Improvements in scanning probe microscopy

Abstract

Apparatus (e.g. scanning probe microscope 400) receives a probe having a cantilever and imaging tip. A scanning stage initiates relative movement between a probe mount and a sample surface in an XY plane. Optical detection system 418 positions light beam 416 onto surface 420 of the cantilever. The light beam remains stationary in the XY plane during scanning. A positioning module brings the tip into contact with the surface. A width value of the cantilever near the tip is determined, the width being a distance extended by the tip in the X-direction. The probe mount is moved in the X-rection to vary a position around the tip relative to the stationary light beam. Maximum peak-to-peak amplitude of motion of the probe mount in the X-direction is no more than the determined width. A Z-component of a light signal returned from the cantilever surface represents a distance moved by the tip along the Z-direction. [Fig. 4]