Semiconductor device inspection images

Abstract

The image of the present design is used to inspect a semiconductor device to be analyzed, and is an image for inspecting each block area when multiple block areas consisting of multiple chips are formed on a semiconductor device. This image reads the chips and automatically sets the block areas, and automatically displays an approximately rectangular selection area covering each block area as shown in the "image diagram." The approximately rectangular selection area can also be deselected, so that only the block areas to be analyzed can be selected. The "image diagram" shows a state in which an approximately rectangular corner part without a chip is selected, and the "image diagram in a changed state" shows a state in which the approximately rectangular corner part is deselected and excluded from the analysis target.

Images