METHOD AND EXPOSURE DEVICE FOR EXPOSURE A LIGHT-SENSITIVE RECORDING MACHINE

Description

[0001] The invention relates to a method for exposing at least one stored representation on a light-sensitive recording medium and to an exposure device for carrying out the method.

[0002] From DE 20 2016 001 967 U1, an exposure device is known which has at least two exposure heads movable on a common guide axis and which are movable above a support for a recording medium. These exposure heads are movable along a movable guide axis in the X direction, which is also movable in the Y direction. This allows the exposure heads to be aligned in different positions relative to the recording medium in order to expose stored images onto a flat, light-sensitive recording medium.

[0003] From DE 10 2017 123 686 A1, a method and an exposure device for exposing at least one stored image onto a light-sensitive recording medium are further disclosed. This exposure device comprises at least one exposure head that is moved along a guide axis in the X direction, the guide axis being moved in the Y direction. A support, in the form of a movable table for receiving the recording medium, is extended from a process chamber of the exposure device to position the recording medium on it. Subsequently, the support with the recording medium is inserted into the process chamber in the Y direction. During this movement, the position of the recording medium is detected by at least one linear image acquisition device. After the recording medium has been exposed, the support is extended and the exposed recording medium is removed.

[0004] US Patent 2014 / 0146299 A1 discloses an exposure device and a method for correcting the orientation of a recording medium to be exposed. An exposure head for exposing the recording medium is provided in a process chamber of the exposure device. Furthermore, a scanning device and image acquisition devices in the form of cameras are provided, which, in addition to an image sensor, acquire data. To determine the orientation, the recording medium is placed on a stage within the process chamber. This stage can be moved both towards the exposure head and in a direction perpendicular to it to determine different positions of the recording medium.

[0005] From DE 10 2018 106 544 B3, a method and a device for transporting an arrangement of flexible circuit substrates during the production of a composite on them are known. Several circuit substrates are positioned one above the other on a conveyor belt. These circuit substrates are completely covered by a film. Subsequently, a vacuum is created to apply a contact force to the overlapping circuit substrates via the film.

[0006] US patent 4,635,788 A discloses a chain conveyor belt driven by a toothed pinion. Several trays, each holding a single chip, are transported through a zone where air currents are directed onto the chip.

[0007] From US patent 2012 / 0056105 A, a device and a method for manufacturing flat screen displays are known.

[0008] A prospectus from Manz AG, Steigäckerstraße 5, 72768 Reutlingen, entitled "PLI 400 SpeedLight," further discloses an exposure machine for direct exposure, which includes a double support system. A loading station with a first support in the form of a movable pallet is provided in front of the exposure unit's process chamber. A second movable pallet with a support is arranged below the first in the loading station. After the first support is moved into the process chamber, the second support is raised to be loaded with another recording medium. After the exposure of the first recording medium, the support with the second recording medium is lowered, the support with the first recording medium is removed from the processing machine, and the second support is inserted into the process chamber and raised into a processing position.Although this exposure device allows for the loading and unloading of another recording medium in the loading and unloading station while one is being exposed in the process chamber, the process duration is limited by the loading and unloading and the movement of the supports or pallets in the exposure device.

[0009] The invention is based on the objective of proposing a method and an exposure device for exposing a light-sensitive recording medium, which results in higher productivity.

[0010] This problem is solved by a method for exposing a light-sensitive recording medium, preferably at least one stored image on a light-sensitive recording medium, using an exposure device in which the at least one recording medium is placed and positioned on a support, which is designed as an endless conveyor belt, and the at least one recording medium is moved by the conveyor belt from the loading station to the process chamber, wherein at least one first vacuum chamber is assigned to the conveyor belt in the loading station and at least one second vacuum chamber is assigned to the process chamber. This enables simplified handling and a reduction in process times.According to a first embodiment, this conveyor belt allows the recording medium to be moved from the loading station into the process chamber and, in the same direction, out of the process chamber. During the removal of the exposed recording medium, an unexposed recording medium is simultaneously inserted into the process chamber using the same conveyor belt movement. Furthermore, the process chamber can be traversed in a defined plane by this conveyor belt, thus ensuring consistent conditions for the exposure of the recording medium.

[0011] Preferably, the conveyor belt for exposing the recording medium in the process chamber is stopped, and another recording medium is simultaneously placed onto the stationary conveyor belt at a loading station. This ensures that the recording medium is placed securely onto the conveyor belt. During a subsequent movement, the exposed recording medium is removed from the process chamber, and simultaneously, the unexposed recording medium is moved into the process chamber.

[0012] An advantageous embodiment of the method provides that, during the insertion of the recording medium into the process chamber, the actual position and / or orientation of the recording medium on the conveyor belt is detected, and the exposure head is then activated to apply the image to the recording medium or to expose the recording medium. This can result in a further reduction in process time, since this actual position and / or orientation is detected during the movement of the recording medium from a position outside the process chamber into the process chamber.

[0013] The recording medium is preferably aligned by a stop on the conveyor belt. This allows for a defined positioning of the recording medium on the conveyor belt. Alternatively, positioning pins can be provided on the conveyor belt, which preferably engage in positioning holes in the recording medium. This allows a recording medium to be picked up and transported with precision.

[0014] Preferably, at least the first vacuum chamber is activated after the recording medium is placed on the conveyor belt and at least at the beginning of a transport movement. Switching the first vacuum chamber on and off in the loading station simplifies handling of the recording medium. Furthermore, the first vacuum chamber is preferably switched off after the recording medium has been inserted into the process chamber. This simplifies the placement of the subsequent recording medium onto the conveyor belt.

[0015] Furthermore, the end position of the recording medium for the exposure process is preferably detected in the process chamber by at least one position sensor. Upon detecting the end position, this position sensor triggers a stop of the transport belt, allowing the exposure of the recording medium to then take place. This position sensor can, for example, be designed as a camera, in particular a CCD camera, or the like.

[0016] The problem underlying the invention is solved by an exposure device for exposing a light-sensitive recording medium, in which the support for the at least one recording medium is designed as an endless conveyor belt, which extends at least from a loading station in front of the process chamber of the exposure device at least to the end of the process chamber, and the conveyor belt is assigned in the loading station to at least a first vacuum chamber and in the process chamber to at least a second vacuum chamber, which can be controlled separately from each other.The conveyor belt can, for example, control a continuous operation in which, while the recording medium(s) are being exposed in the process chamber, at least one further recording medium to be exposed is placed in the loading station. After exposure, the recording medium is removed from the process chamber, and simultaneously, the recording medium to be exposed can be inserted into the process chamber. By controlling the first and second vacuum chambers separately, the first vacuum chamber can be switched off after the recording medium has been inserted from the loading station into the process chamber, thus enabling easy loading of another recording medium. This reduces the process time, which is then limited only by the exposure time of the recording medium.

[0017] Preferably, the conveyor belt is designed as a vacuum conveyor belt. This allows for quick handling and fixation of the recording medium on the conveyor belt.

[0018] Furthermore, stops, position markers, or position pins are preferably provided on the conveyor belt to align the recording medium when placing it on the belt. This enables fast and preferably automated positioning of the recording medium onto the conveyor belt in the loading station.

[0019] Furthermore, the conveyor belt preferably extends to an unloading station, which is connected to the process chamber and oriented opposite the loading station. Thus, during an ongoing production process, the recording medium can be loaded at the loading station, exposed in the process chamber, and the exposed recording medium removed at the unloading station. Preferably, the direction of travel or the transport direction of the conveyor belt can remain constant in this arrangement. Alternatively, the direction of travel of the conveyor belt can also be reversed, meaning that the loading station serves for loading and unloading the recording medium, and the unloading station also serves for loading and unloading the recording medium. The process chamber is located between the two stations.In this case, an evaluation device is provided on the inlet side of the process chamber to record the actual position of the recording medium or at least a representation on the recording medium during the entry movement into the process chamber.

[0020] Furthermore, the conveyor belt can transfer the exposed recording medium to a magazine or a turning station located opposite the loading station of the process chamber. For example, at such a turning station, the recording medium can then be fed to an exposure unit so that the second side of the recording medium is exposed.

[0021] Furthermore, it is preferably provided that the vacuum chamber has a support contour facing the conveyor belt, which comprises contact surface sections interrupted by depressions running in the direction of transport, and that air is supplied in the area of ​​the contact surface sections and extracted through the depressions. This support contour serves two functions: firstly, to suspend the conveyor belt above it by means of the supplied air via the contact surface sections. These contact surface sections may preferably have small bores or be made of a porous, air-permeable material. Secondly, the supplied air can then be extracted through the depressions.

[0022] Advantageously, the conveyor belt has several rows of perforations arranged one behind the other in the direction of transport, extending longitudinally along the recesses of the support contour. This allows a vacuum to be created between a surface of the conveyor belt and the recording medium resting on it, so that the medium, once aligned, can be conveyed from the loading station into the process chamber and preferably out of the process chamber for further processing.

[0023] The invention, as well as further advantageous embodiments and developments thereof, are described and explained in more detail below with reference to the examples shown in the drawings. The drawings show: Figure 1 a perspective view of an exposure device, Figure 2 a schematic side view of the exposure device according to Figure 1with a transport conveyor system Figure 3 a schematic view of an alternative embodiment of the exposure device Figure 2 , Figure 4 a schematic view of a vacuum chamber of the transport device, and Figure 5 a schematic sectional view along line VV in Figure 4 .

[0024] In Figure 1 A simplified schematic representation of an exposure unit 11 is shown. This exposure unit 11 comprises a housing 13 with a machine base frame. Figure 1 A support 12 for one or more recording carriers 14 is shown. This support 12 is part of a conveyor belt 32 of a transport conveying device 31, which is schematically shown in Figure 2The transport device 31 allows the recording medium 14 to be positioned through a housing opening 15 into a process chamber 35 of the exposure unit 11. In this process chamber 35, the recording medium 14 is exposed by at least one exposure head 16. Subsequently, the exposed recording medium 14 can be removed from the process chamber 35 through another housing opening 37. The transport device 31 can be mounted on a base plate, in particular a granite plate.

[0025] The recording medium 14 can, for example, be photographic templates for printed circuit boards as well as other objects that use phototechnical structures as part of the production process. In particular, resist-coated panels, UV films, solder resists, red-sensitive orthochromatic films or masks can be used as recording medium 14.

[0026] For exposing such recording media 14, the exposure devices 11 are designed as so-called direct exposure systems.

[0027] In the process chamber 35, at least one exposure head 16 is preferably arranged, which is provided to be movable along a guide 18 in and against the X-direction. This guide axis 18 is movable in and against the Y-direction in the process chamber 35 by means of a carriage assembly 19. A control unit 27 is provided for controlling this carriage assembly 19 and the at least one exposure head 16. This control unit 27 is computer program-controlled. This control unit 27 preferably comprises a user interface 28 and a display 29 for controlling, calling up and / or setting individual programs.

[0028] The process chamber 35 of the exposure unit 11 comprises an image acquisition device 25 associated with the housing opening 15. This device is preferably linear and can be designed in the form of a scan bar. During a movement of the recording medium 14 into the process chamber 35, the recording medium 14 is detected with respect to its position and / or orientation, and / or the position of at least one image 21 on the recording medium 14 is detected. Based on the detected measurement points, wherein at least two—preferably three—measurement points are detected, the orientation of the recording medium 14 on the support 12 with respect to the X and Y positions can be determined. This detected position data is transmitted to the control unit 27. This control unit 27 comprises an evaluation unit to then control the at least one exposure head 16 with respect to the exposure.

[0029] In Figure 2is a schematic side view of the exposure device 11 according to Figure 1The transport conveyor 31 of the exposure unit 11 extends from a loading station 41 into the process chamber 35 and preferably to the end of the further housing opening 37 of the process chamber 35. This transport conveyor 31 comprises an endless conveyor belt 32, which is guided by two deflection rollers 33, 34 and is movably controlled by at least one of the two deflection rollers 33, 34. The conveyor belt 32 is preferably designed as a metallic belt, in particular a steel belt. A first and a second vacuum chamber 43, 44 are associated on the underside of the conveyor belt 32. The first vacuum chamber 43 preferably extends along the loading station 41, and the second vacuum chamber 44 preferably extends within the process chamber 35. The first and second vacuum chambers 43, 44 can preferably be controlled separately by the control unit 27.

[0030] Furthermore, a position sensor 46 is provided in the process chamber 35, which detects a position, in particular end position, of the recording carrier 14 after the recording carrier 14 has been inserted into the process chamber 35 and stops the movement of the transport movement 32.

[0031] A first embodiment of the method for exposing the recording medium 14 with the exposure device 11 is described below:

[0032] In loading station 41, an unexposed recording medium 14 is placed on the conveyor belt 32. Stops, position markers, and / or position pins can be provided on or in the conveyor belt 32 to position and / or align the recording medium 14. The conveyor belt 32 is preferably made of stainless steel or a high-alloy steel. Subsequently, a vacuum is activated in the first vacuum chamber 43, and the recording medium 14 is fixed to the conveyor belt 32. Simultaneously or at a later time, the second vacuum chamber 44 can be pressurized with a vacuum. The recording medium 14 is moved from loading station 41 into the process chamber 35. The image acquisition device 25 detects the position of the recording medium 14. As it continues to move into the process chamber, the position sensor 46 detects the final position of the recording medium 14, and the transport movement of the conveyor belt 32 is stopped.Simultaneously, the first vacuum chamber 43 can be switched off. While the conveyor belt 32 is stationary, the exposure of the recording medium 14 is carried out in the process chamber 35. At the same time, a new recording medium 14 is loaded into the loading station 41. After the exposure process in the process chamber 35, the first vacuum chamber 43 is activated and the conveyor belt 32 is moved in the same direction of travel, so that the exposed recording medium 14 is conveyed out of the process chamber 35 through the housing opening 37 and the new recording medium 14 is inserted from the loading station 41 into the process chamber 35. Subsequently, the process described above is repeated.

[0033] A magazine or turning station can be assigned downstream of the process chamber 35 in order to receive and / or remove the single-sided exposed recording media 14.

[0034] In Figure 3is an alternative recording medium 14 of the exposure device 11 to Figure 2 This embodiment of the exposure device 11 comprises a transport conveyor 31, in which the conveyor belt 32 extends from a loading station 41 to an unloading station 48 and passes through an intermediate process chamber 35. This allows the previously described method to be carried out by conveying the exposed recording medium 14 from the process chamber 35 to the unloading station 48. The exposed recording medium 14, resting on the conveyor belt 32, can be removed manually or with a handling device (not shown) and fed into a magazine or to a subsequent processing station. In this embodiment, the Figure 3 The third vacuum chamber 45 shown is not required.

[0035] The exposure device 11 according to Figure 3enables an alternative method for exposing the light-sensitive recording medium 14 compared to the exposure device 11 according to Figure 2 .

[0036] Loading station 41 is loaded with a recording medium 14. The first vacuum chamber 43 in loading station 41 and the second vacuum chamber 44 of process chamber 35 are activated. The conveyor belt 32 is moved according to arrow A, so that the recording medium 14 is moved into process chamber 35. While the conveyor belt 32 is stationary for the exposure of the recording medium 14 in process chamber 35, another recording medium 14 to be exposed is placed on the conveyor belt 32 in unloading station 48. After the exposure of the recording medium 14 in process chamber 35, a third vacuum chamber 45 of unloading station 48 is activated, and the conveyor belt 32 is driven according to arrow B. The exposed recording medium 14 is transferred to loading station 41, and the other recording medium 14 is transferred from unloading station 48 to process chamber 35.Subsequently, in loading station 41, the exposed recording medium 14 is removed and a recording medium 14 to be exposed is inserted. Afterwards, the transport belt 32 is driven again in the direction of arrow A.

[0037] Each time the recording carrier 14 is inserted from the loading station 41 into the process chamber 35 or from the unloading station 48 into the process chamber 35, the respective vacuum chamber 43, 45 is switched off.

[0038] The exposure device 11 according to the embodiment in Figure 3 Each housing opening 15 and housing opening 35 has an image acquisition device 25. The position sensor 46 can also be positioned at one end of the second vacuum chamber 44 to detect the final position depending on the respective insertion direction of the recording carrier 14 into the process chamber 35.

[0039] In Figure 4Figure 43, 44, 45 shows a schematic view of a vacuum chamber. Figure 5Figure 1 shows a schematic sectional view along line VV of a support contour 51 of the vacuum chamber 43, 44, 45 and a transport conveyor 32 positioned therein. This support contour 51 has support sections 52, which are separated by recesses 53. These recesses 53 are preferably U-shaped and extend longitudinally to the transport direction. The support surface sections 52 are separated from each other by these recesses 53. The width of the support surface sections 52 is at least twice the width of the recess 53. The support surface sections 52 have bores or openings facing the transport conveyor 32. Alternatively, the support surface section 52 can also be porous. This allows air to flow out towards the transport conveyor 32 via an air supply (not shown in detail), so that an air cushion forms between the support surface sections 52 and the transport conveyor 32.

[0040] The depressions 53 have 55 extraction openings in their base, through which air is extracted via extraction devices not shown in detail.

[0041] The conveyor belt 32 has several rows of perforations 57 arranged one behind the other. The preferably parallel rows of perforations 57 are aligned above the recesses 53 when viewed in the direction of transport, and when the conveyor belt 32 moves in the direction of transport, the perforations 57 are aligned above the recesses 53. This allows a holding force, in particular a vacuum, to be generated between the conveyor belt 32 and the recording medium 14 resting on it. The conveyor belt 32, which preferably extends along several vacuum chambers 43, 44, 45, thus enables continuous transport in which the recording medium 14 is held fixed to the conveyor belt 32 by the vacuum.

Claims

1. Method for exposing a light-sensitive recording medium (14) with an exposure device (11), which comprises at least one exposure head (16) in a process chamber (35) for exposing the recording medium (14), with at least one support (12), on which the at least one recording medium (14) is positioned and subsequently moved into the process chamber (35), and with at least one image acquisition device (25), which is connected upstream of the at least one exposure head (16) in the direction of entry of the recording medium (14), and with a controller (27) which detects the actual position and / or actual orientation of the recording medium (14) or of the at least one representation (21) on the recording medium (14) and controls the at least one exposure head (16) as a function of a stored desired position of the recording medium (14) for exposure, characterized in - that the support (12) is designed as an endless conveyor belt (32) on which the at least one recording medium (14) is placed, - that the at least one recording medium (14) is moved with the conveyor belt (32) from a loading station (41) outside the process chamber (35) at least into the process chamber (35), and - that at least one first vacuum chamber (43) is assigned to the conveyor belt (32) in the loading station (41) and at least one second vacuum chamber (44) is assigned to the conveyor belt (32) in the process chamber (35), which are controlled separately by a controller.

2. Method according to claim 1, characterized in that the conveyor belt (32) is stopped for exposing the recording medium (14) and a further recording medium (14) is simultaneously placed on the stationary conveyor belt (32) in the loading station (41).

3. Method according to claim 1 or 2, characterized in that during the introduction of the recording medium (14) into the process chamber (35), the actual position and / or actual orientation of the recording medium (14) is detected by the image acquisition device (25) and the at least one exposure head (16) is subsequently activated for exposing the recording medium (14).

4. Method according to one of the preceding claims, characterized in that the recording medium (14) is aligned by stops on the conveyor belt (32) or by positioning pins which engage in positioning holes in the recording medium (14).

5. Method according to one of the preceding claims, characterized in that the first vacuum chamber (43) is activated after the record medium (14) has been placed on the conveyor belt (32) and before a transport movement of the conveyor belt (32) begins.

6. Method according to claim 5, characterized in that the first vacuum chamber (43) is switched off after the recording medium (14) has been introduced into the process chamber (35).

7. Method according to one of the preceding claims, characterized in that an end position of the recording medium (14) is detected in the process chamber (35) by a position sensor (46) after the recording medium (14) has been introduced into the process chamber (35) for the exposure.

8. Method according to one of the preceding claims, characterized in that the recording medium (14) exposed in the process chamber (35) is moved out of the process chamber (35) with the conveyor belt (32) and transferred to a magazine or a turning station or positioned in an unloading station (48).

9. Method according to one of the preceding claims, characterized in that an unexposed recording medium (14) is introduced into the process chamber (35) with the conveyor belt (32) in parallel with the removal of the exposed recording medium (14) from the process chamber (35).

10. Exposure device for exposing at least one light-sensitive recording medium (14), with at least one exposure head (16) in a process chamber (35) for exposing the recording medium (14), with at least one support (12) on which the at least one recording medium (14) can be positioned, with at least one image acquisition device (25), which is connected upstream of the at least one exposure head (16) in the direction of entry of the recording medium (14) into the process chamber (35), and with a controller (27) which detects the actual position and / or actual orientation of the recording medium (14) and / or of the at least one representation (21) on the recording medium (14) and controls the at least one exposure head (16) as a function of a stored desired position of the recording medium (14), characterized in - that the support (12) for the at least one recording medium (14) is designed as an endless conveyor belt (32), - that the conveyor belt (32) extends at least from a loading station (41) in front of the process chamber (35) at least to the end of the process chamber (35), and - that the conveyor belt (32) has at least one first vacuum chamber (43) in the loading station (41) and at least one second vacuum chamber (44) in the process chamber (35), which can be controlled separately by the controller (27).

11. Exposure device according to claim 10, characterized in that the conveyor belt (32) is designed as a vacuum conveyor belt.

12. Exposure device according to claim 10 or 11, characterized in that the conveyor belt (32) has stops, positioning marks and / or positioning pins for aligning and / or receiving the recording medium (14) when it is placed on the conveyor belt (32).

13. Exposure device according to one of claims 10 to 12, characterized in that the conveyor belt (32) extends into an unloading station (48) which adjoins the process chamber (35) and is arranged opposite the loading station (41), or in that the conveyor belt (32) transfers the recording medium (14) from the process chamber (35) into a magazine or a turning station.

14. Exposure device according to one of claims 10 to 13, characterized in that the vacuum chamber (43, 44, 45) has a supporting contour (51) which points towards the transport belt and comprises support surface sections (52) which are interrupted by depressions (53) running in the transport direction, and in that air can be supplied in the region of the support surface sections (52) and air can be extracted via the depressions (53).

15. Exposure device according to one of claims 10 to 14, characterized in that the conveyor belt (32), viewed in the transport direction, has a plurality of rows of openings (57) arranged in a row, which extend in the longitudinal direction of the depressions (53).