Semiconductor device inspection images

Abstract

The image of the present design is used to inspect a semiconductor device to be analyzed and is an image for identifying periodically formed chip regions on the semiconductor device. In this image, as shown in "Image Diagram," a chip region indicator surrounding a chip region on the semiconductor device to be analyzed can be set, and the display size can be enlarged to a desired size as shown in "Image of Changed State" (Figure 1). Furthermore, after setting a chip region indicator, the position of a chip region adjacent to the chip region can be specified using adjacent chip region indicator lines consisting of vertical and horizontal lines as shown in "Image of Changed State" (Figure 2), and by selecting and operating a predetermined operation unit, chip region indicators surrounding each periodically formed chip region can be automatically set as shown in "Image of Changed State" (Figure 3). This allows each chip region surrounded by the chip region indicator to be analyzed.

Images