Method for manufacturing a solid electrolyte for an electrochemical device
The method enhances ionic conductivity in solid electrolytes by increasing precursor residence time in ALD, addressing the challenge of manufacturing ultrathin layers with complex geometries and improving energy storage performance.
FR3170704A1Pending Publication Date: 2026-06-26COMMISSARIAT A LENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
Patent Information
- Authority / Receiving Office
- FR · FR
- Patent Type
- Applications
- Current Assignee / Owner
- COMMISSARIAT A LENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Filing Date
- 2024-12-20
- Publication Date
- 2026-06-26
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Abstract
Method for manufacturing a solid electrolyte for an electrochemical device. The invention relates to a method for manufacturing a solid electrolyte according to the steps: a) a substrate is placed in the reaction chamber of an atomic thin film deposition reactor; b) a pulse of a 1st chemical precursor is supplied to the reaction chamber; c) the reaction chamber is purged; d) a pulse of a 2nd chemical precursor is supplied to the reaction chamber; e) the reaction chamber is purged; f) optionally, steps d) and e) are repeated with another chemical precursor; g) optionally, steps b) to e) are repeated or, where appropriate when step f) is carried out, steps b) to f), until a desired thickness of the solid electrolyte is obtained, said manufacturing method further includes a step h) consisting of supplying a pulse of an inert gas for a determined time in the reaction chamber.
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