Sensor arrangement having a paramagnetic thermopile sensor and an infrared optical thermopile sensor on a common support

Abstract

The invention relates to a sensor arrangement (1), having at least two sensor elements (5, 7, 9) arranged on a support element (3), which enables the analysis of a gas mixture. Depending on the designs of the sensor elements (5, 7, 9), different physical properties of the gas mixture at a common measurement location can be metrologically acquired, processed and provided as data.

Description

[0001] Sensor arrangement with a paramagnetic thermopile sensor and an infrared optical thermopile sensor on a common carrier

[0002] The invention relates to a sensor arrangement for determining physical or chemical situations in a respiratory gas mixture, for example, in an inhaled gas or in an exhaled gas of a living being. The invention encompasses both sensor arrangements in which the phenomenon of paramagnetism of gases is utilized as a measuring effect, as well as sensor arrangements in which a degree of absorption of infrared light is utilized as a measuring effect, and sensor arrangements in which the difference in the thermal conductivity of different gases is utilized as a measuring effect.

[0003] Optical measurement of the composition of respiratory gases is known. The concentration of the respective gas is measured by the absorption of light in a specific wavelength range specific to the respective gas. In this way, in the medical field—particularly during anesthesia of a living being—the concentrations of volatile anesthetic gases, carbon dioxide (CO2), and nitrous oxide (N2O), among others, are measured in the respiratory gas mixture of ventilated patients.

[0004] US5739535B describes an infrared-optical gas measuring device. US8399839B describes an infrared-optical carbon dioxide sensor, a so-called IR carbon dioxide sensor. US6571622B describes a combination sensor consisting of an infrared-optical carbon dioxide sensor and a flow sensor, which can be arranged in the main stream of a patient's respiratory gas path. US2004238746A and US2002036266A describe infrared-optical carbon dioxide sensors that can be arranged in the side stream in or on the respiratory gas path of a patient. US6954702B, US7606668B, US8080798B, US7501630B, US7684931B, US7432508B, US7183552B show gas measuring systems for detecting gas concentrations in the side stream and main stream.

[0005] EP3421947 B1 discloses a method for operating a flow sensor device having a first sensor arrangement for measuring a flow of a fluid and a first fluid property, and having a second sensor arrangement for measuring a further, second fluid property using thermocouples or thermopiles. US 6,779,395 B2 discloses a device for measuring the flow of a fluid having a main channel and a bypass. US 9,952,079 B2 discloses a sensor that is exposed to a fluid in the bypass channel and measures a value related to the flow rate of the fluid flowing through the bypass channel.

[0006] Paramagnetic methods are often used to determine the oxygen concentration in gases. These methods are based on the fact that oxygen molecules are paramagnetic due to their permanent magnetic dipole moment, whereas most other gases are diamagnetic. It is well known that the thermal conductivity of paramagnetic gases changes under the influence of magnetic fields. The reason for this behavior is apparently the fact that paramagnetic gases possess a permanent magnetic moment, which, however, is normally not apparent externally due to the thermal molecular motion of the gas molecules. However, a sufficiently strong external magnetic field ensures that the magnetic dipole moments of the individual molecules are aligned.On the one hand, this causes a change in susceptibility, which increases the magnetic flux. On the other hand, a certain molecular arrangement develops in the gas, which limits the degrees of freedom and thus the ability to transfer heat energy to neighboring molecules through collisions. This slightly changes the thermal conductivity of the gas. Paramagnetic measuring devices for determining oxygen concentrations, particularly in respiratory gases, are known, for example, from US6952947 BB, US2011094293 AA, US8596109 BB, US9360441 BB, US6895802 BB, US6405578 BB, US6430987 BA, US4808921 A, US4683426 A, US3646803 A, US3584499 A, US2944418 A.

[0007] US6430987 BA shows a paramagnetic gas sensor for determining oxygen concentrations. Thermoelectric elements are arranged in a magnetic field. The oxygen concentration in a gas mixture can be determined by measuring heat flow both without the influence of a magnetic field and with the influence of a magnetic field.

[0008] In current designs for gas measurement tasks for analyzing gas composition during anesthesia of a living being, two or three of the aforementioned measurement tasks—flow rate measurement, oxygen concentration measurement, and anesthetic gas concentration measurement—are usually combined in a serial arrangement to form a single measurement system. This serial arrangement means that, for example, a flow rate measurement and an oxygen concentration measurement cannot be recorded simultaneously, or that measured values ​​recorded at the same time do not reflect the same flow state of the gas mixture with regard to the inhalation and exhalation of the living being during anesthesia.

[0009] Based on the state of the art, the task therefore arises to design a sensor arrangement which, based on thermocouples or thermopiles, provides an integrated measuring system which is capable of simultaneously measuring concentrations of oxygen, other gases as well as flow rates.

[0010] Preferably, the thermocouples or thermopiles can be designed to provide solutions to the problem (as?) microstructured components, in particular semiconductor structures in the form of so-called micro-electro-mechanical systems (MEMS).

[0011] The problem is solved by a measuring system with the features of patent claim 1.

[0012] The problem is also solved by a measuring system with the features of patent claim 2.

[0013] Advantageous further developments are specified in the subclaims, some of which are explained in more detail with reference to the figures.

[0014] A first sensor arrangement according to the invention is designed to determine physical or chemical properties of a gas or gas mixture. For this purpose, the sensor arrangement comprises at least one planar support element and a number of at least two sensor elements. The at least two sensor elements are arranged on surfaces of the at least one planar support element.

[0015] The surfaces are formed by a bottom side and a top side of the carrier element. The at least two sensor elements can be arranged on the same surface of the at least one planar carrier element. The at least two sensor elements can be arranged on different surfaces - i.e. on the bottom side and on the top side of the at least one planar carrier element. The carrier element and the at least two sensor elements are arranged as an integrated arrangement in a common gas or flow chamber and thus form the sensor arrangement according to the invention. In the common gas or flow chamber, simultaneous measured value acquisition of the measuring elements for a same flow state in the common gas or flow chamber can take place.

[0016] The carrier element is at least partially formed as a semiconductor substrate. The carrier element can be at least partially formed as a ceramic carrier element or as a film carrier element (flexible PCB). The at least two sensor elements are designed as thermocouples or as thermopiles. Thermopiles are often also referred to as thermopiles. An arrangement of two elements made of a magnetically conductive material is arranged on the carrier element. This arrangement of two elements made of magnetically conductive materials is designed to guide a magnetic field and can be configured as an arrangement of two pole shoes, for example, as a pair of pole shoes arranged on the carrier element.The guidance of the magnetic field preferably allows the magnetic field lines and the magnetic flux to propagate essentially perpendicular to the planar surface of the support element and, in particular, also perpendicular to the sensor elements designed as thermocouples or thermopiles. Examples of magnetically conductive materials include ferrites, metals, such as iron cores, and sintered pole pieces made of compounds of epoxy resins with metal powder. The arrangement of the elements for guiding a magnetic field and at least one (of the at least one?) of the two sensor elements is configured in such a way that the magnetic field is guided essentially perpendicularly with respect to the surface of the planar support element.At least one of the at least two sensor elements, designed as a thermocouple or thermopile, forms a measuring module for paramagnetic gas concentration measurement with the arrangement of the two elements designed to guide a magnetic field. Another of the at least two sensor elements, designed as a thermocouple or thermopile, forms a measuring module for infrared-optical gas concentration measurement or a measuring module for flow or flow rate measurement.

[0017] A second sensor arrangement according to the invention is designed to determine physical or chemical properties of a gas or gas mixture. For this purpose, the sensor arrangement has at least one planar support element and a number of at least two sensor elements. The at least two sensor elements are arranged on a surface of the at least one planar support element. The support element and the at least two sensor elements are arranged as an integrated arrangement in a common gas or flow space and thus form the sensor arrangement according to the invention. In the common gas or flow space, simultaneous measured value(s) can be recorded by the measuring elements for a similar flow state in the common gas or flow space.

[0018] The carrier element is at least partially formed as a semiconductor substrate. The carrier element can be at least partially formed as a ceramic carrier element or as a foil carrier element (flexible PCB). The at least two sensor elements are designed as thermocouples or thermopiles. Thermopiles are often also referred to as thermopiles.

[0019] At least one of the two sensor elements is sensitive to radiation in the infrared range of 3 pm - 12 pm and is intended to detect radiation quantities in the infrared range of 3 pm - 12 pm. An arrangement with a radiation source for emitting infrared radiation in the infrared range of 3 pm - 12 pm is arranged in or at the flow space or at or on the at least one support element. In optional embodiments of the arrangement with the radiation source, a mirror element can (optionally) be provided which directs the infrared radiation from the radiation source towards the sensor element. At least one of the at least two sensor elements forms a measuring module with the radiation source for infrared-optical gas concentration measurement.Another of the at least two sensor elements designed as a thermocouple or thermopile forms a measuring module for a paramagnetic gas concentration measurement or a measuring module for a flow or flow rate measurement.

[0020] Preferred and advantageous embodiments of the first and second sensor arrangement according to the invention are given below.

[0021] In a particularly preferred embodiment, the sensor arrangement can have a planar carrier element on which three sensor elements are arranged. This particularly preferred embodiment represents a combination of the first embodiment according to the invention with the second embodiment according to the invention. Thus, this particularly preferred embodiment can also be regarded as a third embodiment according to the invention. In this particularly preferred embodiment, the three sensor elements are arranged on surfaces of the at least one planar carrier element in a common gas or flow space. The carrier element is at least partially formed as a semiconductor substrate. The three sensor elements are designed as thermocouples or as thermopiles.An arrangement with a radiation source for emitting infrared radiation in the infrared range of 3 pm - 12 pm is arranged in or at the flow space or at or on the at least one support element. In optional embodiments of the arrangement with the radiation source, an optional mirror element can be provided which directs the infrared radiation of the radiation source towards the sensor element. An arrangement of two elements made of a magnetically conductive material is arranged on the support element. In this preferred embodiment, one of the two sensor elements designed as a thermocouple or thermopile forms, with the arrangement of the two elements designed to guide a magnetic field, a measuring module for paramagnetic gas concentration measurement.In this preferred embodiment, one of the three sensor elements is sensitive to radiation in the infrared range of 3 pm - 12 pm and is designed to detect radiation quantities in the infrared range of 3 pm - 12 pm. Together with the radiation source, it forms a measuring module for infrared-optical gas concentration measurement. In this preferred embodiment, one of the three sensor elements forms a measuring module for flow or flow rate measurement.

[0022] In a further preferred embodiment of the sensor arrangement, the at least two measuring modules can form a measuring arrangement, wherein the at least two measuring modules can be arranged at least partially on surfaces of a common, planar support element. This embodiment offers the advantage of an integrated measuring system in which the support element is designed as a type of platform for the arrangement of measuring modules.

[0023] In a further preferred embodiment of the sensor arrangement or measuring arrangement, at least one further sensor element or measuring module can be arranged on the at least one planar carrier element. The further sensor element or measuring module can

[0024] • as a thermocouple or as a thermopile;

[0025] • as a thermoelectric sensor element;

[0026] • as an optically sensitive sensor element;

[0027] • as a resistive sensor element;

[0028] • as a piezoelectric sensor element;

[0029] • as a catalytic sensor element;

[0030] • or be designed as a piezoresistive sensor element. This embodiment offers the advantage of being able to design a multifunctional, integrated measuring system for monitoring anesthesia or ventilation of a patient or living being using microstructured technology (MEMS). This allows the various sensor elements to be incorporated into the measuring process and data acquisition depending on the application and measuring tasks. With such a multifunctional, integrated measuring system, a multitude of measured values ​​and data can be provided that can be used by various applications on a medical technology system for monitoring patients in a medical technology environment. Furthermore, the data obtained in this way can be distributed in a communications environment (network environment: LAN, WLAN, etc.) using interfaces.

[0031] In a preferred embodiment of the sensor arrangement or measuring arrangement, the at least two measuring modules and the additional sensor element or measuring module can be arranged on surfaces of a common, planar support element. This embodiment also offers the advantage of a further integrated measuring system, in which the support element is designed as a type of platform for the arrangement of measuring modules.

[0032] In a preferred embodiment of the sensor arrangement or measuring arrangement, the common gas or flow space can form a housing element or a measuring cuvette designed to guide the flow of a gas mixture.

[0033] In a further preferred embodiment, the measuring arrangement can have operating electronics which are designed for commissioning, adjusting or calibrating the measuring arrangement and / or coordinating a measuring operation of the measuring arrangement, the sensor arrangement and / or the sensor elements,

[0034] • wherein at least one of the sensor elements or one of the measuring modules, in conjunction with the operating electronics, forms a metrological function of a flow or flow rate sensor

[0035] • or wherein at least one of the sensor elements or one of the measuring modules in cooperation with the operating electronics, the elements for guiding the magnetic field and a coil arrangement forms a metrological function of a paramagnetic oxygen sensor

[0036] • or wherein at least one of the sensor elements or one of the measuring modules in cooperation with the operating electronics, radiation source and at least one optical filter element (16) forms a metrological function of an infrared-optical gas sensor.

[0037] The operating electronics preferably comprise a computing unit, e.g., in the form of a microcontroller or similar (PCI, PCP, DSP, FPGA, ASIC, GAL) and a data memory (RAM, ROM). The operating electronics with computing unit (PCI, PCP, DSP, FPGA, ASIC, GAL) and data memory (RAM, ROM) are designed to perform conversions, linearizations, and conversions of the measured values ​​of the measuring modules and to transmit these values ​​via interfaces (USB, SPI, etc.). 2C, 1-Wire) a medical device (anesthesia machine, ventilator, heat therapy device, physiological monitoring system (PPM)) or a data network (LAN, WLAN). In the data memory, for example, characteristic curves or data fields (array, vector) can be stored, which can be used by the computing unit for signal processing, signal conversion, signal conversion in the quantitative and / or qualitative determination of measured variables, such as flow rates, gas concentrations, temperatures. It is also possible to store typical and specific calibration data or information (offset, gain, drift) of the measuring modules or sensor elements in the data memory and use it during operation to enable improved accuracy or reliability of the measuring system.

[0038] Preferred particular embodiments can be formed by arranging additional components, assemblies, or elements in or on the carrier element or the housing element. Thus, the sensor arrangement can be arranged on the at least one planar carrier element.

[0039] In a particular embodiment, the at least one optical filter element can be arranged on the at least one planar carrier element.

[0040] In a particular embodiment, the at least one optical filter element can be arranged on the housing element.

[0041] In a particular embodiment, the at least one optical filter element can be formed as part of the housing element.

[0042] In a particular embodiment, the radiation source can be arranged on the at least one planar carrier element.

[0043] In a particular embodiment, the radiation source can be arranged on the housing element. In a particular embodiment, the radiation source can be formed as part of the housing element.

[0044] In a particular embodiment, the mirror element can be arranged on the at least one planar support element.

[0045] In a particular embodiment, the mirror element can be arranged on the housing element.

[0046] In a particular embodiment, the mirror element can be formed as part of the housing element.

[0047] In a particular embodiment, the coil arrangement can be formed as an integral part of the at least one planar support element or can be arranged on the at least one planar support element.

[0048] In a preferred embodiment, the coil arrangement can be arranged on the housing element.

[0049] In a preferred embodiment, the coil arrangement can be formed as a part of the housing element.

[0050] In a preferred embodiment, the housing element can have at least one gas inlet and at least one gas outlet and / or elements for flow guidance.

[0051] In a preferred embodiment, the thermocouples or thermopiles of the sensor elements can be formed as structured semiconductor elements in the form of PN-doped semiconductor elements on the semiconductor substrate of the surface of the at least one planar carrier element.

[0052] In a further preferred embodiment, the measuring arrangement can enable the determination of physical or chemical properties of a gas or gas mixture. At least one of the sensor elements and / or another sensor element

[0053] • to a pressure measurement;

[0054] • to a density measurement;

[0055] • to a viscosity measurement;

[0056] • to measure concentration;

[0057] • to measure thermal conductivity; • flow rate measurement;

[0058] • Flow measurement;

[0059] • Flow velocity measurement;

[0060] • to a humidity measurement;

[0061] • be designed to measure temperature.

[0062] The temperature measurement can be performed, for example, by an NTC sensor arranged on the support element. This allows both the temperature of the gas mixture in the flow chamber and the surface temperature of the support element to be measured.

[0063] In a preferred embodiment, the operating electronics can be arranged at least partially with the sensor elements on the planar, common carrier element, and the planar, common carrier element can be arranged integrated into a common gas and flow chamber. This preferred embodiment also offers the advantage of a further integrated, in this case highly integrated, measuring system, in which the carrier element is designed as a type of platform for the arrangement of measuring modules and electronics. The operating electronics with a computing unit (pC, pP, DSP, FPGA, ASIC, GAL), data memory (RAM, ROM) is designed to perform conversions, linearizations, and conversions of the measured values ​​of the measuring modules and to transmit them via interfaces (bus systems such as USB, SPI, l 2C, 1-Wire) to a medical device (anesthesia machine, ventilator, heat therapy device, physiological monitoring system (PPM)) or a data network (LAN, WLAN). For example, characteristic curves or data fields (array, vector) can be stored in the data memory, which can be incorporated by the computing unit for signal processing, signal conversion, and signal conversion into the quantitative and / or qualitative determination of measured variables, such as flow rates, gas concentrations, and temperatures. It is also possible to store typical and specific calibration data or information (offset, gain, drift) of the measuring modules or sensor elements in the data memory and use them during operation to enable improved accuracy or reliability of the measuring system. This embodiment with an "on-chip" integration of electronic components for signal processing, a computing unit (PC), data storage (RAM, ROM), and interfaces (bus systems such as USB, SPI, etc.)2C, 1-Wire) offers the possibility of recording measured values ​​with parameters relating to the properties of gas mixtures, including flow velocities, flow rates, concentrations of gas components in the gas mixture, density, viscosity, temperature and pressure levels or moisture content in the gas mixture, and temporal changes in the moisture content or temperature and pressure levels in the gas mixture. This also makes it possible to record physical states such as the inhalation and exhalation cycle and the addition of gases to the mixture during ventilation or anesthesia in real time in a shared flow space. Furthermore, any necessary adjustments to signal processing, signal filtering, signal corrections, calculations (max, min, average), normalization, or linearization can be carried out in real time for multiple measured parameters.Thus, a data set can be provided which describes the physical situation in the common gas space at an identical location and at an identical time and contains it in the form of several measured variables.

[0064] In a further preferred embodiment, one of the following arrangements for determining physical or chemical properties of a gas or gas mixture can be formed on the at least one planar carrier element with three sensor elements:

[0065] • Arrangement for flow or flow rate measurement, oxygen concentration measurement and gas concentration measurement for another gas component or a moisture content in the gas or gas mixture;

[0066] • Arrangement for flow or flow rate measurement and oxygen concentration measurement and temperature measurement;

[0067] • Arrangement for flow or flow rate measurement, oxygen concentration measurement and pressure measurement;

[0068] • Arrangement for flow or flow rate measurement, oxygen concentration measurement and density measurement;

[0069] » Arrangement for oxygen concentration measurement, gas concentration measurement for another gas component or a moisture content in the gas or gas mixture and temperature measurement;

[0070] • Arrangement for oxygen concentration measurement, gas concentration measurement for another gas component or a moisture content in the gas or gas mixture and pressure measurement;

[0071] • Arrangement for oxygen concentration measurement, gas concentration measurement for another gas component or a moisture content in the gas or gas mixture, and density measurement; • Arrangement for oxygen concentration measurement, pressure measurement, and density measurement.

[0072] The sensor arrangement and the measuring arrangement according to the invention thus offer a cost-effective and practical solution for the integrative joint metrological detection and monitoring of gas concentrations (oxygen, anesthetic gas) and flow rates.

[0073] The invention will be explained in more detail in the following description, with partial reference to Figures 1, 2, 3a, 3b, 4, 5, 6a, 6b, 6c. Identical elements in Figures 1, 2, 3a, 3b, 4, 5, 6a, 6b, 6c are designated by identical reference symbols or numerals in Figures 1, 2, 3a, 3b, 4, 5, 6a, 6b, 6c. In the drawings:

[0074] Fig. 1: Perspective view of a measuring cuvette;

[0075] Fig. 2: View of the measuring cuvette according to Figure 1 in the inflow direction;

[0076] Fig. 3a: Top view of the measuring cuvette according to Figure 1;

[0077] Fig. 3b: Top view of a variant of the measuring cuvette according to Figures 1, 3a;

[0078] Fig. 4: Extension of the measuring cuvette according to Figure 2;

[0079] Fig. 5: Extension of the measuring cuvette according to Figure 1;

[0080] Fig. 6a, 6b, 6c: Views of a support element.

[0081] Figure 1 shows a perspective view of a measuring cuvette 19 as a housing or housing element as a common gas and flow chamber. Shown are the measuring cuvette 19, a mirror element 17 on a right-hand side wall of the measuring cuvette 19, a sensor arrangement 1, a support element 3 with a radiation source 15, a first sensor element (O2) 5 and a second sensor element (IR) 7, as well as elements 11 for guiding a magnetic field on the support element 3. The mirror element 17 directs the infrared radiation 151 from the radiation source 15 toward the second sensor element (IR) 7.

[0082] Figure 2 shows a view of the measuring cuvette according to Figure 1 in the inflow direction with a mirror element 17 on the right side wall of the measuring cuvette 19 with the carrier element 3 in the middle, the first sensor element (O2) 5, the second sensor element (IR) 7 and a third sensor element (Flow) 9, with a gas inlet 21 for the inflow 25 of gas quantities into the measuring cuvette 19 and a flow division for distributing the inflowing gas quantities to the sensor elements 5, 7, 9. The elements 11 for guiding a magnetic field are shown in outline in Figure 2.

[0083] Figure 3a shows a top view of the measuring cuvette 19 according to Figure 1.

[0084] Figure 3b shows a top view of a variant of the measuring cuvette 19 according to Figure 1. Figures 3a and 3b show the measuring cuvette 19 with a mirror element 17 on the right side wall of the measuring cuvette 19, with the support element 3 in the center, depicting a flow 25 into and through the measuring cuvette 19. The elements 11 for guiding a magnetic field are indicated in Figure 3a. Walls and flow barriers are arranged in the measuring cuvette 19, forming a first chamber 191 and a second chamber 192 as a "bypass" in the measuring cuvette 19, forming a "flow-calmed chamber." A main flow can flow into the first chamber 191, and its flow rate can be measured using the third sensor element (Flow) 9, in terms of direction and magnitude. In the second space 192, a partial flow reaches the first sensor element (O2) 5 and the second sensor element (IR) 7.The first sensor element 5, in cooperation with the elements 11, is arranged and configured to guide a magnetic field for the metrological detection of an oxygen concentration in the second chamber 192 of the measuring cuvette 19. The second sensor element (IR) 7, in cooperation with the radiation source 15, is arranged and configured to metrologically detect a concentration of another gas, for example, carbon dioxide (CO2), in the second chamber 192 of the measuring cuvette 19. The sensor elements 5, 7, 9 can form measuring modules 51, 71, 91, respectively, with the electronic components 27 (Figure 4), interfaces 26 (Figure 4), the radiation source 15 (Figure 1), mirror element 17, optical filter element (16) 16 (Figure 6a), control unit 28 (Figure 4), and signal processing elements (OP amps, filters) (Figure 4).

[0085] In Figure 3a, two sensor elements 5 (O2), 7 (IR) are arranged on one side of the carrier element 3, while in the first space on the opposite side of the carrier element 3 the sensor element 9 (Flow, Flow_l) is arranged.

[0086] In Figure 3b, in contrast to Figure 3a, an additional sensor element 9' (Flow_2) is arranged in the second chamber 192 of the measuring cuvette 19. This additional sensor element 9' is arranged in such a way that it enables the measurement of flow situations in the second chamber (bypass). This allows, for example, a check to determine whether a gas exchange 25 of the measuring cuvette 19 with the outside world is taking place in the second chamber. In alternative embodiments, the distribution of the flow 25 between the first chamber

[0087] 191 and the second chamber 192 by a "flow division" as a division in a defined ratio, e.g. in a ratio of 10:1. In this way, for a predetermined measuring range of the flow rate by means of the additional sensor element 9' in the second chamber

[0088] 192, the flow rate through the first chamber 191 can also be determined indirectly. In such a configuration, the sensor element 9 (Flow_l) in the first chamber 191 is optional and can also be omitted in alternative embodiments of the measuring cuvette 19, so that all sensor elements (5, 7, 9') can be arranged on the same surface of the carrier element 3.

[0089] Figure 4 shows an extension of the measuring cuvette according to Figure 2 with sensor arrangements 5, 7, 9, interfaces 26 and / or electronic components 27 on the carrier element 3, as well as an arrangement of elements 11 for guiding the magnetic field with a coil arrangement 33 with an iron core 34. The electronic components 27 can be arranged at least partially on the carrier element 3, as well as at least partially on the measuring cuvette 19 and comprise a control unit (pC, ADpC) 28, elements 29 for signal processing (OP-Amps, filters) as well as interfaces (USB, SPI, l 2 C, 1-Wire) 26 to connection options 39, such as power supply connection and data connection to networks 37, equipment or external devices 35.

[0090] Figure 5 shows an extension of the measuring cuvette 19 according to Figure 1 or a variant of the design according to Figure 4 in a simplified schematic representation with electronic components 27 on the carrier element 3, as well as an arrangement of elements 11 for guiding the magnetic field. The electronic components 27 include a control unit (PC, ADPC) 28, signal processing elements (OP amps, filters) 29, and interfaces (USB, SPI, etc.). 2 C, 1-Wire) 26.

[0091] Figures 6a, 6b, and 6c show schematic views of the carrier element with an exemplary arrangement of three sensor elements 5, 7, and 9. Figure 6a shows a sectional view of a schematic side view of a carrier element 3 in the measuring cuvette 19 with sensor elements 5, 7, and 9, a radiation source 15, and elements 11 for guiding the magnetic field. Visible is an area CI 31 of a surface 13 of the carrier element 3 above the section line C 10 according to Figure 6b. Figure 6b shows a schematic view of the carrier element 3 in the drawing plane A 20 of the carrier element 3 according to Figure 6a. Three sensor elements 5, 7, and 9 are visible on the carrier element 3. A gas inlet 21 and a gas outlet 23 with flow arrows 25, which are intended to symbolize inflow and outflow, are indicated.

[0092] Figure 6c shows a schematic view of the support element 3 in the drawing plane B 40 of the support element 3 according to Figure 6a. Visible are the support element 3, the radiation source 15, and the elements 11 for guiding the magnetic field.

[0093] List of reference numbers

[0094] Sensor arrangement

[0095] Carrier element , 7, 9 Sensor elements 0 Measuring arrangement 1 Elements made of magnetically conductive material 3 Surface of the carrier element 5 Radiation source 51 Infrared radiation 6 Optical filter elements (16) 7 Mirror element 9 Measuring cuvette, housing element, housing 91, 192 Spaces in the measuring cuvette 0, 30, 40 Levels A, C, B 1 Gas inlet 3 Gas outlet 5 Flow arrows 6 Interfaces (USB, SPI, l 2C, 1-Wire) 7 Electronic components 8 Control unit (pC, ADpC) 9 Elements for signal processing (OP-Amps, Filters) 1 Area CI of the carrier element 2 Area C2 of the carrier element 3 Coil arrangement 4 Iron core 5, 37, 39 Connection options 1, 71, 91 Measuring modules 10 Arrangement with elements 11 made of magnetically conductive material or materials

Claims

Patent claims 1. Sensor arrangement (1) for determining physical or chemical properties of a gas or gas mixture with at least one planar carrier element (3) and a number of at least two sensor elements (5, 7, 9, 9'), • wherein the at least two sensor elements (5, 7, 9, 9') are arranged on surfaces (13) of the at least one planar carrier element (3), • wherein the at least two sensor elements (5, 7, 9, 9') are arranged in a common gas or flow space (19), • wherein the carrier element (3) is at least partially formed as a semiconductor substrate, • wherein the at least two sensor elements (5, 7, 9, 9') are designed as thermocouples or as thermopiles, • wherein an arrangement of elements (11) made of a magnetically conductive material designed to guide a magnetic field is arranged on the carrier element (3), • wherein the arrangement of the elements (11) for guiding a magnetic field and of at least one of the two sensor elements (5, 7, 9, 9') is designed in such a way that a substantially perpendicular guidance of the magnetic field with respect to the surface (13) of the planar carrier element (3) is provided, • wherein at least one of the at least two sensor elements (5, 7, 9, 9') designed as a thermocouple or thermopile forms a measuring module (51) for a paramagnetic gas concentration measurement with the arrangement of the two elements (11) designed to guide a magnetic field • and wherein a further one of the at least two sensor elements (5, 7, 9, 9') designed as a thermocouple or thermopile is designed: o as a measuring module (71) for an infrared-optical gas concentration measurement o or as a measuring module (91) for a flow or flow rate measurement.

2. Sensor arrangement (1) for determining physical or chemical properties of a gas or gas mixture with at least one planar carrier element (3) and a number of at least two sensor elements (5, 7, 9, 9'), • wherein the at least two sensor elements (5, 7, 9, 9') are arranged on surfaces (13) of the at least one planar carrier element (3), • wherein the at least two sensor elements (5, 7, 9, 9') are arranged in a common gas or flow space (19), • wherein the carrier element (3) is at least partially formed as a semiconductor substrate, • wherein the at least two sensor elements (5, 7, 9, 9') are designed as thermocouples or as thermopiles, • wherein at least one of the two sensor elements (5, 7, 9, 9') is designed to be sensitive to radiation in the infrared range of 3 pm - 12 pm and is intended to detect radiation quantities in the infrared range of 3 pm - 12 pm, • wherein an arrangement with a radiation source (15) for emitting infrared radiation in the infrared range of 3 pm - 12 pm is arranged in or on the flow space (19) or on or on the at least one carrier element (3), • wherein at least one of the at least two sensor elements (5, 7, 9, 9') with the radiation source (15) and an optional mirror element (17) is designed (as?) a measuring module (71) for an infrared-optical gas concentration measurement and another of the at least two sensor elements (5, 7, 9, 9') designed as a thermocouple or thermopile: o as a measuring module (51) for a paramagnetic gas concentration measurement o or as a measuring module (91) for a flow or flow rate measurement.

3. Sensor arrangement (1) according to claim 1 or claim 2 with a planar support element (3) with an arrangement of three sensor elements (5, 7, 9, 9'), • wherein the at least three sensor elements (5, 7, 9, 9') are arranged on surfaces (13) of the at least one planar carrier element (3), • wherein the at least three sensor elements (5, 7, 9, 9') are arranged in a common gas or flow space (19), » wherein the carrier element (3) is at least partially formed as a semiconductor substrate, • wherein the at least three sensor elements (5, 7, 9, 9') are designed as thermocouples or as thermopiles, • wherein an arrangement with a radiation source (15) for emitting infrared radiation in the infrared range of 3 pm - 12 pm is arranged in or on the flow space (19) or on or on the at least one carrier element (3), • wherein an arrangement of two elements (11) designed to guide a magnetic field made of a magnetically conductive material is arranged on the carrier element (3), • wherein the arrangement of the elements (11) for guiding a magnetic field (pole shoes) and of at least one of the two sensor elements (5, 7, 9, 9') is designed in such a way that a substantially rectangular guidance of the magnetic field with respect to the surface (13) of the planar carrier element (3) is provided and one of the at least three sensor elements (5, 7, 9, 9') forms a measuring module (51) for a paramagnetic gas concentration measurement with the arrangement of the three elements (11) designed to guide a magnetic field, • wherein one of the three sensor elements (5, 7, 9, 9') is designed to be sensitive to radiation in the infrared range of 3 pm - 12 pm and is provided for detecting radiation quantities in the infrared range of 3 pm - 12 pm and forms a measuring module (71) for infrared-optical gas concentration measurement with the radiation source (15) and an optional mirror element (17), • wherein one of the at least three sensor elements (5, 7, 9, 9') is designed as a measuring module (91) for measuring flow or flow rate.

4. Sensor arrangement (1) according to one of claims 1 to 3, wherein the at least two measuring modules (51, 71, 91) according to claims 1 or 2 comprise a Form a measuring arrangement (10) and wherein the at least two measuring modules (51, 71, 91) are arranged at least partially on surfaces (13) of a common, planar carrier element (3).

5. Sensor arrangement (1) or measuring arrangement (10) according to one of claims 1 to 4, wherein at least one further sensor element (5, 7, 9, 9') or measuring module (51, 71, 91) is arranged on the at least one planar carrier element (3) and: • as a thermocouple or as a thermopile; • as a thermoelectric sensor element; • as an optically sensitive sensor element; • as a resistive sensor element; • as a piezoelectric sensor element; • as a catalytic sensor element • or is designed as a piezoresistive sensor element.

6. Measuring arrangement (10) according to one of claims 3 to 5, wherein the at least two measuring modules (51, 71, 91) according to claim 1 or claim 2 and the further sensor element or measuring module (51, 71, 91) according to claim 4 are arranged on surfaces (13) of a common, planar carrier element (3).

7. Measuring arrangement (10) with a sensor arrangement (1) according to one of claims 3 to 6, wherein the common gas or flow space (19) forms a housing element or a measuring cuvette designed to guide the flow of a gas mixture.

8. Measuring arrangement (10) with a sensor arrangement (1) according to one of claims 3 to 7, wherein the measuring arrangement (10) has operating electronics (26, 27, 28, 29) which are designed for commissioning, adjustment or calibration of the measuring arrangement (10) and / or coordination of a measuring operation of the measuring arrangement (10), the sensor arrangement (1) and / or the sensor elements (5, 7, 9, 9'), • wherein at least one of the sensor elements (5, 7, 9, 9') or one of the measuring modules (51, 71, 91) in cooperation with the operating electronics (26, 27, 28, 29) forms a metrological function of a flow or flow rate sensor • or wherein at least one of the sensor elements (5, 7, 9, 9') or one of the measuring modules (51, 71, 91) in cooperation with the operating electronics (26, 27, 28, 29), the elements (11) for guiding the magnetic field and a coil arrangement (33) forms a metrological function of a paramagnetic oxygen sensor • or wherein at least one of the sensor elements (5, 7, 9, 9') or one of the measuring modules (51, 71, 91) in cooperation with the operating electronics (26, 27, 28, 29), radiation source (15), an optional mirror element (17) and at least one optical filter element (16) forms a metrological function of an infrared-optical gas sensor.

9. Measuring arrangement (10) according to claim 8, wherein the at least one optical filter element (16) • on the at least one planar support element (3) • or is arranged on the housing element • or is formed as a part of the housing element, and wherein the radiation source (15) and / or the optional mirror element (17) • on which at least one planar support element (3) is arranged • or is arranged on the housing element • or is formed as part of the housing element.

10. Measuring arrangement (10) according to claim 8, wherein the coil arrangement (33) • is designed as an integral part of the at least one planar support element (3) • or on which at least one planar support element (3) is arranged • or is arranged on the housing element • or is formed as part of the housing element.

11. Measuring arrangement (10) according to one of claims 3 to 8, wherein the housing element has at least one gas inlet and at least one gas outlet and / or elements for flow guidance.

12. Sensor arrangement (1) according to claim 1 or claim 2, and measuring arrangement (10) according to one of claims 3 to 11, wherein the thermocouples or thermopiles of the sensor elements (5, 7, 9, 9') are designed as structured semiconductor elements in the form of PN-doped semiconductor elements on the semiconductor substrate of the surface (13) of the at least one planar carrier element (3).

13. Measuring arrangement (10) according to one of claims 3 to 12, wherein the measuring arrangement (10) enables a determination of physical or chemical properties of a gas or gas mixture, wherein at least one of the sensor elements (5, 7, 9, 9') and / or a further sensor element • to a pressure measurement; • to a density measurement; • to a viscosity measurement; • to measure concentration; • to a thermal conductivity measurement; • to a flow rate measurement; • to a flow measurement; • to a flow velocity measurement; • to a humidity measurement; • is designed to measure temperature.

14. Measuring arrangement (10) according to one of claims 6 to 13, wherein the operating electronics (26, 27, 28, 29) are arranged at least partially together with the sensor elements (5, 7, 9, 9') on the planar, common carrier element (3), wherein the planar, common carrier element (3) is arranged integrated into a common gas and flow space (19).

15. Measuring arrangement (10) according to one of claims 9 to 14, wherein the operating electronics (26, 27, 28, 29) and the sensor elements (5, 7, 9, 9') or measuring modules (51, 71, 91) are arranged on the at least one planar carrier element (3) in the common gas or flow space (19), wherein one of the following Arrangements for determining physical or chemical properties of a gas or gas mixture on which at least one planar carrier element (3) is formed: • Arrangement for flow or flow rate measurement, oxygen concentration measurement and gas concentration measurement for another gas component or a moisture content in the gas or gas mixture; • Arrangement for flow or flow rate measurement and oxygen concentration measurement and temperature measurement; • Arrangement for flow or flow rate measurement, oxygen concentration measurement and pressure measurement; • Arrangement for flow or flow rate measurement, oxygen concentration measurement and density measurement; • Arrangement for oxygen concentration measurement, gas concentration measurement for another gas component or a moisture content in the gas or gas mixture and temperature measurement; • Arrangement for oxygen concentration measurement, gas concentration measurement for another gas component or a moisture content in the gas or gas mixture and pressure measurement; • Arrangement for oxygen concentration measurement, gas concentration measurement for another gas component or a moisture content in the gas or gas mixture and density measurement; • Arrangement for oxygen concentration measurement, pressure measurement and density measurement.

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