Spectral analysis

Abstract

A method of analysis of an X-ray induced electron emission spectrum (22) comprises; acquiring spectrum data describing an X-ray photoelectron and Auger spectrum obtained by detecting photoelectrons and Auger electrons emitted from a specimen in response to irradiation with X-rays; selecting spectral peak data (24) from amongst the acquired spectrum data that describes a spectral peak structure within the X-ray induced electron emission spectrum; identifying an element included within the specimen according to the selected spectral peak data; the selecting and / or said identifying is performed based on the following structural properties of a spectral peak structure within the X-ray induced electron emission spectrum, in combination: a peak relative position; and, at least one of: a relative amplitude, a peak relative width, a peak partial width, a peak area. The relative position, relative amplitude and relative width are relative to a reference value of a corresponding structural property of a reference spectral peak structure. [Fig. 3]