Flexible piezoelectric device with a ground plane

A flexible piezoelectric device with a multi-part ground plane addresses electromagnetic interference, maintaining sensitivity and flexibility by using a highly flexible part for the sensor and a more rigid part for conductive tracks, ensuring effective signal protection and measurement accuracy.

FR3169283A1Pending Publication Date: 2026-06-05COMMISSARIAT A LENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
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Patent Information

Application Number
FR2024013339
Authority / Receiving Office
FR · FR
Patent Type
Applications
Current Assignee / Owner
Filing Date
2024-12-03
Publication Date
2026-06-05

AI Technical Summary

Technical Problem

Piezoelectric devices are highly sensitive to external electromagnetic disturbances and parasitic signals, which disrupt their measurements, and existing solutions for flexible ground planes either compromise flexibility or conductivity, or require additional constraints that affect sensor performance.

Method used

A piezoelectric device with a substrate having a flexible ground plane composed of multiple parts with varying Young's moduli, where a first part covers the sensor and is highly flexible, and a second part covers conductive tracks, providing enhanced protection and conductivity while maintaining flexibility.

Benefits of technology

The solution effectively shields the device from electromagnetic interference while preserving its mechanical flexibility and sensitivity, allowing for efficient signal measurement without additional mechanical constraints.

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Abstract

Flexible piezoelectric device having a ground plane. This description relates to a piezoelectric device (1000) comprising a substrate (100) covered by a piezoelectric sensor and electrically conductive tracks (200). The device (1000) comprises a ground plane, a first portion (150) of the ground plane covering the sensor and a second portion (220) of the ground plane covering the electrically conductive tracks (200). The first portion (150) of the ground plane is more flexible than the second portion (220) of the ground plane. The first portion (150) of the ground plane is in contact with the second portion (220) of the ground plane at an intermediate zone (Z3) to form a continuous ground plane. Figure for the abstract: Fig. 1B
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