Sensor device and electronic device

The sensor device achieves distinct pressure sensitivity levels by using a thicker, more elastic surface layer and a control unit to set threshold values, addressing the challenge of separating touch and pressure sensing in capacitive sensors.

DE112024003175T5Pending Publication Date: 2026-06-03SONY GROUP CORP

Patent Information

Authority / Receiving Office
DE · DE
Patent Type
Applications
Current Assignee / Owner
SONY GROUP CORP
Filing Date
2024-06-03
Publication Date
2026-06-03

AI Technical Summary

Technical Problem

Existing capacitive sensors struggle to separate touch and pressure sensing functions effectively, with pressure sensitivity often being comparable to or lower than touch sensitivity, limiting the ability to divide pressure sensing into multiple levels.

Method used

A sensor device comprising a sensor film, a reference electrode layer, a deformation layer made of flexible material, a surface layer thicker than the deformation layer, and a control unit that sets threshold values to distinguish pressure sensitivity into multiple levels by using a thicker, more elastic surface layer.

Benefits of technology

The solution ensures that pressure sensitivity is significantly higher than touch sensitivity, allowing for clear differentiation and assignment of pressure sensing into several levels, enhancing the functionality of capacitive sensors.

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Abstract

A sensor device according to an embodiment of the present technology comprises: a sensor film; a reference electrode layer; a deformation layer; a surface layer; and a control unit. The sensor film is configured to detect a pressure distribution. The reference electrode layer is arranged to face a surface on one side of the sensor film and is connected to a reference potential. The deformation layer is arranged between the sensor film and the reference electrode layer and consists of a flexible material. The surface layer has an input operating surface, is arranged on a surface on the other side of the sensor film, and consists of a non-conductive material that is thicker than the deformation layer.Based on an output from the sensor film, the control unit sets a variety of threshold values ​​in several stages to determine the magnitude of the pressure force to be applied to the input operating surface.
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Description

Technical field

[0001] The present technology relates to sensor devices and electronic devices capable of detecting touch and pressure acts. State of the art

[0002] As a capacitive sensor capable of detecting touch and pressure actuations, patent literature 1 discloses, for example, a sensor comprising a ground electrode, a first electrode provided on the ground electrode and consisting of a plurality of first sub-electrodes, a deformation layer provided between the installation electrode and the first electrode, a second electrode provided on the first electrode and consisting of a plurality of second sub-electrodes, and a surface layer provided on the second electrode and having an operating surface. List of patent literature

[0003] Patent literature 1: WO 2018 / 025690 Disclosure of the invention Technical problem

[0004] In recent years, there has been a growing demand for capacitive sensors of this type, which feature a sensor structure capable of separating touch and pressure sensing functions, dividing the pressure sensing function into multiple levels, and assigning different functions according to the number of pressure actuations. To achieve this, it is necessary that the pressure sensitivity when a finger presses the operating surface is sufficiently higher than the touch sensitivity when a finger touches the operating surface.

[0005] In view of these circumstances, the present technology was developed to achieve a task of providing a sensor device and an electronic device capable of adjusting the pressure sensitivity to be sufficiently higher than the touch sensitivity, and of dividing the pressure sensing function into several levels. Solution to the problem

[0006] A sensor device according to an embodiment of the present technology comprises: a sensor film; a reference electrode layer; a deformation layer; a surface layer; and a control unit.

[0007] The sensor film is configured to be able to detect a pressure distribution.

[0008] The reference electrode layer is arranged so that it faces a surface on one side of the sensor film and is connected to a reference potential.

[0009] The deformation layer is located between the sensor film and the reference electrode layer and consists of a flexible material.

[0010] The surface layer has an input operating surface, is located on a surface on another side of the sensor film, and consists of a non-conductive material that is thicker than the deformation layer.

[0011] The control unit is able to perform, based on an output from the sensor film, a first detection process to detect a contact that a detection object makes with the input operating surface, and a second detection process to detect a pressure force that the detection object exerts on the input operating surface, wherein the control unit sets a variety of threshold values ​​to determine a magnitude of the pressure force over several stages in the second detection process.

[0012] Since the surface layer is designed to be thicker than the deformation layer, the pressure sensitivity can be sufficiently higher than the touch sensitivity, according to the present technology. Thus, the pressure sensing function can be divided into several levels.

[0013] The surface layer typically has a thickness that is two or several times greater than the thickness of the deformation layer.

[0014] The surface layer can consist of a material that has a higher modulus of elasticity than the deformation layer.

[0015] The sensor film can include a flexible base, and a sensor electrode layer comprising a variety of capacitive elements arranged in a matrix on a surface on one side of the base, and The multitude of capacitive elements each comprise a pair of comb-shaped electrodes facing each other in a direction parallel to the surface on one side of the base.

[0016] The sensor electrode layer can be arranged on the surface of the sensor film, with the surface facing the reference electrode layer.

[0017] The sensor device may also include a carrier layer.

[0018] The carrier layer is positioned between an installation surface on which the sensor device is installed and the reference electrode layer and consists of a flexible material.

[0019] The surface layer can include an outer layer area that forms the input operating surface, and an inner layer area that is located between the outer layer area and the sensor film and has a modulus of elasticity that differs from the modulus of elasticity of the outer layer area.

[0020] The deformation layer can include a first deformation layer, which is arranged on the surface on one side of the sensor film, and a second deformation layer, which is arranged between the first deformation layer and the reference electrode layer and has a modulus of elasticity that differs from the modulus of elasticity of the first deformation layer.

[0021] The surface layer can include a flat plate area that forms the input operating surface, and a leg area that is provided on a circumferential area of ​​the flat plate area and is supported by the installation surface on which the sensor device is installed.

[0022] The control unit may include a determination section that determines to which segment of a multitude of segments, defined according to the multitude of threshold values, the compressive force belongs.

[0023] The multitude of thresholds can include a first pressure sensitivity, which is a sensitivity that is two or more times higher than a touch sensitivity, which is a detection sensitivity of the sensor film, wherein the touch sensitivity is measured when the detection object comes into contact with the input operating surface, and a second pressure sensitivity, which is a sensitivity that is three or more times higher than the touch sensitivity.

[0024] The multitude of threshold values ​​may also include a third pressure sensitivity, which is a sensitivity that is four or more times higher than the touch sensitivity.

[0025] The control unit may also include a threshold setting section capable of individually setting the multitude of threshold values.

[0026] The threshold adjustment section can correct the first pressure sensitivity and the second pressure sensitivity in accordance with a range of actuation that the detection object performs on the input actuation surface.

[0027] An electronic device according to another embodiment of the present technology comprises a sensor device.

[0028] The sensor device comprises: a sensor film; a reference electrode layer; a deformation layer; a surface layer; and a control unit.

[0029] The sensor film is configured to be able to detect a pressure distribution.

[0030] The reference electrode layer is arranged so that it faces a surface on one side of the sensor film and is connected to a reference potential.

[0031] The deformation layer is located between the sensor film and the reference electrode layer and consists of a flexible material.

[0032] The surface layer has an input operating surface, is located on a surface on another side of the sensor film, and consists of a non-conductive material that is thicker than the deformation layer.

[0033] The control unit is able to perform, based on an output from the sensor film, a first detection process to detect a contact that a detection object makes with the input operating surface, and a second detection process to detect a pressure force that the detection object exerts on the input operating surface, wherein the control unit sets a variety of threshold values ​​to determine a magnitude of the pressure force over several stages in the second detection process. Brief description of the drawings [ Fig. 1] A schematic cross-sectional side view illustrates a configuration of a sensor device according to an embodiment of the present technology. [ Fig. 2] A schematic top view illustrates a configuration example of a sensor film in the sensor device. [ Fig. 3] A schematic top view illustrates a configuration example of detection areas in the sensor film. [ Fig. 4] A schematic cross-sectional side view illustrates another configuration example of the sensor device. [ Fig. 5] A schematic cross-sectional side view illustrates yet another configuration example of the sensor device. [ Fig. 6] A schematic cross-sectional side view illustrates another configuration example of the sensor device. [ Fig. 7] A schematic cross-sectional side view illustrates another configuration example of the sensor device. [ Fig. 8] A functional block diagram of a control unit that forms the sensor device. [ Fig. 9] An illustrative graph showing an example of a relationship between touch sensitivity and pressure sensitivity. [ Fig. 10] An illustrative graph showing a different relationship between the touch sensitivity and the pressure sensitivity to be set for the sensor device. [ Fig. 11] An experimental result of the dependence of the thickness of a surface layer relative to displacement sensitivity. [ Fig. 12] An experimental result of the dependence of a structure (thickness and flexibility) of the surface layer relative to load sensitivity. [ Fig. 13] A load-displacement curve when an input operating surface of the sensor device is pressed. [ Fig. 14] A graph showing a relationship between a displacement amount and the maximum sensitivity of the sensor device. [ Fig. 15] A schematic view illustrates operating areas on the input operating surface. [ Fig. 16] A graph showing an example of the respective load-displacement curves in the operating ranges. [ Fig. 17] Reference tables showing the respective relationships between the operating areas and correction coefficients. [ Fig. 18] An explanatory view illustrates the thicknesses of a deformation layer and the surface layer of the in Fig. 1 illustrated sensor device. [ Fig. 19] A simulation result that represents a relationship between a ratio of the thicknesses of the deformation layer and the surface layer and a maximum deformation rate of the deformation layer. Modes for carrying out the invention

[0034] The following describes embodiments of the present technology with reference to the drawings.

[0035] Fig. Figure 1 is a schematic cross-sectional side view illustrating a configuration of a sensor device 100 according to an embodiment of the present technology. Fig. Figure 2 is a schematic top view illustrating a configuration example of a sensor film 10 in the sensor device 100.

[0036] In Fig. 1 and Fig. 2. An X-axis direction and a Y-axis direction are directions parallel to an input operating surface S (hereinafter also referred to as directions in the plane), and a Z-axis direction is a direction perpendicular to the input operating surface S (hereinafter also referred to as a perpendicular direction). Additionally, in Fig. 1 an upper side of a front, on which an external force is exerted, and a lower side corresponds to a back, which is opposite this. [Overall configuration of the sensor device]

[0037] The sensor device 100 has a planar shape with a substantially rectangular flat-plate structure. The planar shape of the sensor device 100 is not limited, in particular as long as the planar shape is, if necessary, set in accordance with the shape of a location where the sensor device 100 is arranged. For example, the planar shape of the sensor device 100 can be polygonal shapes other than a square shape, a circular shape, an elliptical shape, or the like.

[0038] As in Fig. As illustrated in Figure 1, the sensor device 100 comprises a pressure sensor 1 and a control unit 60. The pressure sensor 1 consists of a laminate comprising the sensor film 10, a reference electrode layer 20, a deformation layer 30 and a surface layer 40.

[0039] The sensor device 100, for example, is configured as an input device to be installed in an electronic device. Examples of electronic devices include not only information processing devices, such as a tablet PC, and audio devices, such as headphones and earphones, but also imaging devices, such as a digital still camera and camcorder, and gaming devices. (Sensor film)

[0040] The sensor film 10, for example, consists of a flexible printed circuit board comprising a base 11 and a sensor electrode layer 12. The sensor electrode layer 12 comprises a plurality of capacitive elements (sensing areas 13) arranged in a matrix on a rear surface of the base 11, the rear surface facing the reference electrode layer 20, and is configured to be able to detect a pressure distribution to be applied to the input operating surface S.

[0041] As in Fig. As illustrated in Figure 2, the base 11 comprises a body region 111, which has a rectangular planar shape, and a discharge region 112, which extends outward from a portion of the perimeter of an edge of the body region 111. It should be noted that the planar shape of the base 11 is not limited to a rectangular shape, and any shape can be used. In particular, the materials of the base 11 are not limited, as long as the materials are flexible insulating materials; for example, polymer resins such as polyethylene terephthalate, polyimide, polycarbonate, and an acrylic resin are used.

[0042] The detection areas 13 correspond to nodes of the sensor film 10 and are arranged uniformly in a matrix at a predetermined vertical and horizontal interval (vertical: Y-axis direction and horizontal: X-axis direction). In the Fig. In the illustrated example 2, the number of detection areas 13 (number of nodes) is 9 × 9 (vertical × horizontal), that is, a total of 81. It should be noted that the number of detection areas 13 can be varied as needed. The detection areas 13 are formed by capacitive elements (detection elements) that are capable of detecting a variation in the distance to the reference electrode layer 20 as a variation in capacitance.

[0043] Fig. Figure 3 is a schematic top view illustrating a configuration example of the sensing areas 13. The sensing area 13 has an electrode pair comprising a comb-shaped pulse electrode 281 and a comb-shaped sensing electrode 282, which face each other in a direction parallel to the rear surface of the base 11 (Y-axis direction in Fig. 3) The pulse electrode 281 and the detection electrode 282 are arranged such that their respective comb teeth face each other. The detection areas 28 are each formed by a region (node ​​region) in which comb teeth are arranged on a different side to penetrate gaps between comb teeth on one side.

[0044] The pulse electrodes 281 are each connected to a wiring area 281a extending in the Y-axis direction, and the sensing electrodes 282 are each connected to a wiring area 282a extending in the X-axis direction. Wiring area 281a is located on the rear surface of the base 11 in the X-axis direction, and wiring area 282a is located on a front surface of the base 11 in the Y-axis direction. The sensing electrodes 282 are each electrically connected to wiring area 282a via through-holes 283 provided by the base 29.

[0045] Alternatively, both wiring area 281a and wiring area 282a can be formed on the rear surface of the base 11, and the intersecting areas between them can be isolated from each other, for example, by using bridging elements. When the pulse electrode 281 (wiring area 281a) and the sensing electrode 282 (wiring area 282a) are formed on the rear surface of the base 11 (the surface facing the reference electrode layer 20), the distance between each of the electrodes 281 and 282 and the input operating surface S increases by one thickness of the base 11. Thus, the touch sensitivity can be suppressed to be low relative to the pressure sensitivity. It should be noted that the touch sensitivity and pressure sensitivity are described below.

[0046] The sensor electrode layer 30 may include ground wires. The ground wires are provided, for example, in an outer circumferential region of the sensor electrode layer 12 or in parts where the wiring regions 281a and 282a run along the ground wires.

[0047] It should be noted that the detection area 13 does not necessarily have to be structured as in the example described above, and any structure can be used. For example, the sensor electrode layer 12 can consist of a laminate of a first electrode film with a grid-like first electrode pattern extending in the X-axis direction, and a second electrode film with a grid-like second electrode pattern extending in the Y-axis direction. In this case, the detection areas 13 are formed at the intersections between the first and second electrode patterns. (Reference electrode layer)

[0048] The reference electrode layer 20 is arranged such that it faces a surface on one side (back surface) of the sensor film 10. The reference electrode layer 20 is connected to a reference potential. In this embodiment, the reference electrode layer 20 is a so-called ground electrode and is connected to a ground potential as the reference potential. The reference electrode layer 20 is flexible and has a thickness of, for example, approximately 0.05 mm to 0.5 mm. Examples of materials that can be used as such for the reference electrode layer 20 include inorganic conductive materials, organic conductive materials, conductive materials containing both inorganic and organic conductive materials, and the like.

[0049] Examples of inorganic conductive materials include metals such as aluminum, copper, and silver; alloys such as stainless steel; and metal oxides such as zinc oxide and indium oxide. Additionally, examples of organic conductive materials include carbon materials such as carbon black and carbon fiber, and conductive polymers such as substituted or unsubstituted polyaniline and polypyrrole. The reference electrode layer 20 can, for example, consist of a thin sheet of metals such as stainless steel or aluminum, or of conductive fiber or conductive nonwoven fabric. The reference electrode layer 20 can be formed on a plastic film, for example, by a process such as deposition, sputtering, bonding, or coating. (Deformation layer)

[0050] The deformation layer 30 is arranged between the sensor film 10 and the reference electrode layer 20. The deformation layer 30 has a thickness of, for example, approximately 100 µm to 1000 µm, and in this embodiment 500 µm or less.

[0051] A lower limit for the thickness of the deformation layer 30 is not restricted, in particular as long as the thickness is more than 100 µm. This lower limit can be, for example, 150 µm or more, 200 µm or more, 250 µm or more, 300 µm or more, or the like. Meanwhile, an upper limit for the thickness of the deformation layer 30 is not restricted, in particular as long as the thickness is 1000 µm or less. This upper limit can be, for example, 950 µm or more, 900 µm or less, 850 µm or less, 800 µm or less, or the like.

[0052] The deformation layer 30 has a mass per unit area of, for example, 50 mg / cm². 2or less. If the thickness and mass per unit area of ​​the deformation layer 30 are set within these ranges, the detection sensitivity of the pressure sensor 100 in the vertical direction can be improved.

[0053] The deformation layer 30 consists of flexible materials capable of elastic deformation in response to an external force, such as a foamed material (elastic foam), rubber, gel, non-woven fabric, nanofiber, and the like. When an external force is applied perpendicularly to the sensor film 10, the deformation layer 30 elastically deforms in response to the external force, and the reference electrode layer 20 is brought close to the sensor electrode layer 12. At this point, the capacitance varies between the pulse electrode 281 and the sensing electrode 282 in the sensing area 13. Thus, the sensing area 13 can detect this variation in capacitance as a pressure value.

[0054] To allow for easy deformation in the Z-axis direction, the deformation layer 30 can, for example, consist of a patterned structure comprising columnar structures. Various shapes such as matrix, strip, grid, radial, geometric, or helical structures can be used for this patterned structure.

[0055] The deformation layer 30 is applied to the sensor film 10 and the reference electrode layer 20 via a bonding material. Examples of bonding materials that can be used include one or more adhesives selected from the group consisting of an acrylic adhesive, a silicone adhesive, a urethane adhesive, and the like.

[0056] The deformation layer 30 can be a laminated structure comprising a variety of materials that differ in their modulus of elasticity (hardness). Fig. Figure 4 is a schematic cross-sectional side view of a sensor device 101 comprising the deformation layer 30, which consists of a laminated structure comprising a first deformation layer 31 and a second deformation layer 32.

[0057] The first deformation layer 31 is arranged on the back surface of the sensor film 10. The second deformation layer 32 is arranged between the first deformation layer 31 and the reference electrode layer 20 and has a modulus of elasticity that differs from that of the first deformation layer 31. The first deformation layer 31 can be made of a material with a higher modulus of elasticity than the second deformation layer 32, or it can be made of a material with a lower modulus of elasticity than the second deformation layer 32. In particular, the thickness of the first deformation layer 31 and the second deformation layer 32 is not limited and they can be configured to have the same thickness, or they can be configured to have different thicknesses.

[0058] If the deformation layer 30 consists of the laminate of flexible materials that differ in hardness, it is possible to set pressure sensitivity thresholds by using an extent of variation of the capacity (load sensitivity) of the sensing area 13 in response to the deformation of the first deformation layer 31 and an extent of variation of the capacity (load sensitivity) of the sensing area 13 in response to the deformation of the second deformation layer 32. (surface layer)

[0059] The surface layer 40 serves as an outer layer region of the sensor device 100 and has the input operating surface S, which is operated by a user. Furthermore, the input operating surface S serves as a detection surface that comes into contact with an object detected by the sensor device 100 (e.g., a user's finger) and detects the touch and pressure actions on the sensor device 100 by the object being detected.

[0060] Surface layer 40 is located on a surface on another side (front surface) of the sensor film 10. Surface layer 40 consists of a non-conductive material. Examples of non-conductive materials include electrically insulating materials such as synthetic resin, rubber, foamed material (elastic foam), and non-woven fabric. It should be noted that if the entire surface layer 40 is electrically insulating, for example, a composite material obtained by mixing conductive particles such as metal particles or flakes into a synthetic resin material can be used.

[0061] The surface layer 40 is not restricted, in particular, as long as the touch actions on the input actuation surface S can be detected. In this embodiment, the surface layer 40 has a thickness greater than the thickness of the deformation layer 30 (for example, two to three times as thick as the deformation layer 30). This allows the pressure sensitivity, when the detection object presses the input actuation surface S, to be higher than the touch sensitivity, when the detection object touches the input actuation surface S. Here, the touch sensitivity corresponds to a variation in the capacity of the detection area 13 when the detection object touches the input actuation surface S, and the pressure sensitivity corresponds to a variation in the capacity of the detection area 13 when the detection object presses the input actuation surface S.

[0062] The thickness of the surface layer 40 is desirablely two or several times greater than the thickness of the deformation layer 30. This allows, as described below, for the pressure sensitivity to be sufficiently higher than the touch sensitivity, and for a pressure sensing function to be easily divided into several layers.

[0063] The surface layer 40 can be made of a material with a higher modulus of elasticity than the deformation layer 30. In other words, if the surface layer 40 is made of a material that is harder than the deformation layer 30, the touch actuation and pressure actuation functions are easily separated. This allows malfunctions to be suppressed.

[0064] The surface layer 40 can be a laminated structure comprising a variety of materials that differ in their modulus of elasticity (hardness). Fig. Figure 5 is a schematic cross-sectional side view of a sensor device 102, which includes the surface layer 40 having an outer layer region 41 and an inner layer region 42. The outer layer region 41 forms the input operating surface S. The inner layer region 42 is arranged between the outer layer region 41 and the sensor film 10 and has a modulus of elasticity that differs from that of the outer layer region 41.

[0065] The outer layer region 41 can be made of a material with a higher modulus of elasticity than the inner layer region 42, or it can be made of a material with a lower modulus of elasticity than the inner layer region 42. For example, if the outer layer region 41 is thicker than the inner layer region 42, the thicker outer layer region 41 is made of a material with a lower modulus of elasticity (soft material) than the inner layer region 42. Conversely, if the outer layer region 41 is thinner than the inner layer region 42, the thinner outer layer region 41 is made of a material with a higher modulus of elasticity (hard material) than the inner layer region 42. Examples of soft materials include flexible materials such as gel, rubber, elastomer, and elastic foam. Meanwhile, examples of hard materials include plastic materials such as acrylic.

[0066] The surface layer 40 can be part of a housing of the electronic device in which the sensor device 100 is installed. In this case, the sensor device 40 is installed in the housing of the electronic device, and a surface of the housing acts as the input operating surface S. The housing is made, for example, of a translucent or an opaque plastic material.

[0067] Fig. Figure 6 is a schematic cross-sectional side view of a sensor device 103, in which the surface layer 40 consists of part of a housing of an electronic device. As shown in the illustration, the surface layer 40 in the sensor device 103 comprises a flat plate area 401, which forms the input operating surface S, and leg areas 402 provided on a circumferential region of the flat plate area 401. The flat plate area 401 is a non-conductive layer provided such that it faces a front surface of the sensor film 10, which is connected to the surface layer 40 in Figure 6. Fig. 1 corresponds. The leg areas 402 project downwards from the circumferential area of ​​the flat plate area 401 to an installation surface T on which the sensor device 103 is installed, and their end areas are supported by the installation surface T.

[0068] In the sensor device 103, configured as described above, the flat plate area 401 is elastically deformed while supported by the leg areas 402. This transmits the pressure actuations at the input operating surface S to the sensor film 10. This allows the pressure force to be detected based on the variation in the capacity of the sensing area 13 in response to the deformation of the deformation layer 30.

[0069] The pressure sensitivity of the sensor device 103 can be adjusted via the elastic modulus of the flat plate area 401 or via the elastic modulus of the leg areas 402. In this case, the flat plate area 401 and the leg areas 402 can be made of materials with different elastic moduli, or the leg areas 402 can be made of a laminate of non-conductive materials with different elastic moduli. (carrier layer)

[0070] As in Fig. As illustrated in Figure 1, the sensor device 100 further comprises a carrier layer 50. The carrier layer 50 is arranged between the installation surface T, on which the sensor device 100 is installed, and the reference electrode layer 20. The carrier layer 50 consists of an electrically insulating bonding material or an electrically insulating pressure-sensitive adhesive material and serves as a bonding layer that attaches the reference electrode layer 20 to the installation surface T.

[0071] The carrier layer 50 can consist of a flexible material. In this case, for example, if the surface layer 40 consists of part of the housing of the electronic device, as in Fig. Figure 4 illustrates how the initial capacitance or touch sensitivity of the sensing area 13 in the sensor device 101, which is installed on the installation surface T, can be easily adjusted. In other words, dimensional tolerances in the distance between the flat plate area 401 of the surface layer 40 and the installation surface T, and variations in the thickness of the sensor device 101, can be absorbed by the carrier layer 50. This allows the initial capacitance or touch sensitivity in the sensing area 13 to be stably adjusted to its target capacitance value.

[0072] The support layer 50 can be a laminated structure comprising a variety of materials that differ in their modulus of elasticity (hardness). Fig. Figure 7 is a schematic cross-sectional side view of a sensor device 104 comprising the carrier layer 50, which consists of a laminated structure comprising a first carrier layer 51 and a second carrier layer 52.

[0073] The first support layer 51 is arranged on a back surface of the reference electrode layer 20. The second support layer 52 is arranged between the first support layer 51 and the installation surface T and has a modulus of elasticity that differs from that of the first support layer 51. The first support layer 51 can be made of a material with a higher modulus of elasticity than the second support layer 52, or it can be made of a material with a lower modulus of elasticity than the second support layer 52. In particular, the thickness of the first support layer 51 and the second support layer 52 is not limited and they can be configured to have the same thickness, or they can be configured to have different thicknesses.

[0074] If the carrier layer 50 consists of a laminate of flexible materials that differ in hardness, functions and advantages similar to those obtained when the carrier layer 50 is a single layer can be achieved. Furthermore, the robustness of the pressure sensitivity in response to pressure actuation at the input operating surface S can be improved. (Control unit)

[0075] The control unit 60 is typically a computer comprising a CPU (central processing unit) and consists of an integrated circuit, such as an IC chip. The control unit 60 is attached to the sensor film 10 (its output area 112) and is configured to control the pressure sensor 1 and to accept output signals from the pressure sensor 1.

[0076] Fig. Figure 8 is a functional block diagram of the control unit 60. The control unit 60 comprises an arithmetic section 61, a determination section 62, and a threshold setting section 63.

[0077] The arithmetic section 61 calculates the magnitude of the variation in capacitance for each of the sensing areas 13 on the sensor film 10 based on the output from the pressure sensor 1. The determination section 62 determines to which segment of a plurality of segments, defined according to a plurality of preset thresholds, the pressure force belongs, which is the magnitude of the variation in capacitance calculated by the arithmetic section 61, and then outputs the results of the determination to a control device 71 of an electronic device 70 in which the sensor devices 100 to 104 are installed. The threshold setting section 63 sets the plurality of thresholds. It should be noted that the control unit 60 can be configured as part of the control device 71 of the electronic device 70.

[0078] As described above, the electronic device 70 is configured as an input device to be installed in an electronic device. Examples of electronic devices include not only information processing devices, such as a tablet PC, and audio devices, such as headphones and earphones, but also imaging devices, such as a digital still camera and camcorder, and gaming devices.

[0079] The control unit 60 is capable of executing, based on the output from the pressure sensor 1 (sensor film 10), a first detection process to record contact made by the object being measured with the input operating surface S, and a second detection process to record the pressure force exerted by the object being measured on the input operating surface S. In the second detection process, the control unit 60 sets a variety of threshold values ​​to determine the magnitude of the pressure force across several stages.

[0080] While the assignment of a tap action on normal touch sensors is limited to one type, the sensor devices according to this embodiment, wherein the sensor devices have a touch function and a pressure detection function, allow assignment to four different types, such as touch, low pressure, medium pressure, and high pressure. As a specific example of use, if the electronic device 70 is, for example, an audio device, although the touch sensor only allows switching the power on / off by tap action, the touch sensor in this embodiment allows not only switching the power on / off, but also, for example, a slight increase / decrease in volume, a moderate increase / decrease in volume, a strong increase / decrease in volume, and the like.

[0081] Examples of other actions include track selection (fast forwarding, skipping tracks, skipping albums). Other examples include the zoom level in a camera, the multi-level sensing of control intensity in a gaming device, and the brightness setting of a display screen or light in a mobile information device.

[0082] In order for actuations to be assigned across multiple levels via the touch and pressure sensing functions, the touch sensitivity when the input actuation area S is touched with a finger must be sufficiently higher than the pressure sensitivity when the input actuation area S is pressed with a finger. For an actuation to be assigned via each of the touch and pressure sensitivities (two in total), as shown in Fig. As shown in Figure 9, a threshold Th1 is set for a touch sensitivity range and a threshold Th2 for a pressure sensitivity range. Fig. 9 the abscissa axis represents a displacement amount of a finger which is the detection object, the ordinate axis represents the maximum sensitivity among all nodes and “0” on the abscissa axis corresponds to a position at which the detection object comes into contact with the input actuation surface S.

[0083] The threshold values ​​Th1 and Th2 must be set to values ​​that are far apart. To prevent false positives (malfunctions), the threshold value Th2 should ideally be two or more times higher than the threshold value Th1 (Th2 ≥ 2·Th1). To assign actuations across a larger number of steps, a variety of threshold values ​​must be set for the sensitivity range, since only one threshold value can be set for the touch sensitivity range.

[0084] For example, to assign four actions, as in Fig. As shown in Figure 10, the threshold Th1 (touch sensitivity) for the touch area and three thresholds, namely the thresholds Th2 (first pressure sensitivity), Th3 (second pressure sensitivity), and Th4 (third pressure sensitivity), for the pressure sensing area are set. In this case, it is desirable that all Th2 ≥ 2·Th1, Th3 ≥ 3·Th1, and Th4 ≥ 4·Th1 are satisfied. When a large number of thresholds are set under such conditions, sensor structures must allow the pressure sensitivity to be sufficiently higher than the touch sensitivity.

[0085] Now, displacement sensitivity is described. Displacement sensitivity refers to a relationship between the displacement of the detection object (e.g., a user's finger) relative to the input area S and the detection sensitivity. Fig. Figure 11 shows an experimental result of the dependence of the thickness of surface layer 40 relative to the displacement sensitivity. In this graph, sensitivity at a displacement magnitude of 0 corresponds to touch sensitivity, and a region in which the displacement magnitude is positive (plus) corresponds to pressure sensitivity. The material of surface layer 40 was a single-layer acrylic sheet.

[0086] In Fig. Figure 11 represents displacement sensitivity in a case where the thickness of the surface layer 40 is the same as the thickness of the deformation layer 30 (0.5 mm), and A2 represents displacement sensitivity in a case where the thickness of the surface layer 40 is three times greater than the thickness of the deformation layer 30 (1.5 mm). In case A1, the touch sensitivity is high, and therefore the pressure sensitivity threshold is high. Thus, the touch function and the pressure sensing function are difficult to separate. In case A2, however, the touch sensitivity can be reduced, and therefore the pressure sensitivity threshold can be set sufficiently higher than the touch sensitivity threshold. Thus, the touch function and the pressure sensing function are easily separated, and multiple step thresholds can be set for the pressure sensing range.

[0087] Next, load sensitivity is described. Load sensitivity refers to the relationship between a perpendicular load to be applied to the input actuation surface S and the detection sensitivity. Fig. Figure 12 shows an experimental result of the dependence of the structure (thickness and flexibility) of the surface layer 40 relative to the load sensitivity.

[0088] In Fig. 12 represents B1 load sensitivity in the case where the thickness of the surface layer 40 is the same as the thickness of the deformation layer 30 (0.5 mm), and B2 represents load sensitivity in a case where the surface layer 40 is the same as the thickness of the deformation layer 30 (0.5 mm). Fig. Figure 5 illustrates a laminated structure in which the outer layer region 41 is an acrylic sheet with a thickness of 0.5 mm and the inner layer region 42 is a rubber sheet with a thickness of 1.0 mm. It should be noted that the same load sensitivity was also obtained in a case where the outer layer region 41 is the rubber sheet with a thickness of 1.0 mm and the inner layer region 42 is the acrylic sheet with a thickness of 0.5 mm. Additionally, Figure B3 represents load sensitivity in a case where the surface layer 40 is an acrylic sheet with a thickness three times that of the deformation layer 30 (1.5 mm).

[0089] As in Fig. As shown in Figure 12, the load sensitivity tends to decrease in proportion to B1, B2, and B3. This is because the surface layer 40 becomes harder as its thickness increases. To suppress the decrease in load sensitivity, the surface layer 40 must therefore be soft. When the surface layer 40 is soft, the touch function and the pressure sensing function are also slightly separated with respect to load sensitivity.

[0090] In the sensor device 100 according to this embodiment, as described above, the surface layer 40 is designed to be thicker than the deformation layer 30. Therefore, as described above, compared to the case where the surface layer 40 and the deformation layer 30 have the same thickness, the pressure sensitivity can be sufficiently higher than the touch sensitivity. Thus, the pressure sensing function can be divided into several layers. (Threshold setting procedure 1)

[0091] Next, specific examples of a method for setting the threshold values ​​are described. Here, a method for setting fixed threshold values ​​(loads of 1.5 N and 3 N) in the threshold setting section 63 is described using the sensor device 104, which comprises the surface layer 40 having the leg areas 402 (see Fig. 7).

[0092] First, a load, displacement, and maximum sensitivity are measured at all nodes of the pressure sensor 1 when the input operating surface S of the sensor device 104 is pressed. An aluminum press tool with a diameter of 10 mm, approximately the size of a finger, was used. The deformation of the pressure sensor 1 in the Z-axis direction was measured until the load reached 5 N at a position 5 mm above the center of the input operating surface S, which is an upper surface of the surface layer 40.

[0093] Fig. Figure 13 shows a load-displacement curve when the input actuation surface S is pressed, and Fig. Figure 14 shows a relationship between the displacement amount and the maximum sensitivity. It should be noted that in Fig. 14 the displacement amount is -5 mm at a starting position and the displacement amount is 0 mm when the load begins to be detected.

[0094] Then, a displacement amount Z1 is measured when the load is 1.5 N, and a displacement amount Z2 is measured when the load is 3 N (see Fig. 13). Additionally, the maximum sensitivity (hereinafter also referred to simply as sensitivity) is measured when the displacement magnitude is 0, Z1 and Z2 (see Fig. 14).

[0095] Next, in the threshold setting section 63, the sensitivity (touch sensitivity) when the displacement is 0 is set as threshold Th1, the sensitivity when the load is 1.5 N is set as threshold Th2 (first pressure sensitivity), and the sensitivity when the load is 3 N is set as threshold Th3 (second pressure sensitivity). From the perspective of suppressing false positives, as described above, it is desirable that Th2 ≥ 2·Th1 and Th3 ≥ 3·Th1 are satisfied.

[0096] Determination section 62 performs a determination process according to the sensitivity, for example by the following procedure. • Activation 1: When the sensitivity is Th1 or higher and does not exceed Th2 for a certain period of time (e.g. 0.5 seconds). • Actuation 2: If the sensitivity is Th2 or higher and does not exceed Th3 for a certain period of time (e.g. 0.5 seconds). • Actuation 3: If the sensitivity is Th3 or higher and Th3 does not exceed this value for a certain period of time (e.g. 0.5 seconds). (Threshold setting procedure 2)

[0097] The threshold values, which can be set in threshold setting section 63, can be individually adjusted to be variable for each user. This allows the threshold values ​​to be optimized for each user, thus improving usability for everyone. One method for this adjustment is, for example, as follows.

[0098] The measurement of maximum sensitivity across all nodes of pressure sensor 1, when the user performs an actuation to touch the input actuation area S (touch actuation) (hereinafter also referred to as sensitivity measurement), is performed three times, and an average value is set as the threshold Th1 in threshold setting section 63. Next, the sensitivity measurement is performed three times when the user performs an actuation to lightly press the input actuation area S (pressure amount: small), and an average value is set as the threshold Th2 in threshold setting section 63. Finally, the sensitivity measurement is performed three times when the user performs an actuation to firmly press the input actuation area S (pressure amount: large), and an average value is set as the threshold Th3 in threshold setting section 63.

[0099] In this case too, from the perspective of suppressing false positives, it is desirable to adjust the thresholds Th2 and Th3 to meet the conditions Th2 ≥ 2·Th1 and Th3 ≥ 3·Th1. If these conditions are not met, a similar measurement (calibration) can be performed again.

[0100] As described above, the determination section 62 carries out the determination process according to the sensitivity, for example by the following procedure. • Activation 1: When the sensitivity is Th1 or higher and does not exceed Th2 for a certain period of time (e.g. 0.5 seconds). • Actuation 2: If the sensitivity is Th2 or higher and does not exceed Th3 for a certain period of time (e.g. 0.5 seconds). • Actuation 3: If the sensitivity is Th3 or higher and Th3 does not exceed this value for a certain period of time (e.g. 0.5 seconds). (Threshold setting procedure 3)

[0101] The magnitude of the load to be detected by the pressure sensor 1 can vary depending on the position of the actuator on the input operating surface S. Since the leg areas 402 of the surface layer 40 are supported by the installation surface T, the detection sensitivity in the Fig. 7 illustrated sensor device 104, for example, between the central position of the input operating surface S and circumferential positions that are near the leg areas 402, there may be differences (see Fig. 15 and Fig. 16). Thus, in this embodiment, the threshold setting section 63 is configured to be able to correct the pressure sensitivity in accordance with the ranges of actuation that the detection object performs on the input actuation surface S.

[0102] Fig. Figure 15 is a schematic view illustrating the operating areas on the input operating surface S, and Fig. Figure 16 shows the respective load-displacement curves in the operating ranges. As in Fig. As shown in Figure 16, the displacement magnitudes in operating ranges S2 and S3 in the circumferential regions of the input actuation surface S tend to be smaller in the sensor device 104, which comprises the surface layer 40 having the leg regions 402, even under a perpendicular load of the same magnitude, than in an operating range S1 in the center of the input actuation surface S, and therefore the detection sensitivity also tends to be lower. Thus, the threshold setting section 63 sets the thresholds by the following procedure to obtain a uniform detection sensitivity in each of the operating ranges S1 to S3.

[0103] First, relationships between loads and displacement amounts are measured when the operating ranges S1 to S3 are set on the input actuation surface S of the sensor device 104 ( Fig. 16) be pressed. The aluminum pressing tool with a diameter of 10 mm, which was close to the size of a finger, was used. Then, the slopes of the measured load-displacement curves are calculated for each of the operating ranges S1 to S3, and these slopes are used as correction coefficients. Based on these correction coefficients, the threshold setting section 63, for example, corrects the first pressure sensitivity (Th2) and the second pressure sensitivity (Th3) in accordance with the ranges of actuation that the sensing object performs on the input actuation surface S.

[0104] The operating areas are nine subdivided areas. Operating area S1 corresponds to the center position of the input operating surface S, operating areas S2 correspond to areas between a central area on each side of the input operating surface S and operating area S1, and operating areas S3 correspond to areas at the four corners of the input operating surface S. The calculated correction coefficients are assigned to operating areas S1 to S3 using, for example, lookup tables, as shown in Fig. Figure 17 shows how this is managed. In the example shown, nine area numbers are assigned to the subdivided operating areas, and a correction coefficient of 0.5 is set for area numbers 1 and 3, a correction coefficient of 0.7 for area numbers 2 and 8, a correction coefficient of 0.8 for area numbers 4 and 6, a correction coefficient of 1 for area number 5, and a correction coefficient of 0.6 for area numbers 7 and 9.

[0105] Positions where the detection object comes into contact with the input operating surface S are calculated from the position of the center of gravity of a pressure distribution to be exerted on pressure sensor 1 (sensor film 10). Values ​​obtained by multiplying the uncorrected pressure sensitivity (thresholds) by the correction coefficients described above, each assigned to a specific area, are used as the corrected pressure sensitivity (thresholds). For example, if a pressure actuation is detected in area number 1, the pressure force is determined using corrected thresholds (Th2' and Th3') obtained by multiplying the uncorrected pressure sensitivity (Th2 and Th3) by 0.5.When a pressure actuation is detected in the area with area number 6, the pressure force is determined using corrected thresholds (Th2' and Th3') obtained by multiplying the uncorrected thresholds (Th2 and Th3) by 0.8. This reliably ensures that the input acts correspond to the user's intentions without affecting the user's tactile experience.

[0106] It should be noted that even if the material or thickness of the surface layer 40 differs from area to area, the touch sensitivity Th1 can be corrected using a technique similar to the one described above. For example, if a correction coefficient for an area where the thickness of the surface layer 40 is smallest is set to 1, correction coefficients for other areas where the thickness is large will be set to less than 1. Conversely, if a correction coefficient for an area where the thickness of the surface layer 40 is greatest is set to 1, correction coefficients for other areas where the thickness is small will be set to more than 1. (Relationship between touch sensitivity and pressure sensitivity)

[0107] Next, the reason why it is desirable for the pressure sensitivity Th2 to be set to be two or more times higher than the touch sensitivity Th1 will be explained, using an example from the [reference to be added]. Fig. 1 illustrated sensor device 100 described.

[0108] As in Fig. As illustrated in Figure 18, the thickness of the deformation layer 30 is denoted by d, and the thickness of the surface layer 40 is denoted by D. If the entirety of the sensor film 10 is considered as one electrode (sensor electrode layer 13), the touch sensitivity C1 when the sensing object comes into contact with the input operating surface S is expressed by the following equation. C1=εA / D where ε is a permittivity of the surface layer 40 and A is an area of ​​contact established by the sensing object. Equation (1) corresponds to a variation in capacitance between the sensing object and the sensor film 10 as the sensing object moves from a point significantly away from the sensor film 10 to the distance D (position of the input operating surface S).

[0109] The pressure sensitivity C2, when the deformation layer 30 is deformed by x% and when a permittivity of the deformation layer 30 is equal to the permittivity (ε) of the surface layer 40, is expressed by the following equation C2=εA / {d(1−x / 100)}−εA / d

[0110] Equation (2) corresponds to a variation of the capacitance when the sensor film 10 comes close to the reference electrode layer 20 from the distance d to d(1-x / 100).

[0111] When a setting of touch sensitivity × 2 < maximum pressure sensitivity is applied to set the touch sensitivity and pressure sensitivity thresholds, equation (2) = εA / {d(1−x / 100)}−εA / (εA / D)×2<εA / {d(1−x / 100)}−εA / d 2 / D<1 / {d(1−x / 100)}−1 / d=x / d(100−x) ∴D / d>2(100−x) / x a function expressed by equation (3) is in Fig. 19 shown.

[0112] The deformation layer 30 is not necessarily deformed by 100%, and therefore the deformation rate of the deformation layer 30 is limited. For example, if a foamed body is used as the deformation layer 30, the volume fraction of the material from which the foamed body is composed is generally 20% or more. Furthermore, common materials exhibit a thickness variation of ±10%, and therefore a maximum thickness variation of approximately 20% of the deformation layer 30 must be taken into account. Even further, considering the installation of the sensor device 100 in the housing of the electronic device, a mechanical variation (tolerance) of approximately 10% of the housing must be considered.

[0113] Taking into account the three factors described above, the maximum deformation rate of the deformation layer 30 within a practically usable range is 50% or less. Thus, it can be said that, as in Fig. 19 shows that D / d (thickness D of the surface layer 40)÷ (thickness d of the deformation layer 30) is desirablely 2 or more.

[0114] It should be noted that the present technology can also use configurations as follows. (1) A sensor device comprising: a sensor film capable of detecting pressure distribution; a reference electrode layer arranged so that it faces a surface on one side of the sensor film and is connected to a reference potential; a deformation layer that is arranged between the sensor film and the reference electrode layer and consists of a flexible material; a surface layer having an input operating surface, located on a surface on the other side of the sensor film and consisting of a non-conductive material that is thicker than the deformation layer; and a control unit capable of performing, based on an output from the sensor film, a first detection process to detect a contact made by a detection object with the input operating surface, and a second detection process to detect a pressure force exerted by the detection object on the input operating surface, wherein the control unit sets a plurality of threshold values ​​to determine a magnitude of the pressure force over several stages in the second detection process. (2) Sensor device according to (1), wherein the surface layer has a thickness that is two or several times greater than the thickness of the deformation layer. (3) Sensor device according to (2), in which the surface layer consists of a material that has a higher modulus of elasticity than the deformation layer. (4) Sensor device according to (2) or (3), wherein the sensor film includes a flexible base, and a sensor electrode layer comprising a variety of capacitive elements arranged in a matrix on a surface on one side of the base, and The multitude of capacitive elements each comprises a pair of comb-shaped electrodes facing each other in a direction parallel to the surface on one side of the base. (5) Sensor device according to (4), in which the sensor electrode layer is arranged on the surface of the sensor film, with the surface facing the reference electrode layer. (6) Sensor device according to any of (1) to (5), further comprising a carrier layer that is positioned between an installation surface on which the sensor device is installed and the reference electrode layer and consists of a flexible material. (7) Sensor device according to any of (1) to (6), wherein the surface layer includes an outer layer area that forms the input operating surface, and an inner layer area that is located between the outer layer area and the sensor film and has a modulus of elasticity that differs from the modulus of elasticity of the outer layer area. (8) Sensor device according to one of (1) to (6), wherein the deformation layer includes a first deformation layer, which is arranged on the surface on one side of the sensor film, and a second deformation layer, which is arranged between the first deformation layer and the reference electrode layer and has a modulus of elasticity that differs from the modulus of elasticity of the first deformation layer. (9) Sensor device according to one of (1) to (6), wherein the surface layer includes a flat plate area that forms the input operating surface, and a leg area that is provided on a circumferential area of ​​the flat plate area and is supported by an installation surface on which the sensor device is installed. (10) Sensor device according to any of (1) to (9), wherein the control unit includes a determination section that determines to which segment of a multitude of segments, defined according to the multitude of threshold values, the compressive force belongs, and the multitude of thresholds a first pressure sensitivity, which is a sensitivity that is two or more times higher than a touch sensitivity, which is a detection sensitivity of the sensor film, wherein the touch sensitivity is measured when the detection object comes into contact with the input operating surface, and a second pressure sensitivity, which is a sensitivity that is three or more times higher than the touch sensitivity. (11) Sensor device according to (10), in which The multitude of threshold values ​​also includes a third pressure sensitivity, which is a sensitivity that is four or more times higher than the touch sensitivity. (12) Sensor device according to (10) or (11), wherein The control unit also includes a threshold setting section that is capable of individually setting the multitude of threshold values. (13) Sensor device according to (12), in which The threshold setting section corrects the first pressure sensitivity and the second pressure sensitivity in accordance with a range of actuation that the detection object performs on the input actuation surface. (14) Electronic device comprising: a sensor device, the sensor device comprising: a sensor film capable of detecting pressure distribution; a reference electrode layer arranged so that it faces a surface on one side of the sensor film and is connected to a reference potential; a deformation layer that is arranged between the sensor film and the reference electrode layer and consists of a flexible material; a surface layer having an input operating surface, located on a surface on the other side of the sensor film and consisting of a non-conductive material that is thicker than the deformation layer; and a control unit capable of performing, based on an output from the sensor film, a first detection process to detect a contact made by a detection object with the input operating surface, and a second detection process to detect a pressure force exerted by the detection object on the input operating surface, wherein the control unit sets a plurality of threshold values ​​to determine a magnitude of the pressure force over several stages in the second detection process. Reference symbol list 1 pressure sensor 10 Sensor film 11 Basic 12 Sensor electrode layer 13. Detection area 20 Reference electrode layer 30 Deformation layer 31 first deformation layer 32 second deformation layer 40 surface layer 41 outer layer area 42 inner layer area 50 carrier layer 60 Control unit 61 arithmetic section 62 Section for Determination 63 Threshold setting section 70 electronic device 71 Control device 101, 102, 103, 104 Sensor device 401 flat plate area 402 Leg area S Input operating interface QUOTES INCLUDED IN THE DESCRIPTION

[0000] This list of documents cited by the applicant was automatically generated and is included solely for the reader's convenience. The list is not part of the German patent or utility model application. The DPMA accepts no liability for any errors or omissions. Cited patent literature

[0000] WO 2018 / 025690

[0003]

Claims

Sensor device comprising: a sensor film capable of detecting a pressure distribution; a reference electrode layer arranged to face a surface on one side of the sensor film and connected to a reference potential; a deformation layer arranged between the sensor film and the reference electrode layer, made of a flexible material; a surface layer having an input operating surface, arranged on a surface on the other side of the sensor film, made of a non-conductive material thicker than the deformation layer;and a control unit capable of performing, based on an output from the sensor film, a first detection process to detect contact made by a detection object with the input operating surface, and a second detection process to detect a pressure force exerted by the detection object on the input operating surface, wherein the control unit sets a plurality of threshold values ​​to determine a magnitude of pressure force over several stages in the second detection process. Sensor device according to claim 1, wherein the surface layer has a thickness that is two or more times greater than the thickness of the deformation layer. Sensor device according to claim 2, wherein the surface layer consists of a material having a higher modulus of elasticity than the deformation layer. Sensor device according to claim 2, wherein the sensor film comprises a flexible base, and a sensor electrode layer comprising a plurality of capacitive elements arranged in a matrix on a surface on one side of the base, and the plurality of capacitive elements each comprising a pair of comb-shaped electrodes facing each other in a direction parallel to the surface on one side of the flexible base. Sensor device according to claim 4, wherein the sensor electrode layer is arranged on the surface of the sensor film, the surface of which faces the reference electrode layer. Sensor device according to claim 1, further comprising: a carrier layer arranged between an installation surface on which the sensor device is installed and the reference electrode layer, and consisting of a flexible material. Sensor device according to claim 1, wherein the surface layer comprises an outer layer region forming the input operating surface and an inner layer region arranged between the outer layer region and the sensor film, and having an elastic modulus that differs from an elastic modulus of the outer layer region. Sensor device according to claim 1, wherein the deformation layer comprises a first deformation layer arranged on the surface on one side of the sensor film, and a second deformation layer arranged between the first deformation layer and the reference electrode layer, and having a modulus of elasticity that differs from a modulus of elasticity of the first deformation layer. Sensor device according to claim 1, wherein the surface layer comprises a flat plate area forming the input operating surface and a leg area provided on a circumferential area of ​​the flat plate area and supported by an installation surface on which the sensor device is installed. Sensor device according to claim 1, wherein the control unit comprises a determination section that determines to which segment of a plurality of segments defined according to the plurality of thresholds the pressure force belongs, and the plurality of thresholds comprises a first pressure sensitivity, which is a sensitivity that is two or more times higher than a touch sensitivity, which is a detection sensitivity of the sensor film, wherein the touch sensitivity is measured when the detection object comes into contact with the input operating surface, and a second pressure sensitivity, which is a sensitivity that is three or more times higher than the touch sensitivity. Sensor device according to claim 10, wherein the plurality of threshold values ​​further comprises a third pressure sensitivity which is a sensitivity that is four or more times higher than the touch sensitivity. Sensor device according to claim 10, wherein the control unit further comprises a threshold setting section that is capable of individually setting the plurality of threshold values. Sensor device according to claim 12, wherein the threshold setting section corrects the first pressure sensitivity and the second pressure sensitivity in accordance with a range of actuation that the detection object performs on the input actuation surface. Electronic device comprising: a sensor device, wherein the sensor device comprises: a sensor film capable of detecting a pressure distribution; a reference electrode layer arranged to face a surface on one side of the sensor film and connected to a reference potential; a deformation layer arranged between the sensor film and the reference electrode layer, made of a flexible material; a surface layer having an input operating surface, arranged on a surface on the other side of the sensor film, made of a non-conductive material thicker than the deformation layer;and a control unit capable of performing, based on an output from the sensor film, a first detection process to detect contact made by a detection object with the input operating surface, and a second detection process to detect a pressure force exerted by the detection object on the input operating surface, wherein the control unit sets a plurality of threshold values ​​to determine a magnitude of pressure force over several stages in the second detection process.