Method for producing a thick polymer film on a substrate

Abstract

Process for producing a thick polymer film on a substrate. This description relates to a process for producing a thick polymer film on a substrate (100) comprising the following steps: a) forming a first thermoplastic polymer film on a first substrate (100), b) forming a second thermoplastic polymer film on a second substrate (200) comprising a support substrate (210) covered by a non-stick layer (220), c) bonding the second thermoplastic polymer film to the first thermoplastic polymer film by thermocompression, applying a creep temperature higher than the glass transition temperature of both the first and second thermoplastic polymer films, thereby obtaining a third thermoplastic polymer film (303), d) separating the first substrate (100) from the second substrate (200).the third thermoplastic polymer film (303) peeling off the non-stick layer (220) and remaining bonded to the first substrate (100). Figure for the abbreviation: Fig. 2C,

Description

Title of the invention: Process for making of a thick polymer Hlm on a substrate technical field

[0001] This description relates generally to processes for manufacturing thick polymer films, particularly for microelectronics. Thick polymer films are particularly advantageous for manufacturing electronic components, especially when the processes involve photolithography and / or bonding steps. Previous technique

[0002] Polymers used for manufacturing electronic components are generally commercially available in liquid formulations. To obtain a solid and continuous polymer film, the formulations can be spread by centrifugal coating onto the substrate, followed by a heat treatment step to remove the solvent.

[0003] The formulation is chosen according to the polymer and the desired thickness range. The thickness range depends on the viscosity of the liquid formulation and the speed of the centrifugal coating. This data is provided by the manufacturer. Generally, the films obtained have a thickness ranging from tens of nanometers to several tens of micrometers, or even up to 100 pm for certain polymers.

[0004] However, some applications require greater thicknesses of polymer films. For example, to ensure adhesion to a highly textured surface, the film thickness must be much greater than the texture of the substrate in order to encapsulate it properly.

[0005] To obtain large thicknesses, it would seem feasible to use a very viscous formulation and / or to reduce the centrifugation speed.

[0006] However, on automated industrial equipment, a highly viscous formulation would require very high-performance and therefore expensive pumping systems. Furthermore, the pipes would tend to clog very easily. The use of a low centrifugation speed would, in turn, lead to poor uniformity in the thickness of the polymer film.

[0007] Furthermore, repeating the steps of depositing polymer films on the same substrate several times would lead to obtaining a polymer structure that is inhomogeneous in thickness and in which the solvent would tend to remain trapped at the different interfaces of the polymer films. Summary of the invention

[0008] There is a need for a process for producing a homogeneous polymer film of high thickness.

[0009] This objective is achieved by a process for producing a thick polymer film on a substrate comprising the following steps: a) to form a first thermoplastic polymer film on a first substrate, b) form a second thermoplastic polymer film on a second substrate, the second substrate comprising a support substrate covered by a non-stick layer, c) bonding the second thermoplastic polymer film to the first thermoplastic polymer film by thermocompression, applying a finishing temperature higher than the glass transition temperature of both the first and second thermoplastic polymer films, thereby obtaining a third thermoplastic polymer film. d) separate the first substrate from the second substrate, the third thermoplastic polymer film separating from the anti-stick layer and remaining on the first substrate.

[0010] According to a particular embodiment, steps b) to d) are repeated one or more times until a thermoplastic polymer film of the desired thickness is obtained.

[0011] According to a particular embodiment, the first thermoplastic polymer film and the second thermoplastic polymer film are chosen, independently of each other, from polyolefin, polyamide, poly(ethylene terephthalate) or ethylene-vinyl acetate copolymer films.

[0012] According to a particular embodiment, the first substrate is covered by raised elements, for example chips or pillars, the raised elements preferably having a thickness of at least 80pm and, even more preferably, of at least 100pm in thickness.

[0013] According to a particular embodiment, the process comprises, after step d), a further mechanical abrasion step, possibly followed by a mechano-chemical abrasion step, on the raised elements.

[0014] According to a particular embodiment, the non-stick layer is a halogenated polymer layer, preferably a fluorinated polymer layer.

[0015] According to a particular embodiment, the non-stick layer is a layer formed of silane compounds, preferably halogenosilanes, for example an octadecyltrichlorosilane layer or a perfluorodecyltrichlorosilane layer.

[0016] According to a particular embodiment, the first substrate and / or the substrate supporting the second substrate are made of glass or of semiconductor material, for example silicon.

[0017] According to a particular embodiment, the finishing temperature is at least 100°C higher than the glass transition temperature of the first thermoplastic polymer film and the glass transition temperature of the second thermoplastic polymer film.

[0018] According to a particular embodiment, on the one hand, the adhesion energy between the non-stick layer and the third thermoplastic polymer film is at least 500 mJ / m2 lower than the adhesion energy between the first thermoplastic polymer film and the second thermoplastic polymer film and, on the other hand, the adhesion energy between the non-stick layer and the third thermoplastic polymer film is at least 500 mJ / m2 lower than the adhesion energy between the first substrate and the third thermoplastic polymer film. Brief description of the drawings

[0019] These features and advantages, as well as others, will be described in detail in the following description of particular embodiments, given by way of non-limiting example, in relation to the accompanying figures, among which:

[0020] [Fig.1A], [Fig.1B], [Fig.1C], [Fig.1D], [Fig.1E], [Fig.1F] and [Fig.1G] schematically represent different stages of a process for developing a polymer film, according to a particular embodiment of the invention;

[0021] Fig. 2A, Fig. 2B, Fig. 2C, Fig. 2D, Fig. 2E, Fig. 2F and Fig. 2G schematically represent different stages of a process for developing a polymer film, according to another particular embodiment of the invention.

[0022] The different elements are not necessarily represented at the same scale in order to make the figures more legible. Description of the implementation methods

[0023] The same elements have been designated by the same reference numerals in the different figures. In particular, structural and / or functional elements common to the different embodiments may have the same reference numerals and may have identical structural, dimensional and material properties.

[0024] For the sake of clarity, only the steps and elements useful for understanding the described embodiments have been represented and are detailed.

[0025] Unless otherwise specified, when referring to two interconnected elements, this means directly connected without intermediate elements other than conductors, and when referring to two elements connected (in English "coupled") to each other, it means that these two elements can be connected or linked through one or more other elements.

[0026] In the following description, when reference is made to absolute position qualifiers, such as the terms "front", "back", "top", "bottom", "left", "right", etc., or relative position qualifiers, such as the terms "above", "below", "superior", "inferior", etc., or to orientation qualifiers, such as the terms "horizontal", "vertical", etc., reference is made, unless otherwise specified, to the orientation of the figures or structure in a normal position of use.

[0027] Unless otherwise specified, the expressions "approximately", "roughly", and "on the order of" mean to within 10% or 10°, preferably to within 5% or 5°.

[0028] We will now describe in more detail the process of developing a thick polymer film with reference to Figures IA to IG and Figures 2A to 2G.

[0029] The process comprises at least the following steps: a) to form a first thermoplastic polymer film 301 on a first substrate 100, and more particularly on the upper face of the first substrate 100 (figures IA, 2A), b) form a second thermoplastic polymer film 302 on a second substrate 200 comprising a support substrate 210 covered by a non-stick layer 220 (figures IB, 2B), c) bond the second thermoplastic polymer film 302 with the first thermoplastic polymer film 301, by thermocompression, applying a finishing temperature higher than the glass transition temperature of the first thermoplastic polymer film 301 and the second thermoplastic polymer film 302, thereby obtaining a third thermoplastic polymer film 303 (figures IC, 2C), d) separate the first substrate 100 from the second substrate 200, the third thermoplastic polymer film 303 separating from the second substrate 200 and remaining on the first substrate 100 (figures 1D, 2D).

[0030] The cycle of steps b), c) and d) can be repeated one or more times until a polymer film 305 is obtained having the desired thickness (figures 1E to IG and figures 2E to 2G).

[0031] A homogeneous polymer film 303, 305 having a very high thickness is thus formed.

[0032] The polymer films obtained 303, 305 are thick films. By thick, we mean that the film thickness is greater than that of a film normally formed under the deposition conditions specified by the manufacturer. For example, by thick we mean that the film thickness is at least two, or even three, times greater than the thickness specified by the manufacturer. The final thickness of the resulting film will depend on the polymer and the number of films layered. The thickness of the resulting films is, for example, Thicknesses of 80 µm or greater, or even 120 µm or greater, are particularly common in polyolefin films. Thicknesses can reach values ​​exceeding 400 µm, or even 600 µm for other polymers.

[0033] The spreading parameters (centrifuge speed) provided by the manufacturer can be used for the deposition of each film.

[0034] The resulting polymer film 303, 305 differs from a multilayer element by the absence of a film / film or film / solvent interface within its volume. Indeed, carrying out the bonding step of the thermoplastic films at a temperature higher than their finishing temperatures leads to obtaining a continuous or even monolithic polymer film 303, 305 of greater thickness.

[0035] The first polymer film 301 and the second polymer film 302 may have identical or different thicknesses and / or be made of the same material or different materials. They are preferably identical. The first polymer film 301 and the second polymer film 302 may comprise one or more thermoplastic polymers.

[0036] The first thermoplastic polymer film 301 and / or the second thermoplastic polymer film 302 can be chosen, independently of each other, from polyolefins (polyethylene (PE) or polypropylene (PP) for example), polyamides (PA), poly(ethylene terephthalate) (PET) and ethylene and vinyl acetate (EVA) copolymers.

[0037] The first polymer film 301 and the second polymer film 303 can be obtained by depositing, for example by centrifugal coating, a liquid formulation comprising the thermoplastic polymer(s) and one or more organic solvents onto the upper surface of the substrate of interest 100 or onto the adhesive layer 220 of the second substrate 200. A heat treatment can be carried out after each polymer film deposition to remove the organic solvent(s). The temperature of the heat treatment will be chosen according to the solvent.

[0038] Liquid formulations may be commercial compositions BrewerBOND® 305 marketed by Brewer Science or Zero Newton TWM12000 Series marketed by TOKYO OHKA KOGYO Co (TOK).

[0039] The first substrate 100 is the substrate of interest, that is, the substrate on which the thick polymer film is to be formed. The polymer film is formed on the upper surface of the first substrate 100.

[0040] It is specified that, by upper face of the first substrate 100 (or first face of the first substrate 100), we mean the face which serves as the basis for the deposition of the thermoplastic polymer film 301 as opposed to the so-called lower face (or second face) opposite the upper face, which is not subject to any deposition in the context of this process.

[0041] According to a first embodiment, for example shown in Figures IA to IG, the first substrate 100 has a flat surface and is not covered by any element. The first deposited polymer film 301 is in contact with the first face of the first substrate 100.

[0042] According to a second embodiment, for example shown in Figures 2A to 2G, the first face of the first substrate 100 is covered by raised elements 110. The raised elements 110 are, for example, electronic chips or pillars. The raised elements 110 preferably have a thickness of at least 80 µm and, preferably, at least 100 µm.

[0043] The chips 110 can be bonded to the first face of the first substrate 100 to form a tiled structure. By way of illustration, the tiled structure can be formed from a silicon substrate 700 pm thick onto which chips of a similar thickness have been bonded.

[0044] The pillars 110 can be formed by structuring the first substrate 100, for example by means of a photolithography step followed by an etching.

[0045] The second substrate 200 comprises a support substrate 210 covered by a non-stick layer 220. The polymer film is deposited on the non-stick layer 220.

[0046] The first substrate 100 and the support substrate 210 of the second substrate 200 can be made of a semiconductor material, for example, silicon, germanium, for example a silicon-germanium alloy, or an IILV semiconductor. It can also be a silicon-on-insulator (SOI) substrate.

[0047] The first substrate 100 and the support substrate 210 of the second substrate 200 may be made of the same material or of different materials. Preferably, the first substrate 100 and the support substrate 210 of the second substrate 200 are silicon substrates.

[0048] The first substrate 100 and the support substrate 210 of the second substrate 200 may have identical dimensions and, in particular, have the same shape and / or the same surface area.

[0049] For example, the first substrate 100 and / or the support substrate 210 can be circular plates, preferably made of silicon, having a diameter, preferably between 100 and 300 mm, in particular 200 mm.

[0050] The anti-adhesive layer 220 has anti-adhesive properties, and in particular a very low surface energy (typically less than 20 mJ / m2). It acts as an anti-adhesive agent with respect to the adhesion of the thermoplastic polymer to the substrate 200.

[0051] The non-stick layer 220 can in particular be selected from: - a layer comprising one or more halogenated polymers, preferably one or more fluorinated polymers, such as a polymer resulting from the polymerization of at least a fluorinated monomer, for example, a fluorinated acrylate monomer or a fluorinated ethylenic monomer; - a layer in one or more silane compounds grafted onto the support substrate 210 and, more particularly, a layer obtained by grafting one or more halogenosilane compounds, for example, octadecyltrichlorosilane or perfluorodecyltrichlorosilane.

[0052] When the support substrate 210 is made of silicon and the non-stick layer 220 is formed from one or more halosilane compounds, the halosilane compound(s) will react with the hydroxyl groups spontaneously present on the surface of the silicon support substrate 210. The compound(s) are thus irreversibly grafted onto the surface of the support substrate 210 and impart the non-stick property to the second substrate 200.

[0053] The non-stick layer 220 can be formed according to the following steps: - an operation of bringing the upper face of the support substrate 210 into contact with a liquid composition comprising one or more non-stick compounds and at least one organic solvent, for example, by centrifugal coating; - a drying operation to evaporate the solvent(s).

[0054] In step a), the first thermoplastic polymer film 301 is formed on the upper face of the first substrate 100 (Figures IA, 2A). It is preferably deposited by spin-coating.

[0055] The first thermoplastic polymer film 301 has a thickness Epi.

[0056] During step b), the second thermoplastic polymer film 302 is formed on the second substrate 200, and more particularly on the anti-stick layer 220. It is preferably deposited by spin-coating.

[0057] The deposition conditions of the second polymer film 302 may be identical or different from the deposition conditions of the first polymer film 301.

[0058] The second polymer film 302 has a thickness Ep2. The low wetting properties of the non-stick layer 220 can lead to a non-homogeneous second polymer film 302. For example, dewetting zones may be observed. However, such inhomogeneities are not problematic since polymer creep is carried out during step c).

[0059] The thicknesses Epi and Ep2 can be identical or different.

[0060] During step c), the first substrate 100 and the second substrate 200 are assembled by gluing the first thermoplastic polymer film 301 and the second thermoplastic polymer film 302 by thermocompression.

[0061] This step is carried out at a sufficient temperature and pressure to allow the bonding between the first thermoplastic polymer film 301 and the second thermoplastic polymer film 302. The pressure is, for example, included between 6 and 50 kN, preferably between 10 and 50 kN. In particular, the applied temperature is advantageously higher than the glass transition temperature (Tg) of the thermoplastic polymer(s) 301, 302 and, more specifically, it is at least 100°C higher than the highest glass transition temperature. Under pressure and at such a temperature, the thermoplastic polymer(s) become fluid, flow, and create intimate contact between the two polymer interfaces. If necessary, inhomogeneities and wetted areas related to the spreading of the polymer on the second substrate 200 are corrected. This finishing is particularly possible when the viscosity of the adhesive is less than 10⁴ Pa·s. A third polymer film 303 is thus formed, consisting of the first thermoplastic polymer film 301 and the second thermoplastic polymer film 302. The third thermoplastic polymer film 303 has a homogeneous thickness.It has a thickness Ep3 such that Ep3 = Epi + Ep2.

[0062] At the end of step c) of thermocompression bonding, an assembly is obtained comprising the first substrate 100 and the second substrate 200 between which is interposed a thick thermoplastic polymer film 303. The polymer film is in direct contact with the first substrate 100 and with the non-stick layer 220 of the second substrate 200.

[0063] Thermoplastic polymer films have adhesive properties. They adhere to the first substrate 100 or to another thermoplastic polymer film but exhibit weak adhesion to the non-stick layer 220.

[0064] Thus, the thermoplastic polymer film 303 exhibits greater adhesion with the first substrate 100 than with the non-stick layer 220 of the second substrate 200.

[0065] This assembly obtained in step c) is therefore composed of three interfaces: - an interface between the first polymer film 301 and the second polymer film 302, - an interface between the first thermoplastic polymer film 301 and the first substrate 100, - an interface between the second thermoplastic polymer film 302 and the non-stick layer 220.

[0066] By placing the system at a temperature higher than the glass transition temperature of the first polymer film 301 and the second polymer film 302, continuity is ensured between the two polymer films 301 and 302, and a third homogeneous solid film 303 is reconstructed. The adhesion E(Pol) of this interface is very strong. This represents the cohesive energy of the polymer if the polymer films 301 and 303 are identical.

[0067] The interface between the first polymer film 301 and the first substrate 100 is the polymer spreading interface. Its adhesion is strong E(S1), it is generally lower than E(Pol).

[0068] The interface between the second polymer film 302 and the second substrate 200 exhibits very low adhesion E(S2). In particular, E(S2) < E(S1) - 500 mJ / m2 and similarly E(S2) < E(Pol) - 500 mJ / m2. Preferably, the difference between E(S2) and E(S1) and / or the difference between E(S2) and E(Pol) is at least 2 J / m2, or even at least 3 J / m2, and more preferably at least 10 J / m2.

[0069] This allows for easy implementation of the last step of the process, namely, step d) of separation of the second substrate 200 and the thermoplastic polymer film 303.

[0070] Thus, in step d), when the first substrate 100 is separated from the second substrate 200, for example by inserting a wedge into the assembly, the interface with the weakest adhesion opens. This is the interface between the non-stick layer 220 of the second substrate 200 and the third polymer film 303. The third polymer film 303 is thus separated from the second substrate 200. The first substrate 100 is therefore covered with a thick polymer film 303. The second substrate 200, covered with the non-stick layer 220, can be directly reused in a new cycle.

[0071] For example, as shown in Figures 1E to IG and in Figures 2E to 2G, the process may include, after step d), the following steps: - implement step b) by forming a fourth thermoplastic polymer film 304 of thickness Ep4 on the second substrate 200, and more particularly on the non-stick layer 220 (figures 1E and 2E), - implement step c), by gluing the first substrate 100 and the second substrate 200 by thermocompression, thereby forming a fifth polymer film 305 of thickness Ep5 = Ep3 + Ep4, between the substrates 100, 200 (figures 1F and 2F), - implement step d) of dismantling to detach the second substrate 200 from the fifth polymer film 305 (figures IG and 2G).

[0072] The cycle can be repeated until a polymer film of the desired thickness is obtained, the thickness of the film increasing with each cycle performed.

[0073] It is also possible to deposit the thermoplastic polymer films only on one of the first substrate 100 or the second substrate 200. This embodiment is advantageous for forming a thick film on a substrate 100 covered with raised elements 110. In particular, the following steps can be carried out: - provide a first substrate 100, preferably covered with raised elements 110, - deposit a first polymer film 301 onto a second substrate 200 comprising a support substrate 210 covered by a non-stick layer 220, - assemble by thermocompression, the first substrate 100 and the second substrate 200, by bringing the first substrate 100 into contact with the first polymer film 301, - separate the first substrate 100 from the second substrate 200, thereby obtaining a first substrate 100 whose upper face is covered by the first polymer film 301, as indicated in step a) previously described, - implement one or more times the cycle of steps b), c) and d) previously described.

[0074] The spaces between the raised elements 110 covering the first substrate 100 are thus filled by a polymer film of homogeneous thickness.

[0075] This process is particularly advantageous for filling raised structures, especially paved structures (for example, those shown in Figures 2A to 2G). The very large thickness of the chips (greater than 100 µm) makes it impossible to fill the inter-chip space using conventional polymer spreading. Using this process, it is possible to fill this space progressively by repeating the cycle of spreading, bonding, and unbonding steps.

[0076] The resulting structure can then be subjected to a mechanical abrasion step, possibly followed by a mechano-chemical abrasion step, for example, to ensure that all the raised elements are at the same height. These steps are easily carried out since the spaces between the chips are filled with thermoplastic polymer.

[0077] Illustrative and non-limiting examples

[0078] The following examples are carried out using silicon wafers with a diameter of 200 mm. Surface energies are evaluated by the Owens and Wendt method (J. Appl. Polym. Sci 13 (1969), 1741-1747) using three liquids: water, ethylene glycol and diiodomethane. Adhesion is measured by the cleavage method proposed by Maszara et al. (J. Appl. Phys. 64 (10), 1988).

[0079] Example _ 1:

[0080] A first polymer film 301, marketed by Brewer Sciences under the reference BrewerBOND® BB305, is spread onto a silicon wafer 100. The film 301 has a thickness of 40 pm.

[0081] A fluorinated film 200 is deposited on a silicon wafer 210 from a solution marketed by NOVEC (3M) under the reference EGC 1720 to form the second substrate 200. The surface energy of the EGC 1720 film is 11 mJ / m2.

[0082] A second polymer film 302 of BrewerBOND® BB305 polymer adhesive, 40 µm thick, is spread on the second substrate 200.

[0083] The two substrates 100 and 200 are bonded to each other at a temperature of 250°C and a force of 15 kN to form a third film 303. The adhesion of the interface between the third film 303 made of BrewerBOND® BB305 and the first substrate 100 is 2 J / m². The adhesion between the third film 303 made of Brewer 305 and the anti-stick layer 220 of EGC 1720 is 0.2 J / m².

[0084] A corner is inserted into the structure obtained and the second substrate is disassembled, the third Brewer 305 303 film remains stuck to the surface of the first substrate 100. A third BrewerBOND® BB305 303 film of 80 µm is obtained on the surface of the first substrate 100.

[0085] A fourth 40 µm Brewer BB305 polymer film is spread again on the second substrate 200.

[0086] The substrates 100, 200 are bonded at a temperature of 250°C and a force of 15 kN to form a fifth film 305.

[0087] A wedge is inserted into the structure and the second substrate 200 is removed. The Brewer BB305 film remains on the surface of the first substrate 100. A Brewer BB305 film of 120 µm thickness is obtained on the surface of the first substrate 100. This film is then bonded at 210°C and with a force of 6 kN to a silicon plate covered by silicon pads 80 µm high, with a surface area of ​​10 x 10 mm², and spaced 5 mm apart. The bonded structure is free of defects.

[0088] Example 2:

[0089] A first 40 µm thick BrewerBOND® BB305 polymer film is spread on a silicon wafer 100.

[0090] A non-stick film of octadecyltrichl orosilane (OTS, marketed by Sigma-Aldrich) 220 is deposited onto a silicon wafer 210. The deposition is carried out using a solution of OTS in isooctane. A second substrate 200 is thus obtained. The surface energy of the OTS 220 film is 17 mJ / m².

[0091] A second 40 µm thick BrewerBOND® BB305 polymer adhesive film is spread onto the second substrate 200. The two substrates 100 and 200 are bonded at a temperature of 250°C and a force of 15 kN. A third film 303 is formed between the two substrates 100 and 200. The adhesion of the interface between the third BrewerBOND® BB305 film 303 and the first substrate 100 is 2 J / m². The adhesion between BrewerBOND® BB305 and the non-stick layer 220 of the second substrate 200 is 0.2 J / m².

[0092] A corner is inserted into the structure and the second substrate 200 is removed, the third Brewer 305 adhesive film 303 remains on the surface of the first substrate 100. A Brewer 305 film of 80 pm is obtained on the surface of the first substrate 100.

[0093] Example _ 3:

[0094] A first adhesive film 301 Zero Newton TWM12000 of 100 pm thickness is spread on a plate 100.

[0095] A perfluorodecyltrichlorosilane (FDTS, marketed by Sigma-Aldrich) film in isooctane solution is deposited on a silicon wafer 210 to form an anti-stick layer 220. A second substrate 200 is thus obtained. The surface energy of the FDTS film 220 is 10 mJ / m2.

[0096] A second adhesive film 302 Zero Newton TWM12000 of 100 pm is spread on the second substrate 200.

[0097] The two substrates 100 and 200 are bonded at 240°C with a force of 20 kN, thereby forming a third film 303 between the two substrates 100 and 200. The adhesion of the interface between the third film 303 TWM12000 and the first substrate 100 is 3000 mJ / m². The adhesion between the third film 303 TWM12000 and the FDTS anti-adhesive layer 220 of the second substrate 200 is 900 mJ / m².

[0098] A corner is inserted into the structure and the second substrate 200 is disassembled, the adhesive 303 in TWM 12000 remains on the surface of the first substrate 100. A third polymer film 303 of 200 pm thickness is obtained.

[0099] By repeating the operations of spreading TWM12000 on the second substrate 200, gluing it onto the first substrate 100 and removing the second substrate 200 four times, the first substrate 100 is coated with a 600 pm thick Zero Newton TWM 12000 film.

[0100] Example _ 4:

[0101] A first substrate 100 is taken, consisting of a plate onto which are glued square chips 110 with sides of 3 mm and a thickness of 650 µm. The chips 110 are spaced 1 mm apart.

[0102] A second substrate 200 is formed by depositing a non-stick film 220 of perfluorodecyltrichlorosilane (FDTS, marketed by Sigma-Aldrich) in isooctane solution onto a silicon support substrate 210. The surface energy of the FDTS 220 film is 10 mJ / m².

[0103] A second adhesive film 302 in TOK TWM 12000 of 100 pm thickness is spread on the second substrate 200.

[0104] The second substrate 200 is bonded to the first substrate 100 at 240°C and a force of 20 kN. A third adhesive film 303 is obtained. The adhesion of the interface between the third film 303 in TWM12000 and the first substrate is 3000 mJ / m². The adhesion between the third film 303 in TWM12000 and the anti-adhesive layer 220 of FDTS is 900 mJ / m².

[0105] A wedge is inserted into the structure and the second substrate 200 is removed. The third adhesive film 303 in TWM12000 remains on the surface of the first substrate 100. A polymer film 303 of approximately 400 pm is obtained between the chips because the support of the The adhesive guides the polymer into the trenches. Approximately ten microns of polymer remain on the surface of the chips.

[0106] By repeating the operations of spreading TWM12000 polymer film on the second substrate 200, gluing it onto the first substrate 100 and removing the second substrate 200, the trenches between the chips covering the first substrate 100 are filled with polymer.

[0107] Various embodiments and variations have been described. A person skilled in the art will understand that certain features of these various embodiments and variations could be combined, and other variations will become apparent to a person skilled in the art.

[0108] Finally, the practical implementation of the embodiments and variants described is within the reach of a person skilled in the art, based on the functional indications given above.

Claims

Demands

1. A method for producing a thick polymer film on a substrate (100) comprising the following steps: a) forming a first thermoplastic polymer film (301) on a first substrate (100), b) forming a second thermoplastic polymer film (302) on a second substrate (200), the second substrate (200) comprising a support substrate (210) covered by a non-stick layer (220), c) bonding the second thermoplastic polymer film (302) to the first thermoplastic polymer film (301) by thermocompression, applying a finishing temperature higher than the glass transition temperature of both the first thermoplastic polymer film (301) and the second thermoplastic polymer film (302), thereby obtaining a third thermoplastic polymer film (303), d) separating the first substrate (100) from the second substrate (200),the third thermoplastic polymer film (303) separating from the anti-adhesive layer (220) and remaining on the first substrate (100).

2. A method according to claim 1, wherein steps b) to d) are repeated one or more times until a thermoplastic polymer film of the desired thickness is obtained.

3. A method according to any one of claims 1 and 2, wherein the first thermoplastic polymer film (301) and the second thermoplastic polymer film (302) are selected, independently of each other, from polyolefin, polyamide, poly(ethylene terephthalate) or ethylene-vinyl acetate copolymer films).

4. A method according to any one of claims 1 to 3, wherein the first substrate (100) is covered by raised elements (110), for example chips or pillars, the raised elements (110) preferably having a thickness of at least 80pm and, even more preferably, of at least 100pm in thickness.

5. A method according to claim 4, comprising, after step d), a further mechanical abrasion step, optionally followed by a mechano-chemical abrasion step, on the raised elements (110).

6. A method according to any one of claims 1 to 5, wherein the non-stick layer (220) is a halogenated polymer layer, preferably a fluorinated polymer layer.

7. A method according to any one of claims 1 to 5, wherein the non-stick layer (220) is a layer formed of silane compounds, preferably halogenosilanes, for example an octadecyltrichlorosilane layer or a perfluorodecyltrichlorosilane layer.

8. A method according to any one of the preceding claims, wherein the first substrate (100) and / or the support substrate (210) of the second substrate (200) are made of glass or of semiconductor material, for example silicon.

9. A method according to any one of the preceding claims, wherein the finishing temperature is at least 100°C higher than the glass transition temperature of the first thermoplastic polymer film (301) and the glass transition temperature of the second thermoplastic polymer film (302).

10. A method according to any one of the preceding claims, wherein, on the one hand, the adhesion energy between the non-stick layer (220) and the third thermoplastic polymer film (303) is less than the adhesion energy between the first thermoplastic polymer film (301) and the second thermoplastic polymer film (302) by at least 500 mJ / m2 and, on the other hand, the adhesion energy between the non-stick layer (220) and the third thermoplastic polymer film (303) is less than the adhesion energy between the first substrate (100) and the third thermoplastic polymer film (303) by at least 500 mJ / m2.

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