Planetary motion parts support device

Abstract

A planetary system component support device comprises: - a solar support (1) rotatably mounted about a solar axis (S) relative to a reference system; at least one planetary support (2) rotatably mounted on the solar support (1) about a planetary axis (P) parallel to the solar axis (S); - first drive means (5) for driving the planetary support (2) when the solar support (1) rotates about the reference system; - at least one satellite support (3) rotatably mounted on the planetary support (2) about a satellite axis (R) inclined about the solar axis (S); - tilting means (4) for changing the inclination or orientation of the satellite axis (R) relative to the planetary support (2) when the planetary (2) or solar support rotates. Figure for the abbreviation: Fig. 1

Description

Title of the invention: Device for supporting parts with planetary motion. Technical field

[0001] The invention relates to a planetary motion part support device intended to be placed in a projection chamber for the application of surface coatings. Previous technique

[0002] A surface coating process, particularly by plasma, is known in which sublimated material or material separated into fine particles is projected in a directed flow against parts, on which a coating is then formed by the deposition of this material. In order to obtain the most homogeneous deposit possible and high productivity, a plurality of parts to be treated are inserted into a chamber by being arranged on a support device, the latter allowing movement of the parts within the chamber so that each part presents to the flow of material all the faces on which a coating is desired.

[0003] A workpiece support device comprising a table mounted to rotate about a vertical axis within an enclosure is known, for example, from document EP 1 153 155 A1. The disc-shaped table has a series of spindles also mounted vertically around its periphery. At least one planetary support is mounted to rotate on each spindle. Each planetary support is also circular and has a series of satellite supports mounted to rotate around its periphery. A gear system drives each of the supports in rotation with the main rotation of the table.

[0004] This system is suitable for certain types of parts, but for other parts, the movements provided by the device are insufficient to expose all the faces of the parts to be processed. As shown in [Fig. 5], a typical case is a nail-shaped part 101 with a long cylindrical shank 1010 and a head 1011 that is also cylindrical but wider than the shank. The head has an upper face 1012, which may be hollow, and a lower face 1013 with an annular shape. For example, it is desirable to process the upper part of the shank 1010 and all the faces of the head 1011.If we place part 101 in the satellite support 103 with the axis of part 101 coinciding with the axis of rotation R of the satellite support 103, with the material flow Fl coming from one side with a direction perpendicular to the axis of the satellite support 103, we observe that the cylindrical parts are well treated due to the rotation R3 of the support and part 101. around the axis R of the satellite support 103. However, the flux is always oriented substantially parallel to the annular surface 1013 under the head, such that the coating received by this face 1013 is poor. Furthermore, if the upper face 1012 of the head is hollow, it does not receive the flux F2 and is not properly coated either.

[0005] Figure 6 shows a case in which the satellite mount 103' is mounted with an inclined axis of rotation R', compared to the case in Figure 5. In this configuration, the upper face 1012 of the part 101 is fully exposed to the flux F2. Conversely, the lower face 1013 of the head 1011 remains in the shadow of the flux F3 and receives no coating.

[0006] In order to promote the exposure of the end of the parts, document EP 2 297 375 Al proposes that the parts be arranged in a fan shape on a rotating mounted satellite support.

[0007] In document DE 20 2004 009256 Ul, the parts to be processed are arranged in a fan shape on a rotating support. A ratchet system allows the parts to be pivoted around their longitudinal axis in increments, for example by one-sixth of a turn.

[0008] These devices do not allow for improvement in the treatment of the annular face in the case of the nail as described above. Description of the invention

[0009] It is therefore an objective of the invention to provide a parts support that allows the faces of the parts to be exposed as completely as possible.

[0010] With this objective in mind, the invention relates to a planetary system part support device comprising: - a solar mount that is rotatable around a solar axis relative to a reference system, at least one planetary mount that is rotatable on the solar mount around a planetary axis parallel to the solar axis; - initial means of driving the planetary support during the rotation of the solar support relative to the reference system: - at least one satellite mount rotatably mounted on the planetary mount along a satellite axis inclined relative to the solar axis; - second means of drive to drive the satellite support during the rotation of the planetary or solar support; characterized in that the support device further comprises tilting means to modify the inclination or orientation of the satellite axis relative to the planetary support during the rotation of the planetary or solar support.

[0011] By adding tilting means to orient the satellite support, an additional possibility is added for orienting the workpiece towards a flux that has a fixed orientation. For example, in the case of a nail-shaped workpiece, as described above, placed on the satellite support, changing the orientation will allow the upper face of the head to be exposed at certain times, while at other times the exposure will be on the lower face of the head. Thus, a maximum number of surfaces of the workpiece can be exposed to the flux and receive surface treatment.

[0012] According to one design, the tilting means comprise a control plate extending in a plate plane perpendicular to the planetary axis. For each satellite mount, the plate has a drive light through which the satellite mount extends. The plate is driven in the plate plane relative to the planetary mount so that the drive lights cause the tilt or orientation of the satellite axis of the satellite mounts to change. Displacement of the plate alone relative to the planetary mount controls the tilt of all the satellite mounts. Drive via the lights allows for a degree of freedom to adapt the tilt and orientation of the satellite axis.

[0013] According to an improvement, the planetary platform includes, for each satellite platform, a guide light through which the corresponding satellite platform passes, so as to limit the amplitude of the satellite platform's oscillation. The guide light determines the possible amplitude of movement for the satellite platform, as well as the relationship between inclination and orientation. It is also observed that the guide light is relatively easy to change, which makes it possible to modify the trajectories of the satellite platforms without having to change the platform.

[0014] According to one embodiment, the guide light is a linear slit. In this case, the orientation is constant and only the inclination varies.

[0015] According to another embodiment, the guide light is round. In this case, the inclination is constant and only the orientation varies.

[0016] According to one design feature, the tilting means comprise an eccentric driven in rotation relative to the planetary support, the eccentric being rotationally connected to the swashplate, with stop means provided to prevent the swashplate from rotating. Thus, the swashplate receives an oscillating motion without being driven in rotation. This oscillating motion is then used to tilt the satellite supports.

[0017] According to one design feature, the stop means comprise at least two pillars passing through the platform via respective circular stop slots. The combination of the pillars and the stop slots enables the stopping to be achieved by rotation of the platform. In addition, the pillars serve to connect components placed above and below the platform.

[0018] According to one design, the eccentric is driven in rotation relative to the planetary carrier by means of an epicyclic gear train, the epicyclic gear train comprising a first and a second element from the group of a ring gear and a planet wheel, the first element being linked to the eccentric and the second element being fixed and centered on the planetary carrier, a planet carrier being fixed against rotation relative to the sun carrier and mounted for rotation about the axis of the planetary carrier, at least one planet mounted for rotation on the planet carrier engaging simultaneously with the planet wheel and the ring gear. This arrangement makes it possible to use the rotation of the planetary carrier to generate the movement of the swashplate in synchronization.

[0019] According to one design feature, the satellite mounts are rotated by means of a ball joint. This type of joint transmits the rotation of the satellite mounts about themselves while allowing the tilt of the satellite axis. A universal joint is an example of a joint that performs this function. Brief description of the figures

[0020] The invention will be better understood and other features and advantages will become apparent upon reading the following description, the description referring to the accompanying drawings, among which:

[0021] - Fig. 1 is a schematic perspective view of a device conforming to a first embodiment of the invention (on the left constant inclination + Orientation; on the right Forward / backward pivoting); - [Fig.2] is a schematic cross-sectional view of the device in [Fig.1]; - [Fig.3] is a schematic top view of part of the device in [Fig.1]; - [Fig.4] is a schematic view showing the flux received by a nail-shaped part; - the [Fig.5] and a schematic view showing the flux received by a nail-shaped piece according to the prior art; - the [Fig.6] and a schematic view showing the flux received by a nail-shaped piece according to another earlier art;

[0022] - [Fig.7] is a perspective view of the planetary gear hood of [Fig.2];

[0023] - [Fig. 8] is a perspective view of the planetary gear hood shown on the right in [Fig.l]. Detailed description

[0024] An installation comprising a planetary system parts support device according to an embodiment of the invention is shown schematically in the Figures 1 to 4. The installation can typically be a PVD (physical vapor deposition) coating installation. The support device is placed in a controlled vacuum chamber, in which, for example, a sputtering is performed from one or more targets (made up of the material to be deposited).

[0025] In [Fig.1], the reference sign C designates a fixed target relative to a reference system allowing the generation of a flow transporting the material which will constitute the coating of the parts to be treated, the flow being oriented in the direction symbolized by the arrow FL. This drawing is obviously simplified and the flow F may be slightly diverging at the edges.

[0026] The device comprises a solar support 1 mounted rotatably with respect to the reference system along a solar axis S substantially perpendicular to the direction of the flux FL. For the sake of simplicity in the description, this solar axis S will be considered vertical, although it can be installed in any direction. The rotation of the solar support is denoted RL. The device further comprises a plurality of planetary supports 2, of which only two are shown in [Fig. 1], each planetary support 2 being rotatably mounted on the solar support 1 along a planetary axis P parallel to the solar axis S. The rotation of the planetary support is denoted R2.

[0027] The device further comprises a plurality of satellite supports 3, each satellite support 3 being rotatably mounted on one of the planetary supports 2 along a satellite axis R inclined with respect to the solar axis S. The rotation of the satellite support is denoted R3. In the illustrated variant ([Fig.1]) each satellite support 3 comprises a socket portion which supports the workpiece 101' above the hood 200, here a nail with a head.

[0028] The support device further includes tilting means 4 to modify the inclination, in the case of the planetary support 2 on the right in [Fig.1], or the orientation, in the case of the planetary support 2 on the left in [Fig.1], of the satellite axis R with respect to the planetary support 2 during the rotation of the planetary support 2 or solar support.

[0029] The solar support 1 comprises a disc-shaped table 10, pivotally mounted around the solar axis S. On the periphery of the table 10, pins 11 project along the planetary axes P to receive the planetary supports 2. The pins 11 are rotatably mounted, and each pin 11 can receive several planetary supports 2 stacked on top of each other. The pin connects, for example, a square section with which the planetary supports 2 mesh to be driven in rotation by a central tube 201 threaded onto the pin 11.

[0030] With reference to [Fig. 2], the solar axis S is shown on the left of the figure while one of the pins 11 is shown in the middle of the figure. Two supports The two planetary gears are shown superimposed on the same spindle 11. Each planetary gear 2 comprises a frame 20 with a cover 200 having a substantially flat upper face, the central tube 201 forming part of the frame 20. The frame 20 has four pillars 202 extending parallel to the planetary axis P under the cover 200. First drive means 5 are provided to drive the planetary gear 2 during the rotation RI of the solar support 1 relative to the reference system. For this purpose, the first drive means 5 comprise a first static gear 51 centered with the solar axis S and a second gear 52 meshing with the first gear 51 fixed to the spindle 11. By this pair of gears 51, 52, the relative rotation RI of the first gear 51 with respect to the solar support 1 is transmitted to the spindle 11, and thus to the planetary gears 2. Secondary drive means 6 are provided to drive the satellite carrier 3 during the rotation R2 of the planetary carrier 2. The second drive means 6 comprise an eccentric pivot 61 rotatably mounted on the central tube 201 and having a stop arm 62 extending under the planetary carrier 2, held in rotation by a post 7 fixed relative to the solar carrier 1. A toothed wheel 63 is mounted freely in rotation on the eccentric pivot 61 with an axis of rotation offset relative to the axis P of the planetary carrier 2. The toothed wheel 63 has wheel slots 630, through which the pillars 202 pass, thus blocking its rotation. A toothed ring 64 is in contact with the toothed wheel 63 on the inside of the ring 64, which is guided in rotation around the planetary axis P by means of a groove attached to the sub-assembly 20, at the bottom of the pillars 202. For each satellite support 3, a satellite pinion 65 is in contact with the outside of the ring 64.Each satellite pinion 65 is mounted to rotate relative to the chassis 20. The satellite support 3 is driven in rotation by the satellite pinion 65 via a ball joint 66 (e.g. of the dog-clutch type), so that the satellite support 3 can be inclined relative to the axis of the satellite pinion 65. The ball joint 66 is located inside the chassis 20, while the satellite support 3 passes through and protrudes above the hood 200 of the chassis 20.

[0031] The tilting means 4 comprise a control plate 40 extending in a plate plane perpendicular to the planetary axis P, i.e., parallel to the cover 200 of the frame 20. The plate 40 has, for each satellite carrier 3, a drive slot 401 through which the satellite carrier 3 extends, above the ball joints 66. The plate 40 is driven in displacement in the plate plane 40 relative to the frame 20 of the planetary carrier 2 so that the drive slots 401 cause the change in tilt or orientation of the satellite axis R of the satellite carriers 3. The tilting means 4 further comprise an eccentric 41 driven in rotation about the planetary axis P, the eccentric 41 being in rotational connection with respect to the plate 40 around the plate axis U offset from the planetary axis P. Stop means are provided to stop the rotation of the plate 40. The stop means comprise the pillars 202 of the frame 20 passing through the plate 40 by means of respective stop slots 402 of circular shape, as shown in [Fig.3].

[0032] The planetary support 2 includes, for each satellite support 3, a guide light 205 in the hood 200 through which the corresponding satellite support 3 passes, so as to limit the amplitude of the oscillation movement of the satellite support 3. The guide light is made in the hood 200 of the chassis 20. The hood 200 can be fixed to the chassis in a removable manner, so as to adjust the guidance of the satellite supports according to the needs, without modifying the platform.

[0033] The eccentric 41 is driven in rotation relative to the planetary carrier 2 by means of an epicyclic gear train 8. In the example shown at the bottom of [Fig. 2], the epicyclic gear train 8 comprises a first element 81, which is a planetary wheel, the first element 81 being linked to the eccentric 41, and a second element 82, which is a ring fixed and centered on the planetary carrier 2, in this case on the pillars 202. The epicyclic gear train 8 further comprises a planet carrier 83, which is fixed against rotation relative to the sun carrier 1 and mounted for rotation about the axis of the planetary carrier 2. Advantageously, the eccentric pivot 61 performs the function of the planet carrier 83. At least one planet 84 is rotatably mounted on the planet carrier 83 by simultaneously engaging with the planetary wheel 81 and the ring 82.

[0034] In the example shown at the top of [Fig. 2], the epicyclic gear train 8' comprises a second element 82' which is a planetary wheel fixed and centered on the planetary support 2, and a first element 81' which is a ring gear linked to the eccentric 4L

[0035] For the planetary support 2 shown on the right of [Fig.1], the guide light (light 205' in hood 200', see [Fig.8]) is a linear slit, such that the movement conferred by the plate 40 or satellite support 3 is an oscillation of the inclination of the satellite axis R, noted T4 in [Fig.1].

[0036] For the planetary support 2 shown on the left of [Fig.1], the guide light 205 of the hood 200 (Figs 2 and 7) is round, such that the satellite axis R describes a trajectory on a cone with a vertical axis, and indicated R4 in [Fig.1].

[0037] The operation of the parts support device will now be described ([Fig.1]).

[0038] The device is placed within the enclosure (not shown) of the installation. The planetary supports 2 are placed on the pins 11 in a stacked arrangement.

[0039] The solar support 1 is driven in rotation around the solar axis S with a difference in rotational speed compared to the first gear 51. This difference in Speed ​​drives the rotation of the planetary supports 2 via the second gear 52. For each planetary support 2, the eccentric pivot 61 is prevented from rotating relative to the solar support 1 by the stop arm 62 bearing against the post 7. This causes a relative rotation of the eccentric pivot 61 with respect to the solar support 1, and therefore a relative rotation between the gear 63 and the eccentric pivot 61. The gear 63 oscillates inside the ring 64. Due to the difference in diameter (respectively, perimeter) between the gear 63 and the inside of the ring 64, the ring 64 is driven to rotate relative to the planetary support 2. It then drives the rotation of the satellite gears 65 and thus the rotation of the satellite supports 3 via the spherical joint 66.

[0040] For the planetary support 2 shown at the bottom of [Fig. 2], the relative rotation between the eccentric pivot 61 and the ring gear 81 of the epicyclic gear train 8 on the frame 20 causes the rotation of the planetary wheel 82 and therefore that of the eccentric 41 relative to the planetary support 2. The rotation of the eccentric 41 causes the displacement of the plate 40, which in turn causes the tilting of the satellite supports 3 via the drive slots 401, as shown in [Fig. 4]. The tilting of the satellite supports 3 is determined by the shape and size of the guide slots. During part of the process time, the upper face of the workpiece is exposed to the flux from the target, as shown in the position on the left of [Fig. 4]. During another part of the time, the lower face of the head is exposed to the flux from the target, as shown in the position on the right of [Fig. 4].Thus, both surfaces are properly coated at the end of the process.

Claims

Demands

1. A planetary system part support device comprising: - a solar support (1) rotatably mounted about a solar axis (S) relative to a reference system, at least one planetary support (2) rotatably mounted on the solar support (1) about a planetary axis (P) parallel to the solar axis (S); - first drive means (5) for driving the planetary support (2) when the solar support (1) rotates relative to the reference system: - at least one satellite support (3) rotatably mounted on the planetary support (2) about a satellite axis (R) inclined relative to the solar axis (S); - second drive means (6) for driving the satellite support (3) when the planetary (2) or solar support rotates;characterized in that the support device further comprises tilting means (4) to modify the inclination or orientation of the satellite axis (R) relative to the planetary support (2) during the rotation of the planetary (2) or solar support.;

2. Support device according to claim 1, wherein the tilting means (4) comprise a control plate (40) extending in a plate plane perpendicular to the planetary axis (P), the plate (40) comprising for each satellite carrier (3) a drive light (401) through which the satellite carrier (3) extends, the plate (40) being driven in the plate plane relative to the planetary carrier (2) so that the drive lights cause the change in the tilt or orientation of the satellite axis (R) of the satellite carriers (3).

3. Support device according to claim 2, wherein the planetary support (2) has for each satellite support (3) a guide light through which the corresponding satellite support (3) passes, so as to limit the amplitude of the oscillation movement of the satellite support (3).

4. Support device according to claim 3, wherein the guide light is a linear slot.

5. Support device according to claim 3, wherein the guide light is round.

6. Support device according to any one of the preceding claims, wherein the tilting means (4) comprise an eccentric (41) driven in rotation relative to the planetary support (2), the eccentric (41) being in rotational connection relative to the plate (40), stop means being provided to stop the rotation of the plate (40).

7. Support device according to claim 6, wherein the stop means comprise at least two pillars (202) passing through the plate (40) by means of respective stop lights (402) of circular shape.

8. A support device according to any one of claims 6 or 7, wherein the eccentric (41) is driven in rotation relative to the planetary carrier (2) by means of an epicyclic gear train (8, 8'), the epicyclic gear train (8, 8') comprising a first (81, 81') and a second element (82, 82') from among the group of a ring gear and a planetary wheel, the first element (81, 81') being linked to the eccentric (41) and the second element (82, 82') being fixed and centered on the planetary carrier (2), a planet carrier (83) being rotationally immobilized relative to the sun carrier (1) and mounted for rotation about the axis of the planetary carrier (2), at least one satellite (84) rotatably mounted on the planet carrier (83) engaging simultaneously with the planetary wheel (81, 82') and the crown (82, 81').

9. Support device according to any one of the preceding claims, wherein the satellite supports (3) are driven in rotation via a ball joint (66).

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