SCROLL VACUUM PUMP AND ITS OPERATING PROCEDURE

DE502024001183D1Active Publication Date: 2026-06-03PFEIFFER VACUUM TECH AG
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Patent Information

Authority / Receiving Office
DE · DE
Patent Type
Patents
Current Assignee / Owner
PFEIFFER VACUUM TECH AG
Filing Date
2024-05-31
Publication Date
2026-06-03

AI Technical Summary

Technical Problem

Scroll vacuum pumps with TipSeals face issues such as limited lifespan, abrasion, sensitivity to external influences, and require precise axial gap dimensions, leading to variable vacuum performance and increased maintenance.

Method used

Implementing an adjusting means to actively or passively influence thermal expansion and heat transfer within the pump, using materials with varying thermal conductivities, heating/cooling devices, and control systems to precisely set and maintain the axial gap between spiral components.

Benefits of technology

Ensures consistent vacuum performance over time by reducing maintenance needs and minimizing the impact of external influences, while allowing for precise adjustment of the axial gap to enhance pump efficiency.

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