MICROEMBRANE PUMP UNIT

Description

[0001] The present invention relates to a microdiaphragm pump device for pumping a fluid. Microdiaphragm pump devices are known, for example, from documents AU 2015308144 A1 and US 20160153444 A1. Another such pump is known from DE 19918694. An insulating adhesive layer between the plate-shaped membrane body and the actuator is not known from this document. This document also does not show a support body with a deformation sensor embedded in the adhesive.

[0002] The object of the present invention is to improve such known micromembrane pump devices.

[0003] The task is solved by a micromembrane pump device for pumping a fluid, which has the following features: A pump chamber, to which an inlet valve for admitting fluid into the pump chamber, an outlet valve for discharging fluid from the pump chamber, and a diaphragm device for varying the volume of the pump chamber are assigned, the diaphragm device comprising a plate-shaped actuator for deforming the diaphragm device; and an influencing device for influencing the plate-shaped actuator in order to influence the volume of the pump chamber; the diaphragm device comprising a plate-shaped diaphragm body bounding the pump chamber; the plate-shaped actuator being arranged on a side of the plate-shaped diaphragm body facing away from the pump chamber; the plate-shaped actuator being attached to the plate-shaped diaphragm body by means of an electrically insulating adhesive layer, so that the plate-shaped actuator is electrically insulated from the diaphragm body;wherein at least one embedded section of a carrier body is arranged within the electrically insulating adhesive layer, on or in which a deformation sensor is arranged for detecting a deformation of the membrane device in order to detect the volume of the pump chamber; wherein the influencing device, the plate-shaped actuator and the deformation sensor form a closed control loop for controlling a ratio between a volume change of the pump chamber during a working cycle of the micromembrane pump device and a duration of the working cycle of the micromembrane pump device; wherein the carrier body comprises one or more electrically insulating materials.

[0004] The fluid to be pumped can be a liquid or a gas. The pump chamber is a closed cavity into which the fluid can be admitted via an inlet valve and from which it can be discharged via an outlet valve. Both the inlet and outlet valves can be passive valves.

[0005] The diaphragm assembly is part of a housing that surrounds the pump chamber and is elastically deformable, allowing the volume of the pump chamber to change. When the volume increases, fluid is drawn into the pump chamber, and when the volume decreases, fluid is forced out. By periodically increasing and decreasing the volume of the pump chamber, a defined fluid flow rate can be achieved.

[0006] To effect such volume changes in the pump chamber, the diaphragm device includes a plate-shaped actuator designed to deform the diaphragm device in such a way as to change the volume of the pump chamber. The plate-shaped actuator is preferably electrically operated.

[0007] A plate-like shape of a body is understood to mean that the body has a significantly smaller extent in one spatial direction than in the other two. The actuator can be round or polygonal when viewed from above.

[0008] Furthermore, a control device is provided that influences the plate-shaped actuator in order to control the desired volume change of the pump chamber. This control device can be electrical, generating electrical signals that are supplied to the actuator for its control.

[0009] The membrane assembly features an elastically deformable membrane body that defines the pump chamber and is plate-shaped. The membrane body can be attached to a frame or bracket of the housing, for example. Alternatively, it can be formed integrally with other parts of the housing.

[0010] The plate-shaped actuator is located on the side of the plate-shaped membrane body facing away from the pump chamber. It is therefore not in direct contact with the fluid being pumped, which particularly simplifies the transmission of electrical signals from the control device to the actuator.

[0011] The plate-shaped actuator is attached to the plate-shaped membrane body by means of an electrically insulating adhesive layer. This adhesive layer is designed to transmit forces from the actuator to the membrane body, thereby enabling deformation of the membrane body and consequently a change in the volume of the pump chamber. The electrically insulated nature of the adhesive layer ensures that the plate-shaped actuator is electrically isolated from the membrane body. This allows the use of a plate-shaped actuator that is electrically powered independently of ground on its side facing the membrane body, even if the membrane body is electrically conductive.

[0012] The actuator can have a height between 30 µm and 2000 µm, particularly between 45 µm and 1500 µm, to ensure the required forces. It should exhibit high stiffness, good adhesive properties, and resistance to environmental influences (humidity, solvents, temperature, radiation (often used for sterilization in medical devices)). Furthermore, it should be fracture-resistant, fatigue-resistant, and electrically dielectric-resistant.

[0013] The electrically insulated design of the adhesive layer is also advantageous when the membrane body is electrically insulating, as this reduces the electric field strength between the actuator and the fluid being pumped, thus preventing electrical arcing between the actuator and the fluid. This is particularly beneficial when the plate-shaped actuator is operated at higher voltages, for example, in the range of 20 V to 400 V.

[0014] The adhesive layer should be as thin as possible on both sides of the embedded section of the substrate. It should exhibit high stiffness, good adhesion properties, and resistance to environmental influences (moisture, solvents, temperature, radiation (which is frequently used for sterilization in medical devices)). Furthermore, it should be fracture-resistant, durable, non-conductive, and electrically dielectric resistant.

[0015] Within the electrically insulating adhesive layer, an embedded section of a carrier body is arranged, on the surface or inside of which a deformation sensor is arranged, which can detect the volume of the pump chamber over time by detecting a deformation of the membrane device.

[0016] The embedded section of the carrier body can be less than 500 µm thick to ensure the required flexibility. It should exhibit high stiffness, good adhesion properties, and resistance to environmental influences (moisture, solvents, temperature, radiation (often used for sterilization in medical devices)). Furthermore, it should be fracture-resistant, fatigue-resistant, non-conductive, and electrically dielectrically resistant.

[0017] The influencing device, the plate-shaped actuator and the deformation sensor form a closed control loop for regulating the ratio caused by the micromembrane pump devices between a volume change of the pump chamber (2) during a working cycle of the micromembrane pump device (1) and a duration of the working cycle of the fluid.

[0018] A closed-loop control circuit is generally defined as a self-contained system for influencing a physical quantity in a technical process or other system. Essential to this is the direct or indirect feedback of the current value of the controlled variable to the controller, which counteracts any deviation from the setpoint (negative feedback). The controller's task is to compensate for disturbances and to define the time response of the controlled variable with respect to its static and dynamic behavior according to predefined requirements.

[0019] Within the scope of the present invention, the control device assumes the function of a controller. The controlled variable is the ratio between the volume change of the pump chamber during a working cycle of the microdiaphragm pump device and the duration of the working cycle. The working cycle comprises a phase in which the fluid is admitted into the pump chamber via the inlet valve and a further phase in which the fluid is discharged via the outlet valve. Under normal operating conditions, this ratio corresponds to the volumetric flow rate of the respective fluid. The volumetric flow rate is measured indirectly from the known duration of the working cycles, which is determined by the control device, and from the known deformation of the diaphragm device, which is detected by the deformation sensor.

[0020] The indirect measurements are transmitted to an influence device, so that if the volume flow deviates from a setpoint, the control of the plate-shaped actuator can be adjusted to achieve the desired volume flow. Specifically, the volume flow can be influenced by increasing or decreasing the amplitude of the volume change in the pump chamber. Similarly, the frequency of the volume change in the pump chamber can be increased or decreased.

[0021] It has been shown that such an indirect measurement of the volumetric flow rate is significantly faster, more accurate, simpler, and cheaper than a direct measurement of the volumetric flow rate with known flow sensors, which, for example, use an impeller, thus allowing for much better control of disturbances. Likewise, the proposed microdiaphragm pump system proves superior to pump systems in which individual disturbances, such as temperatures and pressures, are detected by sensors and used in an open-loop control circuit of the pump system.

[0022] The proposed control loop allows for significantly more precise control of the volume flow rate than is possible with unregulated control devices. The use of a deformation sensor and its placement in the adhesive layer between the membrane body and the actuator enables highly precise feedback of the actual volume flow rate value to the control device.

[0023] External influences, also called disturbances, on the volume flow can be precisely controlled. Disturbances that can be controlled by the micromembrane pump device according to the invention are: Pressures, for example, the fluid pressure upstream of the inlet valve, the fluid pressure downstream of the outlet valve, or the pressure on the outside of the diaphragm assembly. Temperatures, for example, of the fluid or the environment of the microdiaphragm pump assembly, which can lead to stress in the diaphragm assembly or to a change in the actuator's characteristic curve. For example, in a piezoceramic actuator, the technically relevant d31 coefficient is temperature-dependent. Changes in the fluid's properties, which can lead to a change in the effective volume change of the pump chamber with constant actuator control, especially when pumping liquids. Here, for example, a change in viscosity caused by a temperature change or a change in the fluid's composition leads to different inflow and outflow times and thus to a different volume flow rate.Tolerances of the mechanical components of the microdiaphragm pump assembly, such as the pump chamber housing, inlet valve, outlet valve, actuator, or diaphragm body. This prevents different flow rates in different microdiaphragm pump assemblies of the same series due to geometric deviations (bending, thickness variations, parallelism errors) of the mechanical components. Tolerances in the joining of the mechanical components of the microdiaphragm pump assembly, for example, during the formation of the adhesive layer.

[0024] The micromembrane pump device according to the invention can be advantageously used whenever highly precise dosing of a fluid is required, for example, when mixing different fluids. In particular, it can be used in the medical field for dosing medications or for mixing medication components.

[0025] According to a preferred embodiment of the invention, the adhesive layer lies flat, in particular over the entire surface, against a side of the plate-shaped actuator facing the membrane body, and / or the adhesive layer lies flat, in particular over the entire surface, against a side of the membrane body facing the plate-shaped actuator. In this way, forces generated by the actuator can be reliably transferred to the adhesive layer and from the adhesive layer to the membrane body. This results in, in particular, high rigidity of the arrangement and insensitivity to high shear forces, which ultimately improves dosing accuracy.

[0026] According to a preferred embodiment of the invention, the adhesive layer comprises a cured liquid adhesive, a cured adhesive paste, and / or an adhesive film. Liquid adhesives, adhesive pastes, and adhesive films are easy to handle during the manufacture of the diaphragm pump device and exhibit sufficiently good adhesive properties to reliably transmit the required forces from the actuator to the diaphragm body, thereby increasing the dosing accuracy.

[0027] According to a preferred embodiment of the invention, the adhesive layer comprises a temperature-curing material, an anaerobically curing material, a UV-curing material, an activator-curing material, a humidity-curing material, a drying-curing material, and / or a hot-melt adhesive material. Such adhesive materials are easy to handle in the manufacture of the diaphragm pump device and exhibit sufficiently good adhesive properties to reliably transmit the required forces from the actuator to the diaphragm body, thereby increasing the metering accuracy.

[0028] According to an advantageous embodiment of the invention, the plate-shaped actuator is an electromagnetic actuator, a single- or multi-layer piezoelectric actuator, a shape memory actuator, or a bimetallic actuator. Single-layer piezoelectric actuators have one electrical connection on their underside and one on their top side. Since the adhesive layer is non-conductive in the invention, the single-layer piezoelectric actuator can be powered symmetrically with respect to ground. In multi-layer actuators, both electrical contacts are arranged on the side facing the crane body, and the non-conductive properties of the adhesive layer prevent a short circuit. Shape memory actuators or bimetallic actuators can also be used without difficulty due to the insulating properties of the adhesive layer.

[0029] According to the invention, the carrier body comprises one or more electrically insulating materials. Polyimides, for example, are particularly suitable.

[0030] According to a convenient embodiment of the invention, the support body comprises glass, one or more semiconductor materials, one or more composite materials, one or more polymeric materials, or one or more ceramic materials.

[0031] According to an advantageous further development of the invention, the deformation sensor is a strain gauge, in particular a resistive, capacitive or piezoresistive strain gauge.

[0032] According to a convenient further development of the invention, the deformation sensor is a force sensor.

[0033] According to a suitable further development of the invention, the membrane body comprises a metal, a semiconductor material and / or a plastic.

[0034] According to a practical embodiment of the invention, at least part of the evaluation electronics for evaluating signals from the deformation sensor is arranged on or in the carrier body. This improves interference immunity, which ultimately benefits dosing accuracy.

[0035] According to a preferred embodiment of the invention, the control device for detecting malfunctions of the microdiaphragm pump assembly is designed using measurement signals from the deformation sensor. Malfunctions can occur repeatedly during operation of the microdiaphragm pump assembly. For example, the inlet or outlet valve may become jammed by particles, the actuator may fail, an air bubble may enter the pump chamber in the case of a liquid fluid, and many other things. Such malfunctions are detectable in the measurement signals of the deformation sensor because they affect the deformation of the diaphragm assembly or directly influence the actuator.

[0036] According to a further advantageous embodiment of the invention, the carrier body has a non-embedded section that extends out of the adhesive layer. Contacts for tapping measurement signals from the deformation sensor are attached to this non-embedded section and are electrically connected to the deformation sensor. The electrical connections between the contacts for the deformation sensor and the deformation sensor itself can be formed on or within the carrier body, so that they are mechanically protected and electrically insulated from both the actuator and the membrane body.

[0037] According to a preferred embodiment of the invention, a heating wire is arranged on or within the embedded section. The heating wire allows the fluid to be pumped to be heated. Additionally, the heating wire can be used during the manufacture of the micromembrane pump device to heat the adhesive layer and cure it, provided the adhesive layer comprises a heat-curing material. The heating wire can be supplied with electrical energy either by the control device or by an external device.

[0038] According to a preferred embodiment of the invention, the carrier body has a non-embedded section that extends from the adhesive layer. Contacts for supplying electrical energy to the heating wire are attached to this non-embedded section and are electrically connected to the heating wire. The electrical connections between the contacts for the heating wire and the heating wire itself can be formed on or within the carrier body, thus providing mechanical protection and electrical insulation from both the actuator and the membrane body.

[0039] According to a further advantageous embodiment of the invention, a temperature sensor is arranged on or in the embedded section. Measurement signals from the temperature sensor can, for example, be supplied to the control device or an external device that supplies the heating wire with electrical energy. In this way, the heating effect of the heating wire can be controlled during the manufacture of the microdiaphragm pump device or during its operation.

[0040] According to a preferred embodiment of the invention, the carrier body has a non-embedded section that extends from the adhesive layer, with contacts for tapping measurement signals from the temperature sensor being attached to this non-embedded section and electrically connected to the temperature sensor. The electrical connections between the contacts for the temperature sensor and the temperature sensor itself can be formed on or within the carrier body, so that they are mechanically protected and electrically insulated from both the actuator and the membrane body.

[0041] According to an advantageous embodiment of the invention, a condition sensor, in particular a humidity sensor or a chemical sensor, is arranged on or in the embedded section to monitor the condition of the adhesive layer. The measurement signals of the condition sensor can be supplied to the control device. In this way, the control device can detect age-related or externally caused deterioration of the adhesive layer's condition before the adhesive layer fails, which can be particularly advantageous in medical applications.

[0042] According to an advantageous embodiment of the invention, the carrier body has a non-embedded section that extends from the adhesive layer, wherein contacts for tapping measurement signals from the condition sensor are attached to the non-embedded section and are electrically connected to the condition sensor. The electrical connections between the contacts for the condition sensor and the condition sensor can be formed on or in the carrier body, so that they are mechanically protected and electrically insulated from both the actuator and the membrane body.

[0043] According to a further advantageous embodiment of the invention, the embedded section of the carrier body, viewed in the direction from the plate-shaped actuator to the plate-shaped membrane body, has an area that is smaller than the area of ​​the plate-shaped membrane body facing the embedded section of the carrier body, and which is smaller than the area of ​​the plate-shaped actuator facing the embedded section of the carrier body. This ensures that the adhesive layer is at least partially continuous from the actuator to the membrane body in the specified direction. This results in particularly good force transmission between the actuator and the membrane body.

[0044] According to an advantageous embodiment of the invention, the embedded section of the carrier body has at least one through-hole extending from a side of the embedded section of the carrier body facing the plate-shaped actuator to a side of the embedded section of the carrier body facing the plate-shaped membrane body. This ensures that the adhesive layer extends continuously from the actuator to the membrane body in the area of ​​the through-hole. This results in particularly good force transmission between the actuator and the membrane body.

[0045] According to a further advantageous embodiment of the invention, the embedded section of the carrier body, viewed in the direction from the plate-shaped actuator to the plate-shaped membrane body, has an edge which has indentations. In the area of ​​the indentations, the adhesive layer extends without interruption from the actuator to the membrane body. Since a large part of the forces generated by the actuator are transferred to the adhesive layer in an edge region of the actuator, this results in a particularly good transfer of forces from the actuator to the membrane body.

[0046] The present invention and its advantages are described in more detail below with reference to figures. Figure 1 shows a first embodiment of a micromembrane pump device according to the present invention in a schematic side view; Figure 2 shows a second embodiment of a micromembrane pump device according to the present invention in a schematic side view; Figure 3 shows a third embodiment of a micromembrane pump device according to the present invention in a schematic side view; Figure 4 shows an exemplary actuator, an exemplary support body, and an exemplary membrane body for a micromembrane pump device according to the present invention in a schematic three-dimensional exploded view; Figure 5 shows an exemplary support body with an exemplary deformation sensor for a micromembrane pump device according to the present invention in a schematic top view;Figure 6 shows a simplified partial view of a microdiaphragm pump device according to the present invention in a schematic side view in a rest state; Figure 7 shows a simplified partial view of a microdiaphragm pump device according to the present invention in a schematic side view during fluid inlet; and Figure 8 shows a simplified partial view of a microdiaphragm pump device according to the present invention in a schematic side view during fluid outlet.

[0047] Identical or similar elements, or elements with the same or equivalent function, are below designated with the same or similar reference symbols.

[0048] The following description details exemplary embodiments with a multitude of features of the present invention in order to provide a better understanding of the invention. It should be noted, however, that the present invention can also be implemented by omitting individual features described. It should also be pointed out that the features shown in the various exemplary embodiments can be combined in other ways, unless this is expressly excluded or would lead to contradictions.

[0049] Figure 1 Figure 1 shows a first embodiment of a micromembrane pump device 1 according to the present invention in a schematic side view.

[0050] The micromembrane pump device 1 for pumping a fluid FL has the following features: a pump chamber 2, to which an inlet valve 3 for admitting the fluid FL into the pump chamber 2, an outlet valve 4 for discharging the fluid FL from the pump chamber 2, and a diaphragm device 5 for varying a volume of the pump chamber 1 are assigned, wherein the diaphragm device 5 comprises a plate-shaped actuator 6 for deforming the diaphragm device 5; and an influencing device 7 for influencing the plate-shaped actuator 6 in order to influence the volume of the pump chamber 2; wherein the diaphragm device 5 comprises a plate-shaped diaphragm body 8 delimiting the pump chamber 2; wherein the plate-shaped actuator 6 is arranged on a side of the plate-shaped diaphragm body 8 facing away from the pump chamber 2; wherein the plate-shaped actuator 6 is attached to the plate-shaped diaphragm body 8 by means of an electrically insulating adhesive layer 9, so that the plate-shaped actuator 6 is electrically insulated from the diaphragm body 8;wherein at least one embedded section 10 of a carrier body 11 is arranged within the electrically insulating adhesive layer 9, on or in which a deformation sensor 12 is arranged for detecting a deformation of the membrane device 5 in order to detect the volume of the pump chamber 2; wherein the influencing device 7, the plate-shaped actuator 6 and the deformation sensor 12 form a closed control loop for controlling a ratio between a volume change of the pump chamber (2) during a working cycle of the micro membrane pump device (1) and a duration of the working cycle of the micro membrane pump device 1.

[0051] According to a preferred embodiment of the invention, the adhesive layer 9 lies flat, in particular over the entire surface, on a side of the plate-shaped actuator 6 facing the membrane body 8 and / or the adhesive layer 9 lies flat, in particular over the entire surface, on a side of the membrane body 8 facing the plate-shaped actuator 6.

[0052] According to an advantageous further development of the invention, the adhesive layer 9 comprises a cured liquid adhesive, a cured adhesive paste and / or an adhesive film.

[0053] According to an advantageous embodiment of the invention, the adhesive layer 9 comprises a temperature-curing material, an anaerobically curing material, a UV-curing material, an activator-curing material, a humidity-curing material, a drying-curing material and / or a hot melt adhesive material.

[0054] According to a suitable further development of the invention, the plate-shaped actuator 6 is an electromagnetic actuator, a single- or multi-layer piezoelectric actuator, a shape memory actuator or a bimetallic actuator.

[0055] According to the invention, the carrier body 11 comprises one or more electrically insulating materials.

[0056] According to a convenient embodiment of the invention, the support body 11 comprises glass, one or more semiconductor materials, one or more composite materials, one or more polymeric materials or one or more ceramic materials.

[0057] According to an advantageous further development of the invention, the deformation sensor 12 is a strain gauge, in particular a resistive, capacitive or piezoresistive strain gauge.

[0058] According to a convenient further development of the invention, the deformation sensor 12 is a force sensor.

[0059] According to a suitable further development of the invention, the membrane body 8 comprises a metal, a semiconductor material and / or a plastic.

[0060] According to an advantageous embodiment of the invention, at least part of an evaluation electronics for evaluating signals from the deformation sensor 12 is arranged on or in the carrier body 11.

[0061] According to a suitable further development of the invention, the influencing device 7 is designed to detect operational malfunctions of the micromembrane pump device 1 on the basis of measurement signals MS of the deformation sensor 12.

[0062] According to an advantageous embodiment of the invention, the carrier body 11 has a non-embedded section 13 which is brought out of the adhesive layer 9, wherein contacts 14 for tapping measurement signals MS of the deformation sensor are attached to the non-embedded section 13, which are electrically connected to the deformation sensor.

[0063] In the exemplary embodiment of the Figure 1The deformation sensor 12 is electrically connected to contacts 14, which are arranged on the non-embedded section 13 of the carrier body 11. The contacts 14, in turn, are electrically connected to the control unit 7 via a measuring line 15, so that measurement signals MS from the deformation sensor 12 can be transmitted to the control unit 7. Based on the measurement signals MS, the control unit 7 generates control signals ST, which are transmitted to the actuator 6 via a control line 16 and control it. The control signals ST can also be used to supply power to the actuator 6.

[0064] Figure 2 Figure 1 shows a second embodiment of a micromembrane pump device 1 according to the present invention in a schematic side view. The embodiment of the Figure 2 based on the exemplary embodiment of the Figure 1 , so that only the differences will be described and explained below.

[0065] According to a preferred embodiment of the invention, a heating wire 17 is arranged on or in the embedded section 10.

[0066] According to an advantageous embodiment of the invention, the carrier body 11 has a non-embedded section 13 which is brought out of the adhesive layer 9, wherein contacts 18 for supplying electrical energy EE to the heating wire 17 are attached to the non-embedded section 13 and are electrically connected to the heating wire 17.

[0067] According to an advantageous embodiment of the invention, a temperature sensor 20 is arranged on or in the embedded section 10.

[0068] According to a further advantageous embodiment of the invention, the carrier body 11 has a non-embedded section 13 which is brought out of the adhesive layer 9, wherein contacts 21 for tapping measurement signals TMS of the temperature sensor 20 are attached to the non-embedded section 13, which are electrically connected to the temperature sensor 20.

[0069] In the exemplary embodiment of the Figure 2The heating wire 17 is electrically connected to contacts 18 formed on the non-embedded section 13 of the carrier body 11. The contacts 18 are connected to the control unit 7 via a supply line 19, enabling the control unit 7 to supply the heating wire 17 with electrical energy EE. This allows the fluid FL to be heated in a controlled manner by the control unit 7. Similarly, during the manufacture of the microdiaphragm pump unit 1, the adhesive layer 9 can be heated to cure it. However, the electrical energy EE could also be supplied by a device independent of the control unit 7.

[0070] Furthermore, the temperature sensor 20 is connected to contacts 21 formed on the non-embedded section 13 of the carrier body 11. The contacts 21 are connected to the control unit 7 via a measuring line 22, so that measurement signals TMS from the temperature sensor 20 can be transmitted to the control unit 7. The measurement signals TMS can be used by the control unit 7 to regulate the heating power of the heating wire 17.

[0071] Figure 3 Figure 1 shows a third embodiment of a micromembrane pump device 1 according to the present invention in a schematic side view. The embodiment of Figure 3 based on the exemplary embodiment of the Figure 1 , so that only the differences will be described and explained below.

[0072] According to an advantageous embodiment of the invention, a condition sensor 23, in particular a humidity sensor or a chemical sensor, is arranged on or in the embedded section 10 to monitor the condition of the adhesive layer 9.

[0073] According to a further advantageous embodiment of the invention, the carrier body 11 has a non-embedded section 13 which is brought out of the adhesive layer 9, wherein contacts 24 for tapping measurement signals ZMS of the condition sensor 23 are attached to the non-embedded section 13, which are electrically connected to the condition sensor 23.

[0074] In the exemplary embodiment of the Figure 3A condition sensor 23 is electrically connected to contacts 24, which are formed on the non-embedded section 13 of the carrier body 11 and are electrically connected to the control device 7 via a measuring line 25, so that measurement signals ZMS from the condition sensor 23 can be transmitted to the control device 7. The measurement signals ZMS can be used by the control device 7 for the early detection of a malfunction of the microdiaphragm pump device 1 due to damage to the adhesive layer 9.

[0075] Figure 4 Figure 1 shows an exemplary actuator 6, an exemplary carrier body 11 and an exemplary membrane body 8 for a micro membrane pump device 1 according to the present invention in a schematic three-dimensional exploded view.

[0076] According to an advantageous further invention, the embedded section 10 of the carrier body 11, viewed in a direction RI from the plate-shaped actuator 6 to the plate-shaped membrane body 8, has an area 26 which is smaller than an area 27 of the plate-shaped membrane body 8 facing the embedded section 10 of the carrier body 11, and which is smaller than an area 28 of the plate-shaped actuator 6 facing the embedded section 10 of the carrier body 11.

[0077] According to a further advantageous embodiment of the invention, the embedded section 10 of the carrier body 11 has at least one through-hole 29, which extends from a side of the embedded section 10 of the carrier body 11 facing the plate-shaped actuator 6 to a side of the embedded section 10 of the carrier body 11 facing the plate-shaped membrane body 8.

[0078] Figure 5Figure 1 shows an exemplary carrier body with an exemplary deformation sensor 12 for a micro diaphragm pump device 1 according to the present invention in a schematic top view.

[0079] According to an advantageous embodiment of the invention, the embedded section 10 of the carrier body 11, viewed in the direction RI from the plate-shaped actuator 6 to the plate-shaped membrane body 8, has an edge 30 which has indentations 31.

[0080] Figure 6 Figure 1 shows a simplified partial view of a micromembrane pump device 1 according to the present invention in a schematic side view in a resting state. The actuator 6 is shown in its resting position, so that the membrane body 8 is also in its resting position.

[0081] Figure 7Figure 1 shows a simplified partial view of a micromembrane pump device 1 according to the present invention in a schematic side view during the introduction of a fluid FL. The actuator 6 is controlled such that it moves in such a way that, together with the membrane body 8, it increases the volume of the pump chamber 2 compared to the volume that the pump chamber 2 occupies when the actuator 6 is in its rest position.

[0082] Figure 8 Figure 1 shows a simplified partial view of a micromembrane pump device according to the present invention in a schematic side view during the discharge of a fluid. Here, the actuator 6 is controlled such that it moves in such a way that, together with the membrane body 8, it reduces the volume of the pump chamber 2 compared to the volume that the pump chamber 2 occupies when the actuator 6 is in its rest position.

[0083] The volume flow rate of the fluid FL can be generated by periodically switching the actuator 6 between the one in the Figure 7 the position shown and the one in the Figure 8 The actuator 6 is moved back and forth in the position shown. However, it is also conceivable that the volume flow of the fluid FL is generated by moving the actuator 6 between the position shown in the Figure 6 the position shown and the one in the Figure 7 The actuator 6 is moved back and forth in the position shown. It is also conceivable that the volume flow of the fluid FL is generated by moving the actuator 6 between the position shown in the Figure 6 the position shown and the one in the Figure 8 The position shown is moved back and forth.

[0084] Although specific embodiments of the invention are illustrated and described herein, it is apparent to those skilled in the art that the illustrated and described specific embodiments can be replaced by a multitude of alternative and / or equivalent embodiments without departing from the subject matter of the present invention. This patent application intends to cover all adaptations or variations of the described specific embodiments. Therefore, it is intended that the invention is limited exclusively to the subject matter of the appended claims. Reference symbol:

[0085] 1 Microdiaphragm pump unit 2 Pump chamber 3 Inlet valve 4 Outlet valve 5 Membrane assembly 6 Actuator 7 Control device 8 Membrane body 9 Adhesive layer 10 Embedded section 11 Carrier body 12 Deformation sensor 13 Non-embedded section 14 Contacts 15 Measuring line 16 Control line 17 Heating wire 18 Contacts 19 Supply line 20 Temperature sensor 21 Contacts 22 Measuring line 23 Status sensor 24 Contacts 25 Measuring line 26 Area 27 Area 28 Area 29 Through hole 30 Edge 31 Indentations FL Fluid MS Measurement signals ST Control signals EE Electrical energy TMS Measurement signals ZMS Measurement signals RI Direction

Claims

1. A micromembrane pumping device for pumping a fluid (FL), comprising: a pump chamber (2) to which an inlet valve (3) for introducing the fluid (FL) into the pump chamber (2), an outlet valve (4) for discharging the fluid (FL) from the pump chamber (2), and a membrane device (5) for varying a volume of the pump chamber (1) are associated, wherein the membrane device (5) comprises a plate-shaped actuator (6) for deforming the membrane device (5); and influencing means (7) for influencing the plate-shaped actuator (6) so as to influence the volume of the pump chamber (2); wherein the membrane device (5) comprises a plate-shaped membrane body (8) limiting the pump chamber (2); wherein the plate-shaped actuator (6) is arranged on a side of the plate-shaped membrane body (8) facing away from the pump chamber (2); wherein the plate-shaped actuator (6) is mounted to the plate-shaped membrane body (8) by means of an electrically insulating glue layer (9) so that the plate-shaped actuator (6) is electrically insulated from the membrane body (8); wherein at least one embedded portion (10) of a support body (11) at which or in which a deformation sensor (12) for detecting a deformation of the membrane device (5) is arranged, is arranged within the electrically insulating glue layer (9) in order to detect the volume of the pump chamber (2); wherein the influencing means (7), the plate-shaped actuator (6) and the deformation sensor (12) form a closed-loop control circuit for regulating a ratio between a change in volume of the pump chamber (2) during an operating cycle of the micromembrane pumping device (1) and a duration of the operating cycle of the micromembrane pumping device (1); wherein the support body includes one or more electrically insulating materials.

2. The micromembrane pumping device in accordance with the preceding claim, wherein the glue layer (9) is applied over an area, in particular the entire area, on a side of the plate-shaped actuator (6) facing the membrane body (8), and / or wherein the glue layer (9) is applied over an area, in particular the entire area, on a side of the membrane body (8) facing the plate-shaped actuator (6).

3. The micromembrane pumping device in accordance with any of the preceding claims, wherein the glue layer (9) comprises a temperature-curing material, an anaerobically curing material, a UV radiation-curing material, an activator-curing material, humidity-curing material, dry-curing material and / or hot-melt glue material.

4. The micromembrane pumping device in accordance with any of the preceding claims, wherein the plate-shaped actuator (6) is an electromagnetic actuator, a single-layer or multi-layer piezoelectric actuator, a shape-memory actuator or bimetal actuator.

5. The micromembrane pumping device in accordance with any of the preceding claims, wherein the support body (11) comprises glass, one or more semiconductor materials, one or more composites, one or more polymeric materials or one or more ceramic materials.

6. The micromembrane pumping device in accordance with any of the preceding claims, wherein the deformation sensor (12) is a strain gauge, in particular a resistive, capacitive or piezoresistive strain gauge.

7. The micromembrane pumping device in accordance with any of the preceding claims, wherein the membrane body (8) comprises a metal, semiconductor material and / or plastic.

8. The micromembrane pumping device in accordance with any of the preceding claims, wherein at least a part of evaluating electronics for evaluating signals of the deformation sensor (12) is arranged at or in the support body (11).

9. The micromembrane pumping device in accordance with any of the preceding claims, wherein the influencing means (7) is configured for recognizing operating disturbances of the micromembrane pumping device (1) using measuring signals (MS) of the deformation sensor (12).

10. The micromembrane pumping device in accordance with any of preceding claims, wherein the support body (11) comprises a non-embedded portion (13) which is led out from the glue layer (9), wherein contacts (14) for tapping measuring signals (MS) of the deformation sensor (12) which are electrically connected to the deformation sensor (12) are attached to the non-embedded portion (13).

11. The micromembrane pumping device in accordance with any of claims 1 to 9, wherein a heating wire (17) is arranged at or in the embedded portion (10), wherein the support body (11) comprises a non-embedded portion (13) which is led out from the glue layer (9), wherein contacts (18) for providing the heating wire (17) with electrical energy (EE) which are electrically connected to the heating wire (17) are attached to the non-embedded portion (13).

12. The micromembrane pumping device in accordance with any of claims 1 to 9, wherein a temperature sensor (20) is arranged at or in the embedded portion (10). wherein the support body (11) comprises a non-embedded portion (13) which is led out from the glue layer (9), wherein contacts (21) for tapping measuring signals (TMS) of the temperature sensor (20) which are electrically connected to the temperature sensor (20) are attached to the non-embedded portion (13).

13. The micromembrane pumping device in accordance with any of claims 1 to 9, wherein a state sensor (23), in particular a humidity sensor or a chemical sensor, for checking a state of the glue layer (9) is arranged at or in the embedded portion (10), wherein the support body (11) comprises a non-embedded portion (13) which is led out from the glue layer (9), wherein contacts (24) for tapping measuring signals (ZMS) of the state sensor (23) which are electrically connected to the state sensor (23) are attached to the non-embedded portion (13).

14. The micromembrane pumping device in accordance with any of the preceding claims, wherein the embedded portion (10) of the support body (11), when viewed in a direction (RI) from the plate-shaped actuator (6) towards the plate-shaped membrane body (8), comprises an area (26) which is smaller than an area (27) of the plate-shaped membrane body (8) facing the embedded portion (10) of the support body (11), and which is smaller than an area (28) of the plate-shaped actuator (6) facing the embedded portion (10) of the support body (11).

15. The micromembrane pumping device in accordance with any of the preceding claims, wherein the embedded portion (10) of the support body (11) comprises at least one through hole (29) which extends from a side of the embedded portion (10) of the support body (11), facing the plate-shaped actuator (6), to a side of the embedded portion (10) of the support body (11), facing the plate-shaped membrane body (8), wherein the embedded portion (10) of the support body (11), when viewed in the direction (RI) from the plate-shaped actuator (6) towards the plate-shaped membrane body (8), comprises an edge (30) which comprises recesses (31).