30 transmits an alarm signal (e.g., a warning signal) to the backend monitoring center 300 and controls the light-emitting element 104 of the high-frequency identification tag 10 to emit light (e.g., so that it emits light).

[0062] Fig. 6 is a flowchart of the environmental monitoring procedure of the in Fig. 5 environmental monitoring systems shown. The environmental monitoring procedure from Fig. 6 contains steps S601 to S616. Compared to Fig. 2 and Fig. The differences are described as follows in section 4.

[0063] In step S601, the gas concentration detection circuit 101 and the relative humidity detection circuit 106 output the oxygen concentration and the relative humidity inside the wafer transport box to the control circuit 102 in an associated manner.

[0064] In step S602, the control circuit 102 transmits the oxygen concentration and the relative humidity to the high-frequency signal processing circuit 103.

[0065] In step S603, the high-frequency signal processing circuit 103 transmits a high-frequency signal, which is embedded with the oxygen concentration and the relative humidity (e.g. in which / which the oxygen concentration and the relative humidity are embedded), through the high-frequency antenna 105.

[0066] In step S604, the high-frequency reading module 20 reads the oxygen concentration and the relative humidity in the high-frequency signal (e.g., it reads them out) and transmits the oxygen concentration and the relative humidity to the detection circuit 30.

[0067] In step S605, the detection circuit 30 calculates the nitrogen concentration inside the wafer transfer box based on the oxygen concentration and determines whether the nitrogen concentration is lower than the nitrogen concentration threshold.

[0068] If the detection circuit 30 determines that the nitrogen concentration is lower than the nitrogen concentration threshold, (then) the procedure continues with step S606.

[0069] If the detection circuit 30 determines that the nitrogen concentration is not less than the nitrogen concentration threshold, (then) the procedure continues with step S611.

[0070] In step S611, the detection circuit 30 determines whether the relative humidity is greater than the relative humidity threshold.

[0071] If the detection circuit 30 determines that the relative humidity is greater than the relative humidity threshold, the procedure proceeds to step S612. If the detection circuit 30 determines that the relative humidity is not greater than the relative humidity threshold, the procedure returns to step S601.

[0072] In step S612, the detection circuit 30 transmits an alarm signal (e.g. a warning signal) to the backend monitoring center 300 and transmits a start command to the high-frequency reading module 20.

[0073] In step S613, the high-frequency reading module 20 reads the start command and transmits a high-frequency signal that embeds the start command (e.g., in which / which the start command is embedded).

[0074] In step S614, the high-frequency antenna 105 of the high-frequency identification tag 10 receives the high-frequency signal from the high-frequency reading module 20 and transmits the high-frequency signal to the high-frequency signal processing circuit 103.

[0075] In step S615, the high-frequency signal processing circuit 103 extracts the start command from the high-frequency signal and transmits the start command to the control circuit 102.

[0076] In step S616, the control circuit 102 controls the light-emitting element 104 of the high-frequency identification tag 10 to emit light (e.g., so that it emits light) based on the start command (e.g., the control circuit 102 controls the light-emitting element 104 of the high-frequency identification tag 10 based on the start command to emit light (e.g., so that it emits light)).

[0077] In other embodiments, the control circuit 102 may be omitted, and the detection circuit 30 may be located within the high-frequency identification tag 10. The detection circuit 30, located within the targeting device 200, is configured to calculate the air quality information (e.g., nitrogen concentration and / or relative humidity) of the interior of the targeting device 200 and to determine whether the air quality information meets the air quality standard. If the air quality information does not meet the air quality standard, the detection circuit 30 either generates a warning message (e.g., an alert) or controls other components to generate a warning message (e.g., sound or light).The detection circuit 30 transmits the air quality detection result to the high-frequency reading module 20 located outside the target device 200. The high-frequency reading module 20 is configured to read the air quality detection result and to transmit the detection result to the backend monitoring center 300.

[0078] In other embodiments, the control circuit 102 of the high-frequency identification tag 10, which is arranged in the targeting device 200, is configured to calculate the air quality information from the interior (e.g., the inside) of the targeting device 200. The high-frequency identification tag 10 transmits the air quality information via the high-frequency antenna 105 to the high-frequency reading module 20, which is arranged outside the targeting device 200. The high-frequency reading module 20 reads the air quality information (e.g., extracts it) and transmits the air quality information to the detection circuit 30, which is also arranged outside the targeting device 200. The detection circuit 30 is configured to determine whether the air quality information meets the air quality standard. If the air quality information does not meet the air quality standard, the detection circuit 30 transmits an alarm signal (e.g.,a warning signal) to the backend monitoring center 300 or controls other components to generate a warning message (e.g. a warning message) (e.g. so that they generate a warning message (e.g. a warning message)). [Advantages of the embodiments]

[0079] An advantageous effect of the present disclosure / invention is that the environmental monitoring device, environmental monitoring system, and environmental monitoring method provided by the present disclosure / invention allow the relative humidity (e.g., relative air humidity) within the target device to be monitored in real time and the precise moment when the relative humidity (e.g., relative air humidity) is too high to be accurately identified. This enables the timely introduction of gas to reduce the relative humidity (e.g., relative air humidity) within the target device, thereby avoiding unnecessary gas waste and reducing the possibility of defects due to high relative humidity (e.g., high relative air humidity).

[0080] The foregoing description of exemplary embodiments of the disclosure / invention is presented for illustrative purposes only and is not intended to be exhaustive or to limit the disclosure / invention to the exact forms disclosed. Many modifications and variations are possible in light of the above teaching.

[0081] The embodiments were selected and described to explain the principles of the disclosure / invention and its practical application, enabling another person skilled in the art to utilize the disclosure / invention and various embodiments with different (e.g., different) modifications suitable for the respective intended use. Alternative embodiments are apparent to a person skilled in the field to which the present disclosure / invention belongs, without any deviation from its content and scope. REFERENCE MARK LIST 100 Environmental monitoring device 200 Targeting device 2001 Admission 2002 Exit 2003 Wafer Slot 10 High-frequency identification tag 101 Gas Concentration Detection Circuit 102 Control circuit 103 High-frequency signal processing circuit 104 light-emitting element 105 High-frequency antenna 106 Relative Humidity Detection Circuit 20 High-frequency reading module 201 High-frequency antenna 202 High-frequency reading circuit 30 Investigation Circuit 300 Backend Monitoring Center

Claims

[1] Environmental monitoring device (100) comprising: a high-frequency identification tag (10) which is configured to transmit air quality information about an interior of a targeting device (200), a high-frequency reading module (20) which is configured to read the air quality information, and an investigation circuit (30) which is set up to determine whether the air quality information meets an air quality standard, If the air quality information does not meet the air quality standard, a warning message is generated. [2] Environmental monitoring device (100) according to claim 1, wherein the air quality information includes an oxygen concentration, the high-frequency identification tag (10) includes a gas concentration detection circuit (101) configured to output the oxygen concentration, and the detection circuit (30) is configured to calculate a nitrogen concentration based on the oxygen concentration, and is configured to determine whether the nitrogen concentration is less than a nitrogen concentration threshold, and wherein, if the nitrogen concentration is less than the nitrogen concentration threshold, the air quality information does not meet the air quality standard. [3] Environmental monitoring device (100) according to claim 1, wherein the air quality information includes a relative humidity, the high-frequency identification tag (10) includes a relative humidity detection circuit (106) configured to output the relative humidity, and the detection circuit (30) is configured to determine whether the relative humidity is greater than a relative humidity threshold, and wherein, if the relative humidity is greater than the relative humidity threshold, the air quality information does not meet the air quality standard. [4] Environmental monitoring device (100) according to claim 1, wherein the air quality information includes an oxygen concentration and a relative humidity, the radio frequency identification tag (10) includes a gas concentration detection circuit (101) and a relative humidity detection circuit (106), the gas concentration detection circuit (101) is configured to output the oxygen concentration, the relative humidity detection circuit (106) is configured to output the relative humidity, the detection circuit (30) is configured to calculate a nitrogen concentration based on the oxygen concentration, and is configured to determine whether the nitrogen concentration is less than a nitrogen concentration threshold, and the detection circuit (30) is further configured to determine whether the relative humidity is greater than a relative humidity threshold, and wherein,If the nitrogen concentration is lower than the nitrogen concentration threshold or the relative humidity is higher than the relative humidity threshold, the air quality information does not meet the air quality standard. [5] Environmental monitoring device (100) according to any one of claims 1 to 4, wherein the high-frequency identification tag (10) further comprises a light-emitting element (104) and the warning message comprises light emitted by means of the light-emitting element (104). [6] Environmental monitoring device (100) according to any one of claims 1 to 5, wherein the detection circuit (30) is arranged in the high-frequency identification tag (10) and the high-frequency reading module (20) is configured to read a detection result of the detection circuit (30) and is configured to transmit the detection result to a backend monitoring center (300). [7] Environmental monitoring system which includes: a targeting device (200), a high-frequency identification tag (10) which is arranged inside the targeting device (200) and which is configured to transmit air quality information about an interior of the targeting device (200), a high-frequency reading module (20) which is configured to read the air quality information, and an investigation circuit (30) which is set up to determine whether the air quality information meets an air quality standard, If the air quality information does not meet the air quality standard, a warning message is generated. [8] Environmental monitoring system according to claim 7, wherein the air quality information includes an oxygen concentration, the high-frequency identification tag (10) includes a gas concentration detection circuit (101) configured to output the oxygen concentration, and the detection circuit (30) is configured to calculate a nitrogen concentration based on the oxygen concentration, and is configured to determine whether the nitrogen concentration is less than a nitrogen concentration threshold, and wherein, if the nitrogen concentration is less than the nitrogen concentration threshold, the air quality information does not meet the air quality standard. [9] Environmental monitoring system according to claim 7, wherein the air quality information includes a relative humidity, the high-frequency identification tag (10) includes a relative humidity detection circuit (106) configured to output the relative humidity, and the detection circuit (30) is configured to determine whether the relative humidity is greater than a relative humidity threshold, and wherein, if the relative humidity is greater than the relative humidity threshold, the air quality information does not meet the air quality standard. [10] Environmental monitoring system according to claim 7, wherein the air quality information includes an oxygen concentration and a relative humidity, the radio frequency identification tag (10) includes a gas concentration detection circuit (101) and a relative humidity detection circuit (106), the gas concentration detection circuit (101) is configured to output the oxygen concentration, the relative humidity detection circuit (106) is configured to output the relative humidity, the detection circuit (30) is configured to calculate a nitrogen concentration based on the oxygen concentration, and is configured to determine whether the nitrogen concentration is less than a nitrogen concentration threshold, and the detection circuit (30) is further configured to determine whether the relative humidity is greater than a relative humidity threshold, and wherein,If the nitrogen concentration is lower than the nitrogen concentration threshold or the relative humidity is higher than the relative humidity threshold, the air quality information does not meet the air quality standard. [11] Environmental monitoring system according to any one of claims 7 to 10, wherein the high-frequency identification tag (10) further comprises a light-emitting element (104) and the warning message comprises light emitted by means of the light-emitting element (104). [12] Environmental monitoring system according to any one of claims 7 to 11, wherein the target device (200) is a wafer transfer box. [13] Environmental monitoring system according to any one of claims 7 to 12, wherein the detection circuit (30) is arranged in the high-frequency identification tag (10) and the high-frequency reading module (20) is configured to read a detection result of the detection circuit (30) and is configured to transmit the detection result to a backend monitoring center (300). [14] Environmental monitoring procedure which features: Transmitted, by means of a high-frequency identification tag (10), air quality information about an interior of a targeting device (200), Reading, using a high-frequency reading module (20), the air quality information, Determine, using an investigation circuit (30), whether the air quality information meets an air quality standard, and Generate a warning message if the air quality information does not meet the air quality standard. [15] Environmental monitoring method according to claim 14, wherein the air quality information includes an oxygen concentration and the detection circuit (30) calculates a nitrogen concentration based on the oxygen concentration, and wherein, if the detection circuit (30) determines that the nitrogen concentration is less than the nitrogen concentration threshold, the air quality information does not meet the air quality standard. [16] Environmental monitoring method according to claim 14, wherein the air quality information includes a relative humidity, and wherein, if the detection circuit (30) determines that the relative humidity is greater than a relative humidity threshold, the air quality information does not meet the air quality standard. [17] Environmental monitoring method according to claim 14, wherein the air quality information includes an oxygen concentration and a relative humidity and the detection circuit (30) calculates a nitrogen concentration based on the oxygen concentration, and wherein if the detection circuit (30) determines that the nitrogen concentration is less than the nitrogen concentration threshold and / or the relative humidity is greater than a relative humidity threshold, the air quality information does not meet the air quality standard. [18] Environmental monitoring method according to any one of claims 14 to 17, wherein the high-frequency identification tag (10) further comprises a light-emitting element (104) and the warning message comprises light emitted by means of the light-emitting element (104).

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