Display and identification unit for transport containers for wafers or photomasks in semiconductor factories

Abstract

The invention relates to, among others, a display and identification unit (1) for transport containers (10) for wafers or photomasks (20) in semiconductor manufacturing facilities (100), comprising a passive LF-RFID transponder (2), which can be written with a frequency of 134.2 kHz in order to allow data (DT) transmitted from an external LF-RFID device (30) with a frequency of 134.2 kHz to be received, and an electronically writable passive display element (3) for displaying at least some of the data (DT) received by the passive LF-RFID transponder (2), wherein the passive LF-RFID transponder (2) and the passive display element (3) are designed to transmit data from the passive LF-RFID transponder (2) to the passive display element (3) via a data connection (4).

Description

[0001] Display and identification unit for transport containers for wafers or photomasks in semiconductor factories

[0002] Field of the invention

[0003] The present invention relates to a display and identification unit for transport containers for wafers or photomasks, specifically for the semiconductor industry. The display and identification unit is equipped with an LF-RFID transponder that can be read and written at a frequency of 134.2 kHz, and with an electronically writable display element for displaying at least part of the data received by the LF-RFID transponder, all data, or even more data than stored on the transponder.The invention further relates to a transport container with such a display and identification unit, a tracking system for such transport containers, a semiconductor manufacturing plant with such a tracking system, as well as a method for operating such a tracking system, a method for upgrading a conventional transport container for wafers or photomasks to such a transport container and a use of such a transport container in a semiconductor manufacturing plant.

[0004] Background of the invention

[0005] In the semiconductor industry, special transport boxes (so-called carrier boxes, FOUPs, or SMIF pods, for example) are used to transport the wafers or photomasks on which the chips are subsequently manufactured between production steps. To distinguish and identify the boxes, they are often equipped with cleanroom paper or RFID transponders. These media contain, for example, the actual order number, batch number, and / or the current production status of the box, or the aforementioned information is stored in databases and linked to a unique ID on the RFID transponder.

[0006] Although the paper is directly readable by production or logistics employees, it cannot be updated and cannot be read automatically (keyword: digitization). The RFID transponders, however, can be updated, as can the data stored in the databases. However, the data is not visible to production employees. RFID is a wireless technology and is used exclusively for automated identification.

[0007] It would therefore be desirable if production employees could directly read the information from the RFID transponders visually, without having to use additional devices, in order to have the latest data on the transport boxes or transport containers on site.

[0008] Summary of the invention

[0009] The object of the invention is therefore to provide production employees with a means of reading the information from the RFID transponders and, if applicable, also the information contained in the databases behind them, in order to have the latest data on the transport containers or production orders and batches on site.

[0010] The object is achieved by a display and identification unit for transport containers for wafers or photomasks in semiconductor manufacturing plants, comprising a passive LF-RFID transponder which can be written to at a frequency of 134.2 kHz in order to be able to receive data sent from an external LF-RFID device at the frequency of 134.2 kHz, and an electronically writable passive display element for displaying at least part of the data received from the passive LF-RFID transponder, wherein the passive LF-RFID transponder and the passive display element are designed to transmit data from the passive LF-RFID transponder to the passive display element via a data connection.

[0011] RFID refers to a technology for transmitter-receiver systems for automatic and contactless data exchange, for example for identifying and locating objects using radio waves, in this case transport containers for wafers or photomasks in semiconductor manufacturing plants. An RFID transponder consists of an antenna, an electrical circuit for receiving and transmitting, and a digital circuit, possibly with memory. The entire electronics are often integrated into a single microchip. Passive transponders refer to transponders that cannot actively transmit and do not have their own power supply. Passive transponders draw their energy from the received signal or the antenna field of the transmitter and therefore do not require their own power supply, e.g., their own battery, to receive, process, or forward data. Passive transponders are cheaper than transponders with their own power supply.The range of passive transponders is typically in the range of a few centimeters. For example, LF-RFID transponders from Texas Instruments can be used.

[0012] The present invention uses the transmission / reception frequency of 134.2 kHz for data transmission between the external RFID device and the RFID transponder in the display and identification unit in the long-wave frequency range. The advantages of using LF-RFID technology are that: Interference with radio waves is negligible, ensuring secure and undisturbed data communication between transmitter and receiver. This means that the transport containers can be reliably written to and tracked even in an environment permeated by radio waves. The longer wavelengths make it easier to penetrate metallic objects, meaning the transport containers can also be made of metal. The shorter reading range compared to HF frequencies avoids interference from neighboring transport containers when reading a specific transport container.Since the transport routes of the transport containers are determined by the logistics processes, the transmitter / receiver devices for data communication with the LF transponder can be positioned close to the LF transponder, so that the shorter reading range does not negatively impact the quality of data exchange with the transport container in question. In fact, data exchange is more secure and less disrupted, even when transport containers pass such a transmitter / receiver device in close proximity. In this respect, the combination of passive transponders for LF frequencies is particularly advantageous for reducing susceptibility to interference.

[0013] The passive display element connected to the LF-RFID transponder in the display and identification unit is a display element that does not require its own power supply (e.g. batteries) to show the information on the display of the passive display element and to change it. The passive display element therefore does not require its own power supply, e.g. its own battery. The information shown on the display of the passive display element remains stable even without a power supply and can be read visually at any time. Energy is only required to change the display; this energy is not drawn from its own power supply, but rather from the antenna field of the RFID transmitter. For this purpose, the passive display element is suitably connected to the passive LF-RFID transponder, here with a data connection.The data connection refers to the connection through which energy is transmitted from the antenna field of the RFID transmitter to the passive display element in order to modify the data displayed on the passive display element in the desired manner. The data connection can be implemented by a person skilled in the art in any suitable manner, for example, via a data interface of the transponder, to which the passive display element is connected via cables or conductive connections on a circuit board.

[0014] The passive LF-RFID transponder and the passive display element can already be connected to each other via the data link in the display and identification unit. Alternatively, this data connection could be established later, e.g., after the display and identification unit has been mounted on the transport container.

[0015] The passive display element, for example an E-Ink display, enables the display of data that has been transferred to the transponder via an external LF-RFID device, and the passive display element is overwritten with this data. This allows the desired visually readable data to be updated via the LF-RFID transponder at any location in a production facility or storage area. This allows the status of each transport container for wafers or photomasks to be individually and modifiably visualized via its display and identification unit, visible to the people in production / logistics via the passive display element, and also read electronically and fully automatically via the passive LF-RFID transponder. This system can be manufactured in various housings, allowing the components to be attached to the corresponding transport container for wafers or photomasks in a standardized manner.

[0016] The display and identification unit, the passive LF-RFID transponder and the passive display element can have any shape and size suitable for the transport container.

[0017] The display and identification unit according to the invention provides production employees with a way to read the information from RFID transponders and, if applicable, the information stored in underlying databases, in order to have up-to-date data on transport containers, production orders, and batches on-site without requiring production employees to use their own electronic devices. This simplifies handling and avoids the costs of additional components per employee.

[0018] In one embodiment, the passive display element is an e-ink display element. The imaging layer of the e-ink display element can, for example, be microcapsules with an average diameter of approximately 40 pm, containing positively charged white particles and negatively charged black particles in a transparent, viscous polymer. The image is altered by briefly applying an electrical voltage and then remains stable for up to several weeks. The shape and diameter of the microcapsules are irregular, but this is unimportant because each individual pixel is composed of many microcapsules, and these irregularities are averaged out. The use of microcapsules also allows flexible plastic to be used as the carrier material instead of glass. In addition to black and white displays, color displays can also be realized.Color display elements are either based on upstream color filters or they are equipped with colored pigments. With E-Ink display elements, the image content appears the same from every viewing angle due to the short distance between the imaging elements and the surface, which is advantageous in production environments that are not always easily accessible from all directions. The static display also eliminates flickering. Such display elements are very thin, lightweight, and, with appropriate design, flexible and can be manufactured in all sizes and shapes. Very little energy is required to generate and maintain the display, as a current flow is only required to change the image content. E-Ink display elements are readable in both normal room light and bright sunlight because the imaging elements are reflective.

[0019] In a further embodiment, at least some of the data is transmitted to the passive display element without prior storage in the passive LF-RFID transponder. This allows the passive display element to be overwritten or updated more quickly. The memory chip of the LF-RFID transponder can therefore be smaller. In a preferred embodiment, the passive display element displays all data received from the passive LF-RFID transponder. This makes it possible to completely dispense with a memory in the LF-RFID transponder. Here, the passive display element represents the data memory of the display and identification unit by means of a visually readable display of the data.

[0020] In another embodiment, the data connection is a fixed, wired data connection between the passive LF-RFID transponder and the passive display element. This allows the passive display element to be connected to the passive LF-RFID transponder securely and without interference.

[0021] In a further embodiment, the display and identification unit is equipped for a reversible mount on the transport containers for wafers or photomasks. This allows the display and identification unit to be quickly attached to the transport container. In the event of a transport container replacement, for example, in the event of a damaged transport container or when switching to different transport containers, the display and identification units can be reused on other transport containers, thus conserving resources.

[0022] In a further embodiment, the passive display element and the passive LF-RFID transponder comprise a common fastening means or separate first and second fastening means for attachment to the housing of the transport container. This allows the passive display element and the passive LF-RFID transponder to be quickly attached to the corresponding transport container. The term "housing" here refers to all side walls, lid, and base of the transport container. The location of the display and identification unit can vary from application to application.

[0023] The fastening means can, for example, be a defined adapter device that can be connected to a corresponding counterpart on the transport container. Alternatively, the transport container may already have existing mounts into which the passive display element and the passive LF-RFID transponder, or the display and identification unit as a whole, are inserted or clamped. An adhesive connection cannot be used due to the clean room conditions in semiconductor manufacturing, which the transport containers must meet.

[0024] In a further embodiment, the passive display element and the passive LF-RFID transponder are arranged on a common substrate and / or they have a common housing. This allows the display and identification unit to be designed compactly and easily, which facilitates attachment to the transport containers. The housing can have a defined adapter device for this purpose.

[0025] In another embodiment, the passive LF-RFID transponder is integrated into the passive display element. This allows for an even more compact design of the display and identification unit, which is also advantageous for attaching it to the transport container.

[0026] The invention further relates to a transport container for wafers or photomasks in semiconductor manufacturing systems, comprising a display and identification unit according to the invention attached to a housing of the transport container. The transport container according to the invention also provides the advantages already described above. The transport container for wafers or photomasks according to the invention provides production employees with a means of reading the information from the RFID transponders and, if applicable, also the information stored in underlying databases, in order to have the latest data on the transport containers or production orders and batches on-site without the production employees having to use their own electronic devices. This simplifies handling and avoids costs for additional components per employee.The transport container can be of any shape and size suitable for transporting wafers or photomasks. The shape and size depend on the wafers or photomasks to be transported and the process-related and logistical processes involved in semiconductor production. The transport container can also be referred to as a transport box.

[0027] In semiconductor manufacturing, the term "wafer" refers to the discs or substrates on which the integrated circuits, the microchips, are manufactured. The wafer is the starting material for chip production. Wafers are usually made of silicon, but there are also discs made of germanium, silicon carbide, gallium arsenide, sapphire, glass, and others. The term "photomask" refers to projection templates, whose primary application is photolithographic structuring in the manufacture of microelectronic circuits or microsystems in semiconductor manufacturing.

[0028] In one embodiment, the passive display element is arranged on the transport container in such a way that the displayed data can be visually read out by viewing the passive display element from a distance from the transport container. The distance to which employees in semiconductor production approach the transport containers depends on the local conditions in the manufacturing process. This distance can vary between a few 10 cm and a few meters. The size of the display element can be adapted to the average expected distance so that the data on the display element can still be visually read from the average distance by the employee or by reading devices. The term “visual readout” refers to both reading out by employees and automatic reading out by devices that can recognize and process the data displayed on the display element or, if necessary,record electronically, for example by means of a photo.

[0029] In a further embodiment, the transport container is equipped for a reversible mounting of the display and identification unit. Preferably, the transport container comprises additional container fastening means for this reversible mounting. The advantages of a reversible mounting have already been described above.

[0030] In another embodiment, the transport container is a wafer or photomask transport box in a semiconductor manufacturing facility. The transport container according to the invention allows production employees to easily visually read the information from the RFID transponders and, if applicable, also the information stored in underlying databases, in order to have the latest data on the transport containers or production orders and batches on-site without the production employees having to use their own electronic devices. This simplifies handling and avoids the costs of additional components per employee.

[0031] The invention further relates to a tracking system for monitored transport of transport containers according to the invention along a transport route on which one or more LF-RFID devices are arranged for transmitting data at a frequency of 134.2 kHz to the one or more transport containers, wherein a passive LF-RFID transponder writable at the frequency of 134.2 kHz is provided for each transport container for receiving data from the one or more LF-RFID devices, and wherein an electronically writable passive display element is provided for each transport container for displaying at least part of the data received from the passive LF-RFID transponder, wherein the passive LF-RFID transponder and the passive display element are connected via a data connection for transmitting the data from the passive LF-RFID transponder to the passive display element.The LF-RFID devices specified here for transmitting data correspond to the external LF-RFID devices when specifying the display and identification units according to the invention and the transport containers according to the invention. The LF-RFID device for transmitting data can be any LF-RFID device suitable for data communication with the LF-RFID transponder, for example an LF-RFID read / write head. The transport route refers to the path that the transport container must travel within the semiconductor production facility so that the desired semiconductor products can be manufactured and, if applicable, delivered. The tracking system according to the invention provides production employees with a means of reading the information on the RFID transponders and, if applicable, also the information contained in the databases behind them, in order to obtain the latest data on the transport containers orProduction orders and batches can be managed without requiring production employees to use their own electronic devices. This simplifies handling and avoids the costs of additional components per employee.

[0032] In one embodiment, the one or more LF-RFID devices are also configured to read the data displayed on the passive display element of the transport container and / or the data present on the passive LF-RFID transponder. This allows the current position of each transport container along the transport route to be monitored and, if necessary, controlled. In another embodiment, the reading is performed electronically and fully automatically.

[0033] In a further embodiment, the tracking system comprises a control unit with which the current position of the transport containers can be determined and monitored. This allows the logistics process within a semiconductor manufacturing facility to be monitored and controlled. The control unit comprises at least one processor for executing a control program, a memory with stored control specifications, and data connections to the respective LF-RFID devices for data transfer and reading of the display and identification unit.

[0034] The invention further relates to a semiconductor manufacturing plant in which wafers or photomasks are transported along a transport route in the transport containers according to the invention, comprising a tracking system according to the invention. By enabling production employees to visually read the information from the RFID transponders and, if applicable, the information stored in the underlying databases, in order to have the latest data on the transport containers or production orders and batches on-site, semiconductor production can be monitored better and more quickly without the production employees having to use their own electronic devices. This simplifies handling, increases production efficiency, and avoids costs for additional components per employee.

[0035] The invention further relates to a method for operating a tracking system according to the invention comprising the following steps:

[0036] Transporting one or more transport containers according to the invention along a transport route,

[0037] Transmitting data by one or more LF-RFID devices with a frequency of 134.2 kHz to the one or more transport containers, wherein the one or more LF-RFID devices are suitably arranged along the transport route for the transport containers,

[0038] Receiving the data per transport container with a passive LF-RFID transponder writable at a frequency of 134.2 kHz, and

[0039] Displaying at least part of the data received from the passive LF-RFID transponder of the respective transport container using an electronically writable passive display element, wherein the passive LF-RFID transponder and the passive display element are connected via a data connection for transmitting the data from the passive LF-RFID transponder to the passive display element. The method according to the invention for operating the tracking system according to the invention provides production employees with a means of reading the information from the RFID transponders and, if applicable, also the information stored in underlying databases, in order to have the latest data on the transport containers or production orders and batches on-site without the production employees having to use their own electronic devices. This simplifies handling and avoids costs for additional components per employee.

[0040] In one embodiment, the step of displaying comprises all data received from the passive LF-RFID transponder.

[0041] In a further embodiment, the method comprises the further step of transmitting at least part of the data to the passive display element without prior storage in the passive LF-RFID transponder.

[0042] The invention further relates to a method for upgrading a conventional transport container for wafers or photomasks to a transport container according to the invention, comprising the following steps:

[0043] Attaching a passive LF-RFID transponder that can be written to at a frequency of 134.2 kHz to the transport container to receive data from an external LF-RFID device at 134.2 kHz,

[0044] Attaching an electronically writable passive display element for displaying at least part of the data received from the passive LF-RFID transponder to the transport container, and

[0045] Connecting the passive LF-RFID transponder and the passive display element via a data connection to transmit the data from the passive LF-RFID transponder to the passive display element.

[0046] The above list of method steps is not intended to define a chronological order of the steps. In one embodiment, the establishment of a data connection between the passive LF-RFID transponder and the passive display element can take place after the passive LF-RFID transponder and / or the passive display element are attached, and in another embodiment, before the passive LF-RFID transponder and / or the passive display element are attached. The passive LF-RFID transponder can also be attached to the transport container before, after, or simultaneously with the display element. The attachment means for the transponder and display element can be identical or different. The first and second attachment means can also represent a common attachment means.The resulting transport container for wafers or photomasks provides production employees with a means of reading the information from the RFID transponders and, if applicable, the information stored in the underlying databases. This allows them to have up-to-date data on the transport containers or production orders and batches on-site without requiring production employees to use their own electronic devices. This simplifies handling and avoids the costs of additional components per employee.

[0047] In one embodiment of the method, the passive LF-RFID transponder and the passive display element are attached to the transport container as a common display and identification unit in a single attachment step. This simplifies the attachment process.

[0048] In one embodiment of the method, the fastening steps are carried out reversibly, preferably by means of a common fastening means for the display and identification unit or by means of separate first and second fastening means for the passive LF-RFID transponder and the passive display element and / or by means of container fastening means on the transport container. The advantages of reversible fastening and possible fastening means have already been described above.

[0049] In one embodiment of the method, the fastening steps are carried out in such a way that a visual readout of the displayed data is possible by viewing the passive display element from a distance from the transport container. The invention further relates to the use of a transport container according to the invention for wafers or photomasks for transporting wafers or photomasks in a semiconductor manufacturing facility.

[0050] In the present invention, the term "a," "an," or "an" does not refer to a specific number of the respective components designated thereby, but explicitly includes the possibility that the claimed subject matter may comprise one or more additional components in addition to the one component. Thus, the term should also be understood as "one or more." However, if the number of specified components is equal to 1, this is referred to as "exactly one."

[0051] The embodiments described above can be combined with one another as desired by a person skilled in the art within the scope of the teaching of the invention, even deviating from the claims.

[0052] Short description of the drawings

[0053] Fig.1: an embodiment of the display and identification unit according to the invention (a) in plan view and (b) in side view for attachment to a transport container for wafers or photomasks;

[0054] Fig.2: two embodiments of the transport container according to the invention for wafers or photomasks, wherein fastening means (a) fasten the display and identification unit as a whole together and (b) fasten the passive LF-RFID transponder and the passive display element separately to the housing of the transport container;

[0055] Fig.3: a schematic representation of the tracking system according to the invention;

[0056] Fig.4: an embodiment of the inventive method for operating the tracking system according to Fig.3; and

[0057] Fig.5: an embodiment of the method according to the invention for upgrading a conventional transport container for wafers or photomasks to the transport container according to the invention.

[0058] Detailed Description of the Drawings The embodiments shown here are merely examples of the present invention and should therefore not be considered limiting. Alternative embodiments contemplated by one skilled in the art are equally within the scope of the present invention.

[0059] Fig. 1 shows an embodiment of the display and identification unit 1 according to the invention (a) in plan view and (b) in side view for attachment to a transport container 10 for wafers or photomasks 20, comprising a passive LF-RFID transponder 2 which is writable at a frequency of 134.2 kHz in order to be able to receive data DT sent from an external LF-RFID device 30 at the frequency of 134.2 kHz, and an electronically writable passive display element 3 for displaying at least part of the data DT received from the passive LF-RFID transponder 2, wherein the passive LF-RFID transponder 2 and the passive display element 3 are designed to transmit data from the passive LF-RFID transponder 2 to the passive display element 3 via a data connection 4. The passive display element 3 is an E-Ink display element here.In this case, at least some of the data DT can be transmitted to the passive display element 3 without prior storage in the passive LF-RFID transponder 2. Independently of the data transmission from the transponder 2 to the display element 3, all of the data DT received by the passive LF-RFID transponder 2 can also be displayed on the passive display element 3. In this case, data storage in passive LF-RFID transponders 2 could be dispensed with. The data connection 4 is a fixed, wired data connection between the passive LF-RFID transponder 2 and the passive display element 3. The display and identification unit 1 is equipped here by means of the hook(s) 6, 61, 62 for reversible mounting on the transport containers 10 for wafers or photomasks 20.The passive display element 3 and the passive LF-RFID transponder 2 can have a common fastening means 6 or separate first and second fastening means 61, 62 for fastening to the housing 11 of the.

[0060] transport container 10. Here, the passive display element 3 and the passive LF-RFID transponder 2 have a common substrate 5 (see Fig. 1 (a), where the housing is not shown for reasons of clarity) and a common housing 5, wherein the housing is only shown in side view in Fig. 1 (b). As an alternative to the embodiment shown here, the passive LF-RFID transponder 2 can be integrated into the passive display element 3. Fig. 1 (b) further shows a transport container 10 or 10' for wafers or photomasks 20 in semiconductor manufacturing systems 100, wherein it is indicated that the display and identification unit 1 is attached to the housing 11 of the transport container 10 or 10'.

[0061] Fig. 2 shows two embodiments of the transport container 10 according to the invention for wafers or photomasks 20, wherein fastening means 6, 61, 62 (a) fasten the display and identification unit 1 as a whole together and (b) fasten the passive LF-RFID transponder 2 and the passive display element 3 separately to the housing 11 of the transport container 10. In this case, the passive display element 3 is arranged uncovered and freely visible on one end side of the transport container 10, so that a visual readout of the displayed data DT is possible by viewing B the passive display element 3 from a distance D to the transport container 10. The size of the display element 3 can be adapted to the average expected distance D, so that the data DT on the display element 3 can still be visually read from the average distance D by the employee M or by reading devices 30.The transport container 10 is equipped for reversibly holding the display and identification unit 1. In Fig. 2(a), the transport container 10 comprises additional container fastening means 12 for this reversible holding. Alternatively or in combination, the display and identification unit 1 can comprise common fastening means 6 for fastening to the transport container 10. In Fig. 2(b), the fastening is implemented by means of separate first and second fastening means 61, 62 for the passive LF-RFID transponder 2 and the passive display element 3, which engage in corresponding container fastening means 12 on the housing 11 of the transport container 10.Alternatively, the separate fastening means for the passive LF-RFID transponder 2 and the passive display element 3 can also be provided solely by the transport container 10, into which the passive LF-RFID transponder 2 and the passive display element 3 are clicked / hooked / pressed and held by clamping. The transport container 10 is a wafer or photomask transport box in a semiconductor manufacturing system 100.

[0062] Fig. 3 shows a schematic representation of the tracking system 50 according to the invention for monitored transport of transport containers 10 according to the invention along a transport route TS, on which one or more LF-RFID devices 30 are arranged for transmitting data DT at a frequency of 134.2 kHz to the one or more transport containers 10. Suitable LF-RFID devices 30 are known to those skilled in the art. For each transport container 10, a passive LF-RFID transponder 2, writable at a frequency of 134.2 kHz, is arranged on the transport container 10 for receiving data DT from the one or more LF-RFID devices 30.For each transport container 10, an electronically writable passive display element 3 is also arranged for displaying at least part of the data DT received from the passive LF-RFID transponder 2. The passive LF-RFID transponder 2 and the passive display element 3 are connected via a data connection 4 for transmitting the data from the passive LF-RFID transponder 2 to the passive display element 3, thus constituting the display and identification unit 1 according to the invention on the transport container 10. The tracking system 50 is arranged in a semiconductor manufacturing plant 100, which is schematically represented as a dashed frame. The one or more LF-RFID devices 30 can also be configured to read L the data DT displayed on the passive display element 3 of the transport container 10 and / or the data DT present on the passive LF-RFID transponder 2. In this case, the reading L can be carried out electronically and fully automatically.Likewise, an employee M can visually read the data DT displayed on the display element 3 by viewing B the display element 3. The tracking system 50 here further comprises a control unit 40, with which a current position of the transport containers 10 can be determined and monitored. For this purpose, the control unit 40 is connected to the LF-RFID read / write devices 30 via data connections 45 in order to, on the one hand, transmit the data DT to be transmitted to the display and identification unit 1 to the devices 30 and, on the other hand, to receive the data DT read by the display and identification units 1 and process them according to a control program. The control unit can be suitably equipped by a person skilled in the art. Typically, it comprises at least a processor and a memory unit and all other components required for control.Thus, the transport container 10 according to the invention for wafers or photomasks 20 can be used for the controlled and monitored transport of wafers or photomasks 20 in a semiconductor manufacturing plant 100.

[0063] Fig.4 shows an embodiment of the inventive method 200 for operating the inventive tracking system 50 according to Fig.3. comprising the following steps of transporting 210 one or more transport containers 10 according to the invention along a transport route TS, transmitting 220 data DT by one or more LF-RFID devices 30 at a frequency of 134.2 kHz to the one or more transport containers 10, wherein the one or more LF-RFID devices 30 are suitably arranged along the transport route TS for the transport containers 10, receiving 230 the data DT per transport container 10 with a passive LF-RFID transponder 2 writable at the frequency of 134.2 kHz, and displaying 240 at least part of the data DT received by the passive LF-RFID transponder 2 of the respective transport container 10 by an electronically writable passive display element 3,wherein the passive LF-RFID transponder 2 and the passive display element 3 are connected via a data connection 4 for transmitting the data from the passive LF-RFID transponder 2 to the passive display element 3. Here, the display step 240 can include all data DT received from the passive LF-RFID transponder 2. The method 200 can additionally include the further step of transmitting 250 at least a portion of the data DT to the passive display element 3 without prior storage in the passive LF-RFID transponder 2.

[0064] Fig. 5 shows an embodiment of the method 300 according to the invention for upgrading a conventional transport container 10' for wafers or photomasks 20 to the transport container 10 according to the invention, comprising the following steps of attaching 310 a passive LF-RFID transponder 2, which is writable at a frequency of 134.2 kHz, to the transport container 10' in order to receive data from an external LF-RFID device 30 at 134.2 kHz, attaching 320 an electronically writable passive display element 3 for displaying at least part of the data DT received from the passive LF-RFID transponder 2 to the transport container 10', and connecting 330 the passive LF-RFID transponder 2 and the passive display element 3 via a data connection 4 for transmitting the data from the passive LF-RFID transponder 2 to the passive display element 3. The above list of procedural steps is not intended to define a chronological order of the steps.The different embodiments according to Fig. 5(a) and Fig. 5(b) are equally encompassed by the method 300. In Fig. 5(a), the data connection 4 between the passive LF-RFID transponder 2 and the passive display element 3 is established after the attachment of the passive LF-RFID transponder 2 and the passive display element 3. In Fig. 5(b), the data connection 4 between the passive LF-RFID transponder 2 and the passive display element 3 is established before the attachment of the passive LF-RFID transponder 2 and the passive display element 3. The attachment means for the transponder 2 and the display element 3 can be the same or different. The passive LF-RFID transponder 2 and the passive display element 3 can also be attached to the transport container 10' as a common display and identification unit 1 in a common attachment step 340.Here, the fastening steps 310, 320, 340 can be carried out reversibly. The respective fastening step can be carried out by means of a fastening means 6 common to the display and identification unit 1 or by means of separate first and second fastening means 61, 62 for the passive LF-RFID transponder 2 and the passive display element 3 and / or by means of container fastening means 12 on the transport container 10'. The same also applies to a non-reversible fastening. The fastening steps 310, 320, 340 can be carried out in such a way that a visual readout of the displayed data DT is possible by viewing B the passive display element 3 from a distance D from the transport container 10. List of reference symbols.

[0065] 1 display and identification unit

[0066] 2 LF RFID transponders

[0067] 3 electronically writable display element

[0068] 4 Data connection between transponder and display element

[0069] 5 common substrate and / or common housing

[0070] 6 common fastener

[0071] 61 first fastener

[0072] 62 second fastening device

[0073] 10 inventive transport container

[0074] 10' ordinary transport container

[0075] 11 Housing of the transport container

[0076] 12 container fastening devices

[0077] 20 wafers or photomasks

[0078] 30 LF-RFID device (transmitter or transmitter + reader)

[0079] 40 Control unit

[0080] 45 Data connection to the control unit

[0081] 50 inventive tracking system

[0082] 100 inventive semiconductor manufacturing plant

[0083] 200 Method for operating a tracking system according to the invention

[0084] 210 Transporting one or more transport containers

[0085] 220 Transmission of data by one or more LF-RFID devices

[0086] 230 Receiving data with an LF-RFID transponder

[0087] 240 Displaying the received data on a writable display element

[0088] 250 Transferring at least part of the data without prior storage in the LF-RFID transponder to the display element

[0089] 300 A method for upgrading a conventional transport container for wafers or photomasks to a transport container 310 Attaching a passive LF-RFID transponder to the conventional transport container

[0090] 320 Attaching an electronically writable passive display element to the ordinary transport container 330 Connecting the passive LF-RFID transponder and the passive

[0091] Display element via a data connection

[0092] 340 common fastening step on the transport container

[0093] B Viewing the display element D Distance to the transport container

[0094] DT data

[0095] L Reading the data shown on the display element of the transport container

[0096] M Employee in the semiconductor manufacturing plant TS transport route

Claims

AMENDED CLAIMS received by the International Bureau on 11 December 2024 (11.12.2024) 1. A transport container (10) for wafers or photomasks (20) in semiconductor manufacturing systems (100), comprising a display and identification unit (1) fastened to a housing (11) of the transport container (10), comprising a passive LF-RFID transponder (2) which is writable at a frequency of 134.2 kHz in order to be able to receive data (DT) sent from an external LF-RFID device (30) at the frequency of 134.2 kHz, and an electronically writable passive display element (3) for displaying at least part of the data (DT) received from the passive LF-RFID transponder (2), wherein the passive LF-RFID transponder (2) and the passive display element (3) are designed to transmit data from the passive LF-RFID transponder (2) to the passive display element (3) via a data connection (4).

2. The transport container (10) according to claim 1, characterized in that the passive display element (3) is an E-Ink display element.

3. The transport container (10) according to claim 1 or 2, characterized in that at least part of the data (DT) is transmitted to the passive display element (3) without prior storage in the passive LF-RFID transponder (2).

4. The transport container (10) according to one of the preceding claims, characterized in that the passive display element (3) displays all data (DT) received from the passive LF-RFID transponder (2).

5. The transport container (10) according to one of the preceding claims, characterized in that AMENDED SHEET (ARTICLE 19) the data connection (4) is a wired fixed data connection between the passive LF-RFID transponder (2) and the passive display element (3) 6. The transport container (10) according to one of the preceding claims, characterized in that the display and identification unit (1) is equipped for reversible mounting on the transport containers (10) for wafers or photomasks (20).

7. The transport container (10) according to one of the preceding claims, characterized in that the passive display element (3) and the passive LF-RFID transponder (2) comprise a common fastening means (6) or separate first and second fastening means (61, 62) for fastening to the housing (11) of the transport container (10).

8. The transport container (10) according to one of the preceding claims, characterized in that the passive display element (3) and the passive LF-RFID transponder (2) are arranged on a common substrate (5) and / or have a common housing (5).

9. The transport container (10) according to one of the preceding claims, characterized in that the passive LF-RFID transponder (2) is integrated into the passive display element (3).

10. The transport container (10) according to one of the preceding claims, characterized in that the passive display element (3) is arranged on the transport container (10) in such a way that a visual readout of the displayed data (DT) is possible by viewing (B) the passive display element (3) from a distance (D) to the transport container (10). 11 . The transport container (10) according to one of the preceding claims, characterized in that AMENDED SHEET (ARTICLE 19) the transport container (10) is equipped for a reversible mounting of the display and identification unit (1), preferably the transport container (10) comprises additional container fastening means (12) for this reversible mounting.

12. The transport container (10) according to one of the preceding claims, characterized in that the transport container (10) is a wafer or photomask transport box in a semiconductor manufacturing plant (100).

13. A tracking system (50) for a monitored transport of transport containers (10) according to one of claims 1 to 12 along a transport route (TS), on which one or more LF-RFID devices (30) for transmitting data (DT) at a frequency of 134.2 kHz to the one or more transport containers (10) are arranged, wherein a passive LF-RFID transponder (2) writable at the frequency of 134.2 kHz is provided for each transport container (10) for receiving data from the one or more LF-RFID devices (30), wherein an electronically writable passive display element (3) is provided for each transport container (10) for displaying at least part of the data (DT) received by the passive LF-RFID transponder (2), wherein the passive LF-RFID transponder (2) and the passive display element (3) are connected via a data connection (4) for transmitting the data from the passive LF-RFID transponder (2) are connected to the passive display element (3).

14. The tracking system (50) according to claim 13, characterized in that the one or more LF-RFID devices (30) are also designed to read (L) the data (DT) displayed on the passive display element (3) of the transport container (10) and / or the data (DT) present on the passive LF-RFID transponder.

15. The tracking system (50) according to claim 14, characterized in that the reading (L) is carried out electronically and fully automatically. AMENDED SHEET (ARTICLE 19) 16. The tracking system (50) according to one of claims 13 to 15, characterized in that the tracking system (50) comprises a control unit (40) with which a current position of the transport containers (10) can be determined and monitored.

17. A semiconductor manufacturing plant (100) in which wafers or photomasks (20) are transported in transport containers (10) according to one of claims 1 to 12 along a transport path (TS), comprising a tracking system (50) according to one of claims 13 to 16.

18. A method (200) for operating a tracking system (10) according to one of claims 13 to 16, comprising the following steps: Transporting (210) one or more transport containers (10) according to one of claims 1 to 12 along a transport route (TS), Transmitting (220) data (DT) by one or more LF-RFID devices (30) at a frequency of 134.2 kHz to the one or more transport containers (10), wherein the one or more LF-RFID devices (30) are suitably arranged along the transport route (TS) for the transport containers (10), Receiving (230) the data (DT) per transport container (10) with a passive LF-RFID transponder (2) writable at a frequency of 134.2 kHz, and Displaying (240) at least part of the data (DT) received from the passive LF-RFID transponder (2) of the respective transport container (10) by means of an electronically writable passive display element (3), wherein the passive LF-RFID transponder (2) and the passive display element (3) are connected via a data connection (4) for transmitting the data from the passive LF-RFID transponder (2) to the passive display element (3).

19. The method (200) of claim 18, wherein the step of displaying (240) comprises all data (DT) received from the passive LF-RFID transponder (2). AMENDED SHEET (ARTICLE 19) 20. The method (200) according to claim 18 or 19, comprising the further step of transmitting (250) at least part of the data (DT) to the passive display element (3) without prior storage in the passive LF-RFID transponder (2).

21. A method (300) for upgrading a conventional transport container (10') for wafers or photomasks (20) to a transport container (10) according to one of claims 1 to 12, comprising the following steps: Attaching (310) a passive LF-RFID transponder (2) which can be written to at a frequency of 134.2 kHz to the transport container (10') in order to receive data from an external LF-RFID device (30) at 134.2 kHz, Attaching (320) an electronically writable passive display element (3) for displaying at least part of the data (DT) received from the passive LF-RFID transponder (2) to the transport container (10'), and Connecting (330) the passive LF-RFID transponder (2) and the passive display element (3) via a data connection (4) for transmitting the data from the passive LF-RFID transponder (2) to the passive display element (3).

22. The method (300) according to claim 21, wherein the passive LF-RFID transponder (2) and the passive display element (3) are attached to the transport container (10') as a common display and identification unit (1) in a common attachment step (340).

23. The method (300) according to one of claims 21 or 22, wherein the fastening steps (310, 320, 340) are carried out reversibly, preferably by means of a fastening means (6) common to the display and identification unit (1) or by means of separate first and second fastening means (61, 62) for the passive LF-RFID transponder (2) and the passive display element (3) and / or by means of container fastening means (12) on the transport container (10'). AMENDED SHEET (ARTICLE 19) 24. The method (300) according to any one of claims 21 to 23, wherein the fastening steps (310, 320, 340) are carried out in such a way that a visual readout of the displayed data (DT) is possible by viewing (B) the passive display element (3) from a distance (D) to the transport container (10).

25. Use of a transport container (10) for wafers or photomasks (20) according to one of claims 1 to 12 for transporting wafers or photomasks (20) in a semiconductor manufacturing plant (100). AMENDED SHEET (ARTICLE 19)

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